MLA 300 Maskless Aligner
The modular MLA 300 brings the flexibility of maskless lithography with highest optical quality and precision to industrial production. Easily integrates into production lines.
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Application Image Competition
on Advanced Nano- and Microfabrication.

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MPO 100
3D Lithography and 3D Microprinting

1 – 10 – 100 – 1000.
The MPO 100 is a Two-Photon Polymerization (TPP) Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in optics, photonics, mechanics, and biomedical engineering.
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NanoFrazor® Explore
Revolutionizing Nanofabrication: the first hybrid system to write anything from 15 nm to 100 μm.
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The Lithographer
What's new in the world of quantum fabrication? Register and find out by reading the recent issue of our company magazine, THE LITHOGRAPHER.
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Heidelberg Instruments - The Power of direct writing

Heidelberg Instruments is a world leader in the design, development and manufacture of high-precision laser lithography systems, maskless aligners and nanofabrication tools.

Industry stakeholders as well as working groups of the most renowned universities and research institutes all over the world use Heidelberg Instruments systems for the advanced micro- and nanopatterning. Fields of applications are in micro-optics and microsystems technology, photonics, electronics, semiconductors/advanced packaging, quantum computing, MEMS/NEMS, micro-mechanics, biomedical engineering, 2D material, IoT and many more.

With over 35 years of experience and well over 1,300 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet the micro- and nanofabrication requirements of our global customers – no matter how challenging. In our Process and Application Labs (PAL) located in Germany, Switzerland and China, the engineers train and collaborate closely with our customers to make the most of their Heidelberg Instruments equipment.

The Heidelberg Instruments systems and technology pool comprises high-precision maskless aligner (MLA) and laser lithography systems for direct writing of 2D, 2.5D and 3D microstructures to mask-making, and systems based on thermal scanning probe lithography (t-SPL) for the advanced nanopatterning. 3D laser lithography systems based on Two-Photon Polymerization (TPP) technology close the gap between conventional laser lithography – the basis of Heidelberg Instruments’ strong core business – and the thermal scanning probe lithography (t-SPL) for nanopatterning.

Heidelberg Instruments is part of Lab14 Group, a group of successful high-tech companies providing advanced manufacturing solutions with complementary products and services for a wide range of applications that require demanding solutions for nano- and microfabrication and surface analysis.

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The MPO 100 fabricates micro-optics stitching-free without unwanted artifacts

IFoV writing mode for stitching-free micro-optics Superior quality of optical components without stitching defects can be achieved with Infinite Field-of-View (IFoV) writing mode, using the synchronized 5-axes design in Multiphoton

In January and February of 2023 we will be participating in several premier conferences and exhibitions. Get the preview for SPIE Photonics West 2023, nano tech 2023 and SPIE Advanced

MLA 150 – a maskless lithography tool for nanofabrication of quantum devices, MEMS, micro-optics and other applications

Heidelberg, Germany – We are happy to announce that one hundred and fifty MLA 150 Maskless Aligners have been successfully installed worldwide at our customers facilities. First launched to the

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07 - 10 February
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AMN10

Rotorua Energy Events Centre | Rotorua, New Zealand

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About us

From diverse culture and far-reaching history to forward-looking state-of-the-art scientific research facilities – Heidelberg has it all. A city with over 800 years of history and tradition is also home to numerous leading researchers and Nobel Prize winners. As a center for scientific research, Heidelberg not only houses prestigious universities and industrial research institutions but is also the home of Heidelberg Instruments Mikrotechnik GmbH.

Heidelberg Instruments was founded in 1984 by five scientists from various institutions in Heidelberg with the aim of building a high-tech company that transfers academic research and developments to industrial projects. In the past 35+ years it has become the core of innovation in the development of high-resolution microlithography pattern generators at Heidelberg Instruments.

Heidelberg Instruments has evolved to become a world leader in the development and production of high-precision photolithography systems, maskless aligners, two-photon-polymerization lithography systems, and nanofabrication tools. 

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Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments. 
Would you like to become a part of our growing team? Learn more about careers and available positions at Heidelberg Instruments.

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Learn more about careers at Heidelberg Instruments.

Our executive team consists of industry experts with decades of market experience. Together they ensure our operations run smoothly and efficiently, all while keeping the interest of our customers at the forefront. Their long-standing affiliation Heidelberg Instruments provides a firm sense of stability to both our clients and staff. 

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Heidelberg Instruments started in Heidelberg, Germany and has expanded its reach with subsidiary offices to seven different countries, including the US and China, to serve our global customer base and interested parties.

Additionally, global partner offices represent our products, applications and technologies in other countries without subsidiary coverage.

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