VPG+ 1400 FPD

Designed for photomask production on large substrates in display applications

  • Product Description

  • Breakthrough efficiency meets superior quality with the VPG+ 1400 FPD, the ultimate Volume Pattern Generator for high-volume display production used by photomask manufacturers around the world. It is our largest system specifically designed for the display industry and tailored for the high-throughput patterning of large-area photomasks (1.4 m). It is optimal for Flat Panel Display (FPD) applications, specifically designed to handle large format substrates, making it an ideal solution for manufacturers looking to excel in the display industry.

    The VPG+ 1400 FPD is designed for high-quality and fast exposures with extremely accurate alignment. It features a differential interferometer with a resolution down to 1.2 nm. Mura optimization ensures excellent CD uniformity and resolution, while the closed-loop environmental chamber complies with the most stringent requirements for advanced photomask fabrication.

    Enhance Your FPD Manufacturing

    • Flawless Displays: The VPG+ 1400 FPD is your one-stop shop for creating high-resolution photomasks used in the production of key display components like TFT arrays, color filters, and Indium Tin Oxide (ITO) electrodes. Achieve the precision and quality your next-generation displays demand.
    • Outstanding Throughput: The VPG+ 1400 FPD’s exceptional throughput capabilities ensure rapid mask production, allowing you to meet the demands of high-volume display manufacturing and optimize your production line.
    • Highest Precision & Reliability: The VPG+ 1400 FPD delivers the precision and resolution needed for creating intricate patterns on large format masks, guaranteeing flawless transfer of your designs. It runs reliably 24/7 for predictable delivery times.
    • Advanced Metrology: Included metrology package and tool matching functions for precise 2nd layer alignment capabilities used in large area greytone mask production.

    Unleash Peak Performance

    • The ultra-high-speed exposure engine and high-power DPSS laser dramatically reduce writing times, enabling you to produce masks faster and maximize your production output.
    • The VPG+ 1400 FPD boasts excellent sub-µm resolution and image quality, guaranteeing the accurate transfer of your design patterns onto the photomask for flawless displays.
    • The automatic calibration tool streamlines your workflow by ensuring superb registration and positioning of written structures, saving you time and minimizing errors.
    • The large-format precision stage with flexible vacuum layout accommodates substrates up to 1400 mm, making it ideal for handling the demands of mid and large display photomasks.
    • The closed-loop environmental chamber maintains optimal conditions throughout the process, ensuring consistent mask quality, run after run.
    • The VPG+ 1400 FPD supports all industrial data formats, allowing for smooth integration with your existing design and fabrication workflows.

    Invest in the Future of Display Technology

    The VPG+ 1400 FPD is an investment in the future of your display production capabilities. By implementing it in your production, you can achieve:

    • Exceptional mask quality for flawless display performance.
    • High throughput for high-volume display production and increased profitability.
    • Reduced production costs at a highly economic tool price.
    • Efficient tool operation and reliable performance.
    • Future-proof technology that scales with the demands of next-generation displays.

    Complement your display production with a highly economic tool. Contact us today to learn more about the VPG+ 1400 FPD and how it can revolutionize your manufacturing process.

    Breakthrough efficiency meets superior quality with the VPG+ 1400 FPD, the ultimate Volume Pattern Generator for high-volume display production used by photomask manufacturers around the world. It is our largest system specifically designed for the display industry and tailored for the high-throughput patterning of large-area photomasks (1.4 m). It is optimal for Flat Panel Display (FPD) applications, specifically designed to handle large format substrates, making it an ideal solution for manufacturers looking to excel in the display industry.

    The VPG+ 1400 FPD is designed for high-quality and fast exposures with extremely accurate alignment. It features a differential interferometer with a resolution down to 1.2 nm. Mura optimization ensures excellent CD uniformity and resolution, while the closed-loop environmental chamber complies with the most stringent requirements for advanced photomask fabrication.

    Enhance Your FPD Manufacturing

    • Flawless Displays: The VPG+ 1400 FPD is your one-stop shop for creating high-resolution photomasks used in the production of key display components like TFT arrays, color filters, and Indium Tin Oxide (ITO) electrodes. Achieve the precision and quality your next-generation displays demand.
    • Outstanding Throughput: The VPG+ 1400 FPD’s exceptional throughput capabilities ensure rapid mask production, allowing you to meet the demands of high-volume display manufacturing and optimize your production line.
    • Highest Precision & Reliability: The VPG+ 1400 FPD delivers the precision and resolution needed for creating intricate patterns on large format masks, guaranteeing flawless transfer of your designs. It runs reliably 24/7 for predictable delivery times.
    • Advanced Metrology: Included metrology package and tool matching functions for precise 2nd layer alignment capabilities used in large area greytone mask production.

    Unleash Peak Performance

    • The ultra-high-speed exposure engine and high-power DPSS laser dramatically reduce writing times, enabling you to produce masks faster and maximize your production output.
    • The VPG+ 1400 FPD boasts excellent sub-µm resolution and image quality, guaranteeing the accurate transfer of your design patterns onto the photomask for flawless displays.
    • The automatic calibration tool streamlines your workflow by ensuring superb registration and positioning of written structures, saving you time and minimizing errors.
    • The large-format precision stage with flexible vacuum layout accommodates substrates up to 1400 mm, making it ideal for handling the demands of mid and large display photomasks.
    • The closed-loop environmental chamber maintains optimal conditions throughout the process, ensuring consistent mask quality, run after run.
    • The VPG+ 1400 FPD supports all industrial data formats, allowing for smooth integration with your existing design and fabrication workflows.

    Invest in the Future of Display Technology

    The VPG+ 1400 FPD is an investment in the future of your display production capabilities. By implementing it in your production, you can achieve:

    • Exceptional mask quality for flawless display performance.
    • High throughput for high-volume display production and increased profitability.
    • Reduced production costs at a highly economic tool price.
    • Efficient tool operation and reliable performance.
    • Future-proof technology that scales with the demands of next-generation displays.

    Complement your display production with a highly economic tool. Contact us today to learn more about the VPG+ 1400 FPD and how it can revolutionize your manufacturing process.

  • Product Highlights

  • Exposure Quality

    Edge roughness 20 nm; local CD uniformity 50 nm; address grid 8 nm; Mura correction, edge detection.

    Writing Stability

    Highly stable climate chamber, real-time climate compensations and software corrections for any environmental variations.

    Automated Alignment

    Metrology package with automated global and field-by-field alignment with distortion correction. Sophisticated 2D correction matrix for stage position calibration and tool matching.

    Scalability

    Scale easily for all sizes from small and mid-size up to G8 display photomasks.

    Mura Control

    Pitch and panel pitch optimization.
  • Available Modules

  • Photomask Handling

    Semi-automatic substrate loading.

    Customization

    Special substrates, loader, or mask handling on request.

Breakthrough efficiency meets superior quality with the VPG+ 1400 FPD, the ultimate Volume Pattern Generator for high-volume display production used by photomask manufacturers around the world. It is our largest system specifically designed for the display industry and tailored for the high-throughput patterning of large-area photomasks (1.4 m). It is optimal for Flat Panel Display (FPD) applications, specifically designed to handle large format substrates, making it an ideal solution for manufacturers looking to excel in the display industry.

The VPG+ 1400 FPD is designed for high-quality and fast exposures with extremely accurate alignment. It features a differential interferometer with a resolution down to 1.2 nm. Mura optimization ensures excellent CD uniformity and resolution, while the closed-loop environmental chamber complies with the most stringent requirements for advanced photomask fabrication.

Enhance Your FPD Manufacturing

  • Flawless Displays: The VPG+ 1400 FPD is your one-stop shop for creating high-resolution photomasks used in the production of key display components like TFT arrays, color filters, and Indium Tin Oxide (ITO) electrodes. Achieve the precision and quality your next-generation displays demand.
  • Outstanding Throughput: The VPG+ 1400 FPD’s exceptional throughput capabilities ensure rapid mask production, allowing you to meet the demands of high-volume display manufacturing and optimize your production line.
  • Highest Precision & Reliability: The VPG+ 1400 FPD delivers the precision and resolution needed for creating intricate patterns on large format masks, guaranteeing flawless transfer of your designs. It runs reliably 24/7 for predictable delivery times.
  • Advanced Metrology: Included metrology package and tool matching functions for precise 2nd layer alignment capabilities used in large area greytone mask production.

Unleash Peak Performance

  • The ultra-high-speed exposure engine and high-power DPSS laser dramatically reduce writing times, enabling you to produce masks faster and maximize your production output.
  • The VPG+ 1400 FPD boasts excellent sub-µm resolution and image quality, guaranteeing the accurate transfer of your design patterns onto the photomask for flawless displays.
  • The automatic calibration tool streamlines your workflow by ensuring superb registration and positioning of written structures, saving you time and minimizing errors.
  • The large-format precision stage with flexible vacuum layout accommodates substrates up to 1400 mm, making it ideal for handling the demands of mid and large display photomasks.
  • The closed-loop environmental chamber maintains optimal conditions throughout the process, ensuring consistent mask quality, run after run.
  • The VPG+ 1400 FPD supports all industrial data formats, allowing for smooth integration with your existing design and fabrication workflows.

Invest in the Future of Display Technology

The VPG+ 1400 FPD is an investment in the future of your display production capabilities. By implementing it in your production, you can achieve:

  • Exceptional mask quality for flawless display performance.
  • High throughput for high-volume display production and increased profitability.
  • Reduced production costs at a highly economic tool price.
  • Efficient tool operation and reliable performance.
  • Future-proof technology that scales with the demands of next-generation displays.

Complement your display production with a highly economic tool. Contact us today to learn more about the VPG+ 1400 FPD and how it can revolutionize your manufacturing process.

Breakthrough efficiency meets superior quality with the VPG+ 1400 FPD, the ultimate Volume Pattern Generator for high-volume display production used by photomask manufacturers around the world. It is our largest system specifically designed for the display industry and tailored for the high-throughput patterning of large-area photomasks (1.4 m). It is optimal for Flat Panel Display (FPD) applications, specifically designed to handle large format substrates, making it an ideal solution for manufacturers looking to excel in the display industry.

The VPG+ 1400 FPD is designed for high-quality and fast exposures with extremely accurate alignment. It features a differential interferometer with a resolution down to 1.2 nm. Mura optimization ensures excellent CD uniformity and resolution, while the closed-loop environmental chamber complies with the most stringent requirements for advanced photomask fabrication.

Enhance Your FPD Manufacturing

  • Flawless Displays: The VPG+ 1400 FPD is your one-stop shop for creating high-resolution photomasks used in the production of key display components like TFT arrays, color filters, and Indium Tin Oxide (ITO) electrodes. Achieve the precision and quality your next-generation displays demand.
  • Outstanding Throughput: The VPG+ 1400 FPD’s exceptional throughput capabilities ensure rapid mask production, allowing you to meet the demands of high-volume display manufacturing and optimize your production line.
  • Highest Precision & Reliability: The VPG+ 1400 FPD delivers the precision and resolution needed for creating intricate patterns on large format masks, guaranteeing flawless transfer of your designs. It runs reliably 24/7 for predictable delivery times.
  • Advanced Metrology: Included metrology package and tool matching functions for precise 2nd layer alignment capabilities used in large area greytone mask production.

Unleash Peak Performance

  • The ultra-high-speed exposure engine and high-power DPSS laser dramatically reduce writing times, enabling you to produce masks faster and maximize your production output.
  • The VPG+ 1400 FPD boasts excellent sub-µm resolution and image quality, guaranteeing the accurate transfer of your design patterns onto the photomask for flawless displays.
  • The automatic calibration tool streamlines your workflow by ensuring superb registration and positioning of written structures, saving you time and minimizing errors.
  • The large-format precision stage with flexible vacuum layout accommodates substrates up to 1400 mm, making it ideal for handling the demands of mid and large display photomasks.
  • The closed-loop environmental chamber maintains optimal conditions throughout the process, ensuring consistent mask quality, run after run.
  • The VPG+ 1400 FPD supports all industrial data formats, allowing for smooth integration with your existing design and fabrication workflows.

Invest in the Future of Display Technology

The VPG+ 1400 FPD is an investment in the future of your display production capabilities. By implementing it in your production, you can achieve:

  • Exceptional mask quality for flawless display performance.
  • High throughput for high-volume display production and increased profitability.
  • Reduced production costs at a highly economic tool price.
  • Efficient tool operation and reliable performance.
  • Future-proof technology that scales with the demands of next-generation displays.

Complement your display production with a highly economic tool. Contact us today to learn more about the VPG+ 1400 FPD and how it can revolutionize your manufacturing process.

Exposure Quality

Edge roughness 20 nm; local CD uniformity 50 nm; address grid 8 nm; Mura correction, edge detection.

Writing Stability

Highly stable climate chamber, real-time climate compensations and software corrections for any environmental variations.

Automated Alignment

Metrology package with automated global and field-by-field alignment with distortion correction. Sophisticated 2D correction matrix for stage position calibration and tool matching.

Scalability

Scale easily for all sizes from small and mid-size up to G8 display photomasks.

Mura Control

Pitch and panel pitch optimization.

Photomask Handling

Semi-automatic substrate loading.

Customization

Special substrates, loader, or mask handling on request.

Customer applications

Why customers choose our systems

"The VPG allows us to realize copper lines and chip-to-chip interconnects with a size down to 1 µm, which is three times smaller in feature size than when using the conventional mask aligner process."

Markus Wöhrmann
Group leader Lithography and Thin Film Polymers for Wafer Level Packaging
Fraunhofer Institute for Microintegration and Reliability
Berlin, Germany

"At TNO @ Holst Centre, the Heidelberg Instruments VPG is instrumental in our Research and Development effort by providing the ability to cycle quickly through design iterations and developing and optimizing manufacturing process flows of these designs."

Auke Jisk Kronemeijer, Research Manager Thin Film Electronics
TNO @ Holst Centre
Eindhoven, Netherlands

Technical Data

Write modeQXFX
Writing performanceHigh QualityHigh Throughput
Minimum structure size [μm]0.81
Address grid [nm]88
Edge roughness [3σ, nm]2040
CD uniformity [3σ, nm]5070
Plate-to-plate overlay [3σ, nm]250250
Stitching [3σ, nm]4050
Registration [3σ, nm]100100
Write speed [mm²/min]13752750
System features
Light sourceHigh-power DPSS laser with 355 nm
Maximum substrate sizes1400 x 1400 mm²
Substrate thickness0 to 13.2 mm
Maximum exposure area1400 x 1400 mm²
AutofocusRealtime autofocus system (optical and pneumatic)
Autofocus compensation range150 µm
AutomationSemi-automatic loading system
FlowboxClosed-loop temperature controlled environmental chamber
Alignment Camera system for metrology and alignment
Other features and optionsStage map correction, Mura and panel pitch optimization, Edge detector system, Multiple data input formats (DXF, CIF, GDSII and Gerber files)
System dimensions
Main unit (doors closed, loader extended)
Width [mm]5370
Depth [mm]7000
Height [mm]2800
Weight [kg]25000
Installation requirements
Electrical400 VAC ± 5 %, 50/60 Hz, 32 A
Compressed air8 - 10 bar

Please note
Specifications depend on individual process conditions and may vary according to equipment configuration. Write speed depends on pixel size and write mode. Design and specifications are subject to change without prior notice.

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