NanoFrazor® technology: Enabling advanced nanodevices and unique applications
The NanoFrazor® uses thermal scanning probe lithography (t-SPL) for the simultaneous patterning and inspection of nanoscale structures, as well as direct laser sublimation (DLS) for mix & match lithography on a surface, namely on thermal resists. The NanoFrazor® technology has proven its value as an enabler of novel ultra-high resolution nanodevices, as well as an asset for improving the performance of existing device concepts. In doing so, the NanoFrazor® is establishing itself as a mature direct-write nanolithography tool, as well as a complementary extension to other maskless nanolithography methods such as electron beam lithography (EBL).
The range of applications for t-SPL is very broad, spanning from ultra-high resolution 2D and 3D patterning, to chemical and physical modification of matter at the nanoscale. Nanometer-precise markerless overlay and non-invasiveness to sensitive materials are among the key strengths of the technology. The overlay is shown to work with sub-5nm precision even for nanowires and 2D material flakes that are buried under resist layers, thanks to the highly sensitive in-situ reading capability of the NanoFrazor® tool. These unique capabilities allow for the realization of novel nanodevices with emerging 1D and 2D materials, and for nanometer-precise 3D (grayscale) surfaces in optics and fluidics.
In this live webinar, Jana will explain the working principle of the NanoFrazor® lithography, and highlight key applications that utilize the unique patterning capabilities of the NanoFrazor® technology.
Date: Tuesday, April 19, 2022
Time: 9:15 am CEST
Duration: approx. 45 minutes
Presenter: Dr. Jana Chaaban, Technology and Applications Engineer at Heidelberg Instruments Nano
There will also be a Q&A session at the end of the webinar to address any questions you may have.
About Dr. Jana Chaaban:
Jana Chaaban majored in Physics during her undergraduate studies at McGill University in Montreal, before moving to Switzerland to further her education. At ETH Zurich, she received a M.Sc. in Mechanical Engineering with a focus on micro- and nanosystems. She conducted her Master thesis at the IBM Research laboratory in Zurich, where she also performed most of her subsequent PhD research and work. During her PhD, much of her research focused on additive nanomanufacturing through electrohydrodynamic nanoprinting, as well as microfabrication processes at the IBM Research clean room laboratory, and more fundamental research on materials, surfaces, and droplet microfluidics. In 2020, Jana received her PhD from ETH Zurich and then joined the Process and Applications Laboratory (PAL) team at Heidelberg Instruments Nano.
To sign up for the webinar, please click on the registration button above, complete the form on the GoTo Webinar registration page and make sure to select the correct webinar time from the dropdown. You will also receive a confirmation and reminder emails from GoTo Webinar with instructions and the link to join the webinar.
We look forward to seeing you online on April 19th!