MLA 300 Maskless Aligner
The modular MLA 300 brings the flexibility of maskless lithography with highest optical quality and precision to industrial production. Easily integrates into production lines.
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Application Image Competition
on Advanced Nano- and Microfabrication.

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MPO 100
3D Lithography and 3D Microprinting

1 – 10 – 100 – 1000.
The MPO 100 is a Two-Photon Polymerization (TPP) Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in optics, photonics, mechanics, and biomedical engineering.
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NanoFrazor® Explore
Revolutionizing Nanofabrication: the first hybrid system to write anything from 15 nm to 100 μm.
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The Lithographer
What's new in the world of quantum fabrication? Register and find out by reading the recent issue of our company magazine, THE LITHOGRAPHER.
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Heidelberg Instruments - The Power of direct writing

Heidelberg Instruments is a world leader in the design, development and manufacture of high-precision laser lithography systems, maskless aligners and nanofabrication tools.

Industry stakeholders as well as working groups of the most renowned universities and research institutes all over the world use Heidelberg Instruments systems for the advanced micro- and nanopatterning. Fields of applications are in micro-optics and microsystems technology, photonics, electronics, semiconductors/advanced packaging, quantum computing, MEMS/NEMS, micro-mechanics, biomedical engineering, 2D material, IoT and many more.

With over 35 years of experience and well over 1,300 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet the micro- and nanofabrication requirements of our global customers – no matter how challenging. In our Process and Application Labs (PAL) located in Germany, Switzerland and China, the engineers train and collaborate closely with our customers to make the most of their Heidelberg Instruments equipment.

The Heidelberg Instruments systems and technology pool comprises high-precision maskless aligner (MLA) and laser lithography systems for direct writing of 2D, 2.5D and 3D microstructures to mask-making, and systems based on thermal scanning probe lithography (t-SPL) for the advanced nanopatterning. 3D laser lithography systems based on Two-Photon Polymerization (TPP) technology close the gap between conventional laser lithography – the basis of Heidelberg Instruments’ strong core business – and the thermal scanning probe lithography (t-SPL) for nanopatterning.

Heidelberg Instruments is part of Lab14 Group, a group of successful high-tech companies providing advanced manufacturing solutions with complementary products and services for a wide range of applications that require demanding solutions for nano- and microfabrication and surface analysis.

Blog

3D microprinted scaffold structures are used in tissue engineering

The MPO 100, the 3D Lithography and 3D Microprinting tool based on Two-Photon Polymerization (TPP) technology is an ideal multi-user tool for working on different applications with varying demands on

SEMICON Europa 2022

Chips Powering the Data Age When the SEMICON Europa 2022 gets underway next month at the Messe München in Munich, Germany, the role played by semiconductor chips will be the

All users of Heidelberg Instruments and Multiphoton Optics products are invited to participate in our new “Application Image Competition on Advanced Nano & Micro Fabrication”. This is an opportunity for

Applications | Key Features | Technologies

Dates | Events

30 November - 02 December
Shangri-La Hotel
Wednesday

AM&ST22

Cairns, QLD, Australia

No event found!

Products

µMLA – the perfect entry-level research and development (R&D) tool for virtually any application requiring microstructures

Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.

MLA 150 – a maskless lithography tool for nanofabrication of quantum devices, MEMS, micro-optics and other applications

The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.

MLA 300 – industrial maskless aligner for production of sensors, MEMS, microfluidics, advanced packaging, displays, and more

Optimised for industrial production with highest throughput and seamless integration into industrial production lines.

DWL 66+ – a laser lithography tool for R&D in microelectronics, MEMS, microfluidics and more with Grayscale exposure mode

Our most versatile system for research and prototyping with variable resolution and wide selection of options.

DWL 2000 GS and DWL 4000 GS industrial-level grayscale lithography for masks and wafers for IC, MEMS, micro-optic, and more

The most advanced industrial grayscale lithography tool on the market.

VPG+ 200 and VPG+ 400 – Volume Pattern Generators designed for i-line resist applications like MEMS and advanced packaging

A production tool for standard photomasks and microstructures in i-line resists.

The VPG+ 800 and VPG+ 1400 – Large-area volume pattern generators for the display industry, for advanced packaging, and more

Photomask production on large substrates, perfect for display applications.

ULTRA – a laser mask writer for semiconductor photomasks, which are the basis for electronic devices such as microcontrollers

A tool specifically made to produce non-critical semiconductor photomasks for 130 nm designs and non-Manhattan designs.

NanoFrazor Scholar – the academic nanofabrication tool for nanopatterning of quantum devices, grayscale photonics and more

Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.

NanoFrazor Explore – Thermal Scanning Probe lithography with direct laser sublimation and grayscale patterning capability

Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.

MPO 100 – a TPP tool for 3D Lithography and 3D Microprinting for optics, photonics, mechanics, and biomedical engineering

Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering.

REFERENCES

HEIDELBERG INSTRUMENTS WORLDWIDE

thumbnail_Heidelberg_Instruments_Locations-min

North America – Subsidiary
Service

North America – Subsidiary
Sales & Service

Switzerland – Subsidiary
Sales & Service

China – Subsidiary
Service

Japan – Subsidiary
Sales & Service

Germany – Head Office
Production, Sales & Service

Taiwan – Subsidiary
Service

South Korea – Subsidiary
Sales & Service

About us

From diverse culture and far-reaching history to forward-looking state-of-the-art scientific research facilities – Heidelberg has it all. A city with over 800 years of history and tradition is also home to numerous leading researchers and Nobel Prize winners. As a center for scientific research, Heidelberg not only houses prestigious universities and industrial research institutions but is also the home of Heidelberg Instruments Mikrotechnik GmbH.

Heidelberg Instruments was founded in 1984 by five scientists from various institutions in Heidelberg with the aim of building a high-tech company that transfers academic research and developments to industrial projects. In the past 35+ years it has become the core of innovation in the development of high-resolution microlithography pattern generators at Heidelberg Instruments.

Heidelberg Instruments has evolved to become a world leader in the development and production of high-precision photolithography systems, maskless aligners, two-photon-polymerization lithography systems, and nanofabrication tools. 

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Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments. 
Would you like to become a part of our growing team? Learn more about careers and available positions at Heidelberg Instruments.

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Learn more about careers at Heidelberg Instruments.
Learn more about careers at Heidelberg Instruments.

Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments.  

Would you like to become a part of our growing team? 

Learn more about careers and available positions at Heidelberg Instruments. 

Our executive team consists of industry experts with decades of market experience. Together they ensure our operations run smoothly and efficiently, all while keeping the interest of our customers at the forefront. Their long-standing affiliation Heidelberg Instruments provides a firm sense of stability to both our clients and staff. 

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