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We are thrilled to provide you with a comprehensive collection of fact sheets, research papers, whitepapers, and other documents related to Heidelberg Instruments. Our library is designed to serve as a valuable resource for anyone seeking information about our products, applications, core technologies and key features. Not only do we publish our own information here, but we also feature joint documents produced with partners and papers by other authors using our systems. Some links may lead to external sources.
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- Use the search bar to find application-related content, with terms like “Advanced Packaging”, “Quantum Devices”, “Micro-optics” and many more.
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- The categories indicate the type of publication, e.g., Fact Sheets.
| Title | Description | Category | Tags | Publisher | Published | Link | hf:doc_categories | hf:doc_tags | hf:doc_author | |
|---|---|---|---|---|---|---|---|---|---|---|
| “Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023 | Energieführungssystem für die partikelfreie Halbleiterfertigung in den Anlagen von Heidelberg Instruments. Only available in German at this point. | Press | VPG | WILEY Verlag | May, 2023 | press | vpg | wiley-verlag | ||
| 3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolution | High-precision 3D printing provides a wide range of freedom in design for industrial fabrication of advanced optical components and products. LFW December Issue/2019 | Scientific Paper | Two-Photon Polymerization (TPP) | Laser Focus World | December, 2019 | scientific-paper | two-photon-polymerization | laser-focus-world | ||
| A cleanroom in a glovebox | Our glovebox-integrated cleanroom achieves fabrication, characterization, and reduced facility costs in an oxygen-free and clean environment, enabling exploration of new materials, quantum phases and devices. | Scientific Paper | μPG 101 | Review of Scientific Instruments | July, 2020 | scientific-paper | %ce%bcpg-101 | review-of-scientific-instruments | ||
| Broadband imaging with one planar diffractive lens | Achromatic diffractive lenses (ADLs) enable imaging across the visible spectrum, achieving diffraction-limited focusing and high numerical aperture. Cost-effective and scalable for widespread use. | Scientific Paper | Grayscale, μPG 101 | Scientific Reports | February, 2018 | scientific-paper | grayscale %ce%bcpg-101 | scientific-reports | ||
| Diffractive flat lens enables extreme depth-of-focus imaging | Multi-level diffractive lens (MDL) designs drastically enhance depth of focus by over 4 orders of magnitude, enabling focus maintenance for objects separated by large distances. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | October, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography | The most advanced industrial grayscale lithography tool on the market. | Fact Sheet | DWL | Heidelberg Instruments | November, 2021 | fact-sheet | dwl | heidelberg-instruments | ||
| DWL 66+ Ultimate Lithography System | Versatile system for research and prototyping with variable resolution and wide selection of options. | Fact Sheet | DWL 66 | Heidelberg Instruments | April, 2022 | fact-sheet | dwl-66 | heidelberg-instruments | ||
| Grayscale with GenISys 3D-PEC | We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser lithography. | Application Note | Direct-writing, DWL 66, Grayscale | GenISys GmbH, Heidelberg Instruments | March, 2023 | application-note | direct-writing dwl-66 grayscale | genisys-gmbh heidelberg-instruments | ||
| Imaging over an unlimited bandwidth with a single diffractive surface | By allowing the phase in the image plane to be a free parameter, a single diffractive surface can correct chromatic aberrations over a wide bandwidth, … | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | July, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Impact of massive parallelization on two-photon absorption micro- and nanofabrication | In this paper, massive parallelization is demonstrated which was realized by using a beam splitting diffractive optical element (DOE). | Scientific Paper | Two-Photon Polymerization (TPP) | SPIE. Digital Library | March, 2020 | scientific-paper | two-photon-polymerization | spie-digital-library | ||
| Increasing the density of passive photonic integrated circuits via nanophotonic cloaking | We utilize nanophotonic cloaking to enable closer spacing of photonic-integrated devices, overcoming signal cross-talk limitations. Experimental results demonstrate efficient transmission and compact designs. | Scientific Paper | Grayscale, μPG 101 | Nature Communications | November, 2016 | scientific-paper | grayscale %ce%bcpg-101 | nature-communications | ||
| Large-area, high-numerical-aperture multi-level diffractive lens via inverse design | Inverse design enables the creation of thin, high-NA flat lenses. Multi-level diffractive lens (MDL) with a NA=0.9 at 850 nm wavelength, replicable via imprint lithography. | Scientific Paper | DWL 66, Grayscale | Heidelberg Instruments, Optica | March, 2020 | scientific-paper | dwl-66 grayscale | heidelberg-instruments optica | ||
| Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process | Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device fabrication. | Scientific Paper | DWL | HAL open science | October, 2017 | scientific-paper | dwl | hal-open-science | ||
| Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range | Two-photon absorption (TPA) provides freedom in design for the fabrication of novel products that are not feasible with conventional techniques. | Scientific Paper | Two-Photon Polymerization (TPP) | Advanced Optical Technologies | May, 2019 | scientific-paper | two-photon-polymerization | advanced-optical-technologies | ||
| MLA 150 Advanced Maskless Aligner | The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. | Fact Sheet | MLA 150 | Heidelberg Instruments | November, 2021 | fact-sheet | mla-150 | heidelberg-instruments | ||
| MLA 300 Industrial Maskless Aligner | Optimised for industrial production with highest throughput and seamless integration into industrial production lines. | Fact Sheet | MLA 300 | Heidelberg Instruments | October, 2022 | fact-sheet | mla-300 | heidelberg-instruments | ||
| MPO 100 3D Lithography Tool | Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering. | Fact Sheet | MPO 100, Two-Photon Polymerization (TPP) | Heidelberg Instruments | August, 2023 | fact-sheet | mpo-100 two-photon-polymerization | heidelberg-instruments | ||
| NanoFrazor® Explore Nanofabrication Tool | Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules. | Fact Sheet | NanoFrazor®, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | March, 2022 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| NanoFrazor® Scholar Nanofabrication Tool | Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox. | Fact Sheet | NanoFrazor®, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | March, 2022 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensions | We investigate neurite guidance using semiconductor industry-compatible techniques for fabricating modulated surfaces, enabling the cultivation and study of ordered neuronal networks in a 2.5D configuration. | Scientific Paper | DWL 66, Grayscale | Nanoscale Advances | July, 2020 | scientific-paper | dwl-66 grayscale | nanoscale-advances | ||
| Optimization of Laser Written Photomasks for Photonic Device Manufacturing | Successful performance improvement of an ULTRA i-line laser writer for photonic device mask fabrication, reducing manufacturing costs. Thorough investigation and analysis identify optimal exposure strategies. | Scientific Paper | Mask-making, ULTRA | Heidelberg Instruments, SPIE. Digital Library | September, 2022 | scientific-paper | mask-making ultra | heidelberg-instruments spie-digital-library | ||
| Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentration | Photovoltaic system combining spectrum splitting and concentration using a planar diffractive optic, overcoming losses in single-bandgap absorbers & achieving a 25% increase in output power. | Scientific Paper | Direct-writing, μPG 101 | AIP Advances | September, 2016 | scientific-paper | direct-writing %ce%bcpg-101 | aip-advances | ||
| Overview on Maskless Grayscale Lithography | From design to micro structured topography: Grayscale lithography can be used to quickly fabricate various 2.5D and 3D structures at the micro scale. | Video | Grayscale | Heidelberg Instruments | May, 2023 | video | grayscale | heidelberg-instruments | ||
| Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2 | Novel atomic substitution method creates highly conductive nonlayered molybdenum nitrides from MoS2, enabling potential nanoelectronics’ applications with maintained conductivity and stable contacts over weeks. | Scientific Paper | µMLA | Chemistry of Materials | December, 2021 | scientific-paper | %c2%b5mla | chemistry-of-materials | ||
| Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants | Study of fabrication of artificial structures for musculo-skeletal tissue engineering, which was done by Two-Photon-Polymerization (TPP). | Scientific Paper | Two-Photon Polymerization (TPP) | International Journal of Molecular Sciences | March, 2022 | scientific-paper | two-photon-polymerization | international-journal-of-molecular-sciences | ||
| Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater | Aptamer-based graphene field effect transistor (AptG-FET) platform detects three opioid metabolites in wastewater rapidly and inexpensively, providing a reliable alternative to costly laboratory-based techniques. | Scientific Paper | Direct-writing, µMLA | ACS Nano | February, 2022 | scientific-paper | direct-writing %c2%b5mla | acs-nano | ||
| Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography | Grayscale lithography and hard-mask techniques allow for the creation of micrometer-scale features and nearly hemispherical solid immersion lenses in silicon carbide, enhancing optical collection efficiency … | Scientific Paper | Direct-writing, DWL 66, Grayscale | Applied Physics Letters | April, 2023 | scientific-paper | direct-writing dwl-66 grayscale | applied-physics-letters | ||
| Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8 | Low-power laser irradiation of SU-8 photoresist with an added absorber enables selective pyrolysis for simple and inexpensive patterning of pyrolytic carbon microelectrodes. | Scientific Paper | Direct-writing, µPG | Micromachines | April, 2021 | scientific-paper | direct-writing %c2%b5pg | micromachines | ||
| Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination Therapy | Monodisperse dual-compartment microdevices with pH-sensitive polymer coatings enable tunable, sequential drug release in the gastrointestinal tract, providing a promising strategy for combination therapy. | Scientific Paper | Direct-writing, MLA 100 | Advanced Therapeutics | August, 2022 | scientific-paper | direct-writing mla-100 | advanced-therapeutics | ||
| Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substrates | Bottom surface-induced ferromagnetism in Bi2Se3 nanoplate devices on SiO2 and ferromagnetic insulator substrates decouples quantum Hall effects, revealing shifted half-integer QHEs in a three-channel model. | Scientific Paper | Direct-writing, μPG 101 | IOP Science | January, 2017 | scientific-paper | direct-writing %ce%bcpg-101 | iop-science | ||
| The Lithographer – Grayscale Lithography Issue | The Rise of Grayscale Lithography: Direct-write 3D patterning scaled from µm to nm. Grayscale Lithography Issue of The Lithographer, issued January 2020. | The Lithographer | Grayscale | Heidelberg Instruments | January, 2020 | the-lithographer | grayscale | heidelberg-instruments | ||
| The Lithographer – Quantum Issue | The Quantum Issue of The Lithographer, issued Fall 2020 Topics include: Maskless Aligners, Grayscale, 2D Materials, Quantum Technology | The Lithographer | Direct-writing, Grayscale, NanoFrazor®, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | October, 2020 | the-lithographer | direct-writing grayscale nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| Thermal Scanning Probe Lithography – a review | Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-SPL) are reviewed here. | Scientific Paper | Thermal Scanning Probe (t-SPL) | Microsystems & Nanoengineering | April, 2020 | scientific-paper | thermal-scanning-probe | microsystems-nanoengineering | ||
| Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 Nanowires | Nanowires are promising for thermoelectric applications, but the predicted performance enhancement has not been observed yet. Surface states play a crucial role in transport characteristics. | Scientific Paper | Direct-writing, μPG 101 | Advanced Energy Materials | May, 2015 | scientific-paper | direct-writing %ce%bcpg-101 | advanced-energy-materials | ||
| Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stress | Flexible thin film transistors on 50 µm thick polyimide demonstrated stable behavior under simultaneous mechanical and electrical stress up to a 4 mm bending radius. | Scientific Paper | Direct-writing, DWL 66 | Flexible and Printed Electronics | June, 2022 | scientific-paper | direct-writing dwl-66 | flexible-and-printed-electronics | ||
| ULTRA Semiconductor Mask Writer | A tool specifically designed to produce mature semiconductor photomasks. | Fact Sheet | ULTRA | Heidelberg Instruments | April, 2022 | fact-sheet | ultra | heidelberg-instruments | ||
| Ultra-thick positive photoresist layers for maskless grayscale lithography | Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental resist. | Scientific Paper | Direct-writing, DWL 66, Grayscale | Heidelberg Instruments, SPIE. Digital Library | April, 2023 | scientific-paper | direct-writing dwl-66 grayscale | heidelberg-instruments spie-digital-library | ||
| Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3 | Orthorhombic κ-Ga2O3 is a superior ultrawide bandgap material for extreme environments. We demonstrate ultrasensitive UV-C detection using Si-doped κ-Ga2O3 photodetectors. | Scientific Paper | µPG | Applied Surface Science | January, 2023 | scientific-paper | %c2%b5pg | applied-surface-science | ||
| Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithography | Achieve straight, vertical sidewalls in thick negative-tone resist using focused laser beam-based direct write lithography, overcoming non-homogeneous illumination and non-sharp edges. (Possible application: MEMS) | Scientific Paper | Direct-writing, DWL 66 | Micro and Nano Engineering | June, 2023 | scientific-paper | direct-writing dwl-66 | micro-and-nano-engineering | ||
| Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology | First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality devices. | Scientific Paper | Direct-writing, DWL | HAL open science | October, 2017 | scientific-paper | direct-writing dwl | hal-open-science | ||
| VPG 300 DI Maskless Stepper | Maskless direct imager for high-accuracy and high-resolution microstructures. | Fact Sheet | VPG | Heidelberg Instruments | July, 2023 | fact-sheet | vpg | heidelberg-instruments | ||
| VPG+ 200 / VPG+ 400 Volume Pattern Generator | A production tool for standard photomasks and microstructures in i-line resists. | Fact Sheet | VPG | Heidelberg Instruments | June, 2023 | fact-sheet | vpg | heidelberg-instruments | ||
| VPG+ 800 / VPG+ 1400 Volume Pattern Generator | Photomask production on large substrates, perfect for display applications. | Fact Sheet | VPG | Heidelberg Instruments | June, 2022 | fact-sheet | vpg | heidelberg-instruments | ||
| µMLA Tabletop Maskless Aligner | Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules. | Fact Sheet | µMLA | Heidelberg Instruments | October, 2022 | fact-sheet | %c2%b5mla | heidelberg-instruments |