Heidelberg Instruments - The Power of direct writing
Heidelberg Instruments is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools.
Our systems are installed in both industrial and academic facilities all over the world. These are used for direct writing applications and photomask production in various
subjects requiring micro- and nano-patterning, such as MEMS/NEMS, for Semiconductors, Quantum Computing, Flat Panel Displays, Photonics, 2D Materials, IOT and many more.
With over 35 years of experience and well over 1,200 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet all
your micro- and nanofabrication requirements – no matter how challenging.
Blog
All users of Heidelberg Instruments and Multiphoton Optics products are invited to participate in our new “Application Image Competition on Advanced Nano & Micro Fabrication”. This is an opportunity for …
Upfront the MNE 2022 Eurosensors Conference in Leuven, Belgium from September 19th to 23rd GenISys, Heidelberg Instruments, micro resist technology and Multiphoton Optics jointly organize the 2022 edition of their traditional technical workshop. For …
Heidelberg/Würzburg, Germany – The Würzburg based company Multiphoton Optics GmbH will become a subsidiary of Heidelberg Instruments Mikrotechnik GmbH, after resources have already been pooled in various business areas since …
Applications | Key Features | Technologies
Applications
Key Features
Dates | Events
SEDEX 2022
Seoul, Korea
CNF 45th Anniversary Annual Meeting
Ithaca, NY, USA
Electronic Materials Symposium
Kashihara, Japan
ICSS 2022
Taichung City, Taiwan
Products
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
Optimised for industrial production with highest throughput and seamless integration into industrial production lines.
Our most versatile system for research and prototyping with variable resolution and wide selection of options.
The most advanced industrial grayscale lithography tool on the market.
A production tool for standard photomasks and microstructures in i-line resists.
Photomask production on large substrates, perfect for display applications.
A tool specifically made to produce non-critical semiconductor photomasks for 130 nm designs and non-Manhattan designs.
Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.
Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in Optics, Photonics, Mechanics and Biomedical Engineering.
About us
From diverse culture and far-reaching history to forward-looking state-of-the-art scientific research facilities – Heidelberg has it all. A city with over 800 years of history and tradition is also home to numerous leading researchers and Nobel Prize winners. As a center for scientific research, Heidelberg not only houses prestigious universities and industrial research institutions but is also the home of Heidelberg Instruments Mikrotechnik GmbH.
Heidelberg Instruments was founded in 1984 by five scientists from various institutions in Heidelberg with the aim of building a high-tech company that transfers academic research and developments to industrial projects. In the past 35+ years it has become the core of innovation in the development of high-resolution microlithography pattern generators at Heidelberg Instruments.
Heidelberg Instruments has evolved to become a world leader in the development and production of high-precision photolithography systems, maskless aligners, two-photon-polymerization lithography systems, and nanofabrication tools.
Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments.
Would you like to become a part of our growing team?
Learn more about careers and available positions at Heidelberg Instruments.
Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments.
Would you like to become a part of our growing team?
Learn more about careers and available positions at Heidelberg Instruments.
Our executive team consists of industry experts with decades of market experience. Together they ensure our operations run smoothly and efficiently, all while keeping the interest of our customers at the forefront. Their long-standing affiliation Heidelberg Instruments provides a firm sense of stability to both our clients and staff. Learn more about our senior leadership team here.