Advancing Excellence in Microfabrication: Fabrication of 2.5D Topographies with Maskless Grayscale Lithography or Two-Photon Polymerization (TPP)
What looks like ocean waves or river pebbles is an excellent example of the grayscale capabilities of Heidelberg Instruments tools. The irregular microlens arrays seen here might be used for light diffusion, modulating a light source exactly how it is intended by the user. They perfectly illustrate the design freedom that is at your disposal with grayscale exposure. Complex designs like these are patterned with high accuracy, high throughput, 100% fill factor, and excellent surface quality.
The structures have been patterned with our DWL 66+ high-resolution direct-write pattern generator:
While our Two-Photon Polymerization tool MPO 100 unlocks genuine third-dimensional possibilities, enabling the creation of overhanging or suspended structures, it also excels in the realm of 2.5D. It proves outstanding for achieving ultra-sharp angles and delivers incredible resolution, reaching a minimum structure size of 100 nm.
The structures shown below have been fabricated with MPO 100:
Did you know? To generate 2.5D topographies, we are not limited to one technology – both Maskless Grayscale Lithography (with the DWL series or the µMLA) and Two-Photon Polymerization (with the MPO 100) are suitable options.
Contact us with your specific application and we will recommend the optimal tool for your requirements by comparing various technologies!
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