MPO 100 – Multi-User Tool for 3D Lithography and 3D Microprinting

Heidelberg/Würzburg, January 18, 2022.  “1 – 10 – 100 – 1000” – Achievable component heights of over 1 cm, surfaces with roughness in the order of 10 nm, structure sizes of less than 100 nm, and writing speeds over 1000 mm/s: At the SPIE Photonics West in San Francisco, from January 25th to 27th, Heidelberg Instruments will be presenting, for the first time, the new two-photon polymerization MPO 100, a multi-user tool that combines both the requirements of 3D lithography with resolutions in the 100 nm range and 3D microprinting with structure heights of over one centimeter, all in one device.

“The MPO 100 is a unique tool for microfabrication and achieves the highest resolution among additive manufacturing processes at 100 nanometers. Furthermore, the 1-10-100-1000 capability of the MPO 100 will enable users at universities, R&D institutions, as well as the industry and offer significant advantages for new developments in areas such as micro-optics, microfluidics, and biomedicine,” says Dr. Benedikt Stender of Multiphoton Optics GmbH, the subsidiary of Heidelberg Instruments where the development of the MPO 100 was carried out.

The MPO 100 works with a laser wavelength in the green spectral range, which is ideally suited for the
3D structuring of typical photoresists. Furthermore, MPO 100 is optimized to use the hybrid polymers
(ORMOCER®s), particularly important for various applications. In addition to sophisticated algorithms
to maximize structure quality, the synchronized scanning system offers the possibility of stitching-free
patterning. In addition, the MPO 100 is currently the only tool in the market equipped with a flowbox that guarantees temperature stability of up to 0.1°C and thus provides the necessary stability for largescale exposures. Application-specific writing modes enable customer-specific printing requirements and distinguish the MPO 100 as a multi-user tool.

“With the MPO 100, we have combined the strengths of both companies in one system: Multiphoton
Optics’ sophisticated exposure unit for two-photon polymerization and Heidelberg Instruments’
industrial platform, which guarantees the required stability and meets the necessary industry
standards. The capabilities of the MPO 100 are already very popular with our customers, who benefit
from the worldwide support from our service organization and ISO-certified production,” says Steffen
Diez, COO of Heidelberg Instruments

About Heidelberg Instruments
With over 35 years of experience and more than 1,000 installed systems, Heidelberg Instruments is one of the leading international players in the development and production of high-precision photolithography systems and nanofabrication tools. Heidelberg Instruments systems are installed in industrial and scientific facilities around the world. They are used for efficient direct writing, as well as for photomask fabrication for a wide range of industries – including semiconductors, quantum computing, photonics, 2D materials, IoT, and many related application fields.

About Multiphoton Optics
Multiphoton Optics GmbH, a wholly owned subsidiary of Heidelberg Instruments Mikrotechnik GmbH, is a global solution provider for 3D lithography via two-photon polymerization (TPP). This disruptive technology enables the production of complex functional structures in micro-optics and microsystems technology, optical interconnect technology, micromechanics, and biomedical technology. The modular 3D printing platform enables the highprecision fabrication of structures in the submicrometer to millimeter range with very high throughput.

Marketing and Communication Contact
Veronika Loose
Heidelberg Instruments Mikrotechnik GmbH
Mittelgewannweg 27
69123 Heidelberg
Tel. +49 931 908792 88



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