A powerful production tool for standard photomasks and microstructures in i-line resists
VPG+ 200/400 Volume Pattern Generators are direct laser lithography systems designed for i-line resist applications on small and mid size subtrates up to 410 mm x 410 mm. Applications include product prototyping, MEMS, advanced packaging, 3D integration, LED and OLED production, microfluidics and compound semiconductors.
VPG+ features an ultra-high-speed exposure engine and automated alignment, both specifically developed for the VPG+ 200/400 systems. This field-proven technology combines high resolution, outstanding image quality and fast throughput. Stabilization of writing conditions ensures mask-to-mask reproducibility and compensates for any variations during long exposures.
Exposure Quality
High Exposure Speed
Writing Stability
Alignment Accuracy
Automated Alignment
Overall Cost of Ownership
Variable Stage Dimensions
3 Write Modes
Laser Source
Customization
Service Contracts
Customer applications
Technical Data
Write mode | I | II | III |
---|---|---|---|
Writing performance | |||
Minimum structure size [μm] | 0.75 | 1 | 2 |
Address grid [nm] | 12.5 | 25 | 50 |
Edge roughness [3σ, nm] | 40 | 50 | 70 |
CD uniformity [3σ, nm] | 65 | 75 | 110 |
Stitching [3σ, nm] | 60 | 70 | 100 |
2nd layer alignment [3σ, nm] | 225 | 350 | 500 |
Write speed [mm²/min] | 970 | 3150 | 6400 |
System features | ||
---|---|---|
Light source | High power DPSS laser with 355 nm | |
Maximum substrate sizes | 9″ x 9″ / 17″ x 17″ | |
Substrate thickness | 0 to 9 mm | |
Maximum exposure area | 205 mm x 205 mm / 410 mm x 410 mm | |
Autofocus | Realtime autofocus system | |
Autofocus compensation range | 80 µm | |
Flowbox | (Closed-loop) temperature controlled environmental chamber | |
Alignment | Camera system for metrology and alignment | |
Other features | Stage map correction, Mura correction, Edge detector system, Multiple data input formats (DXF, CIF, GDSII and Gerber files) | |
System dimensions | VPG+ 200/400 | |
System / Electronic rack | ||
Width [mm] | 2350 / 800 | |
Depth [mm] | 1650 / 650 | |
Height [mm] | 2100 / 1800 | |
Weight [kg] | 3000 / 180 | |
Installation requirements | ||
Electrical | 400 VAC ± 5 %, 50/60 Hz, 32 A | |
Compressed air | 6 - 10 bar |
Please note
Specifications depend on individual process conditions and may vary according to equipment configuration. Write speed depends on pixel size and write mode. Design and specifications are subject to change without prior notice