MLA300 Maskless Aligner
The modular MLA300 brings the flexibility of maskless lithography with highest optical quality and precision to industrial production. Easily integrates into production lines.
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NanoFrazor Explore
Revolutionizing Nanofabrication: the first hybrid system to write anything from 15 nm to 100 μm.
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Connect, share and learn about the latest technologies and products for Nano-Micro-Lithography and how these innovations are advancing micro- and nanofabrication. Join us in our one-day digital event on November 4, 2021.
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The Lithographer
What's new in the world of quantum fabrication? Register and find out by reading the recent issue of our company magazine, THE LITHOGRAPHER.
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Heidelberg Instruments - The Power of direct writing

Heidelberg Instruments is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools.

Our systems are installed in industrial and academic facilities all over the world. These are used for direct writing and photomask production in various
areas of MEMS/NEMS – for Semiconductors, Quantum Computing, Flat Panel Displays, Photonics, 2D Materials, IOT and many other related applications.

With over 35 years of experience and more than 1,000 systems installed worldwide, we can provide lithography solutions specifically tailored to meet all
your micro- and nanofabrication requirements – no matter how challenging.

Blog

In the last weeks, another NanoFrazor system from Heidelberg Instruments was installed in Canada at the University of Alberta/NRC, where it will be used for fabricating atom-scale electronics together with …

Join us for the 3rd Nano-Micro-Lithography Symposium, hosted on gather.town. This online event brings together technical experts, customers and users from Heidelberg Instruments, micro resist technology GmbH, Nanoscribe, GenISys GmbH …

We celebrate the National Nanotechnology Day (USA) on October 9th, which pays homage to the nanometer scale: 1 nm equals 1 x 10-9 m (one billionth of a meter).  The …

Solutions | Key Features | Core Technologies

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Products

Explore the µMLA Maskless Aligner by Heidelberg Instruments.

Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.

Learn more about the MLA150 Maskless Aligner.

The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.

Discover more about the MLA300 Industrial Maskless Aligner.

Optimised for industrial production with highest throughput and seamless integration into industrial production lines.

Read more about the DWL 66+ Laser Lithography System.

Our most versatile system for research and prototyping with variable resolution and wide selection of options.

Find out more about the DWL 2000/4000 Grayscale Lithography System.

The most advanced industrial grayscale lithography tool on the market.

Get more information about the VPG+ 200/400 Volume Pattern Generators.

A production tool for standard photomasks and microstructures in i-line resists.

Explore the VPG+ 800/1100-1400 Volume Pattern Generators.

Photomask production on large substrates, perfect for display applications.

Learn more about the ULTRA Semiconductor Laser Mask Writer.

A tool specifically made to produce non-critical semiconductor photomasks for 130 nm designs and non-Manhattan designs.

Click to explore the NanoFrazor Scholar Nanofabrication System.

Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.

Discover more about the NanoFrazor Explore All-Round Nanofabrication System.

Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.

Read more about the NanoFrazor Professional.

Industrial-grade thermal scanning probe lithography tool with the multitip write head, highly customizable.

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About us

Diverse culture, far-reaching history on one hand, and forward-looking scientific research facilities on the other – Heidelberg has it all. A city with over 800 years of tradition is home to leading researchers and Nobel Prize winners. As a science center, Heidelberg not only houses special university and industrial research, but also Heidelberg Instruments Mikrotechnik GmbH.

Heidelberg Instruments was founded in 1984 by five scientists from various Heidelberg institutions with the aim of building a high-tech company that transfers academic developments to industrial projects. In the past 36 years it should become the core of innovation in the development of high-resolution microlithography pattern generators.

Heidelberg Instruments, located in the historic city of Heidelberg, Germany, is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools.

Individual commitment and good teamwork – two opposites that are not mutually exclusive and essential for our successfully growing business for more than 35 years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments. Would you like to become a part of a successful team?

Learn more about careers at Heidelberg Instruments.
Our executive team consists of industry experts with many years of market experience. Together they ensure our operations run smoothly and efficiently, always keeping your interests first and foremost. Their long-standing affiliation with the company provides a firm sense of stability to our clients and staff. Learn more about our senior leadership team.

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