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Direct Write Laser Lithography System
DWL 2000 GS / DWL 4000 GS Laser Lithography Systems
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Direct Write Laser Lithography System
DWL 66⁺ Laser Lithography System
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Maskless Aligner
MLA 150 Maskless Aligner
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Maskless Aligner
MLA 300 Maskless Aligner
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Thermal Scanning Probe Lithography System
NanoFrazor Nanolithography Tool
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Laser Mask Writer
ULTRA Semiconductor Mask Writer
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Maskless Stepper
VPG 300 DI Maskless Stepper
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Volume Pattern Generator
VPG⁺ 1400 FPD / VPG⁺ 1850 FPD Volume Pattern Generators
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Volume Pattern Generator
VPG⁺ 200 / VPG⁺ 400 / VPG⁺ 800 Volume Pattern Generators
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Maskless Aligner
µMLA Maskless Aligner
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APPLICATIONS

1D & 2D Materials
Advanced Packaging
Biotechnology and Medical Engineering
Displays
High-Security Printing
Materials Science
MEMS
Microelectronics and Nanoelectronics
Microfluidics and Nanofluidics
Micro-Optics and Photonics
Nanoimprint Templates
Photomasks
Quantum Devices
Semiconductors
Sensors

1D & 2D Materials
Advanced Packaging
Biotechnology and Medical Engineering
Displays
High-Security Printing
Materials Science
MEMS
Microelectronics and Nanoelectronics
Microfluidics and Nanofluidics
Micro-Optics and Photonics
Nanoimprint Templates
Photomasks
Quantum Devices
Semiconductors
Sensors

CORE TECHNOLOGIES

Maskless Laser Lithography
Thermal Scanning Probe Lithography

Maskless Laser Lithography
Thermal Scanning Probe Lithography

KEY FEATURES

Accurate Pattern Placement
Grayscale Lithography
High Aspect Ratio
High & Ultra-High Resolution
In-situ Inspection & Metrology
Non-invasive Nanolithography
Small & Unconventional Substrates

Accurate Pattern Placement
Grayscale Lithography
High Aspect Ratio
High & Ultra-High Resolution
In-situ Inspection & Metrology
Non-invasive Nanolithography
Small & Unconventional Substrates

PRODUCTS

μMLA
MLA 150
DWL 66⁺
NanoFrazor
MLA 300
DWL 2000 GS / DWL 4000 GS
VPG⁺200 / VPG⁺400 / VPG⁺800
VPG⁺ 1400 FPD / VPG⁺ 1850 FPD
VPG 300 DI
ULTRA

μMLA
MLA 150
DWL 66⁺
NanoFrazor
MLA 300
DWL 2000 GS / DWL 4000 GS
VPG⁺200 / VPG⁺400 / VPG⁺800
VPG⁺ 1400 FPD / VPG⁺ 1850 FPD
VPG 300 DI
ULTRA

LIBRARY

SERVICE

Service & Support
Contact Service
Service Locations

Service & Support
Contact Service
Service Locations

NEWS & EVENTS

Press Releases
Blog
Events
Application Image Gallery on Advanced Micro- & Nanofabrication

Press Releases
Blog
Events
Application Image Gallery on Advanced Micro- & Nanofabrication

COMPANY

About Us
The Lithographer
History
Careers
Press Releases
Network Memberships
Locations
Contact Sales

About Us
The Lithographer
History
Careers
Press Releases
Network Memberships
Locations
Contact Sales

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Disclaimer: Translations were created with the help of AI. Heidelberg Instruments does not guarantee the completeness and correctness of the translations.

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