Quantum Devices
A Mega-Trend with High Demands on Lithography
Research and development activities for quantum devices are growing strongly and at a rapid pace worldwide. Future quantum devices promise to revolutionize computing, sensing, and data communication. Prototypes and ideas for quantum devices are very diverse and based on a wide variety of particles and quasi particles depending on their specific properties and interactions.
Ultra-high resolution patterning for well-defined structures (e.g., for tunneling gaps or plasmonic cavities)
Non-invasive lithography which does not disturb the quantum materials (e.g., topological insulators)
Fast and accurate placement of electrodes on low-dimensional materials with unknown positions (2D material flakes, dispersed nanowires, etc.)
The 3D environment and topography can be crucial for fine-tuning photon interactions in quantum devices
Ultra-high resolution
Non-invasive nanolithography
Accurate overlay
Accurate grayscale lithography
Application images
suitable Systems
NanoFrazor® Explore
- Thermal Scanning Probe Lithography System
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.
µMLA
- Maskless Aligner
Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules.
MLA 150
- Maskless Aligner
The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. Perfect for standard binary lithography.
DWL 66+
- Direct Write Laser Lithography System
Our most versatile system for research and prototyping with variable resolution and wide selection of options.