High aspect ratio lithography

The study of microfluidics may either serve to replicate real-world reactions or enable detection of smallest amounts of substances. A prime example is the “lab-on-a-chip”: Chemical or biological reactions are “miniaturized”, thereby enhancing efficiency and enabling application in constricted conditions. Some microfluidic chips serve as sensors, while so-called “bio-chips” are used for protein or DNA analysis or allow for diagnostics of microscopic blood samples.

Surface smoothness

Large structures

High aspect ratio

Straight walls

High resolution

Pattern small holes, narrow channels

Grayscale lithography

Create 2.5D topography, e.g., tapered channels

High aspect ratio

Channels with vertical side walls

No undercut

The structure can be used for replication

Application images


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