MPO 100
3D Lithography and 3D Microprinting

1 – 10 – 100 – 1000.
The MPO 100 is a Two-Photon Polymerization (TPP) multi-user tool for 3D Lithography and 3D Microprinting of microstructures with applications in Optics, Photonics, Mechanics, and Biomedical Engineering.
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MLA 300 Maskless Aligner
The modular MLA 300 brings the flexibility of maskless lithography with highest optical quality and precision to industrial production. Easily integrates into production lines.
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NanoFrazor Explore
Revolutionizing Nanofabrication: the first hybrid system to write anything from 15 nm to 100 μm.
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The Lithographer
What's new in the world of quantum fabrication? Register and find out by reading the recent issue of our company magazine, THE LITHOGRAPHER.
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Heidelberg Instruments - The Power of direct writing

Heidelberg Instruments is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools.

Our systems are installed in industrial and academic facilities all over the world. These are used for direct writing and photomask production in various
areas of MEMS/NEMS – for Semiconductors, Quantum Computing, Flat Panel Displays, Photonics, 2D Materials, IOT and many other related applications.

With over 35 years of experience and more than 1,000 systems installed worldwide, we can provide lithography solutions specifically tailored to meet all
your micro- and nanofabrication requirements – no matter how challenging.


Heidelberg/Würzburg, January 18, 2022.  “1 – 10 – 100 – 1000” – Achievable component heights of over 1 cm, surfaces with roughness in the order of 10 nm, structure sizes …

We rely heavily on electronics for virtually everything we do. But actually, it does not necessarily need to be electrons that do all the job. Edoardo Albisetti, an Assistant Professor …

Happy Holidays

Our best wishes for a healthy, prosperous New Year Thank you very much for your confidence and your co-operation in 2021. It has been an extraordinary year in every sense. …

Solutions | Key Features | Core Technologies

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Explore the µMLA Maskless Aligner by Heidelberg Instruments.

Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.

Learn more about the MLA150 Maskless Aligner.

The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.

Discover more about the MLA300 Industrial Maskless Aligner.

Optimised for industrial production with highest throughput and seamless integration into industrial production lines.

Read more about the DWL 66+ Laser Lithography System.

Our most versatile system for research and prototyping with variable resolution and wide selection of options.

Find out more about the DWL 2000/4000 Grayscale Lithography System.

The most advanced industrial grayscale lithography tool on the market.

Get more information about the VPG+ 200/400 Volume Pattern Generators.

A production tool for standard photomasks and microstructures in i-line resists.

Explore the VPG+ 800/1100-1400 Volume Pattern Generators.

Photomask production on large substrates, perfect for display applications.

Learn more about the ULTRA Semiconductor Laser Mask Writer.

A tool specifically made to produce non-critical semiconductor photomasks for 130 nm designs and non-Manhattan designs.

Click to explore the NanoFrazor Scholar Nanofabrication System.

Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.

Discover more about the NanoFrazor Explore All-Round Nanofabrication System.

Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.

Read more about the NanoFrazor Professional.

Industrial-grade thermal scanning probe lithography tool with the multitip write head, highly customizable.

Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in Optics, Photonics, Mechanics and Biomedical Engineering.


North America – Subsidiary

North America – Subsidiary
Sales & Service

Switzerland – Subsidiary
Sales & Service

China – Subsidiary

Japan – Subsidiary
Sales & Service

Germany – Head Office
Production, Sales & Service

Taiwan – Subsidiary

South Korea – Subsidiary
Sales & Service

About us

Diverse culture, far-reaching history on one hand, and forward-looking scientific research facilities on the other – Heidelberg has it all. A city with over 800 years of tradition is home to leading researchers and Nobel Prize winners. As a science center, Heidelberg not only houses special university and industrial research, but also Heidelberg Instruments Mikrotechnik GmbH.

Heidelberg Instruments was founded in 1984 by five scientists from various Heidelberg institutions with the aim of building a high-tech company that transfers academic developments to industrial projects. In the past 36 years it should become the core of innovation in the development of high-resolution microlithography pattern generators.

Heidelberg Instruments, located in the historic city of Heidelberg, Germany, is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools.

Individual commitment and good teamwork – two opposites that are not mutually exclusive and essential for our successfully growing business for more than 35 years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments. Would you like to become a part of a successful team?

Learn more about careers at Heidelberg Instruments.
Our executive team consists of industry experts with many years of market experience. Together they ensure our operations run smoothly and efficiently, always keeping your interests first and foremost. Their long-standing affiliation with the company provides a firm sense of stability to our clients and staff. Learn more about our senior leadership team.

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Please send us your request.

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