Thermal scanning probe lithography tool with a hybrid direct laser sublimation and grayscale patterning capability
NanoFrazor® Explore is the first commercial thermal scanning probe lithography tool. NanoFrazor® Explore is used for nanopatterning of quantum devices on 1D/2D materials, such as quantum dots, Dolan bridges and Josephson junctions, and nanoscale arrays. Its unique capabilities enable new devices in new materials. For example, it is used for advanced applications such as grayscale photonics devices, nanofluidics structures or biomimetic substrates for cell growth; local modification of materials by heat, e.g. chemical reactions and physical phase changes.
With the direct laser sublimation module, nano- and microstructures are now seamlessly and quickly written into the same resist layer in a single fabrication step. In-situ imaging enables two unique features: markerless overlay, and comparison of the written and target patterns during writing, so the parameters can be immediately adjusted. This approach, called closed-loop lithography, results in sub-2 nm vertical precision for 2.5D (grayscale) shapes of any complexity. Fast and precise control of a heated nanoscale tip enables innovation not otherwise feasible.
The technology behind the system is the result of more than 20 years of intensive research and development (R&D) that started at IBM Research Zürich, and now happens at Heidelberg Instruments Nano. The NanoFrazor® hardware and software are constantly advancing to extend the capabilities and performance of the tool and its range of applications. Our dedicated team of experts keeps developing and optimizing the pattern transfer processes for different applications. We compile this know-how in a growing collection of best practices and protocols to support our customers.
High-resolution
Thermal Scanning Probe Lithography
Non-invasive Lithography
Compatibility
In-situ Imaging
Precise Overlay and Stitching
Unique Thermal Cantilevers
Laser Sublimation Module
Compact
Vibration Isolation
Low Cost of Ownership
Grayscale Software Module
Glovebox Integration
Customer applications
Technical Data
Thermal Probe Writing | Direct Laser Sublimation | |
---|---|---|
Patterning performance | ||
Minimum structure size [nm] | 15 | 600 |
Minimum lines and spaces [half pitch, nm] | 25 | 1000 |
Grayscale / 3D-resolution (step size in PPA) [nm] | 2 | - |
Writing field size [X μm x Y μm] | 60 x 60 | 60 x 60 |
Field stitching accuracy (markerless, using in-situ imaging) [nm] | 25 | 600 |
Overlay accuracy (markerless, using in-situ imaging) [nm] | 25 | 600 |
Write speed (typical scan speed) [mm/s] | 1 | 5 |
Write speed (thermal Probe: 50 nm pixel, incl. imaging) [μm²/min] | 1000 | 100 000 |
Topography performance | ||
Lateral imaging resolution (feature size) [nm] | 10 | 10 |
Vertical resolution (topography sensitivity) [nm] | <0.5 | <0.5 |
Imaging speed (50 nm pixel) [μm²/min] | 1000 | 1000 |
System features | |
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Substrate sizes | 1 x 1 mm² to 100 x 100 mm² (150 x 150 mm² possible with limitations) Thickness: 10 mm with optical access, 15 mm without optical access. |
Optical microscope | 0.6 μm digital resolution, 2 μm diffraction limit, 1.0 mm x 1.0 mm field of view, autofocus |
Laser source and optics | 405 nm wavelength CW fiber laser, more than 110 mW output power on sample, 1.2 μm minimum focal spot size |
Real-time laser autofocus | Using the distance sensor of the NanoFrazor cantilever |
Magnetic cantilever holder | Fast (< 1 min) and accurate tip exchange |
Housing | Three-layer acoustic isolation, superior vibration isolation (> 98% @ 10 Hz) PC-controlled temperature and humidity monitoring, gas-flow regulation |
Software features | GDS and bitmap import, 0.1 nm address grid, 256 grayscale levels, topography image analysis and drawing for overlay, mix & match between tip and laser writing, fully automated calibration routines, Python scripting |
NanoFrazor cantilever features | |
Integrated components | Tip heater, topography sensor, electrostatic actuation |
Tip geometry | Conical tip with < 10 nm radius and 750 nm length |
Tip heater temperature range | 25 °C – 1100 °C (< 1 K setpoint resolution) |
System dimensions & installation requirements | |
Height × width × depth | 185 cm x 78 cm x 128 cm |
Weight | 650 kg |
Power input | 1 x 110 or 220 V AC, 10 A |
Gas input | Compressed air and/or nitrogen with > 4 bar |
Other considerations | |
Recipe book with detailed descriptions of various processes is included (regularly updated with software) | |
Cantilever tips degrade over time (> 50 h patterning possible). Exchange is fast and low cost for tool owners. | |
A clean room or special laboratory is not required. No vacuum needed. |
Please note
Specifications depend on individual process conditions and may vary according to equipment configuration. Write speed depends on pixel size and write mode. Design and specifications are subject to change without prior notice