40 Years of Heidelberg Instruments
This year, we are celebrating our 40th anniversary. To commemorate this occasion, we have put together a history of our company.
View the history
A New Generation of NanoFrazor
Revolutionizing Nanofabrication: Discover the ultimate in nanofabrication flexibility with the NanoFrazor, a versatile tool that is configured for your research and pushes the limits of what's possible.
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Application Image Competition 2023/2024
We have received several outstanding submissions for this year's Application Image Competition on Advanced Micro- & Nanofabrication. Follow the link below to read all about the winners of the second edition.
See the winners
MLA 300 Maskless Aligner
The modular MLA 300 brings the flexibility of maskless lithography with highest optical quality and precision to industrial production. Easily integrates into production lines.
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VPG 300 DI Maskless Stepper
The VPG 300 DI Maskless Stepper is a Volume Pattern Generator specifically designed for direct writing of high-accuracy and high-resolution microstructures in i-line resists. Derived from the mask making tool, the VPG 300 DI offers all advanced VPG+ system features for use in academic and industrial R&D, or low-volume production.
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Advanced Packaging
Redefining Wafer-Level Packaging Production with Heidelberg  Instruments flexible Direct Writing technology.

Flexible designs, high throughput, uniformity, and yield are the basic requirements in the semiconductor industry. The MLA 300 Maskless Aligner meets all of these requirements.
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MPO 100
3D Lithography and 3D Microprinting

1 – 10 – 100 – 1000.
The MPO 100 is a Two-Photon Polymerization (TPP) Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in optics, photonics, mechanics, and biomedical engineering.
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Heidelberg Instruments - The Power of direct writing

Heidelberg Instruments is a world leader in the design, development, and manufacture of high-precision laser lithography systems, maskless aligners, and nanofabrication tools.

With 40 years of experience and well over 1,400 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet the micro- and nanofabrication requirements of our global customers – no matter how challenging. In our Process and Application Labs (PAL) located in Germany, Switzerland, and China, the engineers train and collaborate closely with our customers to make the most of their Heidelberg Instruments equipment. 

Industry stakeholders, as well as working groups of the most renowned universities and research institutes all over the world, use Heidelberg Instruments’ systems for advanced micro- and nanopatterning. Fields of application are in micro-optics and microsystems technology, photonics, electronics, semiconductors/advanced packaging, quantum computing, MEMS/NEMS, micro-mechanics, biomedical engineering, 2D materials, IoT, and many more. 

Applications | Technologies | Key Features



For decades, photolithography with mask aligners has been the cornerstone of microfabrication. But what if there was a faster, more flexible way to create the intricate patterns needed for miniaturized

Organized by our local distributor Stella Technology, the Technical Workshop 2024 for Heidelberg Instruments’ Direct Writing was held on June 17th at the AJ Hotel in Hsinchu, Taiwan, focusing on

Heidelberg Instruments’ Workshop on Maskless Lithography and Direct Write technology in Japan, hosted at The University of Tokyo’s Takeda Building. Source: The University of Tokyo. We are excited to recap

Would you like to know more about our system portfolio, key features, our corresponding core technologies or possible applications?

Meet us at exhibitions and conferences year-round.


About us

From diverse culture and far-reaching history to forward-looking state-of-the-art scientific research facilities – Heidelberg has it all. A city with over 800 years of history and tradition is also home to numerous leading researchers and Nobel Prize winners. As a center for scientific research, Heidelberg not only houses prestigious universities and industrial research institutions but is also the home of Heidelberg Instruments Mikrotechnik GmbH.

Heidelberg Instruments was founded in 1984 by five scientists from various institutions in Heidelberg with the aim of building a high-tech company that transfers academic research and developments to industrial projects. In the past 35+ years it has become the core of innovation in the development of high-resolution microlithography pattern generators at Heidelberg Instruments.

Heidelberg Instruments has evolved to become a world leader in the development and production of high-precision photolithography systems, maskless aligners, two-photon-polymerization lithography systems, and nanofabrication tools. 

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Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments. 
Would you like to become a part of our growing team? Learn more about careers and available positions at Heidelberg Instruments.

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Learn more about careers at Heidelberg Instruments.

Our executive team consists of industry experts with decades of market experience. Together they ensure our operations run smoothly and efficiently, all while keeping the interest of our customers at the forefront. Their long-standing affiliation Heidelberg Instruments provides a firm sense of stability to both our clients and staff. 

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Heidelberg Instruments started in Heidelberg, Germany and has expanded its reach with subsidiary offices to seven different countries, including the US and China, to serve our global customer base and interested parties.

Additionally, global partner offices represent our products, applications and technologies in other countries without subsidiary coverage.

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