Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules
Customer applications
(Courtesy of Max-Planck-Institute for terrestrial microbiology)
Why customers choose our systems
“The Heidelberg maskless system has been a central component in our cleanroom in a glovebox. It has worked beyond our hopes and been central to our fabrication efforts. Support for improving its performance and fixing problems has been excellent.”
Technical Data
| Write Mode I * | Write Mode II * | Write Mode III * | |
|---|---|---|---|
| Writing performance (Raster Scan Exposure Module) | |||
| Minimum structure size [μm] | 0.6 | 1 | 3 |
| Minimum lines and spaces [μm] | 0.8 | 1.5 | 3 |
| Address grid [nm] | 20 | 50 | 100 |
| CD uniformity [3σ, nm] | 200 | 300 | 400 |
| 2nd layer alignment over 5 x 5 mm² [nm] | 500 | 500 | 1000 |
| 2nd layer alignment over 50 x 50 mm² [nm] | 1000 | 1000 | 2000 |
| Write speed | with 390 nm LED / 365 nm LED | with 390 nm LED / 365 nm LED | with 390 nm LED |
| Write speed | 10 mm²/min at 0.6 µm | 40 mm²/min at 1 µm | 130 mm²/min at 3 µm |
| Optional write speeds at different minimum structure sizes with “Variable Resolution for Raster Scan Exposure Module” | 18 mm²/min at 1 µm | 60 mm²/min at 2 µm | 160 mm²/min at 4 µm |
| 25 mm²/min at 2 µm | 90 mm²/min at 4 µm | 300 mm²/min at 6 µm | |
| Writing performance (Vector Mode Exposure Module) | |||
| Minimum feature size [µm] | 0.6 | 1 | 3 |
| Address grid [nm] | 20 | 20 | 20 |
| 2nd layer alignment over 5 x 5 mm² [nm] | 500 | 500 | 1000 |
| 2nd layer alignment over 50 x 50 mm² [nm] | 1000 | 1000 | 2000 |
| Maximum linear write speed in Vector Mode | 200 mm/s | 200 mm/s | 200 mm/s |
| Available spot sizes in Vector Mode [µm] | 0.6 / 1 / 2 / 5 / 10 | 1 / 2 / 5 / 10 / 25 | 3 / 5 / 10 / 25 /50 |
| System specifications | |||
| Maximum substrate size | 6″ x 6″ | ||
| Minimum substrate size | 5 x 5 mm2 | ||
| Substrate thickness | 0.1 to 12 mm | ||
| Maximum write area | 150 x 150 mm2 |
| Raster scan exposure module | Vector exposure module | |
|---|---|---|
| Light source | LED; 390 nm or 365 nm | Laser; 405 nm and/or 375 nm |
| System dimensions (lithography unit) | ||
| µMLA | Width x Depth | Height x Weight |
| Main system housing | 640 mm (25") x 840 mm (33") | 530 mm (21") x 130 kg (285 lbs) |
| Installation requirements | ||
| Electrical | 230 VAC / 6A or 110 VAC / 12A (±5%, 50/60 Hz) | |
| Compressed air | 6 - 10 bar | |
| Cleanroom | ISO 6 recommended | |
| Temperature stability | ±1 °C | |
| * Only one write mode can be installed on the system |