微光学和光子学

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反光镜、散光镜和微透镜的精湛工艺

  • Description

  • 由于智能手机和平板电脑对先进微型光学器件的需求日益增长，微型透镜阵列和复杂菲涅尔透镜成为紧凑型相机光学器件的关键部件。这些微型透镜可用于波前传感器、光纤耦合或均匀化光源等多种应用。这些微型透镜的生产首先要使用灰度光刻技术生成模具，然后通过 LIGA 复制模具以创建金属垫片，用作成型、压印或热压印的主工具。灰度光刻技术还可用于制造微棱镜、波导、炽热光栅、CGH（计算机生成全息图）和特殊防伪标签等。直接写入光刻技术可精确制造 VLS（可变行距）和标准光栅。DWL 系列包括各种高性能灰度光刻系统，如用于研发的DWL 66+和用于高端需求的DWL 2000 GS / DWL 4000 GS。

    NanoFrazor是一种功能强大的工具，可用于各种微型和纳米光学应用。它的高分辨率和灰度光刻功能使其成为制造衍射光栅、光学傅里叶表面、相位板和更复杂的精细调整光学元件等纳米光学结构的理想工具。

  • Requirements

  • Solutions

由于智能手机和平板电脑对先进微型光学器件的需求日益增长，微型透镜阵列和复杂菲涅尔透镜成为紧凑型相机光学器件的关键部件。这些微型透镜可用于波前传感器、光纤耦合或均匀化光源等多种应用。这些微型透镜的生产首先要使用灰度光刻技术生成模具，然后通过 LIGA 复制模具以创建金属垫片，用作成型、压印或热压印的主工具。灰度光刻技术还可用于制造微棱镜、波导、炽热光栅、CGH（计算机生成全息图）和特殊防伪标签等。直接写入光刻技术可精确制造 VLS（可变行距）和标准光栅。DWL 系列包括各种高性能灰度光刻系统，如用于研发的DWL 66+和用于高端需求的DWL 2000 GS / DWL 4000 GS。

NanoFrazor是一种功能强大的工具，可用于各种微型和纳米光学应用。它的高分辨率和灰度光刻功能使其成为制造衍射光栅、光学傅里叶表面、相位板和更复杂的精细调整光学元件等纳米光学结构的理想工具。

Application images

Irregular Microlens Array - Concave - Pseudo-square arrangement of lenslet. ~18µm (Average side) and ~6µm depth in AZ4562.
Irregular Microlens Array - Concave - Pseudo-square arrangement of lenslet. ~18µm (Average side) and ~6µm depth in AZ4562.
DWL 66+: Confocal microscope image of a convex fresnel lens (diameter 506 µm, height 10 µm).
DWL 66+: Confocal microscope image of a convex fresnel lens (diameter 506 µm, height 10 µm).
Nano structured phase masks made of Silicon-nitride using thermal scanning probe lithography combined with etching. This phase mask offers the intriguiging possibilities in electron-beam shaping. (NanoFrazor)
Nano structured phase masks made of Silicon-nitride using thermal scanning probe lithography combined with etching. This phase mask offers the intriguiging possibilities in electron-beam shaping. (NanoFrazor)
DWL 66+: Micrograph showing the image of a Fresnel lens (diameter 506 µm, height 10 µm).
DWL 66+: Micrograph showing the image of a Fresnel lens (diameter 506 µm, height 10 µm).
DWL 66+: Confocal microscope image of a micro lens array in a honeycomb arrangement (hexagon radius 10 µm, height 2.7 µm).
DWL 66+: Confocal microscope image of a micro lens array in a honeycomb arrangement (hexagon radius 10 µm, height 2.7 µm).
Half of a Concave Fresnel Lens,also showing its profile, Radius of curvature 840 µm, Height 10 µm, effective diameter 1mm. (DWL66+ WM III)
Half of a Concave Fresnel Lens,also showing its profile, Radius of curvature 840 µm, Height 10 µm, effective diameter 1mm. (DWL66+ WM III)
DWL 66+: Confocal microscope image of a pyramid (pitch 47 µm, height 5.8 µm).
DWL 66+: Confocal microscope image of a pyramid (pitch 47 µm, height 5.8 µm).
DOE square size 1µm 4steps 800nm total height View 70° x5000 (DWL66+ HiRes) Multi-level Diffractive Optical Elements (DOEs) are valuable devices commonly used for light modulation. By changing the phase profile of a laser beam, DOEs can split and shape the beam in well-defined ways, enabling the efficient generation of beam arrays or complex light patterns.
DOE square size 1µm 4steps 800nm total height View 70° x5000 (DWL66+ HiRes) Multi-level Diffractive Optical Elements (DOEs) are valuable devices commonly used for light modulation. By changing the phase profile of a laser beam, DOEs can split and shape the beam in well-defined ways, enabling the efficient generation of beam arrays or complex light patterns.
Photonic sieve made with a NanoFrazor. A Photonic Sieve focuses light through diffraction and interference using a flat material filled with pinholes, achieving sharper focus than a Fresnel Zone plate.
Photonic sieve made with a NanoFrazor. A Photonic Sieve focuses light through diffraction and interference using a flat material filled with pinholes, achieving sharper focus than a Fresnel Zone plate.
DWL 66+: Confocal microscope image of the central part of a concave fresnel lens (diameter of the central part: 120 µm, height 11 µm).
DWL 66+: Confocal microscope image of the central part of a concave fresnel lens (diameter of the central part: 120 µm, height 11 µm).
Tailored diffusers and reflectors have applications for example in light sources and illumination, for example backlight units in LCD displays. This example shows a retro-reflector structure. (Courtesy of karmic.ch)
Tailored diffusers and reflectors have applications for example in light sources and illumination, for example backlight units in LCD displays. This example shows a retro-reflector structure. (Courtesy of karmic.ch)
1100nm pitch grating etched in Si and coated with Al - integrated nanostructured optical reflection gratings on atom chips for quantum applications like gravimeters. (Courtesy of Sascha de Wall, IMPT)
1100nm pitch grating etched in Si and coated with Al - integrated nanostructured optical reflection gratings on atom chips for quantum applications like gravimeters. (Courtesy of Sascha de Wall, IMPT)
Concave Micro lenses made in ma-P1275G. Microlenses and microlens arrays are key components in modern-day micro-optics. They are used in wavefront sensors, for fiber coupling, or for homogenizing light sources.
Concave Micro lenses made in ma-P1275G. Microlenses and microlens arrays are key components in modern-day micro-optics. They are used in wavefront sensors, for fiber coupling, or for homogenizing light sources.
Microlenses written in 15 μm thick AZ4562, with a pitch of 30 μm and a radius of curvature of 16 μm.
Microlenses written in 15 μm thick AZ4562, with a pitch of 30 μm and a radius of curvature of 16 μm.
This example shows a compound structure – a complex structure made of micro- and nanostructures. The insect eye, for instance (in particular the moth- or fly-eye), consists of a series of compound structures. (Courtesy of ShenZhen Nahum-Eli Optical Technology Inc.)
This example shows a compound structure – a complex structure made of micro- and nanostructures. The insect eye, for instance (in particular the moth- or fly-eye), consists of a series of compound structures. (Courtesy of ShenZhen Nahum-Eli Optical Technology Inc.)
Parts of a waveguide (1 µm wide) made with a VPG 300 DI. Waveguides can guide electromagnetic waves, essential in applications like optical communication and sensors. (Courtesy of IMS Chips)
Parts of a waveguide (1 µm wide) made with a VPG 300 DI. Waveguides can guide electromagnetic waves, essential in applications like optical communication and sensors. (Courtesy of IMS Chips)
A ring resonator consists of a closed loop or ring made from a waveguide. Light is coupled into and out of the ring through waveguide arms. The geometry of the ring allows it to support resonant modes. Here the lines are 2µm wide, the distance between the line and the ring is 500 nm.
A ring resonator consists of a closed loop or ring made from a waveguide. Light is coupled into and out of the ring through waveguide arms. The geometry of the ring allows it to support resonant modes. Here the lines are 2µm wide, the distance between the line and the ring is 500 nm.

suitable Systems

DWL 66+

DWL 66+

  • 直接写入激光光刻系统

我们最通用的研究和原型制作系统，具有可变分辨率和多种选项。

DWL 4000 GS 激光光刻系统

DWL 2000 GS / DWL 4000 GS

  • 直接写入激光光刻系统

市场上最先进的工业灰度光刻工具。

NanoFrazor 台式

纳米光栅

  • 热扫描探针光刻系统

多功能模块化 工具 组合热扫描探头 光刻, 直接激光升华和 先进的 自动化用于 尖端研发。研发。

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