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“Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023

Energieführungssystem für die partikelfreie Halbleiterfertigung in den Anlagen von Heidelberg Instruments. Only available in German at this point. Document Search …

PressVPGwwwpressvpgwww
3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolution

High-precision 3D printing provides a wide range of freedom in design for industrial fabrication of advanced optical components and products. LFW December …

Scientific PaperTwo-Photon Polymerization (TPP)wwwscientific-papertwo-photon-polymerizationwww
A cleanroom in a glovebox

Our glovebox-integrated cleanroom achieves fabrication, characterization, and reduced facility costs in an oxygen-free and clean environment, enabling exploration of new materials, quantum phases and …

Scientific PaperμPG 1010006462scientific-paper%ce%bcpg-1010006462
Bilayer Lift-Off for NanoFrazor® Lithography

Explore bilayer lift-off with NanoFrazor® lithography, addressing advantages, process details, and examples, including high-quality contacts and structures as small as 7 …

Application NoteNanoFrazor®, Thermal Scanning Probe (t-SPL)2 MBpdfapplication-notenanofrazor thermal-scanning-probepdf
Broadband imaging with one planar diffractive lens

Achromatic diffractive lenses (ADLs) enable imaging across the visible spectrum, achieving diffraction-limited focusing and high numerical aperture. Cost-effective and scalable for widespread …

Scientific PaperGrayscale, μPG 101wwwscientific-papergrayscale %ce%bcpg-101www
Cubic Microcontainers Improve In Situ Colonic Mucoadhesion and Absorption of Amoxicillin in Rats

Microcontainers enhance colonic drug delivery by influencing mucoadhesion and absorption. Cubic microcontainers show better adherence and absorption of amoxicillin compared to cylindrical and triangular …

Scientific PaperDirect-writing, MLA 100wwwscientific-paperdirect-writing mla-100www
Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe

A deterministic technique uses hot scanning nanoprobes to assemble sub-20 nm nanoparticles, including quantum dots, into 2D arrays and complex nanostructures for various …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)202005979scientific-papernanofrazor thermal-scanning-probe202005979
Diffractive flat lens enables extreme depth-of-focus imaging

Multi-level diffractive lens (MDL) designs drastically enhance depth of focus by over 4 orders of magnitude, enabling focus maintenance for objects separated by large …

Scientific PaperGrayscale, μPG 10107928scientific-papergrayscale %ce%bcpg-10107928
Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer

Cheap and quick fabrication of mr-DWL waveguides channels on glass buried in optical polymer cladding with 350 µm radius ring resonators and 0.9 µm …

Scientific PaperDirect-writing, DWL 66pdfscientific-paperdirect-writing dwl-66pdf
DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography

The most advanced industrial grayscale lithography tool on the …

Fact SheetDWL523 KBpdffact-sheetdwlpdf
DWL 66+ Ultimate Lithography System

Versatile system for research and prototyping with variable resolution and wide selection of …

Fact SheetDWL 661 MBpdffact-sheetdwl-66pdf
Evidence for metastable photo-induced superconductivity in K3C60

Intense optical pulses induce transient superconductivity, evolving into stable states in K3C60 under sustained mid-infrared excitation, characterized by low resistance and extended …

Scientific PaperDirect-writing, µMLA1038/s41567-020-01148-1scientific-paperdirect-writing %c2%b5mla1038-s41567-020-01148-1
Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release

This application note discusses microdevice-based drug delivery, focusing on dual compartment microcontainers (DCMCs) produced via maskless UV lithography. Potential for combination therapy is …

Application NoteDirect-writing, µMLA3 MBpdfapplication-notedirect-writing %c2%b5mlapdf
Freeform nanostructuring of hexagonal boron nitride

Hexagonal boron nitride (hBN), now available as atomically smooth flakes, offers unique properties in optoelectronics and nanoelectronics. Researchers demonstrate freeform nanostructuring for advanced device …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)12987scientific-papernanofrazor thermal-scanning-probe12987
From regular periodic micro-lens arrays to randomized continuous phase profiles

For industrial illumination systems, micro-optical structures made via direct grayscale lithography achieve precise multi-wavelength intensity control, efficiency, and flexibility at a cost-effective production …

Scientific PaperDirect-writing, DWL 661515/aot-2014-0062scientific-paperdirect-writing dwl-661515-aot-2014-0062
Grayscale with GenISys 3D-PEC

We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser …

Application NoteDirect-writing, DWL 66, Grayscale473 KBpdfapplication-notedirect-writing dwl-66 grayscalepdf
Imaging over an unlimited bandwidth with a single diffractive surface

With the control of the phase in the image plane, a single diffractive surface can correct chromatic aberrations over a wide bandwidth, simplifying imaging …

Scientific PaperGrayscale, μPG 10106251scientific-papergrayscale %ce%bcpg-10106251
Impact of massive parallelization on two-photon absorption micro- and nanofabrication

In this paper, massive parallelization is demonstrated which was realized by using a beam splitting diffractive optical element …

Scientific PaperTwo-Photon Polymerization (TPP)2545788scientific-papertwo-photon-polymerization2545788
Increasing the density of passive photonic integrated circuits via nanophotonic cloaking

We utilize nanophotonic cloaking to enable closer spacing of photonic-integrated devices, overcoming signal cross-talk limitations. Experimental results demonstrate efficient transmission and compact …

Scientific PaperGrayscale, μPG 101wwwscientific-papergrayscale %ce%bcpg-101www
Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured template

Examining single Au nanoparticle cluster light scattering on nanostructured substrates, revealing two substrate effects via Green’s tensor theory for plasmonic nanostructure spectral …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)420801scientific-papernanofrazor thermal-scanning-probe420801
Large Scale Fresnel Zone Plates On SiN-Membranes

This application note describes the fabrication process of Fresnel Zone Plates on a thin silicon nitride membrane substrate for X-ray optics using a DWL …

Application NoteDWL 662 MBpdfapplication-notedwl-66pdf
Large-area, high-numerical-aperture multi-level diffractive lens via inverse design

Inverse design enables the creation of thin, high-NA flat lenses. Multi-level diffractive lens (MDL) with a NA=0.9 at 850 nm wavelength, replicable via imprint …

Scientific PaperDWL 66, Grayscale388697scientific-paperdwl-66 grayscale388697
Light-induced anomalous Hall effect in graphene

Optical driving in quantum solids uncovers phenomena like light-induced superconductivity and anomalous Hall effect in graphene, revealing Floquet-engineered topological band …

Scientific PaperDirect-writing, µMLA03522scientific-paperdirect-writing %c2%b5mla03522
Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process

Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device …

Scientific PaperDWLwwwscientific-paperdwlwww
LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments

Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment in state-of-the-art machinery. Press Release, Lumineq Oy, Sept. 11, …

PressDirect-writing, MLA 300142 KBpdfpressdirect-writing mla-300pdf
Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range

Two-photon absorption (TPA) provides freedom in design for the fabrication of novel products that are not feasible with conventional …

Scientific PaperTwo-Photon Polymerization (TPP)1515/aot-2019-0022scientific-papertwo-photon-polymerization1515-aot-2019-0022
Maskless Aligner Technology and the MLA 300 Drive Efficient Development and Production in Microstructures

This overview covers a paradigm shift in micro fabrication with the benefits of maskless aligners from Heidelberg Instruments and introduces the MLA …

WhitepaperDirect-writing, MLA 3002 MBpdfwhitepaperdirect-writing mla-300pdf
MEMS micro-coils for magnetic neurostimulation

Innovative MEMS micro-coil probe fabrication overcame brain stimulation challenges, validated in vivo. International collaboration advances micro-magnetic stimulation for applications like artificial vision and …

Scientific PaperMLA 150115143scientific-papermla-150115143
MLA 150 Advanced Maskless Aligner

The fastest maskless tool for rapid prototyping, the alternative to the mask …

Fact SheetMLA 150546 KBpdffact-sheetmla-150pdf
MLA 300 Industrial Maskless Aligner

Optimised for industrial production with highest throughput and seamless integration into industrial production …

Fact SheetMLA 3001 MBpdffact-sheetmla-300pdf
MPO 100 3D Lithography Tool

Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical …

Fact SheetMPO 100, Two-Photon Polymerization (TPP)1 MBpdffact-sheetmpo-100 two-photon-polymerizationpdf
Multilevel diffractive lens in the MWIR with extended depth-of-focus and wide field-of-view

Compare inverse-designed and conventional lenses in MWIR optics. The inverse-designed lens offers better depth-of-focus and off-axis performance but with larger spot size and reduced …

Scientific PaperDirect-writing, DWL 66486756scientific-paperdirect-writing dwl-66486756
Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography

Thermal scanning probe lithography (t-SPL) shows promise for scalable nanofabrication in nanoelectronics. It produces high-performance graphene-based transistors with simplified processing, reducing time and …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)0026159scientific-papernanofrazor thermal-scanning-probe0026159
Nanofluidic rocking Brownian motors

Creating precise nanofluidic slits, utilizing electrostatic forces and oscillating fields, enables controlled transport of nanoparticles, demonstrated with 60nm gold spheres and efficient sorting of …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)aal3271scientific-papernanofrazor thermal-scanning-probeaal3271
NanoFrazor® Explore Nanofabrication Tool

Thermal scanning probe lithography tool with a direct laser sublimation and grayscale …

Fact SheetNanoFrazor®, Thermal Scanning Probe (t-SPL)607 KBpdffact-sheetnanofrazor thermal-scanning-probepdf
NanoFrazor® Scholar Nanofabrication Tool

Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with …

Fact SheetNanoFrazor®, Thermal Scanning Probe (t-SPL)343 KBpdffact-sheetnanofrazor thermal-scanning-probepdf
Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensions

We investigate neurite guidance using semiconductor industry-compatible techniques for fabricating modulated surfaces, enabling the cultivation and study of ordered neuronal networks in a 2.5D …

Scientific PaperDWL 66, Grayscale1039/D0NA00549Escientific-paperdwl-66 grayscale1039-d0na00549e
Normally-Off p-GaN Gate High-Electron-Mobility Transistors with the Air-Bridge Source-Connection Fabricated Using the Direct Laser Writing Grayscale Photolithography Technology

Fabrication of a p-GaN gate HEMT with an air-bridge source connection using direct grayscale lithography, achieving good performance with high breakdown voltage and low …

Scientific PaperDirect-writing, DWL 663390/cryst13050815scientific-paperdirect-writing dwl-663390-cryst13050815
Novel Tunnel Magnetoresistive Sensor Functionalities via Oblique-Incidence Deposition

We improve tunnel magnetoresistive (TMR) devices by precisely shaping magnetic layers with oblique-incidence deposition, enhancing TMR design and functionality without additional magnetic …

Scientific PaperμPG 1011c03084scientific-paper%ce%bcpg-1011c03084
Optical Fourier surfaces

Thermal Scanning Probe Lithography and templating creating optical surfaces containing multiple specified sinusoids, enabling advanced diffractive optics, photonics, and applications in emerging photonics …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)1038/s41586-020-2390-xscientific-papernanofrazor thermal-scanning-probe1038-s41586-020-2390-x
Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic Antiferromagnets

A versatile platform utilizes spin waves for optically inspired wave-based processing, advancing nanoscale devices with wavefront engineering, focusing, interference, and unique …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)201906439scientific-papernanofrazor thermal-scanning-probe201906439
Optimization of Laser Written Photomasks for Photonic Device Manufacturing

Successful performance improvement of an ULTRA i-line laser writer for photonic device mask fabrication, reducing manufacturing costs. Thorough investigation and analysis identify optimal exposure …

Scientific PaperMask-making, ULTRA2640799scientific-papermask-making ultra2640799
Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentration

Photovoltaic system combining spectrum splitting and concentration using a planar diffractive optic, overcoming losses in single-bandgap absorbers & achieving a 25% increase in output …

Scientific PaperDirect-writing, μPG 1014963198scientific-paperdirect-writing %ce%bcpg-1014963198
Overview on Maskless Grayscale Lithography

From design to micro structured topography: Grayscale lithography can be used to quickly fabricate various 2.5D and 3D structures at the micro …

VideoGrayscalewwwvideograyscalewww
Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography

Thermal Scanning Probe Lithography enables precise metal electrode patterning on 2D semiconductors like MoS2, improving device performance with vanishing Schottky barriers and exceptional …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)1038/s41928-018-0191-0scientific-papernanofrazor thermal-scanning-probe1038-s41928-018-0191-0
Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing

Nanomaterials derive unique properties from their nanostructure. A perspective explores advanced nanofabrication techniques to modify properties in condensed matter systems, discussing applications and future …

Scientific PaperDirect-writing, DWL 66, NanoFrazor®, Thermal Scanning Probe (t-SPL)202300166scientific-paperdirect-writing dwl-66 nanofrazor thermal-scanning-probe202300166
Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2

Novel atomic substitution method creates highly conductive nonlayered molybdenum nitrides from MoS2, enabling potential nanoelectronics’ applications with maintained conductivity and stable contacts over …

Scientific PaperµMLA1c03712scientific-paper%c2%b5mla1c03712
Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants

Study of fabrication of artificial structures for musculo-skeletal tissue engineering, which was done by Two-Photon-Polymerization …

Scientific PaperTwo-Photon Polymerization (TPP)3390/ijms23063115scientific-papertwo-photon-polymerization3390-ijms23063115
Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater

Aptamer-based graphene field effect transistor (AptG-FET) platform detects three opioid metabolites in wastewater rapidly and inexpensively, providing a reliable alternative to costly laboratory-based …

Scientific PaperDirect-writing, µMLA1c07094scientific-paperdirect-writing %c2%b5mla1c07094
Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography

Utilizing grayscale lithography and hard-mask methods, silicon carbide hosts micrometer-scale features and hemispherical solid immersion lenses, boosting optical collection for quantum emitters. Scalable, reproducible, …

Scientific PaperDirect-writing, DWL 66, Grayscale0144684scientific-paperdirect-writing dwl-66 grayscale0144684
Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8

Low-power laser irradiation of SU-8 photoresist with an added absorber enables selective pyrolysis for simple and inexpensive patterning of pyrolytic carbon …

Scientific PaperDirect-writing, µPGwwwscientific-paperdirect-writing %c2%b5pgwww
Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination Therapy

Monodisperse dual-compartment microdevices with pH-sensitive polymer coatings enable tunable, sequential drug release in the gastrointestinal tract, providing a promising strategy for combination …

Scientific PaperDirect-writing, MLA 100202200106scientific-paperdirect-writing mla-100202200106
Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell Transfection

Micro-projectiles were created through maskless UV lithography, O2 plasma treatment, silicon etching, and metal cladding. These conical micro-projectiles have applications in magnetically guided cell …

Application NoteDirect-writing, MLA 150854 KBpdfapplication-notedirect-writing mla-150pdf
Spatial defects nanoengineering for bipolar conductivity in MoS2

Controlling defects in monolayer MoS2 using thermochemical scanning probe lithography enables precise p- and n-type doping, vital for nanoelectronics, p-n junctions, and high rectification …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)1038/s41467-020-17241-1scientific-papernanofrazor thermal-scanning-probe1038-s41467-020-17241-1
Superconducting nonlinear transport in optically driven high-temperature K3C60

This study investigates the electrical responses of optically driven quantum material, revealing nonlinear current-voltage characteristics indicative of photo-induced superconductivity, with potential applications in high-speed …

Scientific PaperDirect-writing, µMLA1038/s41467-023-42989-7scientific-paperdirect-writing %c2%b5mla1038-s41467-023-42989-7
Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substrates

Bottom surface-induced ferromagnetism in Bi2Se3 nanoplate devices on SiO2 and ferromagnetic insulator substrates decouples quantum Hall effects, revealing shifted half-integer QHEs in a three-channel …

Scientific PaperDirect-writing, μPG 1011088/2053-1583/aa525escientific-paperdirect-writing %ce%bcpg-1011088-2053-1583-aa525e
The Lithographer – Grayscale Lithography Issue

The Rise of Grayscale Lithography: Direct-write 3D patterning scaled from µm to nm. Grayscale Lithography Issue of The Lithographer, issued January …

The LithographerGrayscale10 MBpdfthe-lithographergrayscalepdf
The Lithographer – Quantum Issue

The Quantum Issue of The Lithographer, issued Fall 2020 Topics include: Maskless Aligners, Grayscale, 2D Materials, Quantum …

The LithographerDirect-writing, Grayscale, NanoFrazor®, Thermal Scanning Probe (t-SPL)4 MBpdfthe-lithographerdirect-writing grayscale nanofrazor thermal-scanning-probepdf
The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable Metasurfaces

Metasurfaces enable versatile optical wavefront control; active phase-change materials like germanium telluride offer compact, reconfigurable near-infrared metasurfaces, avoiding typical …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)202001243scientific-papernanofrazor thermal-scanning-probe202001243
Thermal scanning probe lithography – a review

Review of Thermal Scanning Probe Lithography (t-SPL) covering its capabilities for high-resolution nanolithography and material interactions, providing insights for nanofabrication and material science …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)1038/s41378-019-0124-8scientific-papernanofrazor thermal-scanning-probe1038-s41378-019-0124-8
Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 Nanowires

Nanowires are promising for thermoelectric applications, but the predicted performance enhancement has not been observed yet. Surface states play a crucial role in transport …

Scientific PaperDirect-writing, μPG 101201500280scientific-paperdirect-writing %ce%bcpg-101201500280
Thermomechanical Nanocutting of 2D Materials

A thermomechanical indentation technique enables precise cutting of monolayer 2D with 20 nm resolution, offering potential for electronic and photonic nanodevice …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)202001232scientific-papernanofrazor thermal-scanning-probe202001232
Thermomechanical Nanostraining of Two-Dimensional Materials

Nanoindentation via thermomechanical scanning probe allows precise, nanoscale strain engineering in 2D materials like MoS2 and graphene, achieving modulated bandgaps and investigating localized strain …

Scientific PaperNanoFrazor®, Thermal Scanning Probe (t-SPL)0c03358scientific-papernanofrazor thermal-scanning-probe0c03358
Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stress

Flexible thin film transistors on 50 µm thick polyimide demonstrated stable behavior under simultaneous mechanical and electrical stress up to a 4 mm bending …

Scientific PaperDirect-writing, DWL 661088/2058-8585/ac7186scientific-paperdirect-writing dwl-661088-2058-8585-ac7186
ULTRA Semiconductor Mask Writer

A tool specifically designed to produce mature semiconductor …

Fact SheetULTRA2 MBpdffact-sheetultrapdf
Ultra-High Resolution Pattern Transfer on NanoFrazor® Lithography

High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor® lithography, multi-layer stacks, and alternative strategies for superior patterns are …

Application NoteNanoFrazor®, Thermal Scanning Probe (t-SPL)2 MBpdfapplication-notenanofrazor thermal-scanning-probepdf
Ultra-thick positive photoresist layers for maskless grayscale lithography

Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental …

Scientific PaperDirect-writing, DWL 66, Grayscale2658355scientific-paperdirect-writing dwl-66 grayscale2658355
Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3

Orthorhombic κ-Ga2O3 is a superior ultrawide bandgap material for extreme environments. We demonstrate ultrasensitive UV-C detection using Si-doped κ-Ga2O3 …

Scientific PaperµPG155350scientific-paper%c2%b5pg155350
Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithography

Achieve straight, vertical sidewalls in thick negative-tone resist using focused laser beam-based direct write lithography, overcoming non-homogeneous illumination and non-sharp edges. (Possible application: …

Scientific PaperDirect-writing, DWL 66100210scientific-paperdirect-writing dwl-66100210
Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology

First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality …

Scientific PaperDirect-writing, DWLwwwscientific-paperdirect-writing dwlwww
Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetals

Optoelectronic materials converting light to bulk current. Unveiling anisotropic photothermoelectric effect driving complex photocurrent circulations via unequal crystal-axis thermopowers, visualized using microscopy and magnetic …

Scientific PaperDirect-writing, µMLA17176scientific-paperdirect-writing %c2%b5mla17176
VPG 300 DI Maskless Stepper

Maskless direct imager for high-accuracy and high-resolution …

Fact SheetVPG265 KBpdffact-sheetvpgpdf
VPG+ 200 / VPG+ 400 Volume Pattern Generator

A production tool for standard photomasks and microstructures in i-line …

Fact SheetVPG553 KBpdffact-sheetvpgpdf
VPG+ 800 / VPG+ 1400 Volume Pattern Generator

Photomask production on large substrates, perfect for display …

Fact SheetVPG688 KBpdffact-sheetvpgpdf
µMLA Tabletop Maskless Aligner

Configurable and compact tabletop maskless aligner with raster scan and vector exposure …

Fact SheetµMLA2 MBpdffact-sheet%c2%b5mlapdf
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