Thermal scanning probe lithography tool with in-situ imaging and grayscale patterning capabilities
Customer applications
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Technical Data
| Patterning performance | |
|---|---|
| Minimum structure size [nm] | 20 |
| Minimum lines and spaces [half pitch, nm] | 30 |
| Grayscale / 3D-resolution (step size in PPA) [nm] | 3 |
| Writing field size [X μm x Y μm] | 60 x 60 |
| Field stitching accuracy (markerless, using in-situ imaging) [nm] | 50 |
| Overlay accuracy (markerless, using in-situ imaging) [nm] | 50 |
| Write speed (typical scan speed) [mm/s] | 0.5 |
| Write speed (50 nm pixel) [μm²/min] | 500 |
| Imaging performance | |
| Lateral imaging resolution (feature size) [nm] | 10 |
| Vertical resolution (topography sensitivity) [nm] | <0.5 |
| Imaging speed (@ 50 nm resolution) [μm²/min] | 500 |
| System features | |
|---|---|
| Substrate sizes | 1 x 1 mm²
to 100 x 100 mm² Thickness: 5 mm with optical access, 10 mm without optical access |
| Optical microscope | 0.6 µm digital resolution, 2.4 µm diffraction limit, 1.0 mm x 1.0 mm field of view |
| Magnetic cantilever holder | Fast (<1 min) and accurate tip exchange |
| Housing | Compact housing with separate controller rack, active vibration isolation |
| Software features | GDS and bitmap import, topography image analysis and drawing for overlay, fully automated calibration routines, Python scripting |
| NanoFrazor® cantilever features | |
| Integrated components | Tip heater, topography sensor, electrostatic actuation |
| Tip geometry | Conical tip with <10 nm radius and 750 nm length |
| Tip heater temperature range | 25 °C – 1100 °C (<1 °C setpoint resolution) |
| System dimensions & installation requirements | |
| Height × width × depth | Tabletop: 400 mm x 400 mm x 450 mm, electronic trolley: 660 mm x 560 mm, x 600 mm |
| Weight | 100 kg |
| Power input | 1 x 110 or 220 V AC, 10 A |
| Vibration and noise level | Ambient acoustic noise levels need to be kept below 40 dB for best performance. A strong table is required. Floor requires vibration level VC-B. |
| Other considerations | |
| Recipe book with detailed descriptions of various processes is included (regularly updated with software). | |
| Cantilever tips degrade over time (>50 h patterning possible). Exchange is fast and low cost for tool owners. | |
| A cleanroom or special laboratory is not required. No vacuum needed. | |
| Unique capabilities make it easy to receive government funding (for system itself or later research projects) |