Sensors

Heidelberg Instruments' Direct Writers Redefine Sensor Design with Unmatched Flexibility and Precision

Description
Heidelberg Instruments direct writers enable high precision, making them suitable for sensors with fine details and complex geometries (VPG & DWL series). They can work with a variety of materials, including polymers, metals, and ceramics. This flexibility is advantageous for creating sensors with diverse functional layers and optimizing the material properties for specific sensing applications.

Maskless lithography systems are valuable tools for rapid prototyping of sensor designs. Researchers and engineers can quickly iterate and test different sensor configurations without the need for time-consuming mask changes or complex lithography setups (VPG 300 DI, MLA series).

Thermal Scanning Probe Lithography with resolution capabilities as fine as 20 nm has the potential to elevate the sensitivity of the manufactured sensor. It opens up new possibilities for the development of sophisticated sensors and other nanoscale technologies.
Requirements
Resolution

Flexibility

Precise overlay of several layers

Patterning of various materials
Solutions
Accurate overlay

using alignment marks or none. The functional structured layer can be used as reference (NanoFrazor, µMLA, MLA 150)

Ultra-high resolution (15 nm) without the need for proximity effect corrections

(NanoFrazor)

High resolution

Minimum feature size 300 nm (DWL 66⁺) 500 nm (VPG 300 DI)

Multiple wavelengths available

between 355 nm and 405 nm (Direct Writers)

Heidelberg Instruments direct writers enable high precision, making them suitable for sensors with fine details and complex geometries (VPG & DWL series). They can work with a variety of materials, including polymers, metals, and ceramics. This flexibility is advantageous for creating sensors with diverse functional layers and optimizing the material properties for specific sensing applications.

Maskless lithography systems are valuable tools for rapid prototyping of sensor designs. Researchers and engineers can quickly iterate and test different sensor configurations without the need for time-consuming mask changes or complex lithography setups (VPG 300 DI, MLA series).

Thermal Scanning Probe Lithography with resolution capabilities as fine as 20 nm has the potential to elevate the sensitivity of the manufactured sensor. It opens up new possibilities for the development of sophisticated sensors and other nanoscale technologies.