Ultra-High Resolution Pattern Transfer on NanoFrazor® Lithography

High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor® lithography, multi-layer stacks, and alternative strategies for superior patterns are discussed.

File Type: pdf
Categories: Application Note
Tags: NanoFrazor®, Thermal Scanning Probe (t-SPL)
Author: Heidelberg Instruments Nano
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