Nanoimprint Templates

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Single-Nanometer Precision

Nanoimprint lithography (NIL) is used to replicate 2D or 2.5D nanostructures with high throughput, which is required for photonics, optics, and nano-fluidics applications. This method relies on high-precision master templates which are prepared by direct write nano- and micro-lithography.

High resolution patterning over large areas

Accuracy of grayscale nanolithography

Additional processing steps (e.g. etching) for the final master

Accurate grayscale lithography

down to single-nanometer accuracy

Ultra-high resolution

for templates and copies

Compatibility of resists

with various industrial NIL processes

High write speed

to make grayscale masters even up to 1×1 m2

Application images

Nanoimprint templates: NIL is used for replication of grayscale 3D features
NIL is often used for replication of grayscale 3D features. Industrial applications can require masters that are seamlessly covered with 3D features over areas as big as 1 x 1 m2.
Nanoimprint templates: High-fidelity 3d replicas from NanoFrazor® Patterns
High-fidelity 3D replicas from NanoFrazor® patterns. (Courtesy of micro resist technology GmbH)
Nanoimprint templates: Replication of high-resolution features
Replication of high-resolution features. (Courtesy of SCIL Nanoimprint Solutions)
Nanoimprint templates: Amplication of 3D patterns by etching
Amplication of 3D patterns by etching.
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suitable Systems

NanoFrazor Explore – Thermal Scanning Probe lithography with direct laser sublimation and grayscale patterning capability

NanoFrazor® Explore

  • Thermal Scanning Probe Lithography System

Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.

DWL 66+ – a laser lithography tool for R&D in microelectronics, MEMS, microfluidics and more with Grayscale exposure mode

DWL 66+

  • Direct Write Laser Lithography System

Our most versatile system for research and prototyping with variable resolution and wide selection of options.

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