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Title Description Category Tags Publisher Published Linkhf:doc_categorieshf:doc_tagshf:doc_author
“Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023Energieführungssystem für …PressVPGWILEY Verlag5 月, 2023pressvpg-zh-hanswiley-verlag-zh-hans
3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolutionHigh-precision 3D printin …Scientific PaperTwo-Photon Polymerization (TPP)Laser Focus World12 月, 2019scientific-papertwo-photon-polymerization-zh-hanslaser-focus-world-zh-hans
A cleanroom in a gloveboxOur glovebox-integrated c …Scientific PaperμPG 101Review of Scientific Instruments7 月, 2020scientific-paper%ce%bcpg-101-zh-hansreview-of-scientific-instruments-zh-hans
A Decade of Discovery: Heidelberg Instruments’ MLA 150 Maskless Aligner Turns 10Heidelberg Instruments pr …PressMLA 150Heidelberg Instruments9 月, 2025pressmla-150-zh-hansheidelberg-instruments-zh-hans
A New Method of AFM‐Based Nanolithography Using Frequency Enhanced Electrochemical Pressure Solution EtchingThis paper investigates F …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Materials Technologies3 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-materials-technologies-zh-hans
Achieving Reliable and Ultrafast Memristors via Artificial Filaments in Silk FibroinThis paper investigates u …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Materials11 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-materials-zh-hans
Advanced MEMS/NEMS Fabrication and SensorsThis book introduces new …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)nature10 月, 2021scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnature-zh-hans
Anisotropic Particle Fabrication Using Thermal Scanning Probe LithographyNanoparticles’ optical an …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ACS Applied Materials & Interfaces4 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansacs-applied-materials-interfaces-zh-hans
Bilayer Lift-Off for NanoFrazor LithographyExplore bilayer lift-off …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano7 月, 2023application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
Biosynthesis enhancement of tropodithietic acid (TDA) antibacterial compound through biofilm formation by marine bacteria Phaeobacter inhibens on micro-structured polymer surfacesMicrofluidic channels cul …Application NoteDirect Writing, MLA 150Heidelberg Instruments, Technical University of Denmark (DTU)2 月, 2024application-notedirect-writing-zh-hans mla-150-zh-hansheidelberg-instruments-zh-hans technical-university-of-denmark-dtu-zh-hans
Broadband imaging with one planar diffractive lensAchromatic diffractive le …Scientific PaperGrayscale, μPG 101scientific reports (nature)2 月, 2018scientific-papergrayscale-zh-hans %ce%bcpg-101-zh-hansscientific-reports-nature-zh-hans
Challenges of photomask-based greyscale lithography with a highly-sensitive positive photoresist designed for >100µm deep greyscale patternsGreyscale lithography ena …Scientific PaperDWL 66+, GrayscaleSPIE. Digital Library3 月, 2025scientific-paperdwl-66-zh-hans grayscale-zh-hansspie-digital-library-zh-hans
Chemically Amplified, Dry-Develop Poly(aldehyde) PhotoresistThe effects of incorporat …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ECS Journal of Solid State Science and Technology5 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansecs-journal-of-solid-state-science-and-technology-zh-hans
Color astrophotography with a 100 mm-diameter f/2 polymer flat lensA 100 mm achromatic diffr …Scientific PaperDWL 66+Applied Physics Letters3 月, 2025scientific-paperdwl-66-zh-hansapplied-physics-letters-zh-hans
Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplificationA novel method for amplif …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Microsystems & Nanoengineering2 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansmicrosystems-nanoengineering-zh-hans
Complete logic operations in an ambipolar tellurium homojunction via non-invasive scanning probe lithographyLow-dimensional semicondu …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Device9 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansdevice-zh-hans
Cost and Time Effective Lithography of Reusable Millimeter Size Bone Tissue Replicas With Sub-15 nm Feature Size on A Biocompatible PolymerBio-tSPL enables cost-eff …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Functional Materials2 月, 2021scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-functional-materials-zh-hans
Cubic Microcontainers Improve In Situ Colonic Mucoadhesion and Absorption of Amoxicillin in RatsMicrocontainers enhance c …Scientific PaperDirect Writing, MLA 100Pharmaceutics (MDPI)4 月, 2020scientific-paperdirect-writing-zh-hans mla-100-zh-hanspharmaceutics-mdpi-zh-hans
Damage-free nanolithography enabling superior device performanceThermal scanning probe li …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano9 月, 2024application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning NanoprobeA deterministic technique …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Materials11 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-materials-zh-hans
Deterministic Deposition of Nanoparticles with Sub-10 nm ResolutionA nanofluidic slit method …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nano Letters11 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnano-letters-zh-hans
Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETsEngineered nanotopography …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)nature communications8 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnature-communications-zh-hans
Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor NanocircuitsA scalable nanolithograph …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Materials Interfaces11 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-materials-interfaces-zh-hans
Diffractive flat lens enables extreme depth-of-focus imagingMulti-level diffractive l …Scientific PaperGrayscale, μPG 101arXiv Physics/Optics10 月, 2019scientific-papergrayscale-zh-hans %ce%bcpg-101-zh-hansarxiv-physics-optics-zh-hans
Direct Heat-Induced Patterning of Inorganic NanomaterialsThe HIPIN method uses hea …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Journal of the American Chemical Society6 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansjournal-of-the-american-chemical-society-zh-hans
Direct Patterning of Metal Chalcogenide Semiconductor MaterialsA low-cost, high-resoluti …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Functional Materials5 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-functional-materials-zh-hans
Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser WriterCheap and quick fabricati …Scientific PaperDirect Writing, DWL 66+Rochester Institute of Technology5 月, 2016scientific-paperdirect-writing-zh-hans dwl-66-zh-hansrochester-institute-of-technology-zh-hans
DWL 2000 GS / DWL 4000 GS Industrial Grayscale LithographyThe most advanced industr …Data SheetDWLHeidelberg Instruments11 月, 2021data-sheetdwl-zh-hansheidelberg-instruments-zh-hans
DWL 66+ Ultimate Lithography Research ToolVersatile system for rese …Data SheetDWL 66+Heidelberg Instruments6 月, 2025data-sheetdwl-66-zh-hansheidelberg-instruments-zh-hans
Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe LithographyThermal scanning probe li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ACS Applied Materials & Interfaces9 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansacs-applied-materials-interfaces-zh-hans
Evidence for metastable photo-induced superconductivity in K3C60Intense optical pulses in …Scientific PaperDirect Writing, µMLAnature physics2 月, 2021scientific-paperdirect-writing-zh-hans %c2%b5mla-zh-hansnature-physics-zh-hans
Exploiting Thermal Scanning Probe Lithography for the Fabrication of Micro and Nano Electronic DevicesThermal scanning probe li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)9 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hans2023-international-conference-on-optical-mems-and-nanophotonics-omn-and-sbfoton-international-optics-and-photonics-conference-sbfoton-iopc-zh-hans
Exposure of sprayed photoresist on KOH etched side walls of a silicon wafer with Heidelberg Instruments DWL 66+Direct laser writing enab …Application NoteDirect Writing, DWL 66+Fraunhofer IMM, Heidelberg Instruments12 月, 2019application-notedirect-writing-zh-hans dwl-66-zh-hansfraunhofer-imm heidelberg-instruments-zh-hans
Exposure of Sprayed Photoresist on KOH Etched Side Walls of a Silicon Wafer with Heidelberg Instruments DWL 66+The DWL 66+ enables precise photoresist patterning …Application NoteDirect Writing, DWL 66+Fraunhofer IMM, Heidelberg Instruments8 月, 2025application-notedirect-writing-zh-hans dwl-66-zh-hansfraunhofer-imm-2-zh-hans heidelberg-instruments-zh-hans
Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithographyThis paper reports on the …Scientific PaperDWL, GrayscaleInternational Iberian Nanotechnology Laboratory (INL)2 月, 2022scientific-paperdwl-zh-hans grayscale-zh-hansinternational-iberian-nanotechnology-laboratory-inl-zh-hans
Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplatingSi-based device using a f …Scientific PaperDirect Writing, DWL 66+Applied Optics5 月, 2022scientific-paperdirect-writing-zh-hans dwl-66-zh-hansapplied-optics-zh-hans
Fabrication of a hybrid device for the integration of light-triggered proton pumpsA novel method for fabric …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Micro and Nano Engineering (ScienceDirect)6 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansmicro-and-nano-engineering-science-direct-zh-hans
Fabrication of a Silicon Electron Multiplier sensor using metal assisted chemical etching and its characterisationSiEM sensor utilizing met …Scientific PaperDirect Writing, DWL 66+ScienceDirect3 月, 2024scientific-paperdirect-writing-zh-hans dwl-66-zh-hanssciencedirect-zh-hans
Fabrication of refractive micro-lenses for orbital angular momentum generation by direct laser writing and nanoimprint lithographyThis application note des …Application NoteDirect Writing, DWL 66+, Nanoimprint LithographyGermanLitho, Heidelberg Instruments10 月, 2024application-notedirect-writing-zh-hans dwl-66-zh-hans nanoimprint-lithography-zh-hansgermanlitho-zh-hans heidelberg-instruments-zh-hans
Fabrication of spin-orbit logic devices by thermal nanolithographyThis work explores therma …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)4 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hans
Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug ReleaseThis application note dis …Application NoteDirect Writing, µMLAHeidelberg Instruments, IDUN DTU7 月, 2023application-notedirect-writing-zh-hans %c2%b5mla-zh-hansheidelberg-instruments-zh-hans idun-dtu-zh-hans
Far-Field and Non-Intrusive Optical Mapping of Nanoscale StructuresThis study analyzes far-f …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nanomaterials7 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnanomaterials-zh-hans
Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation StudyThis paper describes the …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nanomaterials1 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnanomaterials-zh-hans
Freeform nanostructuring of hexagonal boron nitrideHexagonal boron nitride ( …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)arXiv Physics/Optics5 月, 2021scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansarxiv-physics-optics-zh-hans
From regular periodic micro-lens arrays to randomized continuous phase profilesFor industrial illuminati …Scientific PaperDirect Writing, DWL 66+Advanced Optical Technologies2 月, 2015scientific-paperdirect-writing-zh-hans dwl-66-zh-hansadvanced-optical-technologies-zh-hans
Generating smooth potential landscapes with thermal scanning-probe lithographyScanning probe microscopy …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Journal of Physics: Materials11 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansjournal-of-physics-materials-zh-hans
Grayscale exposure challenges using direct-write laser exposure on thick positive resistPoster by Gerda Ekindorf …PosterDirect Writing, DWL 66+, GrayscaleHeidelberg Instruments5 月, 2025posterdirect-writing-zh-hans dwl-66-zh-hans grayscale-zh-hansheidelberg-instruments-zh-hans
Grayscale Exposure Challenges Using Direct-Write Laser Exposure on Thick Positive ResistPoster by Gerda Ekindorf about grayscale exposure …PosterDirect Writing, DWL, DWL 66+, GrayscaleGerda Ekindorf, Heidelberg Instruments, micro resist technology8 月, 2025posterdirect-writing-zh-hans dwl-zh-hans dwl-66-zh-hans grayscale-zh-hansgerda-ekindorf-zh-hans heidelberg-instruments-zh-hans micro-resist-technology-zh-hans
Grayscale with GenISys 3D-PECWe present the powerful s …Application NoteDirect Writing, DWL 66+, GrayscaleGenISys GmbH, Heidelberg Instruments3 月, 2023application-notedirect-writing-zh-hans dwl-66-zh-hans grayscale-zh-hansgenisys-gmbh-zh-hans heidelberg-instruments-zh-hans
Heidelberg Instruments Enhances DWL 66⁺ Lithography System, Achieving Market-Leading 200 nm Resolution and 65,536 Grayscale LevelsHeidelberg Instruments has made significant perfor …PressDWL 66+Heidelberg Instruments8 月, 2025pressdwl-66-zh-hansheidelberg-instruments-zh-hans
Heidelberg Instruments Enhances DWL 66+ Lithography System, Achieving Market-Leading 200 nm Resolution and 65,536 Grayscale LevelsHeidelberg Instruments ha …PressDirect Writing, DWL 66+, GrayscaleHeidelberg Instruments7 月, 2025pressdirect-writing-zh-hans dwl-66-zh-hans grayscale-zh-hansheidelberg-instruments-zh-hans
Heidelberg Instruments Reports Major Orders for the VPG+ 1400 FPD Volume Pattern Generator from Leading Asian Photomask ManufacturersHeidelberg Instruments ha …PressVPGHeidelberg Instruments11 月, 2024pressvpg-zh-hansheidelberg-instruments-zh-hans
High-Resolution Lift-Off Process with the NanoFrazorThis application note describes the NanoFrazorR …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano8 月, 2025application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
High-Resolution Lift-Off Process with the NanoFrazorThis application note describes the NanoFrazorR …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano8 月, 2025application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
High-resolution patterning of nanowire-based quantum devices with the NanoFrazorThe NanoFrazor offers a u …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano9 月, 2024application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
High-sensitive two-dimensional PbI2 photodetector with ultrashort channelThis study reports a PbI2 …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Frontiers of Physics7 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansfrontiers-of-physics-zh-hans
High-throughput protein nanopatterningThis work demonstrates hi …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Faraday Discussions3 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansfaraday-discussions-zh-hans
Hollow silicon-based microneedle array for dermal interstitial fluid extraction fabricated by only dry etching on wafer scaleSilicon-based microneedle …Application NoteDirect Writing, MLA 150EPFL, Heidelberg Instruments, Xsensio5 月, 2024application-notedirect-writing-zh-hans mla-150-zh-hansepfl-zh-hans heidelberg-instruments-zh-hans xsensio-zh-hans
Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprintThis paper investigates h …Scientific PaperDWL, DWL 66+Paul Scherrer Institute9 月, 2021scientific-paperdwl-zh-hans dwl-66-zh-hanspaul-scherrer-institute-zh-hans
Imaging over an unlimited bandwidth with a single diffractive surfaceWith the control of the p …Scientific PaperGrayscale, μPG 101arXiv Physics/Optics7 月, 2019scientific-papergrayscale-zh-hans %ce%bcpg-101-zh-hansarxiv-physics-optics-zh-hans
Impact of massive parallelization on two-photon absorption micro- and nanofabricationIn this paper, massive pa …Scientific PaperTwo-Photon Polymerization (TPP)SPIE. Digital Library3 月, 2020scientific-papertwo-photon-polymerization-zh-hansspie-digital-library-zh-hans
Increasing the density of passive photonic integrated circuits via nanophotonic cloakingWe utilize nanophotonic c …Scientific PaperGrayscale, μPG 101nature communications11 月, 2016scientific-papergrayscale-zh-hans %ce%bcpg-101-zh-hansnature-communications-zh-hans
Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured templateExamining single Au nanop …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Optics Express4 月, 2021scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansoptics-express-zh-hans
Inverse-designed achromatic flat lens enabling imaging across the visible & near-infrared with diameter > 3mmA flat lens, designed thr …Scientific PaperDWL 66+, GrayscaleApplied Physics Letters7 月, 2020scientific-paperdwl-66-zh-hans grayscale-zh-hansapplied-physics-letters-zh-hans
Josephson Junction Device Fabrication with the NanoFrazorHigh-resolution, damage-f …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano8 月, 2025application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
Josephson Junction Device Fabrication with the NanoFrazorHigh-resolution, damage-free NanoFrazor lithograph …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano8 月, 2025application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
Large Scale Fresnel Zone Plates On SiN-MembranesThis application note des …Application NoteDWL 66+Heidelberg Instruments, XRnanotech9 月, 2023application-notedwl-66-zh-hansheidelberg-instruments-zh-hans xrnanotech-zh-hans
Large-area, high-numerical-aperture multi-level diffractive lens via inverse designInverse design enables th …Scientific PaperDWL 66+, GrayscaleHeidelberg Instruments, Optica3 月, 2020scientific-paperdwl-66-zh-hans grayscale-zh-hansheidelberg-instruments-zh-hans optica-zh-hans
Laser Heat-Mode Lithography: Principle and MethodsThis book explains laser …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)11 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hans
Light-induced anomalous Hall effect in grapheneOptical driving in quantu …Scientific PaperDirect Writing, µMLAnature physics11 月, 2019scientific-paperdirect-writing-zh-hans %c2%b5mla-zh-hansnature-physics-zh-hans
Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar processVia-hole oxidation proces …Scientific PaperDWLHAL open science10 月, 2017scientific-paperdwl-zh-hanshal-open-science-zh-hans
LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg InstrumentsLumineq Oy, a global lead …PressDirect Writing, MLA 300Lumineq9 月, 2023pressdirect-writing-zh-hans mla-300-zh-hanslumineq-zh-hans
Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro rangeTwo-photon absorption (TP …Scientific PaperTwo-Photon Polymerization (TPP)Advanced Optical Technologies5 月, 2019scientific-papertwo-photon-polymerization-zh-hansadvanced-optical-technologies-zh-hans
Maskless Aligner Technology and the MLA 300 Drive Efficient Development and Production in MicrostructuresThis overview covers a pa …WhitepaperDirect Writing, MLA 300Heidelberg Instruments8 月, 2021whitepaperdirect-writing-zh-hans mla-300-zh-hansheidelberg-instruments-zh-hans
MEMS micro-coils for magnetic neurostimulationInnovative MEMS micro-coi …Scientific PaperMLA 150Biosensors and Bioelectronics (ScienceDirect)5 月, 2023scientific-papermla-150-zh-hansbiosensors-and-bioelectronics-sciencedirect-zh-hans
MLA 150 Advanced Maskless AlignerThe fastest maskless tool …Data SheetMLA 150Heidelberg Instruments5 月, 2025data-sheetmla-150-zh-hansheidelberg-instruments-zh-hans
MLA 300 Industrial Maskless AlignerOptimised for industrial …Data SheetMLA 300Heidelberg Instruments3 月, 2024data-sheetmla-300-zh-hansheidelberg-instruments-zh-hans
Monolayer MoS2 Nanoribbon Transistors Fabricated by Scanning Probe LithographyThis work demonstrates th …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nano Letters2 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnano-letters-zh-hans
Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and NanofabricationThis paper describes a hy …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Science1 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-science-zh-hans
Multilevel diffractive lens in the MWIR with extended depth-of-focus and wide field-of-viewCompare inverse-designed …Scientific PaperDirect Writing, DWL 66+Optics Express5 月, 2023scientific-paperdirect-writing-zh-hans dwl-66-zh-hansoptics-express-zh-hans
Nano-Ironing van der Waals Heterostructures toward Electrically Controlled Quantum DotsNanoironing van der Waals …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ACS Applied Materials & Interfaces6 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansacs-applied-materials-interfaces-zh-hans
Nano/Microscale Thermal Field Distribution: Conducting Thermal Decomposition of Pyrolytic-Type Polymer by Heated AFM ProbesThis study investigates t …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nanomaterials3 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnanomaterials-zh-hans
Nanofabrication of graphene field-effect transistors by thermal scanning probe lithographyThermal scanning probe li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)APL Materials1 月, 2021scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansapl-materials-zh-hans
Nanofluidic rocking Brownian motorsCreating precise nanoflui …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Science3 月, 2018scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansscience-zh-hans
NanoFrazorThe NanoFrazor takes nano …Data SheetNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments, Heidelberg Instruments Nano7 月, 2024data-sheetnanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-zh-hans heidelberg-instruments-nano-zh-hans
NanoFrazor Explore Nanofabrication ToolThermal scanning probe li …Data SheetNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments3 月, 2022data-sheetnanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-zh-hans
NanoFrazor for Direct Nanoscale Chemical Conversion of MaterialsChemical conversion using …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano8 月, 2024application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
NanoFrazor Scholar Nanofabrication ToolTable-top thermal scannin …Data SheetNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments3 月, 2022data-sheetnanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-zh-hans
Nanometer scale resolution, multi-channel separation of spherical particles in a rocking ratchet with increasing barrier heightsThis nanoparticle size-se …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Physical Review Applied7 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansphysical-review-applied-zh-hans
Nanopatterning of 2D materials by block copolymer self-assemblyNanopatterning using bloc …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Technical University of Denmark (DTU)8 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hanstechnical-university-of-denmark-dtu-zh-hans
Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensionsWe investigate neurite gu …Scientific PaperDWL 66+, GrayscaleNanoscale Advances7 月, 2020scientific-paperdwl-66-zh-hans grayscale-zh-hansnanoscale-advances-zh-hans
Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal DichalcogenidesNoninvasive t-SPL enables …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Engineering Materials6 月, 2025scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-engineering-materials
Normally-Off p-GaN Gate High-Electron-Mobility Transistors with the Air-Bridge Source-Connection Fabricated Using the Direct Laser Writing Grayscale Photolithography TechnologyFabrication of a p-GaN ga …Scientific PaperDirect Writing, DWL 66+Crystals4 月, 2023scientific-paperdirect-writing-zh-hans dwl-66-zh-hanscrystals-zh-hans
Novel Mixed-Dimensional hBN-Passivated Silicon Nanowire Reconfigurable Field Effect Transistors: Fabrication and CharacterizationThis work demonstrates a …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ACS Applied Materials & Interfaces8 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansacs-applied-materials-interfaces-zh-hans
Novel Tunnel Magnetoresistive Sensor Functionalities via Oblique-Incidence DepositionWe improve tunnel magneto …Scientific PaperμPG 101ACS Applied Materials & Interfaces7 月, 2021scientific-paper%ce%bcpg-101-zh-hansacs-applied-materials-interfaces-zh-hans
Optical Fourier surfacesThermal Scanning Probe Li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments, nature6 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-zh-hans nature-zh-hans
Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic AntiferromagnetsA versatile platform util …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Materials1 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-materials-zh-hans
Optimization of Laser Written Photomasks for Photonic Device ManufacturingSuccessful performance im …Scientific PaperMask-making, ULTRAHeidelberg Instruments, SPIE. Digital Library9 月, 2022scientific-papermask-making-zh-hans ultra-zh-hansheidelberg-instruments-zh-hans spie-digital-library-zh-hans
Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentrationPhotovoltaic system combi …Scientific PaperDirect Writing, μPG 101AIP Advances9 月, 2016scientific-paperdirect-writing-zh-hans %ce%bcpg-101-zh-hansaip-advances-zh-hans
Overview on Maskless Grayscale LithographyFrom design to micro stru …VideoGrayscaleHeidelberg Instruments5 月, 2023videograyscale-zh-hansheidelberg-instruments-zh-hans
Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and NanodevicesScanning probe lithograph …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Electrical Atomic Force Microscopy for Nanoelectronics8 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hanselectrical-atomic-force-microscopy-for-nanoelectronics-zh-hans
Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithographyThermal Scanning Probe Li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)nature electronics1 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnature-electronics-zh-hans
Phase masks for electron microscopy fabricated by thermal scanning probe lithographySilicon-nitride phase mas …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Micron10 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansmicron-zh-hans
Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser WritingNanomaterials derive uniq …Scientific PaperDirect Writing, DWL 66+, NanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Materials Technologies8 月, 2023scientific-paperdirect-writing-zh-hans dwl-66-zh-hans nanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-materials-technologies-zh-hans
Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2Novel atomic substitution …Scientific PaperµMLAChemistry of Materials12 月, 2021scientific-paper%c2%b5mla-zh-hanschemistry-of-materials-zh-hans
Placement of Biological Membrane Patches in a Nanofluidic Gap With Control Over Position and OrientationPurple membranes from Hal …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Materials Interfaces7 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-materials-interfaces-zh-hans
Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral ImplantsStudy of fabrication of a …Scientific PaperTwo-Photon Polymerization (TPP)International Journal of Molecular Sciences3 月, 2022scientific-papertwo-photon-polymerization-zh-hansinternational-journal-of-molecular-sciences-zh-hans
Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substratesThis review discusses and …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Micro and Nano Engineering (ScienceDirect)6 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansmicro-and-nano-engineering-science-direct-zh-hans
Rapid, Multianalyte Detection of Opioid Metabolites in WastewaterAptamer-based graphene fi …Scientific PaperDirect Writing, µMLAACS Nano2 月, 2022scientific-paperdirect-writing-zh-hans %c2%b5mla-zh-hansacs-nano-zh-hans
Recent Advances in Direct Optical Patterning of Inorganic Materials and DevicesDirect patterning technol …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Physics Research8 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-physics-research-zh-hans
Replication of a Tissue Microenvironment by Thermal Scanning Probe LithographyThermal scanning probe li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ACS Applied Materials & Interfaces5 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansacs-applied-materials-interfaces-zh-hans
Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithographyUtilizing grayscale litho …Scientific PaperDirect Writing, DWL 66+, GrayscaleApplied Physics Letters4 月, 2023scientific-paperdirect-writing-zh-hans dwl-66-zh-hans grayscale-zh-hansapplied-physics-letters-zh-hans
Scanning Probe Lithography: State-of-the-Art and Future PerspectivesScanning probe lithograph …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Micromachines1 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansmicromachines-zh-hans
Scanning Probe Thermometry to study Thermoelectricity and Dissipation at Nanoscale JunctionsThis thesis explores heat …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ETH Zürich8 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hanseth-zurich-zh-hans
Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8Low-power laser irradiati …Scientific PaperDirect Writing, µPGMicromachines4 月, 2021scientific-paperdirect-writing-zh-hans %c2%b5pg-zh-hansmicromachines-zh-hans
Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PTPMN–PT thin film disks, w …Scientific PaperDirect Writing, MLA 150Microsystems & Nanoengineering (nature)5 月, 2023scientific-paperdirect-writing-zh-hans mla-150-zh-hansmicrosystems-nanoengineering-nature-zh-hans
Semiconductor Review – Precision by Partnership in the Micro-Optics EraCover story of Semiconduc …PressSemiconductor Review5 月, 2025presssemiconductor-review
Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination TherapyMonodisperse dual-compart …Scientific PaperDirect Writing, MLA 100Advanced Therapeutics8 月, 2022scientific-paperdirect-writing-zh-hans mla-100-zh-hansadvanced-therapeutics-zh-hans
Shaping Interfaces for Manipulation and Imaging of Nano-Objects in Nanofluidic ConfinementThis study demonstrates n …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ETH Zürich1 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hanseth-zurich-zh-hans
Silicon Metalens with Subwavelength Resolution for High-Performance Flat OpticsThis application note describes a low-temperature …Application NoteDirect Writing, DWL 66+Heidelberg Instruments, Koç University11 月, 2025application-notedirect-writing-zh-hans dwl-66-zh-hansheidelberg-instruments-zh-hans koc-university
Single CdSe Quantum Dots Positioned in Nanostructured Heterogeneous Templates: Implications for High-Precision NanoassemblyThis work develops a mult …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ACS Applied Nano Materials4 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansacs-applied-nano-materials-zh-hans
Single-Step 3D Patterning of Negative Resists via Maskless AlignerDemonstrates single-step …Application NoteDirect Writing, Grayscale, MLA 150, MLA 300Heidelberg Instruments10 月, 2025application-notedirect-writing-zh-hans grayscale-zh-hans mla-150-zh-hans mla-300-zh-hansheidelberg-instruments-zh-hans
Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell TransfectionMicro-projectiles were cr …Application NoteDirect Writing, MLA 150Heidelberg Instruments, IDUN DTU9 月, 2023application-notedirect-writing-zh-hans mla-150-zh-hansheidelberg-instruments-zh-hans idun-dtu-zh-hans
Spatial defects nanoengineering for bipolar conductivity in MoS2Controlling defects in mo …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)nature communications7 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnature-communications-zh-hans
Spectral tuning of Bloch Surface Wave resonances by light-controlled optical anisotropyThis work demonstrates dy …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nanophotonics2 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnanophotonics-zh-hans
Spin-acoustic control of silicon vacancies in 4H silicon carbideSpin-acoustic control dem …Scientific PaperDirect Writing, MLA 150nature electronics9 月, 2023scientific-paperdirect-writing-zh-hans mla-150-zh-hansnature-electronics-zh-hans
Structurally and morphologically engineered chalcogenide materials for optical and photonic devicesThis paper explores advan …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Journal of Optical Microsystems1 月, 2021scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansjournal-of-optical-microsystems-zh-hans
Sub-10 nm Resolution Patterning of Pockets for Enzyme Immobilization with Independent Density and Quasi-3D Topography ControlThe study demonstrates th …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ACS Applied Materials & Interfaces10 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansacs-applied-materials-interfaces-zh-hans
Superconducting nonlinear transport in optically driven high-temperature K3C60This study investigates t …Scientific PaperDirect Writing, µMLAnature communications9 月, 2023scientific-paperdirect-writing-zh-hans %c2%b5mla-zh-hansnature-communications-zh-hans
Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substratesBottom surface-induced fe …Scientific PaperDirect Writing, μPG 101IOP Science1 月, 2017scientific-paperdirect-writing-zh-hans %ce%bcpg-101-zh-hansiop-science-zh-hans
Tailored Micromagnet Sorting Gate for Simultaneous Multiple Cell Screening in Portable Magnetophoretic Cell‐On‐Chip PlatformsNovel technique for selec …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Functional Materials3 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-functional-materials-zh-hans
The choice of an autocorrelation length in dark‑field lung imagingX-ray dark-field radiogra …Scientific PaperDirect Writing, DWL 66+scientific reports (nature)2 月, 2023scientific-paperdirect-writing-zh-hans dwl-66-zh-hansscientific-reports-nature-zh-hans
The Lithographer – Grayscale IssueGrayscale Lithography Iss …The LithographerGrayscaleHeidelberg Instruments1 月, 2020the-lithographergrayscale-zh-hansheidelberg-instruments-zh-hans
The Lithographer – Interview with Dr. Nolan LassalineFrom classical optics to …The LithographerThermal Scanning Probe (t-SPL)Heidelberg Instruments10 月, 2024the-lithographerthermal-scanning-probe-zh-hansheidelberg-instruments-zh-hans
The Lithographer – Quantum IssueQuantum Issue of The Lith …The LithographerDirect Writing, Grayscale, NanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments10 月, 2020the-lithographerdirect-writing-zh-hans grayscale-zh-hans nanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-zh-hans
The Lithographer – Surface IssueSurface Issue of The Lith …The LithographerDirect Writing, Grayscale, Thermal Scanning Probe (t-SPL)Heidelberg Instruments5 月, 2025the-lithographerdirect-writing-zh-hans grayscale-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-zh-hans
The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable MetasurfacesMetasurfaces enable versa …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Optical Materials10 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-optical-materials-zh-hans
Thermal nanoconversion of ferromagnetic nanoislandsThis paper examines the u …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Applied Physics Letters3 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansapplied-physics-letters-zh-hans
Thermal scanning probe and laser lithography for patterning nanowire based quantum devicesThe NanoFrazor combines t …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nanotechnology4 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnanotechnology-zh-hans
Thermal scanning probe lithographyThermal scanning probe li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)nature reviews methods primer5 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnature-reviews-methods-primer-zh-hans
Thermal scanning probe lithography – a reviewReview of Thermal Scannin …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments, Microsystems & Nanoengineering (nature)4 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-zh-hans microsystems-nanoengineering-nature-zh-hans
Thermal scanning probe lithography using Parylene C as thermal resistThermal scanning probe li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Micro & Nano Letters2 月, 2022scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansmicro-nano-letters-zh-hans
Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent SubstratesThermal scanning-probe li …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)ACS Applied Nano Materials10 月, 2023scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansacs-applied-nano-materials-zh-hans
Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 NanowiresNanowires are promising f …Scientific PaperDirect Writing, μPG 101Advanced Energy Materials5 月, 2015scientific-paperdirect-writing-zh-hans %ce%bcpg-101-zh-hansadvanced-energy-materials-zh-hans
Thermomechanical Nanocutting of 2D MaterialsA thermomechanical indent …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Advanced Materials6 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansadvanced-materials-zh-hans
Thermomechanical Nanostraining of Two-Dimensional MaterialsNanoindentation via therm …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nano Letters10 月, 2020scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnano-letters-zh-hans
Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stressFlexible thin film transi …Scientific PaperDirect Writing, DWL 66+Flexible and Printed Electronics6 月, 2022scientific-paperdirect-writing-zh-hans dwl-66-zh-hansflexible-and-printed-electronics-zh-hans
Tip-Based Nanomachining on Thin Films: A Mini ReviewMini review of AFM tip-ba …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Nanomanufacturing and Metrology9 月, 2021scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnanomanufacturing-and-metrology-zh-hans
Transistors platform for rapid and parallel detection of multiple pathogens by nanoscale-localized multiplexed biological activationThis paper describes a sc …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)nature1 月, 2024scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hansnature-zh-hans
Ultra compact electrochemical metallization cells offering reproducible atomic scale memristive switchingMiniaturized Ag/SiO₂/Pt m …Scientific PaperNanoFrazor, Thermal Scanning Probe (t-SPL)Communications Physics3 月, 2019scientific-papernanofrazor-zh-hans thermal-scanning-probe-zh-hanscommunications-physics-zh-hans
ULTRA Semiconductor Mask WriterA tool specifically desig …Data SheetULTRAHeidelberg Instruments11 月, 2024data-sheetultra-zh-hansheidelberg-instruments-zh-hans
Ultra-High Resolution Pattern Transfer on NanoFrazor LithographyHigh-resolution lithograp …Application NoteNanoFrazor, Thermal Scanning Probe (t-SPL)Heidelberg Instruments Nano7 月, 2023application-notenanofrazor-zh-hans thermal-scanning-probe-zh-hansheidelberg-instruments-nano-zh-hans
Ultra-thick positive photoresist layers for maskless grayscale lithographyGrayscale lithography can …Scientific PaperDirect Writing, DWL 66+, GrayscaleHeidelberg Instruments, SPIE. Digital Library4 月, 2023scientific-paperdirect-writing-zh-hans dwl-66-zh-hans grayscale-zh-hansheidelberg-instruments-zh-hans spie-digital-library-zh-hans
Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3Orthorhombic κ-Ga2O3 is a …Scientific PaperµPGApplied Surface Science (ScienceDirect)1 月, 2023scientific-paper%c2%b5pg-zh-hansapplied-surface-science-science-direct-zh-hans
Vertical micropillars arrays with high aspect ratio submicron gap by metal assisted chemical etching as active components in new sensor devicesMacEtch, a plasma-free an …Application NoteDirect Writing, DWL 66+ETH Zürich, Heidelberg Instruments, Paul Scherrer Institute7 月, 2024application-notedirect-writing-zh-hans dwl-66-zh-hanseth-zurich-zh-hans heidelberg-instruments-zh-hans paul-scherrer-institute-zh-hans
Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithographyAchieve straight, vertica …Scientific PaperDirect Writing, DWL 66+Micro and Nano Engineering (ScienceDirect)6 月, 2023scientific-paperdirect-writing-zh-hans dwl-66-zh-hansmicro-and-nano-engineering-science-direct-zh-hans
Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx TechnologyFirst experimental demons …Scientific PaperDirect Writing, DWLHAL open science10 月, 2017scientific-paperdirect-writing-zh-hans dwl-zh-hanshal-open-science-zh-hans
Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetalsOptoelectronic materials …Scientific PaperDirect Writing, µMLAnature physics1 月, 2023scientific-paperdirect-writing-zh-hans %c2%b5mla-zh-hansnature-physics-zh-hans
VPG 300 DI Maskless StepperMaskless direct imager fo …Data SheetVPGHeidelberg Instruments8 月, 2025data-sheetvpg-zh-hansheidelberg-instruments-zh-hans
VPG+ 1400 FPD / VPG+ 1850 FPD Volume Pattern GeneratorsHigh-volume photomask pro …Data SheetVPGHeidelberg Instruments8 月, 2025data-sheetvpg-zh-hansheidelberg-instruments-zh-hans
VPG+ 200 / VPG+ 400 Volume Pattern GeneratorA production tool for sta …Data SheetVPGHeidelberg Instruments6 月, 2023data-sheetvpg-zh-hansheidelberg-instruments-zh-hans
Wire suspended on a v-groove cavity to measure gas physical propertiesThermal flow sensors meas …Application NoteDirect Writing, MLA 150Heidelberg Instruments, University of Twente5 月, 2024application-notedirect-writing-zh-hans mla-150-zh-hansheidelberg-instruments-zh-hans university-of-twente-zh-hans
µMLA Tabletop Maskless AlignerConfigurable and compact …Data SheetµMLAHeidelberg Instruments4 月, 2024data-sheet%c2%b5mla-zh-hansheidelberg-instruments-zh-hans
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