40 Years of Heidelberg Instruments
Last year, we celebrated our 40th anniversary. To commemorate this occasion, we have put together a history of our company.
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A New Generation of NanoFrazor
Revolutionizing Nanofabrication: Discover the ultimate in nanofabrication flexibility with the NanoFrazor, a versatile tool that is configured for your research and pushes the limits of what's possible.
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Application Image Competition 2024/2025
This competition invites the global Maskless Laser Lithography and Direct Write community to showcase their work through Heidelberg Instruments' communication channels and compete for prizes worth a total of €10,000.
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MLA 300 Maskless Aligner
The modular MLA 300 brings the flexibility of maskless lithography with highest optical quality and precision to industrial production. Easily integrates into production lines.
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VPG 300 DI Maskless Stepper
The VPG 300 DI Maskless Stepper is a Volume Pattern Generator specifically designed for direct writing of high-accuracy and high-resolution microstructures in i-line resists. Derived from the mask making tool, the VPG 300 DI offers all advanced VPG+ system features for use in academic and industrial R&D, or low-volume production.
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Advanced Packaging
Redefining Wafer-Level Packaging Production with Heidelberg  Instruments flexible Direct Writing technology.

Flexible designs, high throughput, uniformity, and yield are the basic requirements in the semiconductor industry. The MLA 300 Maskless Aligner meets all of these requirements.
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Heidelberg Instruments – The Power of direct writing

Heidelberg Instruments is a global leader in high-precision laser lithography systems, maskless aligners, and nanofabrication tools.

For 40 years, we’ve empowered innovation in micro- and nanofabrication, installing over 1,500 systems worldwide. We understand that every customer’s needs are unique, so we provide customized lithography solutions tailored to even the most challenging applications.

Our portfolio spans from compact, tabletop systems ideal for prototyping and R&D, to high-end photomask manufacturing equipment designed for high-volume industrial production. This breadth allows us to support a wide range of surface structuring techniques, including precise 2D patterning and complex 2.5D features using grayscale lithography.

Our commitment to customer success extends beyond our products. At our Process and Application Labs (PAL) in Germany, Switzerland, and China, our expert engineers collaborate closely with customers, providing comprehensive training and support to ensure they maximize the potential of their Heidelberg Instruments equipment.

Leading companies, top universities, and renowned research institutes worldwide rely on the flexibility and advanced capabilities of our systems for micro- and nanopatterning. Our technology enables breakthroughs across diverse fields, including micro-optics and microsystems technology, photonics, electronics, semiconductors and advanced packaging, quantum devices, MEMS, nanofluidics, biomedical engineering, 2D materials, and many more.

Contact us to discuss your lithography needs.

Applications | Technologies | Key Features

News blog

Sustainable microfabrication is the future. Explore how Heidelberg Instruments' advanced lithography solutions reduce waste, energy use, and chemical consumption.

The close of 2024 marked a unique chapter in Heidelberg Instruments’ history. For the first time in our 40 years, we celebrated Christmas aboard a ship on the Neckar River!

On December 3 and 4, Heidelberg Instruments hosted the project meeting of the EU-funded FABulous initiative at its Würzburg location. Participants from across Europe gathered to discuss the latest developments

Would you like to know more about our system portfolio, key features, our corresponding core technologies or possible applications?

Meet us at exhibitions and conferences year-round.

REFERENCES

About us

From diverse culture and far-reaching history to forward-looking state-of-the-art scientific research facilities – Heidelberg has it all. A city with over 800 years of history and tradition is also home to numerous leading researchers and Nobel Prize winners. As a center for scientific research, Heidelberg not only houses prestigious universities and industrial research institutions but is also the home of Heidelberg Instruments Mikrotechnik GmbH.

Heidelberg Instruments was founded in 1984 by five scientists from various institutions in Heidelberg with the aim of building a high-tech company that transfers academic research and developments to industrial projects. In the past 35+ years it has become the core of innovation in the development of high-resolution microlithography pattern generators at Heidelberg Instruments.

Heidelberg Instruments has evolved to become a world leader in the development and production of high-precision photolithography systems, maskless aligners, two-photon-polymerization lithography systems, and nanofabrication tools. 

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Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments. 
Would you like to become a part of our growing team? Learn more about careers and available positions at Heidelberg Instruments.

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Learn more about careers at Heidelberg Instruments.

Our executive team consists of industry experts with decades of market experience. Together they ensure our operations run smoothly and efficiently, all while keeping the interest of our customers at the forefront. Their long-standing affiliation Heidelberg Instruments provides a firm sense of stability to both our clients and staff. 

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Heidelberg Instruments started in Heidelberg, Germany and has expanded its reach with subsidiary offices to seven different countries, including the US and China, to serve our global customer base and interested parties.

Additionally, global partner offices represent our products, applications and technologies in other countries without subsidiary coverage.

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