Heidelberg Instruments - The Power of direct writing
Heidelberg Instruments is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools.
Our systems are installed in industrial and academic facilities all over the world. These are used for direct writing and photomask production in various
areas of MEMS/NEMS – for Semiconductors, Quantum Computing, Flat Panel Displays, Photonics, 2D Materials, IOT and many other related applications.
With over 35 years of experience and more than 1,000 systems installed worldwide, we can provide lithography solutions specifically tailored to meet all
your micro- and nanofabrication requirements – no matter how challenging.
Blog
Heidelberg Instruments receives ISO 9001:2015 Certificate for extraordinary Quality Management Heidelberg, September 22, 2021. TÜV Süd, an auditor and provider of safety, security and sustainability solutions, has awarded ISO 9001:2015 …
The Micro and Nano Engineering (MNE) conference is the flagship event of the international Micro and Nano Engineering society (iMNEs) where international experts meet. Heidelberg Instruments is gold sponsor of …
Traditions of the past transformed into efficient production Conventional optical lithography requires the use of a mask aligner to fabricate a photomask which is then used to transfer the pattern …
Solutions | Key Features | Core Technologies
Dates | Events
MNE 2021
Turin, Italy
NanoInnovation 2021
Rome, Italy
MicroTAS 2021
Palm Springs, California + Online
Products
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
Optimised for industrial production with highest throughput and seamless integration into industrial production lines.
Our most versatile system for research and prototyping with variable resolution and wide selection of options.
The most advanced industrial grayscale lithography tool on the market.
A production tool for standard photomasks and microstructures in i-line resists.
Photomask production on large substrates, perfect for display applications.
A tool specifically made to produce non-critical semiconductor photomasks for design nodes of 130 nm and non-Manhattan designs.
Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.
Industrial-grade thermal scanning probe lithography tool with the multitip write head, highly customizable.
About us
Diverse culture, far-reaching history on one hand, and forward-looking scientific research facilities on the other – Heidelberg has it all. A city with over 800 years of tradition is home to leading researchers and Nobel Prize winners. As a science center, Heidelberg not only houses special university and industrial research, but also Heidelberg Instruments Mikrotechnik GmbH.
Heidelberg Instruments was founded in 1984 by five scientists from various Heidelberg institutions with the aim of building a high-tech company that transfers academic developments to industrial projects. In the past 36 years it should become the core of innovation in the development of high-resolution microlithography pattern generators.
Heidelberg Instruments, located in the historic city of Heidelberg, Germany, is a world leader in the development and production of high precision photolithography systems, maskless aligners and nanofabrication tools.
Individual commitment and good teamwork – two opposites that are not mutually exclusive and essential for our successfully growing business for more than 35 years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments. Would you like to become a part of a successful team?
