Materials Science

Lithography for New Materials

As pattern and device dimensions move smaller and smaller the material properties change depending on the size and shape. Direct write lithography is a highly flexible technique for modifying and shaping materials at the nano- and micro-scale to study and control an abundance of physical properties.

Direct write laser lithography can be used to create micro-scale patterns, structures, and textures as well as contacts for electronic devices and measurements. Thermal scanning probe lithography can be used in a similar fashion on the nanoscale, with the added ability of being able to directly initiate various material modifications via local heating. Additionally, some states of matter that are not accessible macroscopically can be reached thanks to ultra-fast heating, cooling, and high local pressure that can be applied with the nanoscale heated tip of the NanoFrazor®.

Non-invasive lithography

Localized heating

Precise temperature control

Imaging and metrology

Thermal conversion

Used to generate modifications and new materials locally on the nanoscale

Accurate overlay

Used to align electrodes onto nanoscale materials without alignment marks

No clean room required

High-resolution lithography using novel materials

Non-invasive lithography

Used to preserve physical properties of sensitive materials that would otherwise be damaged or destroyed by irradiation with charged particles or contact with air (glovebox solutions)