The display industry’s relentless pursuit of higher resolution and energy efficiency demands photomask fabrication tools that deliver exceptional precision, scalability, and throughput, especially for the large-format masks crucial in flat panel display (FPD) production. The VPG⁺ 1400 FPD Volume Pattern Generator from Heidelberg Instruments is engineered specifically to meet these rigorous demands.

Pioneering Photomask Production for FPDs

The VPG⁺ 1400 FPD excels at creating large-area photomasks (up to 1400 x 1400 mm²) for essential display components, including thin-film transistor (TFT) arrays, color filters, and Indium Tin Oxide (ITO) electrodes. These masks are the cornerstone of modern displays, enabling technologies like OLED, micro-LED, and quantum dot. Its ability to handle large-format substrates with sub-micron resolution, coupled with mura optimization, edge detection, and panel pitch optimization, guarantees the precision and uniformity required for flawless display performance. A closed-loop environmental chamber maintains optimal conditions throughout the process, ensuring consistent results even in high-volume production.

Key Features Addressing Display Manufacturing Challenges

• High-Speed Optical Engine: A high-speed 1D optical modulator using a Grating Light Valve (GLV) and a 355 nm DPSS laser, combined with a high numerical aperture (NA) write lens, deliver sub-micron resolution and low optical distortions. The GLV ribbons can be driven up to 350 kHz. The optical engine boasts high UV transmission, ultra-high data rate at 2.4 Gbit/s for 1088 pixels, and 10-bit intensity modulation.
• Uncompromising Precision: High-accuracy position metrology with 1 nm interferometric position control and an address grid of 8 nm ensures accurate transfer of intricate design patterns with features down to 800 nm to the photomask.
• Exceptional Throughput: The ultra-high-speed exposure engine enables a throughput of 2750 mm²/min, significantly reducing writing times and enabling rapid mask production without compromising quality.
• Scalable Fabrication: The large-format precision stage accommodates substrates up to 1400 x 1400 mm², ideal for the unique demands of mid-sized and large (up to G8) displays.
• Advanced Alignment: Cognex image recognition and a comprehensive metrology package, including multipoint alignment and a skip function for damaged marks, provide precise second-layer alignment capabilities (400 nm mean+3σ on a 1000 x 1000 mm² area), essential for multi-layer mask production. A sophisticated 2D correction matrix calibrates stage position and ensures accurate tool matching.
• Automation and Reliability: Automatic calibration streamlines workflows, minimizes errors, and ensures reliable 24/7 operation, providing predictable delivery times. The highly stable climate chamber, with real-time climate compensations and software corrections, maintains temperature stability to ±0.05°C.

Other Specifications

• Realtime autofocus system (optical and pneumatic) with a 150 µm compensation range.
• Substrate Thickness: 0 to 13.2 mm.
• Single cross measurement accuracy: 10 – 20 nm
• Area measurement accuracy (G8 area): ~50 nm
• Registration (3σ): 100 nm
• Plate-to-plate overlay (3σ): 250 nm
• Orthogonality: 0.2 µrad

Applications and Benefits for the Display Industry

The VPG⁺ 1400 FPD supports all industrial data formats, ensuring seamless integration into existing workflows. Key applications include:

• TFT Arrays: Precision transistor fabrication for high-resolution displays.
• Color Filters: Uniformity in filters for accurate color fidelity.
• ITO Electrodes: Patterning of transparent, conductive layers for touchscreen functionality and energy efficiency. Halftone photomasks enable precise control of ITO layer thickness and large-area uniformity, optimizing optical and electrical performance.

The combination of outstanding throughput, highest precision, and reduced production costs makes the VPG⁺ 1400 FPD an indispensable tool for photomask manufacturers seeking a competitive edge in the FPD market.

Built for the Future of Display Production

Investing in the VPG⁺ 1400 FPD provides manufacturers with:

• Superior mask quality for flawless displays.
• Increased profitability through optimized production.
• Long-term scalability for next-generation display technologies.

As the display industry continues to advance, Heidelberg Instruments’ VPG⁺ 1400 FPD stands as a game-changing solution, enabling manufacturers to meet the ever-growing demand for precision, efficiency, and innovation in display fabrication.