Small & Unconventional Substrates
For easy R&D or Test Exposures
Many applications require lithography on special samples other than the standard wafer and mask formats. We gathered a lot of experience on different requirements with different substrates.
In research, small pieces of wafers are commonly used. Therefore, our complete R&D product portfolio is specialized to work easily on samples as small as a few millimeters.
Other applications require lithography on unconventionally shaped substrates such as long rods, prisms, or even curved surfaces. Talk to us if your application requires unusual substrates. Most of our standard systems can already handle a wide variety of substrates, and we can develop custom systems for almost any size and kind of substrate. Heidelberg Instruments manufactures the stages in-house at our headquarters in Heidelberg.
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Suitable Systems
DWL 66+
- Direct Write Laser Lithography System
Our most versatile system for research and prototyping with variable resolution and wide selection of options.
NanoFrazor® Scholar
- Thermal Scanning Probe Lithography System
Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox.
NanoFrazor® Explore
- Thermal Scanning Probe Lithography System
Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules, excellent alternative to e-beam lithography tools.