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We are thrilled to provide you with a comprehensive collection of fact sheets, research papers, whitepapers, and other documents related to Heidelberg Instruments. Our library is designed to serve as a valuable resource for anyone seeking information about our products, applications, core technologies and key features. Not only do we publish our own information here, but we also feature joint documents produced with partners and papers by other authors using our systems. Some links may lead to external sources.
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| Title | Description | Category | Tags | Publisher | Published | Link | hf:doc_categories | hf:doc_tags | hf:doc_author | |
|---|---|---|---|---|---|---|---|---|---|---|
| “Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023 | Energieführungssystem für die partikelfreie Halbleiterfertigung in den Anlagen von Heidelberg Instruments. Only available in German at this point. | Press | VPG | WILEY Verlag | May, 2023 | press | vpg | wiley-verlag | ||
| 3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolution | High-precision 3D printing provides a wide range of freedom in design for industrial fabrication of advanced optical components and products. LFW December Issue/2019 | Scientific Paper | Two-Photon Polymerization (TPP) | Laser Focus World | December, 2019 | scientific-paper | two-photon-polymerization | laser-focus-world | ||
| A cleanroom in a glovebox | Our glovebox-integrated cleanroom achieves fabrication, characterization, and reduced facility costs in an oxygen-free and clean environment, enabling exploration of new materials, quantum phases and devices. | Scientific Paper | μPG 101 | Review of Scientific Instruments | July, 2020 | scientific-paper | %ce%bcpg-101 | review-of-scientific-instruments | ||
| Bilayer Lift-Off for NanoFrazor Lithography | Explore bilayer lift-off with NanoFrazor lithography, addressing advantages, process details, and examples, including high-quality contacts and structures as small as 7 nm. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | July, 2023 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Biosynthesis enhancement of tropodithietic acid (TDA) antibacterial compound through biofilm formation by marine bacteria Phaeobacter inhibens on micro-structured polymer surfaces | Microfluidic channels cultivate Phaeobacter inhibens biofilms on diverse polymer surfaces, offering biocontrol potential in aquaculture by mitigating antibiotic risks. Creating diverse surfaces to promote biosynthesis. | Application Note | Direct-writing, MLA 150 | Heidelberg Instruments, Technical University of Denmark (DTU) | February, 2024 | application-note | direct-writing mla-150 | heidelberg-instruments technical-university-of-denmark-dtu | ||
| Broadband imaging with one planar diffractive lens | Achromatic diffractive lenses (ADLs) enable imaging across the visible spectrum, achieving diffraction-limited focusing and high numerical aperture. Cost-effective and scalable for widespread use. | Scientific Paper | Grayscale, μPG 101 | scientific reports (nature) | February, 2018 | scientific-paper | grayscale %ce%bcpg-101 | scientific-reports-nature | ||
| Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ECS Journal of Solid State Science and Technology | May, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | ecs-journal-of-solid-state-science-and-technology | ||
| Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Microsystems & Nanoengineering | February, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | microsystems-nanoengineering | ||
| Cubic Microcontainers Improve In Situ Colonic Mucoadhesion and Absorption of Amoxicillin in Rats | Microcontainers enhance colonic drug delivery by influencing mucoadhesion and absorption. Cubic microcontainers show better adherence and absorption of amoxicillin compared to cylindrical and triangular ones. | Scientific Paper | Direct-writing, MLA 100 | Pharmaceutics (MDPI) | April, 2020 | scientific-paper | direct-writing mla-100 | pharmaceutics-mdpi | ||
| Damage-free nanolithography enabling superior device performance | Thermal scanning probe lithography enabled by NanoFrazor helps to fabricate devices with superior performance due to its damage-free patterning principle. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | September, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe | A deterministic technique uses hot scanning nanoprobes to assemble sub-20 nm nanoparticles, including quantum dots, into 2D arrays and complex nanostructures for various applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | November, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs | Engineered nanotopography induces tensile strain in MoS2 FETs, significantly enhancing carrier mobility and on-state current, promising advancements for 2D material-based electronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | August, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nature-communications | ||
| Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor Nanocircuits | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | November, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-interfaces | ||
| Diffractive flat lens enables extreme depth-of-focus imaging | Multi-level diffractive lens (MDL) designs drastically enhance depth of focus by over 4 orders of magnitude, enabling focus maintenance for objects separated by large distances. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | October, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer | Cheap and quick fabrication of mr-DWL waveguides channels on glass buried in optical polymer cladding with 350 µm radius ring resonators and 0.9 µm spacing. | Scientific Paper | Direct-writing, DWL 66 | Rochester Institute of Technology | May, 2016 | scientific-paper | direct-writing dwl-66 | rochester-institute-of-technology | ||
| DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography | The most advanced industrial grayscale lithography tool on the market. | Fact Sheet | DWL | Heidelberg Instruments | November, 2021 | fact-sheet | dwl | heidelberg-instruments | ||
| DWL 66+ Ultimate Lithography System | Versatile system for research and prototyping with variable resolution and wide selection of options. | Fact Sheet | DWL 66 | Heidelberg Instruments | April, 2022 | fact-sheet | dwl-66 | heidelberg-instruments | ||
| Evidence for metastable photo-induced superconductivity in K3C60 | Intense optical pulses induce transient superconductivity, evolving into stable states in K3C60 under sustained mid-infrared excitation, characterized by low resistance and extended lifetimes. | Scientific Paper | Direct-writing, µMLA | nature physics | February, 2021 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating | Si-based device using a fractal pattern for automatic focusing in high-resolution X-ray tomography. Achieves globally homogeneous visibility and local contrast with versatile X-ray energy applicability. | Scientific Paper | Direct-writing, DWL 66 | Applied Optics | May, 2022 | scientific-paper | direct-writing dwl-66 | applied-optics | ||
| Fabrication of a hybrid device for the integration of light-triggered proton pumps | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | June, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | micro-and-nano-engineering-science-direct | ||
| Fabrication of a Silicon Electron Multiplier sensor using metal assisted chemical etching and its characterisation | SiEM sensor utilizing metal-assisted chemical etching to create high aspect ratio silicon pillars with charge multiplication capabilities. Electrical tests confirm compatibility with p–n junctions. | Scientific Paper | Direct-writing, DWL 66 | ScienceDirect | March, 2024 | scientific-paper | direct-writing dwl-66 | sciencedirect | ||
| Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release | This application note discusses microdevice-based drug delivery, focusing on dual compartment microcontainers (DCMCs) produced via maskless UV lithography. Potential for combination therapy is highlighted. | Application Note | Direct-writing, µMLA | Heidelberg Instruments, IDUN DTU | July, 2023 | application-note | direct-writing %c2%b5mla | heidelberg-instruments idun-dtu | ||
| Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | January, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Freeform nanostructuring of hexagonal boron nitride | Hexagonal boron nitride (hBN), now available as atomically smooth flakes, offers unique properties in optoelectronics and nanoelectronics. Researchers demonstrate freeform nanostructuring for advanced device architectures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | arXiv Physics/Optics | May, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | arxiv-physics-optics | ||
| From regular periodic micro-lens arrays to randomized continuous phase profiles | For industrial illumination systems, micro-optical structures made via direct grayscale lithography achieve precise multi-wavelength intensity control, efficiency, and flexibility at a cost-effective production scale. | Scientific Paper | Direct-writing, DWL 66 | Advanced Optical Technologies | February, 2015 | scientific-paper | direct-writing dwl-66 | advanced-optical-technologies | ||
| Generating smooth potential landscapes with thermal scanning-probe lithography | Scanning probe microscopy with a NanoFrazor achieves atomic precision, enabling controlled material manipulation and high-resolution lithography, with broad applications in photonics, electronics, and nanomaterials science. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Physics: Materials | November, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-physics-materials | ||
| Grayscale with GenISys 3D-PEC | We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser lithography. | Application Note | Direct-writing, DWL 66, Grayscale | GenISys GmbH, Heidelberg Instruments | March, 2023 | application-note | direct-writing dwl-66 grayscale | genisys-gmbh heidelberg-instruments | ||
| Hollow silicon-based microneedle array for dermal interstitial fluid extraction fabricated by only dry etching on wafer scale | Silicon-based microneedles enable interstitial fluid biomarker extraction. Proposed dry etching technique achieves mass production compatibility, enhancing biomedical applications for minimally invasive diagnostics and monitoring. | Application Note | Direct-writing, MLA 150 | EPFL, Heidelberg Instruments, Xsensio | May, 2024 | application-note | direct-writing mla-150 | epfl heidelberg-instruments xsensio | ||
| Imaging over an unlimited bandwidth with a single diffractive surface | With the control of the phase in the image plane, a single diffractive surface can correct chromatic aberrations over a wide bandwidth, simplifying imaging systems. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | July, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Impact of massive parallelization on two-photon absorption micro- and nanofabrication | In this paper, massive parallelization is demonstrated which was realized by using a beam splitting diffractive optical element (DOE). | Scientific Paper | Two-Photon Polymerization (TPP) | SPIE. Digital Library | March, 2020 | scientific-paper | two-photon-polymerization | spie-digital-library | ||
| Increasing the density of passive photonic integrated circuits via nanophotonic cloaking | We utilize nanophotonic cloaking to enable closer spacing of photonic-integrated devices, overcoming signal cross-talk limitations. Experimental results demonstrate efficient transmission and compact designs. | Scientific Paper | Grayscale, μPG 101 | nature communications | November, 2016 | scientific-paper | grayscale %ce%bcpg-101 | nature-communications | ||
| Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured template | Examining single Au nanoparticle cluster light scattering on nanostructured substrates, revealing two substrate effects via Green’s tensor theory for plasmonic nanostructure spectral interpretation. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Optics Express | April, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | optics-express | ||
| Inverse-designed achromatic flat lens enabling imaging across the visible & near-infrared with diameter > 3mm | A flat lens, designed through inverse design with a phase-only pupil function, achieves achromatic focusing over a broad spectrum in a single diffractive surface. | Scientific Paper | DWL 66, Grayscale | Applied Physics Letters | July, 2020 | scientific-paper | dwl-66 grayscale | applied-physics-letters | ||
| Large Scale Fresnel Zone Plates On SiN-Membranes | This application note describes the fabrication process of Fresnel Zone Plates on a thin silicon nitride membrane substrate for X-ray optics using a DWL 66+. | Application Note | DWL 66 | Heidelberg Instruments, XRnanotech | September, 2023 | application-note | dwl-66 | heidelberg-instruments xrnanotech | ||
| Large-area, high-numerical-aperture multi-level diffractive lens via inverse design | Inverse design enables the creation of thin, high-NA flat lenses. Multi-level diffractive lens (MDL) with a NA=0.9 at 850 nm wavelength, replicable via imprint lithography. | Scientific Paper | DWL 66, Grayscale | Heidelberg Instruments, Optica | March, 2020 | scientific-paper | dwl-66 grayscale | heidelberg-instruments optica | ||
| Light-induced anomalous Hall effect in graphene | Optical driving in quantum solids uncovers phenomena like light-induced superconductivity and anomalous Hall effect in graphene, revealing Floquet-engineered topological band structures. | Scientific Paper | Direct-writing, µMLA | nature physics | November, 2019 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process | Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device fabrication. | Scientific Paper | DWL | HAL open science | October, 2017 | scientific-paper | dwl | hal-open-science | ||
| LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments | Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment in state-of-the-art machinery. Press Release, Lumineq Oy, Sept. 11, 2023. | Press | Direct-writing, MLA 300 | Lumineq | September, 2023 | press | direct-writing mla-300 | lumineq | ||
| Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range | Two-photon absorption (TPA) provides freedom in design for the fabrication of novel products that are not feasible with conventional techniques. | Scientific Paper | Two-Photon Polymerization (TPP) | Advanced Optical Technologies | May, 2019 | scientific-paper | two-photon-polymerization | advanced-optical-technologies | ||
| Maskless Aligner Technology and the MLA 300 Drive Efficient Development and Production in Microstructures | This overview covers a paradigm shift in micro fabrication with the benefits of maskless aligners from Heidelberg Instruments and introduces the MLA 300. | Whitepaper | Direct-writing, MLA 300 | Heidelberg Instruments | August, 2021 | whitepaper | direct-writing mla-300 | heidelberg-instruments | ||
| MEMS micro-coils for magnetic neurostimulation | Innovative MEMS micro-coil probe fabrication overcame brain stimulation challenges, validated in vivo. International collaboration advances micro-magnetic stimulation for applications like artificial vision and hearing. | Scientific Paper | MLA 150 | Biosensors and Bioelectronics (ScienceDirect) | May, 2023 | scientific-paper | mla-150 | biosensors-and-bioelectronics-sciencedirect | ||
| MLA 150 Advanced Maskless Aligner | The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. | Fact Sheet | MLA 150 | Heidelberg Instruments | November, 2021 | fact-sheet | mla-150 | heidelberg-instruments | ||
| MLA 300 Industrial Maskless Aligner | Optimised for industrial production with highest throughput and seamless integration into industrial production lines. | Fact Sheet | MLA 300 | Heidelberg Instruments | March, 2024 | fact-sheet | mla-300 | heidelberg-instruments | ||
| MPO 100 3D Lithography Tool | Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical engineering. | Fact Sheet | MPO 100, Two-Photon Polymerization (TPP) | Heidelberg Instruments | August, 2023 | fact-sheet | mpo-100 two-photon-polymerization | heidelberg-instruments | ||
| Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Science | January, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-science | ||
| Multilevel diffractive lens in the MWIR with extended depth-of-focus and wide field-of-view | Compare inverse-designed and conventional lenses in MWIR optics. The inverse-designed lens offers better depth-of-focus and off-axis performance but with larger spot size and reduced efficiency. | Scientific Paper | Direct-writing, DWL 66 | Optics Express | May, 2023 | scientific-paper | direct-writing dwl-66 | optics-express | ||
| Nano-Ironing van der Waals Heterostructures toward Electrically Controlled Quantum Dots | Nanoironing van der Waals heterostructures enhances interface quality, significantly improving electrical performance and enabling controlled quantum dot formation for advanced quantum technologies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | June, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography | Thermal scanning probe lithography (t-SPL) shows promise for scalable nanofabrication in nanoelectronics. It produces high-performance graphene-based transistors with simplified processing, reducing time and cost. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | APL Materials | January, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | apl-materials | ||
| Nanofluidic rocking Brownian motors | Creating precise nanofluidic slits, utilizing electrostatic forces and oscillating fields, enables controlled transport of nanoparticles, demonstrated with 60nm gold spheres and efficient sorting of particles. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Science | March, 2018 | scientific-paper | nanofrazor thermal-scanning-probe | science | ||
| NanoFrazor | The NanoFrazor takes nanofabrication to the next level. Building on decades of research and development, the NanoFrazor brings thermal scanning probe lithography (t-SPL) into your … | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Heidelberg Instruments Nano | July, 2024 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments heidelberg-instruments-nano | ||
| NanoFrazor Explore Nanofabrication Tool | Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules. | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | March, 2022 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| NanoFrazor for Direct Nanoscale Chemical Conversion of Materials | Coming soon. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | August, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| NanoFrazor Scholar Nanofabrication Tool | Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox. | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | March, 2022 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensions | We investigate neurite guidance using semiconductor industry-compatible techniques for fabricating modulated surfaces, enabling the cultivation and study of ordered neuronal networks in a 2.5D configuration. | Scientific Paper | DWL 66, Grayscale | Nanoscale Advances | July, 2020 | scientific-paper | dwl-66 grayscale | nanoscale-advances | ||
| Normally-Off p-GaN Gate High-Electron-Mobility Transistors with the Air-Bridge Source-Connection Fabricated Using the Direct Laser Writing Grayscale Photolithography Technology | Fabrication of a p-GaN gate HEMT with an air-bridge source connection using direct grayscale lithography, achieving good performance with high breakdown voltage and low on-resistance. | Scientific Paper | Direct-writing, DWL 66 | Crystals | April, 2023 | scientific-paper | direct-writing dwl-66 | crystals | ||
| Novel Tunnel Magnetoresistive Sensor Functionalities via Oblique-Incidence Deposition | We improve tunnel magnetoresistive (TMR) devices by precisely shaping magnetic layers with oblique-incidence deposition, enhancing TMR design and functionality without additional magnetic materials. | Scientific Paper | μPG 101 | ACS Applied Materials & Interfaces | July, 2021 | scientific-paper | %ce%bcpg-101 | acs-applied-materials-interfaces | ||
| Optical Fourier surfaces | Thermal Scanning Probe Lithography and templating creating optical surfaces containing multiple specified sinusoids, enabling advanced diffractive optics, photonics, and applications in emerging photonics fields. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, nature | June, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | heidelberg-instruments nature | ||
| Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic Antiferromagnets | A versatile platform utilizes spin waves for optically inspired wave-based processing, advancing nanoscale devices with wavefront engineering, focusing, interference, and unique properties. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | January, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Optimization of Laser Written Photomasks for Photonic Device Manufacturing | Successful performance improvement of an ULTRA i-line laser writer for photonic device mask fabrication, reducing manufacturing costs. Thorough investigation and analysis identify optimal exposure strategies. | Scientific Paper | Mask-making, ULTRA | Heidelberg Instruments, SPIE. Digital Library | September, 2022 | scientific-paper | mask-making ultra | heidelberg-instruments spie-digital-library | ||
| Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentration | Photovoltaic system combining spectrum splitting and concentration using a planar diffractive optic, overcoming losses in single-bandgap absorbers & achieving a 25% increase in output power. | Scientific Paper | Direct-writing, μPG 101 | AIP Advances | September, 2016 | scientific-paper | direct-writing %ce%bcpg-101 | aip-advances | ||
| Overview on Maskless Grayscale Lithography | From design to micro structured topography: Grayscale lithography can be used to quickly fabricate various 2.5D and 3D structures at the micro scale. | Video | Grayscale | Heidelberg Instruments | May, 2023 | video | grayscale | heidelberg-instruments | ||
| Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography | Thermal Scanning Probe Lithography enables precise metal electrode patterning on 2D semiconductors like MoS2, improving device performance with vanishing Schottky barriers and exceptional properties. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature electronics | January, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nature-electronics | ||
| Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing | Nanomaterials derive unique properties from their nanostructure. A perspective explores advanced nanofabrication techniques to modify properties in condensed matter systems, discussing applications and future prospects. | Scientific Paper | Direct-writing, DWL 66, NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | August, 2023 | scientific-paper | direct-writing dwl-66 nanofrazor thermal-scanning-probe | advanced-materials-technologies | ||
| Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2 | Novel atomic substitution method creates highly conductive nonlayered molybdenum nitrides from MoS2, enabling potential nanoelectronics’ applications with maintained conductivity and stable contacts over weeks. | Scientific Paper | µMLA | Chemistry of Materials | December, 2021 | scientific-paper | %c2%b5mla | chemistry-of-materials | ||
| Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants | Study of fabrication of artificial structures for musculo-skeletal tissue engineering, which was done by Two-Photon-Polymerization (TPP). | Scientific Paper | Two-Photon Polymerization (TPP) | International Journal of Molecular Sciences | March, 2022 | scientific-paper | two-photon-polymerization | international-journal-of-molecular-sciences | ||
| Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | June, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | micro-and-nano-engineering-science-direct | ||
| Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater | Aptamer-based graphene field effect transistor (AptG-FET) platform detects three opioid metabolites in wastewater rapidly and inexpensively, providing a reliable alternative to costly laboratory-based techniques. | Scientific Paper | Direct-writing, µMLA | ACS Nano | February, 2022 | scientific-paper | direct-writing %c2%b5mla | acs-nano | ||
| Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography | Utilizing grayscale lithography and hard-mask methods, silicon carbide hosts micrometer-scale features and hemispherical solid immersion lenses, boosting optical collection for quantum emitters. Scalable, reproducible, CMOS-compatible. | Scientific Paper | Direct-writing, DWL 66, Grayscale | Applied Physics Letters | April, 2023 | scientific-paper | direct-writing dwl-66 grayscale | applied-physics-letters | ||
| Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8 | Low-power laser irradiation of SU-8 photoresist with an added absorber enables selective pyrolysis for simple and inexpensive patterning of pyrolytic carbon microelectrodes. | Scientific Paper | Direct-writing, µPG | Micromachines | April, 2021 | scientific-paper | direct-writing %c2%b5pg | micromachines | ||
| Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT | PMN–PT thin film disks, with single-electrode actuation, showcase self-aligned tangential and wineglass modes for high-frequency bulk acoustic wave (BAW) MEMS gyroscopes. | Scientific Paper | Direct-writing, MLA 150 | Microsystems & Nanoengineering (nature) | May, 2023 | scientific-paper | direct-writing mla-150 | microsystems-nanoengineering-nature | ||
| Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination Therapy | Monodisperse dual-compartment microdevices with pH-sensitive polymer coatings enable tunable, sequential drug release in the gastrointestinal tract, providing a promising strategy for combination therapy. | Scientific Paper | Direct-writing, MLA 100 | Advanced Therapeutics | August, 2022 | scientific-paper | direct-writing mla-100 | advanced-therapeutics | ||
| Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell Transfection | Micro-projectiles were created through maskless UV lithography, O2 plasma treatment, silicon etching, and metal cladding. These conical micro-projectiles have applications in magnetically guided cell transfection. | Application Note | Direct-writing, MLA 150 | Heidelberg Instruments, IDUN DTU | September, 2023 | application-note | direct-writing mla-150 | heidelberg-instruments idun-dtu | ||
| Spatial defects nanoengineering for bipolar conductivity in MoS2 | Controlling defects in monolayer MoS2 using thermochemical scanning probe lithography enables precise p- and n-type doping, vital for nanoelectronics, p-n junctions, and high rectification ratios. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | July, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nature-communications | ||
| Spectral tuning of Bloch Surface Wave resonances by light-controlled optical anisotropy | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanophotonics | February, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | nanophotonics | ||
| Spin-acoustic control of silicon vacancies in 4H silicon carbide | Spin-acoustic control demonstrated on a 4H silicon carbide-based bulk acoustic resonator allows frequency-tunable probing of resonances, aiding in dynamic strain distribution analysis for microelectromechanical systems. | Scientific Paper | Direct-writing, MLA 150 | nature electronics | September, 2023 | scientific-paper | direct-writing mla-150 | nature-electronics | ||
| Superconducting nonlinear transport in optically driven high-temperature K3C60 | This study investigates the electrical responses of optically driven quantum material, revealing nonlinear current-voltage characteristics indicative of photo-induced superconductivity, with potential applications in high-speed devices. | Scientific Paper | Direct-writing, µMLA | nature communications | September, 2023 | scientific-paper | direct-writing %c2%b5mla | nature-communications | ||
| Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substrates | Bottom surface-induced ferromagnetism in Bi2Se3 nanoplate devices on SiO2 and ferromagnetic insulator substrates decouples quantum Hall effects, revealing shifted half-integer QHEs in a three-channel model. | Scientific Paper | Direct-writing, μPG 101 | IOP Science | January, 2017 | scientific-paper | direct-writing %ce%bcpg-101 | iop-science | ||
| Tailored Micromagnet Sorting Gate for Simultaneous Multiple Cell Screening in Portable Magnetophoretic Cell‐On‐Chip Platforms | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | March, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| The choice of an autocorrelation length in dark‑field lung imaging | X-ray dark-field radiography (XDFR) explores lung microstructures. Porcine lungs exhibit similar extinction coefficients to PMMA spheres, emphasizing the critical autocorrelation length for effective clinical imaging. | Scientific Paper | Direct-writing, DWL 66 | scientific reports (nature) | February, 2023 | scientific-paper | direct-writing dwl-66 | scientific-reports-nature | ||
| The Lithographer – Grayscale Lithography Issue | The Rise of Grayscale Lithography: Direct-write 3D patterning scaled from µm to nm. Grayscale Lithography Issue of The Lithographer, issued January 2020. | The Lithographer | Grayscale | Heidelberg Instruments | January, 2020 | the-lithographer | grayscale | heidelberg-instruments | ||
| The Lithographer – Quantum Issue | The Quantum Issue of The Lithographer, issued Fall 2020 Topics include: Maskless Aligners, Grayscale, 2D Materials, Quantum Technology | The Lithographer | Direct-writing, Grayscale, NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | October, 2020 | the-lithographer | direct-writing grayscale nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable Metasurfaces | Metasurfaces enable versatile optical wavefront control; active phase-change materials like germanium telluride offer compact, reconfigurable near-infrared metasurfaces, avoiding typical limitations. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Optical Materials | October, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-optical-materials | ||
| Thermal nanoconversion of ferromagnetic nanoislands | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Applied Physics Letters | March, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | applied-physics-letters | ||
| Thermal scanning probe and laser lithography for patterning nanowire based quantum devices | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanotechnology | April, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanotechnology | ||
| Thermal scanning probe and laser lithography for patterning nanowire based quantum devices | The NanoFrazor combines thermal scanning probe and laser writing lithography to fabricate InSb nanowire quantum devices, achieving quasi-ballistic transport with reduced fabrication-induced disorder. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanotechnology | April, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanotechnology | ||
| Thermal scanning probe lithography | Thermal scanning probe lithography is a powerful nanofabrication method with 10 nm lateral resolution and 1 nm depth resolution, applicable in biomedicine, nanomagnetism, and nanoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature reviews methods primer | May, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | nature-reviews-methods-primer | ||
| Thermal scanning probe lithography – a review | Review of Thermal Scanning Probe Lithography (t-SPL) covering its capabilities for high-resolution nanolithography and material interactions, providing insights for nanofabrication and material science challenges. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Microsystems & Nanoengineering (nature) | April, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | heidelberg-instruments microsystems-nanoengineering-nature | ||
| Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 Nanowires | Nanowires are promising for thermoelectric applications, but the predicted performance enhancement has not been observed yet. Surface states play a crucial role in transport characteristics. | Scientific Paper | Direct-writing, μPG 101 | Advanced Energy Materials | May, 2015 | scientific-paper | direct-writing %ce%bcpg-101 | advanced-energy-materials | ||
| Thermomechanical Nanocutting of 2D Materials | A thermomechanical indentation technique enables precise cutting of monolayer 2D with 20 nm resolution, offering potential for electronic and photonic nanodevice fabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | June, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Thermomechanical Nanostraining of Two-Dimensional Materials | Nanoindentation via thermomechanical scanning probe allows precise, nanoscale strain engineering in 2D materials like MoS2 and graphene, achieving modulated bandgaps and investigating localized strain effects. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | October, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stress | Flexible thin film transistors on 50 µm thick polyimide demonstrated stable behavior under simultaneous mechanical and electrical stress up to a 4 mm bending radius. | Scientific Paper | Direct-writing, DWL 66 | Flexible and Printed Electronics | June, 2022 | scientific-paper | direct-writing dwl-66 | flexible-and-printed-electronics | ||
| Transistors platform for rapid and parallel detection of multiple pathogens by nanoscale-localized multiplexed biological activation | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | January, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | ||||
| ULTRA Semiconductor Mask Writer | A tool specifically designed to produce mature semiconductor photomasks. | Fact Sheet | ULTRA | Heidelberg Instruments | April, 2022 | fact-sheet | ultra | heidelberg-instruments | ||
| Ultra-High Resolution Pattern Transfer on NanoFrazor Lithography | High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor lithography, multi-layer stacks, and alternative strategies for superior patterns are discussed. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | July, 2023 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Ultra-thick positive photoresist layers for maskless grayscale lithography | Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental resist. | Scientific Paper | Direct-writing, DWL 66, Grayscale | Heidelberg Instruments, SPIE. Digital Library | April, 2023 | scientific-paper | direct-writing dwl-66 grayscale | heidelberg-instruments spie-digital-library | ||
| Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3 | Orthorhombic κ-Ga2O3 is a superior ultrawide bandgap material for extreme environments. We demonstrate ultrasensitive UV-C detection using Si-doped κ-Ga2O3 photodetectors. | Scientific Paper | µPG | Applied Surface Science (ScienceDirect) | January, 2023 | scientific-paper | %c2%b5pg | applied-surface-science-science-direct | ||
| Vertical micropillars arrays with high aspect ratio submicron gap by metal assisted chemical etching as active components in new sensor devices | MacEtch, a plasma-free anisotropic etching method, produces sharp vertical silicon structures without ion damage, beneficial for sensors, X-ray optics, photovoltaics, vias, and bio-interfaces. | Application Note | Direct-writing, DWL 66 | ETH Zürich, Heidelberg Instruments, Paul Scherrer Institute | July, 2024 | application-note | direct-writing dwl-66 | eth-zurich heidelberg-instruments paul-scherrer-institute | ||
| Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithography | Achieve straight, vertical sidewalls in thick negative-tone resist using focused laser beam-based direct write lithography, overcoming non-homogeneous illumination and non-sharp edges. (Possible application: MEMS) | Scientific Paper | Direct-writing, DWL 66 | Micro and Nano Engineering (ScienceDirect) | June, 2023 | scientific-paper | direct-writing dwl-66 | micro-and-nano-engineering-science-direct | ||
| Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology | First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality devices. | Scientific Paper | Direct-writing, DWL | HAL open science | October, 2017 | scientific-paper | direct-writing dwl | hal-open-science | ||
| Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetals | Optoelectronic materials converting light to bulk current. Unveiling anisotropic photothermoelectric effect driving complex photocurrent circulations via unequal crystal-axis thermopowers, visualized using microscopy and magnetic imaging. | Scientific Paper | Direct-writing, µMLA | nature physics | January, 2023 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| VPG 300 DI Maskless Stepper | Maskless direct imager for high-accuracy and high-resolution microstructures. | Fact Sheet | VPG | Heidelberg Instruments | September, 2023 | fact-sheet | vpg | heidelberg-instruments | ||
| VPG+ 200 / VPG+ 400 Volume Pattern Generator | A production tool for standard photomasks and microstructures in i-line resists. | Fact Sheet | VPG | Heidelberg Instruments | June, 2023 | fact-sheet | vpg | heidelberg-instruments | ||
| VPG+ 800 / VPG+ 1400 Volume Pattern Generator | Photomask production on large substrates, perfect for display applications. | Fact Sheet | VPG | Heidelberg Instruments | June, 2022 | fact-sheet | vpg | heidelberg-instruments | ||
| Wire suspended on a v-groove cavity to measure gas physical properties | Thermal flow sensors measure fluid flow by detecting heat dissipation from a heated wire. A novel silicon-based design compensates for fluctuations ensuring accuracy. | Application Note | Direct-writing, MLA 150 | Heidelberg Instruments, University of Twente | May, 2024 | application-note | direct-writing mla-150 | heidelberg-instruments university-of-twente | ||
| µMLA Tabletop Maskless Aligner | Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules. | Fact Sheet | µMLA | Heidelberg Instruments | April, 2024 | fact-sheet | %c2%b5mla | heidelberg-instruments |