Heidelberg Instruments – The Power of direct writing
Heidelberg Instruments is a global leader in high-precision laser lithography systems, maskless aligners, and nanofabrication tools.
For 40 years, we’ve empowered innovation in micro- and nanofabrication, installing over 1,500 systems worldwide. We understand that every customer’s needs are unique, so we provide customized lithography solutions tailored to even the most challenging applications.
Our portfolio spans from compact, tabletop systems ideal for prototyping and R&D, to high-end photomask manufacturing equipment designed for high-volume industrial production. This breadth allows us to support a wide range of surface structuring techniques, including precise 2D patterning and complex 2.5D features using grayscale lithography.
Our commitment to customer success extends beyond our products. At our Process and Application Labs (PAL) in Germany, Switzerland, and China, our expert engineers collaborate closely with customers, providing comprehensive training and support to ensure they maximize the potential of their Heidelberg Instruments equipment.
Leading companies, top universities, and renowned research institutes worldwide rely on the flexibility and advanced capabilities of our systems for micro- and nanopatterning. Our technology enables breakthroughs across diverse fields, including micro-optics and microsystems technology, photonics, electronics, semiconductors and advanced packaging, quantum devices, MEMS, nanofluidics, biomedical engineering, 2D materials, and many more.
Contact us today to discuss your micro- or nanofabrication needs.
Applications | Technologies | Key Features
µMLA
- Maskless Aligner
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
MLA 150
- Maskless Aligner
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
DWL 66+
- Direct Write Laser Lithography System
Our most versatile system for research and prototyping with variable resolution and wide selection of options.
MLA 300
- Maskless Aligner
Optimized for flexible industrial production with highest precision and seamless integration into industrial production lines.
DWL 2000 GS / DWL 4000 GS
- Direct Write Laser Lithography System
The most advanced industrial grayscale lithography tool on the market.
VPG+ 200, VPG+ 400, and VPG+ 800
- Volume Pattern Generator
Powerful production tools for standard photomasks and microstructures in i-line resists.
VPG+ 1400 FPD
- Volume Pattern Generator
Photomask production on large substrates, perfect for display applications.
VPG 300 DI
- Maskless Stepper
Maskless direct imager for high-accuracy and high-resolution microstructures.
ULTRA
- Laser Mask Writer
A tool specifically designed to produce mature semiconductor photomasks.
NanoFrazor
- Thermal Scanning Probe Lithography System
Versatile & modular tool combining Thermal Scanning Probe Lithography, Direct Laser Sublimation, and advanced automation for cutting-edge R&D.
News blog
Physicists have crafted the "world's smallest violin" as a stunning demonstration of their new NanoFrazor nanolithography capabilities.
Read Heidelberg Instruments' recap of the OPTICA Global Advanced Manufacturing Alliance Meeting 2025. Thanks to all for advancing photonics innovation!
Discover how researchers fabricated an ultra-thin flat lens (MDL) with the DWL 66+, offering a lightweight, cost-effective solution for true-color astrophotography and space-based imaging.
Would you like to know more about our system portfolio, key features, our corresponding core technologies or possible applications?
Meet us at exhibitions and conferences year-round.
REFERENCES
About us
From diverse culture and far-reaching history to forward-looking state-of-the-art scientific research facilities – Heidelberg has it all. A city with over 800 years of history and tradition is also home to numerous leading researchers and Nobel Prize winners. As a center for scientific research, Heidelberg not only houses prestigious universities and industrial research institutions but is also the home of Heidelberg Instruments Mikrotechnik GmbH.
Heidelberg Instruments was founded in 1984 by five scientists from various institutions in Heidelberg with the aim of building a high-tech company that transfers academic research and developments to industrial projects. In the past 35+ years it has become the core of innovation in the development of high-resolution microlithography pattern generators at Heidelberg Instruments.
Heidelberg Instruments has evolved to become a world leader in the development and production of high-precision photolithography systems, maskless aligners, two-photon-polymerization lithography systems, and nanofabrication tools.
Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments.
Would you like to become a part of our growing team? Learn more about careers and available positions at Heidelberg Instruments.
Our executive team consists of industry experts with decades of market experience. Together they ensure our operations run smoothly and efficiently, all while keeping the interest of our customers at the forefront. Their long-standing affiliation Heidelberg Instruments provides a firm sense of stability to both our clients and staff.
Heidelberg Instruments started in Heidelberg, Germany and has expanded its reach with subsidiary offices to seven different countries, including the US and China, to serve our global customer base and interested parties.
Additionally, global partner offices represent our products, applications and technologies in other countries without subsidiary coverage.
