Small & Unconventional Substrates

For easy R&D or Test Exposures

Many applications require lithography on special samples other than the standard wafer and mask formats. We gathered a lot of experience on different requirements with different substrates.
In research, small pieces of wafers are commonly used. Therefore, our complete R&D product portfolio is specialized to work easily on samples as small as a few millimeters.
Other applications require lithography on unconventionally shaped substrates such as long rods, prisms, or even curved surfaces. Talk to us if your application requires unusual substrates. Most of our standard systems can already handle a wide variety of substrates, and we can develop custom systems for almost any size and kind of substrate. Heidelberg Instruments manufactures the stages in-house at our headquarters in Heidelberg.

Application images

Systems

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