| Title | Summary | Categories | Tags | File Size | File Type | Link | hf:doc_categories | hf:doc_tags | hf:file_type |
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| “Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023 | Energieführungssystem für die partikelfreie Halbleiterfertigung in den Anlagen von Heidelberg Instruments. Only available in German at this point. Document Search … | Press | VPG | www | press | vpg | www | ||
| 3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolution | High-precision 3D printing provides a wide range of freedom in design for industrial fabrication of advanced optical components and products. LFW December … | Scientific Paper | Two-Photon Polymerization (TPP) | www | scientific-paper | two-photon-polymerization | www | ||
| A cleanroom in a glovebox | Our glovebox-integrated cleanroom achieves fabrication, characterization, and reduced facility costs in an oxygen-free and clean environment, enabling exploration of new materials, quantum phases and … | Scientific Paper | μPG 101 | 0006462 | scientific-paper | %ce%bcpg-101 | 0006462 | ||
| Bilayer Lift-Off for NanoFrazor® Lithography | Explore bilayer lift-off with NanoFrazor® lithography, addressing advantages, process details, and examples, including high-quality contacts and structures as small as 7 … | Application Note | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 2 MB | application-note | nanofrazor thermal-scanning-probe | |||
| Broadband imaging with one planar diffractive lens | Achromatic diffractive lenses (ADLs) enable imaging across the visible spectrum, achieving diffraction-limited focusing and high numerical aperture. Cost-effective and scalable for widespread … | Scientific Paper | Grayscale, μPG 101 | www | scientific-paper | grayscale %ce%bcpg-101 | www | ||
| Cubic Microcontainers Improve In Situ Colonic Mucoadhesion and Absorption of Amoxicillin in Rats | Microcontainers enhance colonic drug delivery by influencing mucoadhesion and absorption. Cubic microcontainers show better adherence and absorption of amoxicillin compared to cylindrical and triangular … | Scientific Paper | Direct-writing, MLA 100 | www | scientific-paper | direct-writing mla-100 | www | ||
| Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe | A deterministic technique uses hot scanning nanoprobes to assemble sub-20 nm nanoparticles, including quantum dots, into 2D arrays and complex nanostructures for various … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 202005979 | scientific-paper | nanofrazor thermal-scanning-probe | 202005979 | ||
| Diffractive flat lens enables extreme depth-of-focus imaging | Multi-level diffractive lens (MDL) designs drastically enhance depth of focus by over 4 orders of magnitude, enabling focus maintenance for objects separated by large … | Scientific Paper | Grayscale, μPG 101 | 07928 | scientific-paper | grayscale %ce%bcpg-101 | 07928 | ||
| Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer | Cheap and quick fabrication of mr-DWL waveguides channels on glass buried in optical polymer cladding with 350 µm radius ring resonators and 0.9 µm … | Scientific Paper | Direct-writing, DWL 66 | scientific-paper | direct-writing dwl-66 | ||||
| DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography | The most advanced industrial grayscale lithography tool on the … | Fact Sheet | DWL | 523 KB | fact-sheet | dwl | |||
| DWL 66+ Ultimate Lithography System | Versatile system for research and prototyping with variable resolution and wide selection of … | Fact Sheet | DWL 66 | 1 MB | fact-sheet | dwl-66 | |||
| Evidence for metastable photo-induced superconductivity in K3C60 | Intense optical pulses induce transient superconductivity, evolving into stable states in K3C60 under sustained mid-infrared excitation, characterized by low resistance and extended … | Scientific Paper | Direct-writing, µMLA | 1038/s41567-020-01148-1 | scientific-paper | direct-writing %c2%b5mla | 1038-s41567-020-01148-1 | ||
| Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release | This application note discusses microdevice-based drug delivery, focusing on dual compartment microcontainers (DCMCs) produced via maskless UV lithography. Potential for combination therapy is … | Application Note | Direct-writing, µMLA | 3 MB | application-note | direct-writing %c2%b5mla | |||
| Freeform nanostructuring of hexagonal boron nitride | Hexagonal boron nitride (hBN), now available as atomically smooth flakes, offers unique properties in optoelectronics and nanoelectronics. Researchers demonstrate freeform nanostructuring for advanced device … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 12987 | scientific-paper | nanofrazor thermal-scanning-probe | 12987 | ||
| From regular periodic micro-lens arrays to randomized continuous phase profiles | For industrial illumination systems, micro-optical structures made via direct grayscale lithography achieve precise multi-wavelength intensity control, efficiency, and flexibility at a cost-effective production … | Scientific Paper | Direct-writing, DWL 66 | 1515/aot-2014-0062 | scientific-paper | direct-writing dwl-66 | 1515-aot-2014-0062 | ||
| Grayscale with GenISys 3D-PEC | We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser … | Application Note | Direct-writing, DWL 66, Grayscale | 473 KB | application-note | direct-writing dwl-66 grayscale | |||
| Imaging over an unlimited bandwidth with a single diffractive surface | With the control of the phase in the image plane, a single diffractive surface can correct chromatic aberrations over a wide bandwidth, simplifying imaging … | Scientific Paper | Grayscale, μPG 101 | 06251 | scientific-paper | grayscale %ce%bcpg-101 | 06251 | ||
| Impact of massive parallelization on two-photon absorption micro- and nanofabrication | In this paper, massive parallelization is demonstrated which was realized by using a beam splitting diffractive optical element … | Scientific Paper | Two-Photon Polymerization (TPP) | 2545788 | scientific-paper | two-photon-polymerization | 2545788 | ||
| Increasing the density of passive photonic integrated circuits via nanophotonic cloaking | We utilize nanophotonic cloaking to enable closer spacing of photonic-integrated devices, overcoming signal cross-talk limitations. Experimental results demonstrate efficient transmission and compact … | Scientific Paper | Grayscale, μPG 101 | www | scientific-paper | grayscale %ce%bcpg-101 | www | ||
| Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured template | Examining single Au nanoparticle cluster light scattering on nanostructured substrates, revealing two substrate effects via Green’s tensor theory for plasmonic nanostructure spectral … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 420801 | scientific-paper | nanofrazor thermal-scanning-probe | 420801 | ||
| Large Scale Fresnel Zone Plates On SiN-Membranes | This application note describes the fabrication process of Fresnel Zone Plates on a thin silicon nitride membrane substrate for X-ray optics using a DWL … | Application Note | DWL 66 | 2 MB | application-note | dwl-66 | |||
| Large-area, high-numerical-aperture multi-level diffractive lens via inverse design | Inverse design enables the creation of thin, high-NA flat lenses. Multi-level diffractive lens (MDL) with a NA=0.9 at 850 nm wavelength, replicable via imprint … | Scientific Paper | DWL 66, Grayscale | 388697 | scientific-paper | dwl-66 grayscale | 388697 | ||
| Light-induced anomalous Hall effect in graphene | Optical driving in quantum solids uncovers phenomena like light-induced superconductivity and anomalous Hall effect in graphene, revealing Floquet-engineered topological band … | Scientific Paper | Direct-writing, µMLA | 03522 | scientific-paper | direct-writing %c2%b5mla | 03522 | ||
| Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process | Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device … | Scientific Paper | DWL | www | scientific-paper | dwl | www | ||
| LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments | Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment in state-of-the-art machinery. Press Release, Lumineq Oy, Sept. 11, … | Press | Direct-writing, MLA 300 | 142 KB | press | direct-writing mla-300 | |||
| Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range | Two-photon absorption (TPA) provides freedom in design for the fabrication of novel products that are not feasible with conventional … | Scientific Paper | Two-Photon Polymerization (TPP) | 1515/aot-2019-0022 | scientific-paper | two-photon-polymerization | 1515-aot-2019-0022 | ||
| Maskless Aligner Technology and the MLA 300 Drive Efficient Development and Production in Microstructures | This overview covers a paradigm shift in micro fabrication with the benefits of maskless aligners from Heidelberg Instruments and introduces the MLA … | Whitepaper | Direct-writing, MLA 300 | 2 MB | whitepaper | direct-writing mla-300 | |||
| MEMS micro-coils for magnetic neurostimulation | Innovative MEMS micro-coil probe fabrication overcame brain stimulation challenges, validated in vivo. International collaboration advances micro-magnetic stimulation for applications like artificial vision and … | Scientific Paper | MLA 150 | 115143 | scientific-paper | mla-150 | 115143 | ||
| MLA 150 Advanced Maskless Aligner | The fastest maskless tool for rapid prototyping, the alternative to the mask … | Fact Sheet | MLA 150 | 546 KB | fact-sheet | mla-150 | |||
| MLA 300 Industrial Maskless Aligner | Optimised for industrial production with highest throughput and seamless integration into industrial production … | Fact Sheet | MLA 300 | 1 MB | fact-sheet | mla-300 | |||
| MPO 100 3D Lithography Tool | Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in micro-optics, photonics, micro-mechanics and biomedical … | Fact Sheet | MPO 100, Two-Photon Polymerization (TPP) | 1 MB | fact-sheet | mpo-100 two-photon-polymerization | |||
| Multilevel diffractive lens in the MWIR with extended depth-of-focus and wide field-of-view | Compare inverse-designed and conventional lenses in MWIR optics. The inverse-designed lens offers better depth-of-focus and off-axis performance but with larger spot size and reduced … | Scientific Paper | Direct-writing, DWL 66 | 486756 | scientific-paper | direct-writing dwl-66 | 486756 | ||
| Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography | Thermal scanning probe lithography (t-SPL) shows promise for scalable nanofabrication in nanoelectronics. It produces high-performance graphene-based transistors with simplified processing, reducing time and … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 0026159 | scientific-paper | nanofrazor thermal-scanning-probe | 0026159 | ||
| Nanofluidic rocking Brownian motors | Creating precise nanofluidic slits, utilizing electrostatic forces and oscillating fields, enables controlled transport of nanoparticles, demonstrated with 60nm gold spheres and efficient sorting of … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | aal3271 | scientific-paper | nanofrazor thermal-scanning-probe | aal3271 | ||
| NanoFrazor® Explore Nanofabrication Tool | Thermal scanning probe lithography tool with a direct laser sublimation and grayscale … | Fact Sheet | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 607 KB | fact-sheet | nanofrazor thermal-scanning-probe | |||
| NanoFrazor® Scholar Nanofabrication Tool | Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with … | Fact Sheet | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 343 KB | fact-sheet | nanofrazor thermal-scanning-probe | |||
| Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensions | We investigate neurite guidance using semiconductor industry-compatible techniques for fabricating modulated surfaces, enabling the cultivation and study of ordered neuronal networks in a 2.5D … | Scientific Paper | DWL 66, Grayscale | 1039/D0NA00549E | scientific-paper | dwl-66 grayscale | 1039-d0na00549e | ||
| Normally-Off p-GaN Gate High-Electron-Mobility Transistors with the Air-Bridge Source-Connection Fabricated Using the Direct Laser Writing Grayscale Photolithography Technology | Fabrication of a p-GaN gate HEMT with an air-bridge source connection using direct grayscale lithography, achieving good performance with high breakdown voltage and low … | Scientific Paper | Direct-writing, DWL 66 | 3390/cryst13050815 | scientific-paper | direct-writing dwl-66 | 3390-cryst13050815 | ||
| Novel Tunnel Magnetoresistive Sensor Functionalities via Oblique-Incidence Deposition | We improve tunnel magnetoresistive (TMR) devices by precisely shaping magnetic layers with oblique-incidence deposition, enhancing TMR design and functionality without additional magnetic … | Scientific Paper | μPG 101 | 1c03084 | scientific-paper | %ce%bcpg-101 | 1c03084 | ||
| Optical Fourier surfaces | Thermal Scanning Probe Lithography and templating creating optical surfaces containing multiple specified sinusoids, enabling advanced diffractive optics, photonics, and applications in emerging photonics … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 1038/s41586-020-2390-x | scientific-paper | nanofrazor thermal-scanning-probe | 1038-s41586-020-2390-x | ||
| Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic Antiferromagnets | A versatile platform utilizes spin waves for optically inspired wave-based processing, advancing nanoscale devices with wavefront engineering, focusing, interference, and unique … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 201906439 | scientific-paper | nanofrazor thermal-scanning-probe | 201906439 | ||
| Optimization of Laser Written Photomasks for Photonic Device Manufacturing | Successful performance improvement of an ULTRA i-line laser writer for photonic device mask fabrication, reducing manufacturing costs. Thorough investigation and analysis identify optimal exposure … | Scientific Paper | Mask-making, ULTRA | 2640799 | scientific-paper | mask-making ultra | 2640799 | ||
| Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentration | Photovoltaic system combining spectrum splitting and concentration using a planar diffractive optic, overcoming losses in single-bandgap absorbers & achieving a 25% increase in output … | Scientific Paper | Direct-writing, μPG 101 | 4963198 | scientific-paper | direct-writing %ce%bcpg-101 | 4963198 | ||
| Overview on Maskless Grayscale Lithography | From design to micro structured topography: Grayscale lithography can be used to quickly fabricate various 2.5D and 3D structures at the micro … | Video | Grayscale | www | video | grayscale | www | ||
| Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography | Thermal Scanning Probe Lithography enables precise metal electrode patterning on 2D semiconductors like MoS2, improving device performance with vanishing Schottky barriers and exceptional … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 1038/s41928-018-0191-0 | scientific-paper | nanofrazor thermal-scanning-probe | 1038-s41928-018-0191-0 | ||
| Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing | Nanomaterials derive unique properties from their nanostructure. A perspective explores advanced nanofabrication techniques to modify properties in condensed matter systems, discussing applications and future … | Scientific Paper | Direct-writing, DWL 66, NanoFrazor®, Thermal Scanning Probe (t-SPL) | 202300166 | scientific-paper | direct-writing dwl-66 nanofrazor thermal-scanning-probe | 202300166 | ||
| Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2 | Novel atomic substitution method creates highly conductive nonlayered molybdenum nitrides from MoS2, enabling potential nanoelectronics’ applications with maintained conductivity and stable contacts over … | Scientific Paper | µMLA | 1c03712 | scientific-paper | %c2%b5mla | 1c03712 | ||
| Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants | Study of fabrication of artificial structures for musculo-skeletal tissue engineering, which was done by Two-Photon-Polymerization … | Scientific Paper | Two-Photon Polymerization (TPP) | 3390/ijms23063115 | scientific-paper | two-photon-polymerization | 3390-ijms23063115 | ||
| Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater | Aptamer-based graphene field effect transistor (AptG-FET) platform detects three opioid metabolites in wastewater rapidly and inexpensively, providing a reliable alternative to costly laboratory-based … | Scientific Paper | Direct-writing, µMLA | 1c07094 | scientific-paper | direct-writing %c2%b5mla | 1c07094 | ||
| Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography | Utilizing grayscale lithography and hard-mask methods, silicon carbide hosts micrometer-scale features and hemispherical solid immersion lenses, boosting optical collection for quantum emitters. Scalable, reproducible, … | Scientific Paper | Direct-writing, DWL 66, Grayscale | 0144684 | scientific-paper | direct-writing dwl-66 grayscale | 0144684 | ||
| Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8 | Low-power laser irradiation of SU-8 photoresist with an added absorber enables selective pyrolysis for simple and inexpensive patterning of pyrolytic carbon … | Scientific Paper | Direct-writing, µPG | www | scientific-paper | direct-writing %c2%b5pg | www | ||
| Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination Therapy | Monodisperse dual-compartment microdevices with pH-sensitive polymer coatings enable tunable, sequential drug release in the gastrointestinal tract, providing a promising strategy for combination … | Scientific Paper | Direct-writing, MLA 100 | 202200106 | scientific-paper | direct-writing mla-100 | 202200106 | ||
| Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell Transfection | Micro-projectiles were created through maskless UV lithography, O2 plasma treatment, silicon etching, and metal cladding. These conical micro-projectiles have applications in magnetically guided cell … | Application Note | Direct-writing, MLA 150 | 854 KB | application-note | direct-writing mla-150 | |||
| Spatial defects nanoengineering for bipolar conductivity in MoS2 | Controlling defects in monolayer MoS2 using thermochemical scanning probe lithography enables precise p- and n-type doping, vital for nanoelectronics, p-n junctions, and high rectification … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 1038/s41467-020-17241-1 | scientific-paper | nanofrazor thermal-scanning-probe | 1038-s41467-020-17241-1 | ||
| Superconducting nonlinear transport in optically driven high-temperature K3C60 | This study investigates the electrical responses of optically driven quantum material, revealing nonlinear current-voltage characteristics indicative of photo-induced superconductivity, with potential applications in high-speed … | Scientific Paper | Direct-writing, µMLA | 1038/s41467-023-42989-7 | scientific-paper | direct-writing %c2%b5mla | 1038-s41467-023-42989-7 | ||
| Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substrates | Bottom surface-induced ferromagnetism in Bi2Se3 nanoplate devices on SiO2 and ferromagnetic insulator substrates decouples quantum Hall effects, revealing shifted half-integer QHEs in a three-channel … | Scientific Paper | Direct-writing, μPG 101 | 1088/2053-1583/aa525e | scientific-paper | direct-writing %ce%bcpg-101 | 1088-2053-1583-aa525e | ||
| The Lithographer – Grayscale Lithography Issue | The Rise of Grayscale Lithography: Direct-write 3D patterning scaled from µm to nm. Grayscale Lithography Issue of The Lithographer, issued January … | The Lithographer | Grayscale | 10 MB | the-lithographer | grayscale | |||
| The Lithographer – Quantum Issue | The Quantum Issue of The Lithographer, issued Fall 2020 Topics include: Maskless Aligners, Grayscale, 2D Materials, Quantum … | The Lithographer | Direct-writing, Grayscale, NanoFrazor®, Thermal Scanning Probe (t-SPL) | 4 MB | the-lithographer | direct-writing grayscale nanofrazor thermal-scanning-probe | |||
| The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable Metasurfaces | Metasurfaces enable versatile optical wavefront control; active phase-change materials like germanium telluride offer compact, reconfigurable near-infrared metasurfaces, avoiding typical … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 202001243 | scientific-paper | nanofrazor thermal-scanning-probe | 202001243 | ||
| Thermal scanning probe lithography – a review | Review of Thermal Scanning Probe Lithography (t-SPL) covering its capabilities for high-resolution nanolithography and material interactions, providing insights for nanofabrication and material science … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 1038/s41378-019-0124-8 | scientific-paper | nanofrazor thermal-scanning-probe | 1038-s41378-019-0124-8 | ||
| Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 Nanowires | Nanowires are promising for thermoelectric applications, but the predicted performance enhancement has not been observed yet. Surface states play a crucial role in transport … | Scientific Paper | Direct-writing, μPG 101 | 201500280 | scientific-paper | direct-writing %ce%bcpg-101 | 201500280 | ||
| Thermomechanical Nanocutting of 2D Materials | A thermomechanical indentation technique enables precise cutting of monolayer 2D with 20 nm resolution, offering potential for electronic and photonic nanodevice … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 202001232 | scientific-paper | nanofrazor thermal-scanning-probe | 202001232 | ||
| Thermomechanical Nanostraining of Two-Dimensional Materials | Nanoindentation via thermomechanical scanning probe allows precise, nanoscale strain engineering in 2D materials like MoS2 and graphene, achieving modulated bandgaps and investigating localized strain … | Scientific Paper | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 0c03358 | scientific-paper | nanofrazor thermal-scanning-probe | 0c03358 | ||
| Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stress | Flexible thin film transistors on 50 µm thick polyimide demonstrated stable behavior under simultaneous mechanical and electrical stress up to a 4 mm bending … | Scientific Paper | Direct-writing, DWL 66 | 1088/2058-8585/ac7186 | scientific-paper | direct-writing dwl-66 | 1088-2058-8585-ac7186 | ||
| ULTRA Semiconductor Mask Writer | A tool specifically designed to produce mature semiconductor … | Fact Sheet | ULTRA | 2 MB | fact-sheet | ultra | |||
| Ultra-High Resolution Pattern Transfer on NanoFrazor® Lithography | High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor® lithography, multi-layer stacks, and alternative strategies for superior patterns are … | Application Note | NanoFrazor®, Thermal Scanning Probe (t-SPL) | 2 MB | application-note | nanofrazor thermal-scanning-probe | |||
| Ultra-thick positive photoresist layers for maskless grayscale lithography | Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental … | Scientific Paper | Direct-writing, DWL 66, Grayscale | 2658355 | scientific-paper | direct-writing dwl-66 grayscale | 2658355 | ||
| Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3 | Orthorhombic κ-Ga2O3 is a superior ultrawide bandgap material for extreme environments. We demonstrate ultrasensitive UV-C detection using Si-doped κ-Ga2O3 … | Scientific Paper | µPG | 155350 | scientific-paper | %c2%b5pg | 155350 | ||
| Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithography | Achieve straight, vertical sidewalls in thick negative-tone resist using focused laser beam-based direct write lithography, overcoming non-homogeneous illumination and non-sharp edges. (Possible application: … | Scientific Paper | Direct-writing, DWL 66 | 100210 | scientific-paper | direct-writing dwl-66 | 100210 | ||
| Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology | First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality … | Scientific Paper | Direct-writing, DWL | www | scientific-paper | direct-writing dwl | www | ||
| Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetals | Optoelectronic materials converting light to bulk current. Unveiling anisotropic photothermoelectric effect driving complex photocurrent circulations via unequal crystal-axis thermopowers, visualized using microscopy and magnetic … | Scientific Paper | Direct-writing, µMLA | 17176 | scientific-paper | direct-writing %c2%b5mla | 17176 | ||
| VPG 300 DI Maskless Stepper | Maskless direct imager for high-accuracy and high-resolution … | Fact Sheet | VPG | 265 KB | fact-sheet | vpg | |||
| VPG+ 200 / VPG+ 400 Volume Pattern Generator | A production tool for standard photomasks and microstructures in i-line … | Fact Sheet | VPG | 553 KB | fact-sheet | vpg | |||
| VPG+ 800 / VPG+ 1400 Volume Pattern Generator | Photomask production on large substrates, perfect for display … | Fact Sheet | VPG | 688 KB | fact-sheet | vpg | |||
| µMLA Tabletop Maskless Aligner | Configurable and compact tabletop maskless aligner with raster scan and vector exposure … | Fact Sheet | µMLA | 2 MB | fact-sheet | %c2%b5mla |