For decades, photolithography with mask aligners has been the cornerstone of microfabrication. But what if there was a faster, more flexible way to create the intricate patterns needed for miniaturized devices? Discover Maskless Lithography or Direct Writing – a powerful technique revolutionizing the R&D and rapid prototyping landscape. It allows you to bypass the long process of ordering a photomask and enables you to transfer the design directly to the wafer.
Why ditch the masks?
Traditional photolithography relies on custom-designed masks that are ideal for high-volume sub-micron manufacturing, particularly in industries like semiconductor production. Our ULTRA and VPG+ excel in producing high-quality masks tailored for such large-scale operations. However, for low-volume production or research and development facilities, these masks come with drawbacks:
- Costly: Masks can be expensive, especially for complex designs or small batches. Besides their production, their storage and cleaning also generate additional costs.
- Time consuming: Mask fabrication adds significant lead time to the development cycle.
- Inflexibility: Design changes necessitate new masks, hindering rapid iteration.
Here’s where Direct Laser Writing shines:
- Eliminating masks translates to faster design iterations and quicker prototyping cycles.
- Writing patterns directly on the substrate enables rapid exploration of intricate designs and on-the-fly modifications.
- Direct Writing requires fewer steps and less equipment compared to traditional mask-based photolithography.
- Alignment with pre-existing structures is fast and intuitive facilitating the fabrication of multi-layer devices.
- Ideal for low-volume, high-complexity projects where mask costs become prohibitive.
- With our real time autofocus, the exposure remains in focus across the entire substrate, even on corrugated surfaces.
Leveraging 40 years of experience, Heidelberg Instruments offers a comprehensive portfolio of Maskless Aligners and Direct Write Lithography systems, catering to the diverse needs of various application areas:
- µMLA: Configurable and compact tabletop Maskless Aligner with raster scan and vector exposure modules, ideal for virtually any academic application that requires microstructure fabrication.
- MLA 150: The Maskless Aligner for multi-user facilities, R&D, rapid prototyping, and small production volumes, designed for binary lithography.
- MLA 300: Achieves the highest optical quality and precision while providing high throughput, a simplified workflow, and integration with manufacturing execution systems (MES).
- DWL 66+: Versatile allrounder for research and prototyping with variable resolution and a large selection of modules for easy customization.
- DWL 2000 GS / DWL 4000 GS: Industrial-level Grayscale Lithography tool designed for high-throughput patterning of masks and wafers, particularly suitable for wafer-level micro-optics.
- VPG 300 DI: Volume Pattern Generator specially designed for direct writing high-resolution microstructures in i-line resists, replacing traditional steppers.
The Heidelberg Instruments systems and technology pool comprises high-precision Maskless Aligner (MLA) and Laser Lithography systems for Direct Writing of 2D, 2.5D and 3D microstructures to mask-making, and systems based on Thermal Scanning Probe Lithography (t-SPL) for the advanced nanopatterning. 3D laser lithography systems based on Two-Photon Polymerization (TPP) technology close the gap between conventional laser lithography – the basis of Heidelberg Instruments’ strong core business – and the Thermal Scanning Probe Lithography (t-SPL) for nanopatterning.
Maskless Lithography as the state-of-the-art, high-precision, highly flexible technology is ideal for use in both R&D as well as environments where rapid-prototyping of feature sizes greater than 1 µm are required. The maskless lithography technique enables you to transfer the design directly to the wafer without the need for a photomask.
In maskless lithography the pattern is exposed directly onto the substrate surface with the help of a spatial light modulator, or SLM, which serves as a “dynamic photomask”.
If you would like to know more, our team is on-hand to assist you with any questions you might have. Click the button below to contact us directly.
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