Heidelberg Instruments – The Power of Direct Writing
Heidelberg Instruments is a global leader in high-precision laser lithography systems, maskless aligners, and nanofabrication tools.
For 40 years, we’ve empowered innovation in micro- and nanofabrication, installing over 1,500 systems worldwide. We understand that every customer’s needs are unique, so we provide customized lithography solutions tailored to even the most challenging applications.
Our portfolio spans from compact, tabletop systems ideal for prototyping and R&D, to high-end photomask manufacturing equipment designed for high-volume industrial production. This breadth allows us to support a wide range of surface structuring techniques, including precise 2D patterning and complex 2.5D features using grayscale lithography.
Our commitment to customer success extends beyond our products. At our Process and Application Labs (PAL) in Germany, Switzerland, and China, our expert engineers collaborate closely with customers, providing comprehensive training and support to ensure they maximize the potential of their Heidelberg Instruments equipment.
Leading companies, top universities, and renowned research institutes worldwide rely on the flexibility and advanced capabilities of our systems for micro- and nanopatterning. Our technology enables breakthroughs across diverse fields, including micro-optics and microsystems technology, photonics, electronics, semiconductors and advanced packaging, quantum devices, MEMS, nanofluidics, biomedical engineering, 2D materials, and many more.
Contact us today to discuss your micro- or nanofabrication needs.
Applications | Technologies | Key Features
1D & 2D Materials | Advanced Packaging | Biotechnology and Medical Engineering | Displays | High-Security Printing | Materials Science | MEMS | Microelectronics and Nanoelectronics | Microfluidics and Nanofluidics | Micro-optics and Photonics | Nanoimprint Templates | Photomasks | Quantum Devices | Semiconductors | Sensors
µMLA Maskless Aligner
- Maskless Aligner
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
MLA 150 Maskless Aligner
- Maskless Aligner
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
DWL 66+ Laser Lithography System
- Direct Write Laser Lithography System
Our most versatile system for research and prototyping with variable resolution and wide selection of options.
MLA 300 Maskless Aligner
- Maskless Aligner
Optimized for flexible industrial production with highest precision and seamless integration into industrial production lines.
DWL 2000 GS / DWL 4000 GS Laser Lithography Systems
- Direct Write Laser Lithography System
The most advanced industrial grayscale lithography tool on the market.
VPG+ 200 / VPG+ 400 / VPG+ 800 Volume Pattern Generators
- Volume Pattern Generator
Powerful production tools for standard photomasks and microstructures in i-line resists.
VPG+ 1400 FPD / VPG+ 1850 FPD Volume Pattern Generators
- Volume Pattern Generator
Photomask production on large substrates, perfect for display applications.
VPG 300 DI Maskless Stepper
- Maskless Stepper
Maskless direct imager for high-accuracy and high-resolution microstructures.
ULTRA Semiconductor Mask Writer
- Laser Mask Writer
A tool specifically designed to produce mature semiconductor photomasks.
NanoFrazor Nanolithography Tool
- Thermal Scanning Probe Lithography System
Versatile & modular tool combining Thermal Scanning Probe Lithography, Direct Laser Sublimation, and advanced automation for cutting-edge R&D.
News blog
As AI and HPC push monolithic circuits to obsolescence, the industry turns to Advanced Packaging. Yet, challenges like die shift and substrate warpage threaten to kill yield before the package leaves the fab. Enter the new hero of microelectronics: Maskless Lithography. Learn how adaptive alignment ensures your chiplets live to compute another day.
What a week! From September 15–18, we had the pleasure of joining the micro- and nanofabrication community at the 51st International Micro and Nano Engineering Conference (MNE 2025) in Southampton, UK.
Heidelberg Instruments Korea celebrates 20 years of customer commitment and partnership! Built on trust, loyalty, and long-term relationships, Heidelberg Instruments Korea continues to play a vital role in bringing innovation to local customers.
