- May 31 2022 - Jun 03 2022
- all day
The 65th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication.
Visit us at booth # 22!
Talks by Heidelberg Instruments:
Thursday June 2
8:30 am 3A-4 – “Automated overlay with the NanoFrazor” by Emine Cagin,
9:00 am 3A-7 – “Heidelberg Instruments Maskless Lithography Systems for Micro-, Nano and 3D fabrication” by Niels Wijnaendts
8:50 am 3C-3 – “Markerless chip-scale fabrication of FETs by mix and match of thermal scanning probe lithography and direct laser
writing” by Jana Chaaban
11:20 am 4C-4 – “Lensless holographic endoscopes realized with direct laser writing” by Willi Mantei,
5:30 pm 6C-4 – “Controlled line edge roughness for novel nanodevice fabrication with the NanoFrazor” by Jana Chaaban