Heidelberg Instruments - The Power of direct writing
Heidelberg Instruments is a world leader in the design, development and manufacture of high-precision laser lithography systems, maskless aligners and nanofabrication tools.
Industry stakeholders as well as working groups of the most renowned universities and research institutes all over the world use Heidelberg Instruments systems for the advanced micro- and nanopatterning. Fields of applications are in micro-optics and microsystems technology, photonics, electronics, semiconductors/advanced packaging, quantum computing, MEMS/NEMS, micro-mechanics, biomedical engineering, 2D material, IoT and many more.
With over 35 years of experience and well over 1,300 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet the micro- and nanofabrication requirements of our global customers – no matter how challenging. In our Process and Application Labs (PAL) located in Germany, Switzerland and China, the engineers train and collaborate closely with our customers to make the most of their Heidelberg Instruments equipment.
The Heidelberg Instruments systems and technology pool comprises high-precision maskless aligner (MLA) and laser lithography systems for direct writing of 2D, 2.5D and 3D microstructures to mask-making, and systems based on thermal scanning probe lithography (t-SPL) for the advanced nanopatterning. 3D laser lithography systems based on Two-Photon Polymerization (TPP) technology close the gap between conventional laser lithography – the basis of Heidelberg Instruments’ strong core business – and the thermal scanning probe lithography (t-SPL) for nanopatterning.
Heidelberg Instruments is part of Lab14 Group, a group of successful high-tech companies providing advanced manufacturing solutions with complementary products and services for a wide range of applications that require demanding solutions for nano- and microfabrication and surface analysis.
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IFoV writing mode for stitching-free micro-optics Superior quality of optical components without stitching defects can be achieved with Infinite Field-of-View (IFoV) writing mode, using the synchronized 5-axes design in Multiphoton
In January and February of 2023 we will be participating in several premier conferences and exhibitions. Get the preview for SPIE Photonics West 2023, nano tech 2023 and SPIE Advanced
Heidelberg, Germany – We are happy to announce that one hundred and fifty MLA 150 Maskless Aligners have been successfully installed worldwide at our customers facilities. First launched to the
Applications | Technologies | Key Features
Applications
Dates | Events
SPIE Photonics West 2023
Moscone Convention Center | San Francisco, CA, USA
nano tech 2023
Tokyo Big Sight | Tokyo, Japan
SEMICON Korea 2023
COEX Center | Seoul, Korea
CMM Conference
Charles Sturt University | Wagga Wagga, NSW, Australia
Products
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
Optimised for industrial production with highest throughput and seamless integration into industrial production lines.
Our most versatile system for research and prototyping with variable resolution and wide selection of options.
The most advanced industrial grayscale lithography tool on the market.
A production tool for standard photomasks and microstructures in i-line resists.
Photomask production on large substrates, perfect for display applications.
A tool specifically made to produce non-critical semiconductor photomasks for 130 nm designs and non-Manhattan designs.
Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.
Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering.
µMLA
- Maskless Aligner
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
MLA 150
- Maskless Aligner
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
MLA 300
- Maskless Aligner
Optimised for industrial production with highest throughput and seamless integration into industrial production lines.
DWL 66+
- Direct Write Laser Lithography System
Our most versatile system for research and prototyping with variable resolution and wide selection of options.
DWL 2000 GS / DWL 4000 GS
- Direct Write Laser Lithography System
The most advanced industrial grayscale lithography tool on the market.
VPG+ 200 / VPG+ 400
- Volume Pattern Generator
A production tool for standard photomasks and microstructures in i-line resists.
VPG+ 800 / VPG+ 1400
- Volume Pattern Generator
Photomask production on large substrates, perfect for display applications.
ULTRA
- Laser Mask Writer
A tool specifically made to produce non-critical semiconductor photomasks for 130 nm designs and non-Manhattan designs.
NanoFrazor® Scholar
- Thermal Scanning Probe Lithography System
Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.
NanoFrazor® Explore
- Thermal Scanning Probe Lithography System
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.
MPO 100
- Two-Photon Polymerization Multi-User Tool
Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering.
REFERENCES
HEIDELBERG INSTRUMENTS WORLDWIDE
About us
From diverse culture and far-reaching history to forward-looking state-of-the-art scientific research facilities – Heidelberg has it all. A city with over 800 years of history and tradition is also home to numerous leading researchers and Nobel Prize winners. As a center for scientific research, Heidelberg not only houses prestigious universities and industrial research institutions but is also the home of Heidelberg Instruments Mikrotechnik GmbH.
Heidelberg Instruments was founded in 1984 by five scientists from various institutions in Heidelberg with the aim of building a high-tech company that transfers academic research and developments to industrial projects. In the past 35+ years it has become the core of innovation in the development of high-resolution microlithography pattern generators at Heidelberg Instruments.
Heidelberg Instruments has evolved to become a world leader in the development and production of high-precision photolithography systems, maskless aligners, two-photon-polymerization lithography systems, and nanofabrication tools.
Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments.
Would you like to become a part of our growing team? Learn more about careers and available positions at Heidelberg Instruments.
Individual commitment and excellent teamwork – two opposites that have been and continue to be essential for successfully growing our business for the past 35+ years. Together we innovate solutions, develop improvements, and contribute to the constant growth of Heidelberg Instruments.
Would you like to become a part of our growing team? Learn more about careers and available positions at Heidelberg Instruments.
Our executive team consists of industry experts with decades of market experience. Together they ensure our operations run smoothly and efficiently, all while keeping the interest of our customers at the forefront. Their long-standing affiliation Heidelberg Instruments provides a firm sense of stability to both our clients and staff.