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| Title | Description | Category | Tags | Publisher | Published | Link | hf:doc_categories | hf:doc_tags | hf:doc_author | |
|---|---|---|---|---|---|---|---|---|---|---|
| A Microfluidic Gradient Generator Post-Modified by Two-Photon Direct Laser Writing for Dynamic Particle Functionalization | Reconfigurable microfluidic platform uses DLW-added pNIPAM actuators to trap, label, and release beads on-chip, enabling dynamic functionalization, high flexibility, and real-time control without changing flow conditions. | Scientific Paper | Direct Writing, µMLA | Journal of Applied Polymer Science | 3월, 2026 | scientific-paper | direct-writing-ko %c2%b5mla-ko | journal-of-applied-polymer-science | ||
| Programmatically Generated Microparticles Using SUEX Dry-Film Epoxy Resist | Lithographic method fabricates free-standing SUEX microparticles without substrates, achieving near-100% yield, supporting complex geometries, and enabling scalable, programmatic design of large particle libraries via Nazca Python. | Scientific Paper | Direct Writing, Mask-making, MLA 150 | arXiv Physics/Optics | 3월, 2026 | scientific-paper | direct-writing-ko mask-making-ko mla-150-ko | arxiv-physics-optics-ko | ||
| Semiconductor Review – A Decade of Driving Microfabrication Forward | Over the past decade, maskless aligners have transformed lithography by eliminating photomasks, enabling rapid design iteration, high-precision patterning, and faster microfabrication workflows in research and production. | Press | Direct Writing, MLA 150, MLA 300 | Semiconductor Review | 3월, 2026 | press | direct-writing-ko mla-150-ko mla-300-ko | semiconductor-review | ||
| 25 Years of “Sustainable Management Heidelberg”: Optimizing Operational Processes and Protecting the Climate | Heidelberg marks 25 years of its “Sustainable Management” program, honoring participants including LAB14 and Heidelberg Instruments for measurable CO₂ reductions, cost savings, and strengthened climate action collaboration. | Press | Heidelberg | 3월, 2026 | press | heidelberg | ||||
| VPG+ 200 / 400 / 800 Volume Pattern Generators | The small- and medium-area volume pattern generators for photomask production in fields such as high-resolution electronic packaging, touch panels, or in general binary templating. | Data Sheet | VPG | Heidelberg Instruments | 3월, 2026 | data-sheet | vpg-ko | heidelberg-instruments-ko | ||
| Micropatterning Photopolymerizable Hydrogels for Diffusion Studies Using Pillar Arrays or Photomasks | Micropatterned PEGDA-PEG hydrogels on-chip enable controlled in situ polymerization and localized molecular diffusion studies, supporting applications from biosensing to molecular transport and device development. | Scientific Paper | Direct Writing, DWL 66 fs | arXiv Physics/Optics | 3월, 2026 | scientific-paper | direct-writing-ko dwl-66-fs | arxiv-physics-optics-ko | ||
| Ultra-High-Efficiency On-Chip CO2 Conversion by Nanosecond Self-Pulsing Micro-Plasma Devices | Nanosecond self-pulsing micro-plasma chips enable catalyst-free CO₂-to-CO conversion with ~50% energy efficiency and 30% conversion, surpassing conventional plasma systems while operating at low power. | Scientific Paper | Direct Writing, MLA 150 | Carbon Energy | 3월, 2026 | scientific-paper | direct-writing-ko mla-150-ko | carbon-energy | ||
| Inverse-Designed Nanophotonic Neural Network Accelerators for Ultra-Compact Optical Computing | Inverse-designed nanophotonic neural network accelerators achieve ultra-compact, energy-efficient optical computing, enabling high-density parallel processing and accurate image classification within micron-scale device footprints. | Scientific Paper | Direct Writing, MLA 100 | nature communications | 3월, 2026 | scientific-paper | direct-writing-ko mla-100-ko | nature-communications-ko | ||
| Twisted MoS2 Bilayers as Functional Elements in Memtransistors: Hysteresis, Optical Signatures, and Photocurrent Kinetics | Twisted MoS₂ bilayers induce strain-driven charge effects that enhance hysteresis and photocurrent behavior, linking stacking disorder to memtransistor functionality and enabling controlled memory performance in 2D devices. | Scientific Paper | Direct Writing, MLA 150 | Advanced Electronic Materials | 3월, 2026 | scientific-paper | direct-writing-ko mla-150-ko | advanced-electronic-materials | ||
| LAB14 joins the MIT.nano Consortium | Heidelberg Instruments parent company LAB14 joins MIT.nano Consortium, contributing advanced lithography and XPS tools while strengthening academia-industry collaboration to accelerate innovation in micro- and nanofabrication technologies. | Press | Direct Writing, VPG | MIT.nano | 3월, 2026 | press | direct-writing-ko vpg-ko | mit-nano | ||
| Design and Calibration of a Single-Lens Telecentric Four-Camera Array Based on Planar Mirrors and Its Application in Strain Measurement | Single-lens telecentric four-camera array using planar mirrors enables high-precision, non-contact strain measurement, reducing parallax errors and matching strain gauge accuracy in pipeline monitoring applications. | Scientific Paper | Direct Writing, VPG | MDPI | 2월, 2026 | scientific-paper | direct-writing-ko vpg-ko | mdpi | ||
| Broadband, compact, and training-free optical processors for parallel image classification | Compact, training-free optical processor using Fourier surfaces enables broadband, parallel image classification with up to 20 simultaneous computations, achieving high accuracy and scalable, low-power performance. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | arXiv Physics/Optics | 2월, 2026 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | arxiv-physics-optics-ko | ||
| Shape-Conformal Porous Frameworks for Full Coverage of Neural Organoids and High-Resolution Electrophysiology | A self-assembling, shape-matched 3D soft interface enables high-density electrophysiology, stimulation, imaging, and neuromodulation in human neural organoids, enabling high-resolution, network-level activity mapping and disease modeling. | Scientific Paper | Direct Writing, MLA 150 | nature biomedical engineering | 2월, 2026 | scientific-paper | direct-writing-ko mla-150-ko | nature-biomedical-engineering | ||
| Transfer, Integration, and Inverse Design of Metasurfaces in Suspended Membranes | This work introduces OPTIMISM, enabling universal transfer and integration of metasurfaces in suspended membranes, highlighting inverse-designed ultrathin meta-optics and refractive-index effects for scalable fiber-tip and biomedical applications. | Scientific Paper | Direct Writing, µMLA | Moore More | 2월, 2026 | scientific-paper | direct-writing-ko %c2%b5mla-ko | moore-more | ||
| Engineered Strain in 2D Materials by Direct Growth on Deterministically Patterned Grayscale Topographies | Strain is engineered during 2D growth on grayscale topographies, achieving controlled 0–0.5% uni- and multiaxial tensile strain in MoS2 without transfer, enabling direct integration into nanoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Science | 2월, 2026 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-science-ko | ||
| Microfluidic-Driven Lipid Nanoparticles for Improved miRNA Delivery via Endo-Lysosomal Trafficking Optimization | This study shows post-processing significantly shapes miRNA-loaded lipid nanoparticles’ size, charge, stability, and intracellular trafficking, establishing strategies to optimize non-viral gene delivery performance. | Scientific Paper | Direct Writing, µMLA | Advanced Science | 2월, 2026 | scientific-paper | direct-writing-ko %c2%b5mla-ko | advanced-science-ko | ||
| Self-Powered Ultrasensitive Photodetector based on 3C-SiC/Si Heterojunction with Electron-Confined Architecture | This study presents the first island-like 3C-SiC/Si heterojunction self-powered photodetector, achieving high responsivity, detectivity, 65% EQE, and fast response at 637 nm without external bias. | Scientific Paper | Direct Writing, MLA 150 | ChemRxiv | 2월, 2026 | scientific-paper | direct-writing-ko mla-150-ko | chemrxiv | ||
| 3D Micropatterning of PEDOT:PSS/Gelatin Conductive Hydrogels via Two-Photon Lithography for Soft Bioelectronics | Soft 3D bioelectronic interfaces were fabricated by blending PEDOT:PSS with methacrylated gelatin via two-photon polymerization, yielding conductive, low-impedance, mechanically compliant hydrogels for improved neuronal interfacing. | Scientific Paper | MLA 150, Two-Photon Polymerization (TPP) | npj flexible electronics | 1월, 2026 | scientific-paper | mla-150-ko two-photon-polymerization-ko | npj-flexible-electronics | ||
| Beta Site Installation of NanoFrazor with Parallelization Capabilities at EPFL | Following the successful introduction of the modular NanoFrazor nanolithography system in 2024, Heidelberg Instruments is proud to announce the installation of the newest NanoFrazor at EPFL. | Press | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 1월, 2026 | press | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-ko | ||
| Maskless Laser Lithography for Josephson Junction Fabrication | Discover how maskless laser lithography enables efficient, high‑resolution, high‑throughput fabrication of Josephson junctions—without relying on electron beam lithography. | Application Note | Direct Writing, MLA 300 | Heidelberg Instruments | 1월, 2026 | application-note | direct-writing-ko mla-300-ko | heidelberg-instruments-ko | ||
| Strained 2D Semiconductor Lateral Heterojunctions via Grayscale Thermal-Scanning Probe Lithography | Locally strained 2D semiconductor lateral heterojunctions are created by maskless grayscale thermal-Scanning Probe Lithography, enabling tunable asymmetric electrical behavior in MoS₂–Au nanoarrays for nanoelectronic and sensing applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Small | 1월, 2026 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | small | ||
| Advancing neural interfaces: a framework for the fabrication and characterization of freestanding micro-nanodevices | A comprehensive framework for fabricating, harvesting, and characterizing freestanding micro-nanodevices, enabling minimally invasive, wireless neural interfaces with subcellular resolution and scalable neuromodulation potential. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | 1월, 2026 | scientific-paper | direct-writing-ko mla-150-ko | microsystems-nanoengineering-nature-ko | ||
| Beyond Binary Patterning: Polypropylene Carbonate as a Versatile Thermal Resist for High-Fidelity Grayscale Nanofabrication | Polypropylene carbonate enables high-resolution t-SPL nanopatterning via controlled thermal decomposition, achieving 50 nm lateral, sub-nanometer vertical resolution and grayscale pattern transfer for photonic and nanoelectronic fabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Microsystems & Nanoengineering (nature) | 1월, 2026 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | microsystems-nanoengineering-nature-ko | ||
| A Mechanophenotyping Chip for High-Throughput Detection of Metastatic Bacteria-Infected Circulating Tumor Cells | LesM microfluidic chip captures and mechanophenotypes circulating tumor cells, distinguishing bacteria-infected breast cancer cells via deformation, linking microbial cargo and biomechanics to metastatic risk and antibiotic response. | Scientific Paper | Direct Writing, MLA 150 | nature communications | 1월, 2026 | scientific-paper | direct-writing-ko mla-150-ko | nature-communications-ko | ||
| Heidelberg Instruments Reports Major Order for VPG+ 1850 FPD Volume Pattern Generator from Leading Asian Display Photomask Manufacturer | Heidelberg Instruments has received a substantial order from a top-tier photomask manufacturer in Asia for a VPG+ 1850 FPD system. | Press | VPG | Heidelberg Instruments | 12월, 2025 | press | vpg-ko | heidelberg-instruments-ko | ||
| Top-Down Fabrication of Silicon Nanowire Field-Effect Transistors Using Thermal Scanning Probe Lithography | Hybrid t-SPL and photolithography fabricate Si nanowire FETs with precise dimensional control, reproducible liquid-gate characteristics, and low-cost processing for biosensing applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | 12월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-nano-materials-ko | ||
| Bubble detachment from patterned solid surfaces: Roles of wettability contrast and domain geometry | Patterned wettability contrasts control bubble detachment, revealing contact-line pinning, geometry-dependent volumes, and deviations from classical models, offering insights to improve hydrogen electrolysis and mineral flotation efficiency. | Scientific Paper | Direct Writing, MLA 150 | ScienceDirect | 12월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | sciencedirect-ko | ||
| Two-dimensional gradients in magnetic properties created with direct-write laser annealing | Two-dimensional material-property gradients in magnetic thin films unlock novel behaviors, enabling devices such as spin-wave filters and passive domain-wall reset architectures, expanding functionality for future technologies. | Scientific Paper | Direct Writing, DWL 66+ | nature communications | 12월, 2025 | scientific-paper | direct-writing-ko dwl-66-ko | nature-communications-ko | ||
| Scalable and precise diffractive optics via grayscale lithography and soft nanoimprinting | Grayscale lithography with soft nanoimprinting enables low-cost, single-step fabrication of high-quality diffractive optics, expanding design freedom for lenses, holography, and advanced optical systems. | Scientific Paper | Direct Writing, DWL 66+, Grayscale | SPIE. Digital Library | 12월, 2025 | scientific-paper | direct-writing-ko dwl-66-ko grayscale-ko | spie-digital-library-ko | ||
| Gradient Electronic Landscapes in van der Waals Heterostructures | Thermal scanning probe lithography patterns nanometer-precise topographies in hBN-encapsulated graphene, enabling periodic electric-field modulation and tailored quantum transport potentials beyond planar device geometries. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | 12월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nano-letters-ko | ||
| Variability characteristics of non-stoichiometric, low-cost silicon oxide resistive memory | Eco-friendly silicon-oxide RRAM using biocompatible, low-cost materials shows state-of-the-art variability, supports intermediate resistance states, and suits memory-centric, non-von-Neumann computing architectures via simple microfabrication techniques methods. | Scientific Paper | Direct Writing, µMLA | AIP Advances | 12월, 2025 | scientific-paper | direct-writing-ko %c2%b5mla-ko | aip-advances-ko | ||
| Direct Laser Writing of Au Top Contacts on WSe2 for High-Speed Photodetection | Laser-written gold contacts enable WSe2 photodetectors with nanosecond response, 250 MHz bandwidth, and strong responsivity, highlighting scalable high-speed optoelectronics using 2D materials for future applications. | Scientific Paper | Direct Writing, µMLA | ACS Applied Nano Materials | 11월, 2025 | scientific-paper | direct-writing-ko %c2%b5mla-ko | acs-applied-nano-materials-ko | ||
| Defect Engineering in β‐Bi2 SeO5 /Bi2 O2 Se Heterostructures for High‐Resolution Phototransistor Arrays | Defect-engineered β-Bi2SeO5/Bi2O2Se heterojunctions suppress vacancies, enable type-II charge separation, and achieve high-responsivity phototransistors and high-resolution arrays for advanced optoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 11월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-ko | ||
| Deformability determines confined cancer cell migration efficiency with limited effect on directionality | Microfluidic studies link cancer cell deformability to improved squeezing through confinements, comparing HT1080 and MV3 cells, while showing minimal influence on migration path selection decisions. | Scientific Paper | Direct Writing, µMLA | AIP Advances | 11월, 2025 | scientific-paper | direct-writing-ko %c2%b5mla-ko | aip-advances-ko | ||
| Stretchable Porous Membranes for Barrier Tissue Models with Real-Time Measurement and Biomimetic Cyclic Strain | Gold microelectrodes patterned on porous, stretchable PDMS membranes enable impedance sensing under cyclic strain, advancing barrier tissue models and applications in wearables, robotics, and devices. | Scientific Paper | Direct Writing, MLA 150 | MDPI | 11월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | mdpi | ||
| Silicon Metalens with Subwavelength Resolution for High-Performance Flat Optics | This application note describes a low-temperature lithographic process for fabricating high-resolution silicon metalenses, overcoming thermal stress issues and enabling scalable production for mid-IR optics. | Application Note | Direct Writing, DWL 66+ | Heidelberg Instruments, Koç University | 11월, 2025 | application-note | direct-writing-ko dwl-66-ko | heidelberg-instruments-ko koc-university | ||
| A nonsurgical brain implant enabled through a cell–electronics hybrid for focal neuromodulation | Circulatronics uses immune cell–electronics hybrids for nonsurgical brain neuromodulation, enabling intravenous delivery, autonomous targeting of inflammation, wireless photovoltaic stimulation, and neural control without invasive surgery. | Scientific Paper | Direct Writing, MLA 150 | nature biotechnology | 11월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | nature-biotechnology | ||
| Three-dimensional nanoscale control of magnetism in crystalline Yttrium Iron Garnet | Focused UV laser writing enables three-dimensional, non-destructive anisotropy engineering in crystalline YIG, tuning spin-wave band structures, localization, and non-reciprocity for advanced magnonic and magneto-optic devices. | Scientific Paper | NanoFrazor, NanoFrazor Explore, Thermal Scanning Probe (t-SPL) | nature communications | 10월, 2025 | scientific-paper | nanofrazor-ko nanofrazor-explore thermal-scanning-probe-ko | nature-communications-ko | ||
| Ultrasound-driven programmable artificial muscles | Ultrasound-activated microbubble artificial muscles enable programmable, fast, lightweight actuation with high force density, scalability, and compliance, advancing soft robotics, wearable systems, and biomedical applications technologies. | Scientific Paper | Direct Writing, DWL 2000 | nature | 10월, 2025 | scientific-paper | direct-writing-ko dwl-2000 | nature-ko | ||
| Texture-engineered fabrication of ultraflat, 6-inch single-crystal Cu(111) wafers | Scalable fabrication of twin-boundary-free Cu(111) wafers enables ultraflat 6-inch substrates for high-quality wafer-scale graphene with excellent uniformity, low resistance, and high carrier mobility performance metrics. | Scientific Paper | Direct Writing, MLA 150 | Science Advances | 10월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | science-advances | ||
| Batch fabrication of ultra-sharp atomic force microscope probes with stair-shaped handles for high-precision imaging | Scalable batch-fabricated silicon AFM probes integrate ultra-sharp high-aspect-ratio tips and stair-shaped handles, enabling 5 nm resolution, unobstructed laser detection, compatibility, and durable high-fidelity nanoscale imaging. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | 10월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | microsystems-nanoengineering-nature-ko | ||
| Programmable diffractive deep neural networks enabled by integrated rewritable metasurfaces | Direct laser–written Sb2Se3 phase-change metasurfaces enable ultra-compact, low-loss, nonvolatile programmable photonic neural networks, achieving state-of-the-art accuracy in on-chip diffractive deep learning tasks. | Scientific Paper | Direct Writing, DWL 66+ | nature | 10월, 2025 | scientific-paper | direct-writing-ko dwl-66-ko | nature-ko | ||
| Single-Step 3D Patterning of Negative Resists via Maskless Aligner | Demonstrates single-step 3D patterning of negative resists using maskless aligner, enabling complex microstructures for biomedical, MEMS, and microfluidic applications. | Application Note | Direct Writing, Grayscale, MLA 150, MLA 300 | Heidelberg Instruments | 10월, 2025 | application-note | direct-writing-ko grayscale-ko mla-150-ko mla-300-ko | heidelberg-instruments-ko | ||
| Independent Control of Quality Factor and Circular Dichroism via Intrinsic Chiral Plasmonic Bound States in the Continuum | 3D symmetry-broken plasmonic metasurfaces enable visible quasi-BIC resonances with independently tunable circular dichroism and Q-factors, achieving high chiroptical performance via nanoscale height-controlled architectures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Laser & Photonics Reviews | 9월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | laser-photonics-reviews | ||
| A Decade of Discovery: Heidelberg Instruments’ MLA 150 Maskless Aligner Turns 10 | Heidelberg Instruments proudly celebrates the 10th anniversary of the MLA 150 Maskless Aligner—a breakthrough that has redefined high-resolution lithography in cleanrooms around the world. | Press | MLA 150 | Heidelberg Instruments | 9월, 2025 | press | mla-150-ko | heidelberg-instruments-ko | ||
| Manipulating Anisotropy of Second Harmonic Generation in NbOI2 via Precise Strain Engineering | Precisely oriented strain engineering in NbOI2 enhances second harmonic generation up to 19-fold, quantitatively linking strain direction with nonlinear susceptibility and enabling tunable 2D ferroelectric optoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | 9월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-functional-materials-ko | ||
| Photodegradable Hydrogel Matrices for Spatiotemporal Control of Bacteria Transport and Delivery | Photodegradable PEG hydrogels enable spatiotemporal control of bacterial motion, speed, and delivery, guiding chemotaxis and controlled release for advanced living-material and therapeutic applications. | Scientific Paper | Direct Writing, DWL 66+ | ACS Applied Materials & Interfaces | 9월, 2025 | scientific-paper | direct-writing-ko dwl-66-ko | acs-applied-materials-interfaces-ko | ||
| µCodes: A Universal Grid Platform for Microscale Mapping, Microscopy Navigation, and Multimodal Imaging | µCodes is a microgrid system enabling precise sample tracking and image alignment across diverse optical and electron microscopy modalities. | Scientific Paper | Direct Writing, MLA 150 | Small | 8월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | small | ||
| Inkjet-Printed 3D Sensor Arrays with FIB-Induced Electrode Refinement for Low-Noise Amperometric Recordings in hiPSC-Derived Brain Organoids | Customizable 3D microelectrode arrays enable selective, low-noise recordings across organoid depths, overcoming planar MEA limits via inkjet printing, FIB milling, and electrodeposition for activity studies. | Scientific Paper | Direct Writing, µMLA | ACS Sensors | 8월, 2025 | scientific-paper | direct-writing-ko %c2%b5mla-ko | acs-sensors | ||
| Microscopic geared metamachines | Optically driven metasurfaces power on-chip micromachines, enabling lithographically fabricated gear trains and micromechanisms down to tens of micrometers with sub-micrometer precision and scalable integration capabilities. | Scientific Paper | Direct Writing, MLA 150 | nature communications | 8월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | nature-communications-ko | ||
| Grayscale Exposure Challenges Using Direct-Write Laser Exposure on Thick Positive Resist | Poster by Gerda Ekindorf about grayscale exposure challenges using direct-write laser exposure on thick positive resists. | Poster | Direct Writing, DWL, DWL 66+, Grayscale | Gerda Ekindorf, Heidelberg Instruments, micro resist technology | 8월, 2025 | poster | direct-writing-ko dwl-ko dwl-66-ko grayscale-ko | gerda-ekindorf-ko heidelberg-instruments-ko micro-resist-technology-ko | ||
| Exposure of Sprayed Photoresist on KOH Etched Side Walls of a Silicon Wafer with Heidelberg Instruments DWL 66+ | The DWL 66+ enables precise photoresist patterning on KOH-etched silicon sidewalls, achieving superior resolution compared to traditional mask aligners. | Application Note | Direct Writing, DWL 66+ | Fraunhofer IMM, Heidelberg Instruments | 8월, 2025 | application-note | direct-writing-ko dwl-66-ko | fraunhofer-imm-2-ko heidelberg-instruments-ko | ||
| Josephson Junction Device Fabrication with the NanoFrazor | High-resolution, damage-free NanoFrazor lithography enables fast and reliable fabrication of Josephson junctions for quantum and nanoelectronics applications. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 8월, 2025 | application-note | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-nano-ko | ||
| High-Resolution Lift-Off Process with the NanoFrazor | This application note describes the NanoFrazor’s high-resolution lift-off process for creating sub-100 nm metal features with low line edge roughness using thermal lithography. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 8월, 2025 | application-note | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-nano-ko | ||
| Low-loss superconducting resonators fabricated from tantalum films grown at room temperature | Room-temperature growth of α-tantalum on silicon using niobium seed layers yields superconducting resonators with state-of-the-art quality factors, enabling low-thermal-budget integration for qubit circuits applications. | Scientific Paper | Direct Writing, MLA 150 | nature communications | 8월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | nature-communications-ko | ||
| VPG 300 DI Maskless Stepper | Maskless direct imager for high-accuracy and high-resolution microstructures. | Data Sheet | VPG | Heidelberg Instruments | 8월, 2025 | data-sheet | vpg-ko | heidelberg-instruments-ko | ||
| VPG+ 1400 FPD / VPG+ 1850 FPD Volume Pattern Generators | High-volume photomask production on large substrates with extremely accurate alignment and fast, high-quality exposures. Perfect for flat panel display (FPD) applications. | Data Sheet | VPG | Heidelberg Instruments | 8월, 2025 | data-sheet | vpg-ko | heidelberg-instruments-ko | ||
| Heidelberg Instruments Enhances DWL 66+ Lithography System, Achieving Market-Leading 200 nm Resolution and 65,536 Grayscale Levels | Heidelberg Instruments has made significant performance upgrades to its renowned DWL 66+ direct-write lithography system, solidifying its position as the ultimate research tool for microfabrication. | Press | Direct Writing, DWL 66+, Grayscale | Heidelberg Instruments | 7월, 2025 | press | direct-writing-ko dwl-66-ko grayscale-ko | heidelberg-instruments-ko | ||
| Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process | CMOS-compatible SOI foundry integration enables scalable silicon NEM switches with low-voltage operation, volatile and nonvolatile modes, paving high-density logic and memory for extreme environments. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | 7월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | microsystems-nanoengineering-nature-ko | ||
| Picoeukaryote-based biohybrid microrobots for active delivery in the kidney | Picoeukaryote-based biohybrid microrobots enable active drug delivery in confined environments, demonstrating strong motility, kidney penetration, long-term retention, biosafety, and immune evasion in vivo. | Scientific Paper | Direct Writing, MLA 150 | Science Advances | 7월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | science-advances | ||
| Confinement-Enhanced Core–Shell Avalanche Photodetectors | A SiO2-passivated Si nanowire/graphene nanoresonator enhances 1550 nm absorption and confined avalanche multiplication, achieving 56.6 A/W responsivity and 2.6×10⁴ gain for CMOS-compatible NIR photodetection. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | 7월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-nano-ko | ||
| Nanofabrication of All-Dielectric Metasurfaces through Pulsed Thermal Scanning Probe Lithography | Pulsed thermal scanning probe lithography enables sub-10 nm patterning on insulating silica without conductive layers, advancing all-dielectric metasurface fabrication and material compatibility in nanofabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Scientific Reports | 7월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | scientific-reports | ||
| Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal Dichalcogenides | Noninvasive t-SPL enables high-resolution nanolithography on transparent substrates, enabling tunable plasmonic nanostructures for applications in nanophotonics, sensing, and thermoplasmonics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Engineering Materials | 6월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-engineering-materials | ||
| Hybrid-Contact Engineering for Enhanced P-Type Performance in WSe2 Field-Effect Transistors | Hybrid edge-top contacts in WSe2 FETs mitigate Fermi-level pinning, boosting p-type conduction, lowering contact resistance and Schottky barriers, enabling efficient complementary post-silicon electronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanotechnology | 6월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nanotechnology-ko | ||
| Printed Conformal and Transparent Magnetoresistive Sensors for Seamless Integration and Environment-Resilient Touchless Interaction | Magnetic-field-aligned nanowires enable transparent, conformable magnetoresistive sensors with 85% transparency, high out-of-plane sensitivity, bending and stretching durability, touchless operation, and stable performance in environments applications. | Scientific Paper | Direct Writing, DWL 66+ | ACS Nano | 6월, 2025 | scientific-paper | direct-writing-ko dwl-66-ko | acs-nano-ko | ||
| DWL 66+ Ultimate Lithography Research Tool | Versatile system for research and prototyping with highest resolution and wide selection of options. | Data Sheet | DWL 66+ | Heidelberg Instruments | 6월, 2025 | data-sheet | dwl-66-ko | heidelberg-instruments-ko | ||
| Fourier-Tailored Light–Matter Coupling in van der Waals Heterostructures | Fourier-patterned hBN/WS2 van der Waals heterostructures enhance exciton–waveguide coupling, enabling exciton-polariton formation near strong coupling for advanced optoelectronic and quantum devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | 5월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-nano-ko | ||
| Reconfigurable Artificial Synapses Based on Ambipolar Environmentally Stable Tellurium for Neuromorphic Computing | Ambipolar tellurium floating-gate devices enable nonvolatile memory with high retention, endurance, large on/off ratios, and reconfigurable excitatory–inhibitory synapses, achieving >90% accurate neuromorphic image recognition. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 5월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-materials-interfaces-ko | ||
| Semiconductor Review – Precision by Partnership in the Micro-Optics Era | Cover story of Semiconductor Review on how Heidelberg Instruments redefines precision through partnership in the micro-optics era. Interview with Heidelberg Instruments CEO Konrad Roessler. | Press | Semiconductor Review | 5월, 2025 | press | semiconductor-review | ||||
| Engineering flexible superblack materials | A scalable silicon-mold and polymer-casting platform produces flexible, durable superblack materials with 0.15% reflectance, angle-insensitive Lambertian behavior, and customizable surfaces for advanced optical applications. | Scientific Paper | Direct Writing, MLA 150 | nature communications | 5월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | nature-communications-ko | ||
| MLA 150 Advanced Maskless Aligner | The fastest maskless tool for rapid prototyping, the perfect alternative to mask aligners. | Data Sheet | MLA 150 | Heidelberg Instruments | 5월, 2025 | data-sheet | mla-150-ko | heidelberg-instruments-ko | ||
| Tunable chiral magneto-transport through band structure engineering in magnetic topological insulators Mn(Bi1−xSbx)2Te4 | Sb alloying in Mn(Bi,Sb)2Te4 tunes Berry curvature, spin chirality, and harmonic Hall responses, inducing topological transitions and reversible anomalous Hall effects for chiral spin-orbitronic devices. | Scientific Paper | Direct Writing, MLA 150 | Science Advances | 5월, 2025 | scientific-paper | direct-writing-ko mla-150-ko | science-advances | ||
| Multifunctional Logic-in-Memory Circuits Based on Reconfigurable WSe2 Transistors via Enhanced Ambipolarity | Scanning probe lithography enhances ambipolar WSe2 transport, enabling nonvolatile reconfigurable memory, transistor, and diode modes with ~10¹⁰ on/off ratios, realizing ambient logic-in-memory circuits. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | 5월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-nano-ko | ||
| Grayscale exposure challenges using direct-write laser exposure on thick positive resist | Poster by Gerda Ekindorf about grayscale exposure challenges using direct-write laser exposure on ultra-thick positive photoresists. | Poster | Direct Writing, DWL 66+, Grayscale | Heidelberg Instruments | 5월, 2025 | poster | direct-writing-ko dwl-66-ko grayscale-ko | heidelberg-instruments-ko | ||
| The Lithographer – Surface Issue | Surface Issue of The Lithographer, published in May 2025. How micro- and nanoscale features are engineered to drive innovation in research and industry. | The Lithographer | Direct Writing, Grayscale, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 5월, 2025 | the-lithographer | direct-writing-ko grayscale-ko thermal-scanning-probe-ko | heidelberg-instruments-ko | ||
| Diffraction of Light from Optical Fourier Surfaces | Precisely fabricated optical Fourier surfaces show measured diffraction matching electrodynamic simulations, outperforming binary profiles and scalar models, enabling accurate Fourier-spectrum engineering for advanced holography and optical computing. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Photonics | 4월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-photonics | ||
| Combination of Thermal Scanning Probe Lithography and Directed Self-Assembly of Block Copolymers | Combining thermal scanning probe lithography with block copolymer self-assembly enables sub-20 nm, high-density quantum device patterning, achieving depth-amplified nanoholes and sub-10 nm placement accuracy. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | SPIE. Digital Library | 4월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | spie-digital-library-ko | ||
| Aptamer-Based Microfluidic Assay for In-Field Detection of Salicylic Acid in Botrytis cinerea-Infected Strawberries | A microfluidic aptamer assay enables rapid, sensitive salicylic acid detection in plants, supporting early infection diagnosis, field deployment, and improved crop management under climate change. | Scientific Paper | Direct Writing, DWL | MDPI | 4월, 2025 | scientific-paper | direct-writing-ko dwl-ko | mdpi | ||
| Spin wave perturbation in rare-earth iron garnet thin films with epitaxial strain relaxation | Epitaxial strain in YIG and LuIG thin films preserves magnetization and low damping, enhancing spin-wave transmission, while strain relaxation induces defects degrading performance for magnonic devices. | Scientific Paper | Direct Writing, DWL 66+ | APL Materials | 4월, 2025 | scientific-paper | direct-writing-ko dwl-66-ko | apl-materials-ko | ||
| Detection of Dynamic Temperature Modulation using a Thermal Scanning Probe Lithography (t-SPL) System | Thermal scanning probe lithography enables nanoscale thermal diffusivity measurement via localized periodic heating and temperature-wave phase analysis, achieving 10–100 nm resolution without miniaturized sensing. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | AIP Publishing | 4월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | aip-publishing | ||
| Dynamic BIC in Customizable Hydrogel Metagratings for Advanced Information Security | Water-responsive hydrogel metagratings with grayscale thermal patterning enable humidity-tunable q-BIC resonances for multistage visible optical encryption and concealed Morse-code decryption. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | 3월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-functional-materials-ko | ||
| Challenges of photomask-based greyscale lithography with a highly-sensitive positive photoresist designed for >100µm deep greyscale patterns | Greyscale lithography enables 2.5D microstructures for micro-optics. The authors examine deep patterning in mr-P 22G_XP resist using mask aligners, resist aging effects, and suitable photomask requirements. | Scientific Paper | DWL 66+, Grayscale | SPIE. Digital Library | 3월, 2025 | scientific-paper | dwl-66-ko grayscale-ko | spie-digital-library-ko | ||
| Color astrophotography with a 100 mm-diameter f/2 polymer flat lens | A 100 mm achromatic diffractive lens for 400-800 nm, created with the DWL 66+, achieves high-resolution full-color imaging and reduced telescope weight. | Scientific Paper | DWL 66+ | Applied Physics Letters | 3월, 2025 | scientific-paper | dwl-66-ko | applied-physics-letters-ko | ||
| Toward Phonon-Limited Transport in Two-Dimensional Transition Metal Dichalcogenides by Oxygen-Free Fabrication | An oxygen-free fabrication approach boosts MoS2 and WS2 FET mobility toward phonon limits, achieving record values and showing oxygen chemisorption critically degrades 2D transistor performance. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | 2월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-nano-ko | ||
| Hybrid Contact for High‐Performance MoS2 Transistors via Hard‐Mask Scanning Probe Lithography | Hard-mask scanning probe lithography enables hybrid contacts for MoS2 FETs, improving carrier injection, reducing contact resistance and Schottky barriers, achieving high on-current, large on/off ratios, and ~18 … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 1월, 2025 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-ko | ||
| ULTRA Semiconductor Mask Writer | A tool specifically designed to produce mature semiconductor photomasks. | Data Sheet | ULTRA | Heidelberg Instruments | 11월, 2024 | data-sheet | ultra-ko | heidelberg-instruments-ko | ||
| Heidelberg Instruments Reports Major Orders for the VPG+ 1400 FPD Volume Pattern Generator from Leading Asian Photomask Manufacturers | Heidelberg Instruments has secured two major orders for its VPG+ 1400 FPD Volume Pattern Generator from leading photomask manufacturers in Asia. | Press | VPG | Heidelberg Instruments | 11월, 2024 | press | vpg-ko | heidelberg-instruments-ko | ||
| Selective Placement of Functionalised DNA Origami via Thermal Scanning Probe Lithography Patterning | Thermal scanning probe lithography organized functionalized DNA origami into predefined nanoarrays with single-molecule precision, positioning gold nanoparticles and quantum dots for heterofunctional bionanotechnology applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Materials Advances | 11월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | materials-advances | ||
| Quantitative Mapping of Smooth Topographic Landscapes Produced by Thermal Scanning-Probe Lithography | This work introduces FunFit, open-source software fitting analytical functions to SPM data, enabling precise fabrication, transfer, and feedback analysis of tSPL-patterned polymer and hBN nanoscale landscapes. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nature Protocols | 10월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nature-protocols | ||
| The Lithographer – Interview with Dr. Nolan Lassaline | From classical optics to quantum electronics: A researcher’s journey inspired by thermal scanning probe lithography. Interview with Dr. Nolan Lassaline from TU Denmark. | The Lithographer | Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 10월, 2024 | the-lithographer | thermal-scanning-probe-ko | heidelberg-instruments-ko | ||
| Fabrication of refractive micro-lenses for orbital angular momentum generation by direct laser writing and nanoimprint lithography | This application note describes the fabrication of refractive micro-lenses using Direct Laser Writing and Nanoimprint Lithography for generating orbital angular momentum in light waves. | Application Note | Direct Writing, DWL 66+, Nanoimprint Lithography | GermanLitho, Heidelberg Instruments | 10월, 2024 | application-note | direct-writing-ko dwl-66-ko nanoimprint-lithography-ko | germanlitho-ko heidelberg-instruments-ko | ||
| Nanoscale-Localized Multiplexed Biological Activation of Field Effect Transistors for Biosensing Applications | Thermal scanning probe lithography enables nanoscale, multiplexed biofunctionalization of FET biosensors, achieving sub-20 nm precision and ultrasensitive SARS-CoV-2 detection with graphene FETs. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanoscale | 9월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nanoscale | ||
| High-resolution patterning of nanowire-based quantum devices with the NanoFrazor | The NanoFrazor offers a unique patterning solution, combining t-SPL and laser mix and match lithography. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 9월, 2024 | application-note | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-nano-ko | ||
| Liquid Metal Oxide-Assisted Integration of High-k Dielectrics and Metal Contacts for Two-Dimensional Electronics | Liquid metal oxide enables ultrathin high-k HfO2 integration on 2D semiconductors, achieving smooth interfaces, low-leakage WS2 transistors, minimal hysteresis, and scalable dielectric-contact stacking for nanoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Nano | 9월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-nano-ko | ||
| Damage-free nanolithography enabling superior device performance | Thermal scanning probe lithography enabled by NanoFrazor helps to fabricate devices with superior performance due to its damage-free patterning principle. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 9월, 2024 | application-note | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-nano-ko | ||
| Assembly and Bilayer Liftoff of Periodic Nanostructures with Sub-20 nm Resolution Using Thermal Scanning Probe Lithography | Optimized thermal scanning probe lithography achieved 10 nm resolution. Combined with bilayer liftoff, sub-20 nm metal structures were fabricated and validated for photonic dipole devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | MDPI | 9월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | mdpi | ||
| Scalable Layer‐Controlled Oxidation of Bi2 O2 Se for Self‐Rectifying Memristor Arrays With sub‐pA Sneak Currents | UV-assisted oxidation created β-Bi2SeO5/Bi2O2Se heterostructure memristors with self-rectifying switching, high ON/OFF ratios, sub-pA sneak currents, sub-100 ns speed, low power, enabling scalable neuromorphic arrays. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 9월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-ko | ||
| Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs | Engineered nanotopography induces tensile strain in MoS2 FETs, significantly enhancing carrier mobility and on-state current, promising advancements for 2D material-based electronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | 8월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nature-communications-ko | ||
| NanoFrazor for Direct Nanoscale Chemical Conversion of Materials | Chemical conversion using a thermal scanning probe can be used to make biosensors with advanced architecture and tailor surface chemistry to create nanostructures. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 8월, 2024 | application-note | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-nano-ko | ||
| NanoFrazor | The NanoFrazor takes nanofabrication to the next level. Building on decades of research and development, the NanoFrazor brings thermal scanning probe lithography (t-SPL) into your laboratory. Its … | Data Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Heidelberg Instruments Nano | 7월, 2024 | data-sheet | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-ko heidelberg-instruments-nano-ko | ||
| Vertical micropillars arrays with high aspect ratio submicron gap by metal assisted chemical etching as active components in new sensor devices | MacEtch, a plasma-free anisotropic etching method, produces sharp vertical silicon structures without ion damage, beneficial for sensors, X-ray optics, photovoltaics, vias, and bio-interfaces. | Application Note | Direct Writing, DWL 66+ | ETH Zürich, Heidelberg Instruments, Paul Scherrer Institute | 7월, 2024 | application-note | direct-writing-ko dwl-66-ko | eth-zurich-ko heidelberg-instruments-ko paul-scherrer-institute-ko | ||
| Fabrication of a hybrid device for the integration of light-triggered proton pumps | A novel method for fabricating a hybrid device that integrates light-triggered proton pumps into a network of nanochannels for applications in directed ion transport. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | 6월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | micro-and-nano-engineering-science-direct-ko | ||
| Nano-Ironing van der Waals Heterostructures toward Electrically Controlled Quantum Dots | Nanoironing van der Waals heterostructures enhances interface quality, significantly improving electrical performance and enabling controlled quantum dot formation for advanced quantum technologies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 6월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-materials-interfaces-ko | ||
| Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates | This review discusses and compares different lithographic techniques for fabricating SERS substrates, highlighting their strengths and limitations, and explores their potential for commercial applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | 6월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | micro-and-nano-engineering-science-direct-ko | ||
| Wire suspended on a v-groove cavity to measure gas physical properties | Thermal flow sensors measure fluid flow by detecting heat dissipation from a heated wire. A novel silicon-based design compensates for fluctuations ensuring accuracy. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, University of Twente | 5월, 2024 | application-note | direct-writing-ko mla-150-ko | heidelberg-instruments-ko university-of-twente-ko | ||
| Hollow silicon-based microneedle array for dermal interstitial fluid extraction fabricated by only dry etching on wafer scale | Silicon-based microneedles enable interstitial fluid biomarker extraction. Proposed dry etching technique achieves mass production compatibility, enhancing biomedical applications for minimally invasive diagnostics and monitoring. | Application Note | Direct Writing, MLA 150 | EPFL, Heidelberg Instruments, Xsensio | 5월, 2024 | application-note | direct-writing-ko mla-150-ko | epfl-ko heidelberg-instruments-ko xsensio-ko | ||
| Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist | The effects of incorporating a base quencher into a poly(phthalaldehyde-co-propanal) photoresist to enhance the performance of dry-develop resist in a direct-write UV lithography tool. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ECS Journal of Solid State Science and Technology | 5월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | ecs-journal-of-solid-state-science-and-technology-ko | ||
| Thermal scanning probe and laser lithography for patterning nanowire based quantum devices | The NanoFrazor combines thermal scanning probe and laser writing lithography to fabricate InSb nanowire quantum devices, achieving quasi-ballistic transport with reduced fabrication-induced disorder. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanotechnology | 4월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nanotechnology-ko | ||
| µMLA Tabletop Maskless Aligner | Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules. | Data Sheet | µMLA | Heidelberg Instruments | 4월, 2024 | data-sheet | %c2%b5mla-ko | heidelberg-instruments-ko | ||
| Thermal nanoconversion of ferromagnetic nanoislands | This paper examines the use of thermal nanoconversion (TNC) to modify the magnetic properties of nickel-iron (Ni80Fe20) nanoislands. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Applied Physics Letters | 3월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | applied-physics-letters-ko | ||
| Tailored Micromagnet Sorting Gate for Simultaneous Multiple Cell Screening in Portable Magnetophoretic Cell‐On‐Chip Platforms | Novel technique for selectively sorting magnetic carriers and cells using a multi-notched disk micromagnet, enabling precise manipulation even in low magnetic fields. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | 3월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-functional-materials-ko | ||
| MLA 300 Industrial Maskless Aligner | Optimised for industrial production with highest throughput and seamless integration into industrial production lines. | Data Sheet | MLA 300 | Heidelberg Instruments | 3월, 2024 | data-sheet | mla-300-ko | heidelberg-instruments-ko | ||
| Fabrication of a Silicon Electron Multiplier sensor using metal assisted chemical etching and its characterisation | SiEM sensor utilizing metal-assisted chemical etching to create high aspect ratio silicon pillars with charge multiplication capabilities. Electrical tests confirm compatibility with p–n junctions. | Scientific Paper | Direct Writing, DWL 66+ | ScienceDirect | 3월, 2024 | scientific-paper | direct-writing-ko dwl-66-ko | sciencedirect-ko | ||
| Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification | A novel method for amplifying the depth of grayscale nanopatterns in dielectric materials like SiO2 using a combination of t-SPL and optimized dry etching techniques. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Microsystems & Nanoengineering | 2월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | microsystems-nanoengineering-ko | ||
| Biosynthesis enhancement of tropodithietic acid (TDA) antibacterial compound through biofilm formation by marine bacteria Phaeobacter inhibens on micro-structured polymer surfaces | Microfluidic channels cultivate Phaeobacter inhibens biofilms on diverse polymer surfaces, offering biocontrol potential in aquaculture by mitigating antibiotic risks. Creating diverse surfaces to promote biosynthesis. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, Technical University of Denmark (DTU) | 2월, 2024 | application-note | direct-writing-ko mla-150-ko | heidelberg-instruments-ko technical-university-of-denmark-dtu-ko | ||
| Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study | This paper describes the fabrication and characterisation of a flat conical lens (fraxicon) with a diameter of 0.2 mm for use in miniaturised optical applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | 1월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nanomaterials-ko | ||
| Transistors platform for rapid and parallel detection of multiple pathogens by nanoscale-localized multiplexed biological activation | This paper describes a scalable and CMOS-compatible fabrication strategy for modifying individual field-effect transistors (FETs) with distinct bioreceptors. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature | 1월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nature-ko | ||
| Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication | This paper describes a hybrid thermal lithography method that uses silk fibroin as a water-developable resist for the fabrication of micro and nanoscale structures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Science | 1월, 2024 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-science-ko | ||
| Achieving Reliable and Ultrafast Memristors via Artificial Filaments in Silk Fibroin | This paper investigates using biocompatible silk fibroin (SF) as a switching medium in silver/SF/gold (Ag/SF/Au) memristors. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 11월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-ko | ||
| Generating smooth potential landscapes with thermal scanning-probe lithography | Scanning probe microscopy with a NanoFrazor achieves atomic precision, enabling controlled material manipulation and high-resolution lithography, with broad applications in photonics, electronics, and nanomaterials science. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Physics: Materials | 11월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | journal-of-physics-materials-ko | ||
| Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates | Thermal scanning-probe lithography (t-SPL) enables high-resolution nanolithography on transparent substrates with conductive oxide films, creating tunable plasmonic nanostructures for nanophotonics and sensing applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | 10월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-nano-materials-ko | ||
| Large Scale Fresnel Zone Plates On SiN-Membranes | This application note describes the fabrication process of Fresnel Zone Plates on a thin silicon nitride membrane substrate for X-ray optics using a DWL 66+. | Application Note | DWL 66+ | Heidelberg Instruments, XRnanotech | 9월, 2023 | application-note | dwl-66-ko | heidelberg-instruments-ko xrnanotech-ko | ||
| Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell Transfection | Micro-projectiles were created through maskless UV lithography, O2 plasma treatment, silicon etching, and metal cladding. These conical micro-projectiles have applications in magnetically guided cell transfection. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, IDUN DTU | 9월, 2023 | application-note | direct-writing-ko mla-150-ko | heidelberg-instruments-ko idun-dtu-ko | ||
| Superconducting nonlinear transport in optically driven high-temperature K3C60 | This study investigates the electrical responses of optically driven quantum material, revealing nonlinear current-voltage characteristics indicative of photo-induced superconductivity, with potential applications in high-speed devices. | Scientific Paper | Direct Writing, µMLA | nature communications | 9월, 2023 | scientific-paper | direct-writing-ko %c2%b5mla-ko | nature-communications-ko | ||
| LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments | Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment in state-of-the-art machinery. Press Release, Lumineq Oy, Sept. 11, 2023. | Press | Direct Writing, MLA 300 | Lumineq | 9월, 2023 | press | direct-writing-ko mla-300-ko | lumineq-ko | ||
| Complete logic operations in an ambipolar tellurium homojunction via non-invasive scanning probe lithography | Low-dimensional semiconductors, like tellurium nanoribbons, enable miniaturized logic devices via ambipolar conduction. Non-invasive lithography creates transistors performing all seven basic logic operations. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Device | 9월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | device-ko | ||
| Spin-acoustic control of silicon vacancies in 4H silicon carbide | Spin-acoustic control demonstrated on a 4H silicon carbide-based bulk acoustic resonator allows frequency-tunable probing of resonances, aiding in dynamic strain distribution analysis for microelectromechanical systems. | Scientific Paper | Direct Writing, MLA 150 | nature electronics | 9월, 2023 | scientific-paper | direct-writing-ko mla-150-ko | nature-electronics-ko | ||
| Exploiting Thermal Scanning Probe Lithography for the Fabrication of Micro and Nano Electronic Devices | Thermal scanning probe lithography enables fast fabrication of micro/nano structures with 100nm resolution, enhancing electronic performance through gold coating and resistivity characterization. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC) | 9월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | 2023-international-conference-on-optical-mems-and-nanophotonics-omn-and-sbfoton-international-optics-and-photonics-conference-sbfoton-iopc-ko | ||
| Nanopatterning of 2D materials by block copolymer self-assembly | Nanopatterning using block copolymer (BCP) self-assembly is a promising way to advancements in applications ranging from water treatment technologies to energy-efficient devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Technical University of Denmark (DTU) | 8월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | technical-university-of-denmark-dtu-ko | ||
| Nano-Rectennas for Harnessing Infrared Energy | This thesis optimizes MIM rectenna diodes via barrier engineering and scaling, improving responsivity, asymmetry and coupling efficiency, demonstrating enhanced THz rectification and proposing nanoscale rectenna fabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Serdar B. Tekin | 8월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | serdar-b-tekin | ||
| Novel Mixed-Dimensional hBN-Passivated Silicon Nanowire Reconfigurable Field Effect Transistors: Fabrication and Characterization | This work demonstrates a reconfigurable field-effect transistor (RFET) combining a Si nanowire with a 2D hBN dielectric, improving electrical characteristics and enabling dynamic polarity control. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 8월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-materials-interfaces-ko | ||
| Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices | Direct patterning technology enables cost-effective design and production of devices, enhancing the fabrication of inorganic materials for optoelectronic, electronic, and energy applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Physics Research | 8월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-physics-research-ko | ||
| Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing | Nanomaterials derive unique properties from their nanostructure. A perspective explores advanced nanofabrication techniques to modify properties in condensed matter systems, discussing applications and future prospects. | Scientific Paper | Direct Writing, DWL 66+, NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | 8월, 2023 | scientific-paper | direct-writing-ko dwl-66-ko nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-technologies-ko | ||
| Bilayer Lift-Off for NanoFrazor Lithography | Explore bilayer lift-off with NanoFrazor lithography, addressing advantages, process details, and examples, including high-quality contacts and structures as small as 7 nm. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 7월, 2023 | application-note | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-nano-ko | ||
| Ultra-High Resolution Pattern Transfer on NanoFrazor Lithography | High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor lithography, multi-layer stacks, and alternative strategies for superior patterns are discussed. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 7월, 2023 | application-note | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-nano-ko | ||
| Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release | This application note discusses microdevice-based drug delivery, focusing on dual compartment microcontainers (DCMCs) produced via maskless UV lithography. Potential for combination therapy is highlighted. | Application Note | Direct Writing, µMLA | Heidelberg Instruments, IDUN DTU | 7월, 2023 | application-note | direct-writing-ko %c2%b5mla-ko | heidelberg-instruments-ko idun-dtu-ko | ||
| High-sensitive two-dimensional PbI2 photodetector with ultrashort channel | This study reports a PbI2-based photodetector with the highest responsivity (172 A/W) achieved, using thermal scanning probe lithography for ultrashort channel fabrication to enhance performance. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Frontiers of Physics | 7월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | frontiers-of-physics-ko | ||
| Spin Transport in Superconducting and Ferromagnetic Heterostructures | This thesis engineers S/F and F/HM heterostructures, demonstrating high-quality Nb films, tunable spin transport, perpendicular anisotropy, and superconducting spin valves probing super spin currents via neutron reflectivity … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Liam O'Brien | 6월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | liam-obrien | ||
| Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithography | Achieve straight, vertical sidewalls in thick negative-tone resist using focused laser beam-based direct write lithography, overcoming non-homogeneous illumination and non-sharp edges. (Possible application: MEMS) | Scientific Paper | Direct Writing, DWL 66+ | Micro and Nano Engineering (ScienceDirect) | 6월, 2023 | scientific-paper | direct-writing-ko dwl-66-ko | micro-and-nano-engineering-science-direct-ko | ||
| “Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023 | Energieführungssystem für die partikelfreie Halbleiterfertigung in den Anlagen von Heidelberg Instruments. Only available in German at this point. | Press | VPG | WILEY Verlag | 5월, 2023 | press | vpg-ko | wiley-verlag-ko | ||
| Overview on Maskless Grayscale Lithography | From design to micro structured topography: Grayscale lithography can be used to quickly fabricate various 2.5D and 3D structures at the micro scale. | Video | Grayscale | Heidelberg Instruments | 5월, 2023 | video | grayscale-ko | heidelberg-instruments-ko | ||
| Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT | PMN–PT thin film disks, with single-electrode actuation, showcase self-aligned tangential and wineglass modes for high-frequency bulk acoustic wave (BAW) MEMS gyroscopes. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | 5월, 2023 | scientific-paper | direct-writing-ko mla-150-ko | microsystems-nanoengineering-nature-ko | ||
| Multilevel diffractive lens in the MWIR with extended depth-of-focus and wide field-of-view | Compare inverse-designed and conventional lenses in MWIR optics. The inverse-designed lens offers better depth-of-focus and off-axis performance but with larger spot size and reduced efficiency. | Scientific Paper | Direct Writing, DWL 66+ | Optics Express | 5월, 2023 | scientific-paper | direct-writing-ko dwl-66-ko | optics-express-ko | ||
| MEMS micro-coils for magnetic neurostimulation | Innovative MEMS micro-coil probe fabrication overcame brain stimulation challenges, validated in vivo. International collaboration advances micro-magnetic stimulation for applications like artificial vision and hearing. | Scientific Paper | MLA 150 | Biosensors and Bioelectronics (ScienceDirect) | 5월, 2023 | scientific-paper | mla-150-ko | biosensors-and-bioelectronics-sciencedirect-ko | ||
| Ultra-thick positive photoresist layers for maskless grayscale lithography | Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental resist. | Scientific Paper | Direct Writing, DWL 66+, Grayscale | Heidelberg Instruments, SPIE. Digital Library | 4월, 2023 | scientific-paper | direct-writing-ko dwl-66-ko grayscale-ko | heidelberg-instruments-ko spie-digital-library-ko | ||
| Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography | Utilizing grayscale lithography and hard-mask methods, silicon carbide hosts micrometer-scale features and hemispherical solid immersion lenses, boosting optical collection for quantum emitters. Scalable, reproducible, CMOS-compatible. | Scientific Paper | Direct Writing, DWL 66+, Grayscale | Applied Physics Letters | 4월, 2023 | scientific-paper | direct-writing-ko dwl-66-ko grayscale-ko | applied-physics-letters-ko | ||
| Normally-Off p-GaN Gate High-Electron-Mobility Transistors with the Air-Bridge Source-Connection Fabricated Using the Direct Laser Writing Grayscale Photolithography Technology | Fabrication of a p-GaN gate HEMT with an air-bridge source connection using direct grayscale lithography, achieving good performance with high breakdown voltage and low on-resistance. | Scientific Paper | Direct Writing, DWL 66+ | Crystals | 4월, 2023 | scientific-paper | direct-writing-ko dwl-66-ko | crystals-ko | ||
| Grayscale with GenISys 3D-PEC | We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser lithography. | Application Note | Direct Writing, DWL 66+, Grayscale | GenISys GmbH, Heidelberg Instruments | 3월, 2023 | application-note | direct-writing-ko dwl-66-ko grayscale-ko | genisys-gmbh-ko heidelberg-instruments-ko | ||
| A New Method of AFM‐Based Nanolithography Using Frequency Enhanced Electrochemical Pressure Solution Etching | This paper investigates Frequency Enhanced Electrochemical Pressure Solution (FEEPS) as a novel nanolithography method for etching silica surfaces with an AFM tip. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | 3월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-technologies-ko | ||
| Spectral tuning of Bloch Surface Wave resonances by light-controlled optical anisotropy | This work demonstrates dynamic control of resonant modes in a 2D bull’s eye cavity using optically-induced anisotropy, enabling precise tuning in metasurface-based optics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanophotonics | 2월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nanophotonics-ko | ||
| Spin Transport and Associated Background Effects in All-Metallic Non-Local Spin Valves | This thesis investigates spin transport and relaxation mechanisms in all-metallic non-local spin valves across varied materials, temperatures and magnetic fields, clarifying spurious effects for low-power spintronic applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Alexander James Wright | 2월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | alexander-james-wright | ||
| The choice of an autocorrelation length in dark‑field lung imaging | X-ray dark-field radiography (XDFR) explores lung microstructures. Porcine lungs exhibit similar extinction coefficients to PMMA spheres, emphasizing the critical autocorrelation length for effective clinical imaging. | Scientific Paper | Direct Writing, DWL 66+ | scientific reports (nature) | 2월, 2023 | scientific-paper | direct-writing-ko dwl-66-ko | scientific-reports-nature-ko | ||
| Shaping Interfaces for Manipulation and Imaging of Nano-Objects in Nanofluidic Confinement | This study demonstrates nanoscale particle manipulation using nanofluidic slits, thermal scanning probe lithography, and electrostatic interactions for sorting, trapping, and surface charge modulation applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ETH Zürich | 1월, 2023 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | eth-zurich-ko | ||
| Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3 | Orthorhombic κ-Ga2O3 is a superior ultrawide bandgap material for extreme environments. We demonstrate ultrasensitive UV-C detection using Si-doped κ-Ga2O3 photodetectors. | Scientific Paper | µPG | Applied Surface Science (ScienceDirect) | 1월, 2023 | scientific-paper | %c2%b5pg-ko | applied-surface-science-science-direct-ko | ||
| Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetals | Optoelectronic materials converting light to bulk current. Unveiling anisotropic photothermoelectric effect driving complex photocurrent circulations via unequal crystal-axis thermopowers, visualized using microscopy and magnetic imaging. | Scientific Paper | Direct Writing, µMLA | nature physics | 1월, 2023 | scientific-paper | direct-writing-ko %c2%b5mla-ko | nature-physics-ko | ||
| Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor Nanocircuits | A scalable nanolithography method enables precise engineering of 2D TMD nanocircuits, like MoS2, for ultra-compact electronic and photonic devices with controlled thickness and excellent conductivity. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | 11월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-interfaces-ko | ||
| Optimization of Laser Written Photomasks for Photonic Device Manufacturing | Successful performance improvement of an ULTRA i-line laser writer for photonic device mask fabrication, reducing manufacturing costs. Thorough investigation and analysis identify optimal exposure strategies. | Scientific Paper | Mask-making, ULTRA | Heidelberg Instruments, SPIE. Digital Library | 9월, 2022 | scientific-paper | mask-making-ko ultra-ko | heidelberg-instruments-ko spie-digital-library-ko | ||
| Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography | Thermal scanning probe lithography (t-SPL) fabricates MoS2-based field-effect transistors, achieving high on/off ratios without damaging materials, offering a gentle alternative to electron beam lithography. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 9월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-materials-interfaces-ko | ||
| Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination Therapy | Monodisperse dual-compartment microdevices with pH-sensitive polymer coatings enable tunable, sequential drug release in the gastrointestinal tract, providing a promising strategy for combination therapy. | Scientific Paper | Direct Writing, MLA 100 | Advanced Therapeutics | 8월, 2022 | scientific-paper | direct-writing-ko mla-100-ko | advanced-therapeutics-ko | ||
| Placement of Biological Membrane Patches in a Nanofluidic Gap With Control Over Position and Orientation | Purple membranes from Halobacterium salinarum are precisely positioned and oriented in nanofluidic confinement for integration into light-driven nanoscale hybrid devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | 7월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-interfaces-ko | ||
| Far-Field and Non-Intrusive Optical Mapping of Nanoscale Structures | This study analyzes far-field optical mapping of nanostructures using CLSM and radially polarized light, achieving 74 nm resolution for LDOS, crucial for high-density optical storage. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | 7월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nanomaterials-ko | ||
| Direct Heat-Induced Patterning of Inorganic Nanomaterials | The HIPIN method uses heat-induced ligand transformation to pattern nanomaterials, enabling direct, wavelength-diverse lithography for advanced manufacturing of quantum dot electronic and optoelectronic devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of the American Chemical Society | 6월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | journal-of-the-american-chemical-society-ko | ||
| Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stress | Flexible thin film transistors on 50 µm thick polyimide demonstrated stable behavior under simultaneous mechanical and electrical stress up to a 4 mm bending radius. | Scientific Paper | Direct Writing, DWL 66+ | Flexible and Printed Electronics | 6월, 2022 | scientific-paper | direct-writing-ko dwl-66-ko | flexible-and-printed-electronics-ko | ||
| Thermal scanning probe lithography | Thermal scanning probe lithography is a powerful nanofabrication method with 10 nm lateral resolution and 1 nm depth resolution, applicable in biomedicine, nanomagnetism, and nanoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature reviews methods primer | 5월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nature-reviews-methods-primer-ko | ||
| Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating | Si-based device using a fractal pattern for automatic focusing in high-resolution X-ray tomography. Achieves globally homogeneous visibility and local contrast with versatile X-ray energy applicability. | Scientific Paper | Direct Writing, DWL 66+ | Applied Optics | 5월, 2022 | scientific-paper | direct-writing-ko dwl-66-ko | applied-optics-ko | ||
| Fabrication of spin-orbit logic devices by thermal nanolithography | This work explores thermal scanning probe lithography (t-SPL) to fabricate devices with sub-50 nm features, enabling energy-efficient non-volatile computing and memory devices using 2D materials. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | 4월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | ||||
| Anisotropic Particle Fabrication Using Thermal Scanning Probe Lithography | Nanoparticles’ optical and physicochemical properties are modulated via a novel, efficient nanolithographic method producing diverse monodispersed shapes, ensuring precise size, shape, and material control. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 4월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-materials-interfaces-ko | ||
| Single CdSe Quantum Dots Positioned in Nanostructured Heterogeneous Templates: Implications for High-Precision Nanoassembly | This work develops a multiphysical strategy for precise assembly of colloidal quantum dots using nanostructured templates, controlling electric fields, surface energy, and topography. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | 4월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-nano-materials-ko | ||
| NanoFrazor Explore Nanofabrication Tool | Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules. | Data Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 3월, 2022 | data-sheet | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-ko | ||
| NanoFrazor Scholar Nanofabrication Tool | Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox. | Data Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 3월, 2022 | data-sheet | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-ko | ||
| Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants | Study of fabrication of artificial structures for musculo-skeletal tissue engineering, which was done by Two-Photon-Polymerization (TPP). | Scientific Paper | Two-Photon Polymerization (TPP) | International Journal of Molecular Sciences | 3월, 2022 | scientific-paper | two-photon-polymerization-ko | international-journal-of-molecular-sciences-ko | ||
| Thermal scanning probe lithography using Parylene C as thermal resist | Thermal scanning probe lithography with Parylene C as a thermal resist enables high-resolution (∼40 nm) patterning and direct pattern transfer using deep reactive ion etching. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro & Nano Letters | 2월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | micro-nano-letters-ko | ||
| Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography | This paper reports on the fabrication and optical characterisation of large aperture diffractive lenses using greyscale lithography for use in a tunable zoom lens system. | Scientific Paper | DWL, Grayscale | International Iberian Nanotechnology Laboratory (INL) | 2월, 2022 | scientific-paper | dwl-ko grayscale-ko | international-iberian-nanotechnology-laboratory-inl-ko | ||
| Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater | Aptamer-based graphene field effect transistor (AptG-FET) platform detects three opioid metabolites in wastewater rapidly and inexpensively, providing a reliable alternative to costly laboratory-based techniques. | Scientific Paper | Direct Writing, µMLA | ACS Nano | 2월, 2022 | scientific-paper | direct-writing-ko %c2%b5mla-ko | acs-nano-ko | ||
| Scanning Probe Lithography: State-of-the-Art and Future Perspectives | Scanning probe lithography (SPL) is a promising nanofabrication technique for nanoelectronics, data storage, and bioengineering, though it is still mainly used for prototyping. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micromachines | 1월, 2022 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | micromachines-ko | ||
| Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2 | Novel atomic substitution method creates highly conductive nonlayered molybdenum nitrides from MoS2, enabling potential nanoelectronics’ applications with maintained conductivity and stable contacts over weeks. | Scientific Paper | µMLA | Chemistry of Materials | 12월, 2021 | scientific-paper | %c2%b5mla-ko | chemistry-of-materials-ko | ||
| DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography | The most advanced industrial grayscale lithography tool on the market. | Data Sheet | DWL | Heidelberg Instruments | 11월, 2021 | data-sheet | dwl-ko | heidelberg-instruments-ko | ||
| Advanced MEMS/NEMS Fabrication and Sensors | This book introduces new and unique fabrication, micromachining, and integration manufacturing methods for MEMS and NEMS devices, as well as novel nanomaterials for sensor fabrications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature | 10월, 2021 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nature-ko | ||
| Tip-Based Nanomachining on Thin Films: A Mini Review | Mini review of AFM tip-based nanomachining on thin films, covering materials, applications, and future prospects in nanooptics, electronics, and data storage. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomanufacturing and Metrology | 9월, 2021 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nanomanufacturing-and-metrology-ko | ||
| Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint | This paper investigates hybrid processes for patterning mixed structures using thermal nanoimprint lithography (T-NIL) and direct write lithography (DWL) on ma-P1275G positive grayscale resist. | Scientific Paper | DWL, DWL 66+ | Paul Scherrer Institute | 9월, 2021 | scientific-paper | dwl-ko dwl-66-ko | paul-scherrer-institute-ko | ||
| Maskless Aligner Technology and the MLA 300 Drive Efficient Development and Production in Microstructures | This overview covers a paradigm shift in micro fabrication with the benefits of maskless aligners from Heidelberg Instruments and introduces the MLA 300. | Whitepaper | Direct Writing, MLA 300 | Heidelberg Instruments | 8월, 2021 | whitepaper | direct-writing-ko mla-300-ko | heidelberg-instruments-ko | ||
| Novel Tunnel Magnetoresistive Sensor Functionalities via Oblique-Incidence Deposition | We improve tunnel magnetoresistive (TMR) devices by precisely shaping magnetic layers with oblique-incidence deposition, enhancing TMR design and functionality without additional magnetic materials. | Scientific Paper | μPG 101 | ACS Applied Materials & Interfaces | 7월, 2021 | scientific-paper | %ce%bcpg-101-ko | acs-applied-materials-interfaces-ko | ||
| Freeform nanostructuring of hexagonal boron nitride | Hexagonal boron nitride (hBN), now available as atomically smooth flakes, offers unique properties in optoelectronics and nanoelectronics. Researchers demonstrate freeform nanostructuring for advanced device architectures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | arXiv Physics/Optics | 5월, 2021 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | arxiv-physics-optics-ko | ||
| Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8 | Low-power laser irradiation of SU-8 photoresist with an added absorber enables selective pyrolysis for simple and inexpensive patterning of pyrolytic carbon microelectrodes. | Scientific Paper | Direct Writing, µPG | Micromachines | 4월, 2021 | scientific-paper | direct-writing-ko %c2%b5pg-ko | micromachines-ko | ||
| Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured template | Examining single Au nanoparticle cluster light scattering on nanostructured substrates, revealing two substrate effects via Green’s tensor theory for plasmonic nanostructure spectral interpretation. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Optics Express | 4월, 2021 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | optics-express-ko | ||
| Cost and Time Effective Lithography of Reusable Millimeter Size Bone Tissue Replicas With Sub-15 nm Feature Size on A Biocompatible Polymer | Bio-tSPL enables cost-effective, high-precision fabrication of reusable, biocompatible 3D bone tissue replicas for stem cell culture, tissue-mimetic biofunctionalization, drug testing, and regenerative medicine. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | 2월, 2021 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-functional-materials-ko | ||
| Evidence for metastable photo-induced superconductivity in K3C60 | Intense optical pulses induce transient superconductivity, evolving into stable states in K3C60 under sustained mid-infrared excitation, characterized by low resistance and extended lifetimes. | Scientific Paper | Direct Writing, µMLA | nature physics | 2월, 2021 | scientific-paper | direct-writing-ko %c2%b5mla-ko | nature-physics-ko | ||
| Structurally and morphologically engineered chalcogenide materials for optical and photonic devices | This paper explores advanced techniques like multiphoton lithography and thermal scanning probe lithography for patterning chalcogenide materials, enabling nanoscale features and functional photonic devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Optical Microsystems | 1월, 2021 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | journal-of-optical-microsystems-ko | ||
| Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography | Thermal scanning probe lithography (t-SPL) shows promise for scalable nanofabrication in nanoelectronics. It produces high-performance graphene-based transistors with simplified processing, reducing time and cost. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | APL Materials | 1월, 2021 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | apl-materials-ko | ||
| Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe | A deterministic technique uses hot scanning nanoprobes to assemble sub-20 nm nanoparticles, including quantum dots, into 2D arrays and complex nanostructures for various applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 11월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-ko | ||
| The Lithographer – Quantum Issue | Quantum Issue of The Lithographer, published in October 2020. Topics include: Quantum Technology, Maskless Aligners, Grayscale Lithography, 2D Materials. | The Lithographer | Direct Writing, Grayscale, NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 10월, 2020 | the-lithographer | direct-writing-ko grayscale-ko nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-ko | ||
| Thermomechanical Nanostraining of Two-Dimensional Materials | Nanoindentation via thermomechanical scanning probe allows precise, nanoscale strain engineering in 2D materials like MoS2 and graphene, achieving modulated bandgaps and investigating localized strain effects. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | 10월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nano-letters-ko | ||
| The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable Metasurfaces | Metasurfaces enable versatile optical wavefront control; active phase-change materials like germanium telluride offer compact, reconfigurable near-infrared metasurfaces, avoiding typical limitations. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Optical Materials | 10월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-optical-materials-ko | ||
| A cleanroom in a glovebox | Our glovebox-integrated cleanroom achieves fabrication, characterization, and reduced facility costs in an oxygen-free and clean environment, enabling exploration of new materials, quantum phases and devices. | Scientific Paper | μPG 101 | Review of Scientific Instruments | 7월, 2020 | scientific-paper | %ce%bcpg-101-ko | review-of-scientific-instruments-ko | ||
| Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensions | We investigate neurite guidance using semiconductor industry-compatible techniques for fabricating modulated surfaces, enabling the cultivation and study of ordered neuronal networks in a 2.5D configuration. | Scientific Paper | DWL 66+, Grayscale | Nanoscale Advances | 7월, 2020 | scientific-paper | dwl-66-ko grayscale-ko | nanoscale-advances-ko | ||
| Nanometer scale resolution, multi-channel separation of spherical particles in a rocking ratchet with increasing barrier heights | This nanoparticle size-separation device uses a nanofluidic Brownian motor with electrostatic barriers, achieving a separation resolution of approximately 2 nm for gold particles. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Physical Review Applied | 7월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | physical-review-applied-ko | ||
| Inverse-designed achromatic flat lens enabling imaging across the visible & near-infrared with diameter > 3mm | A flat lens, designed through inverse design with a phase-only pupil function, achieves achromatic focusing over a broad spectrum in a single diffractive surface. | Scientific Paper | DWL 66+, Grayscale | Applied Physics Letters | 7월, 2020 | scientific-paper | dwl-66-ko grayscale-ko | applied-physics-letters-ko | ||
| Spatial defects nanoengineering for bipolar conductivity in MoS2 | Controlling defects in monolayer MoS2 using thermochemical scanning probe lithography enables precise p- and n-type doping, vital for nanoelectronics, p-n junctions, and high rectification ratios. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | 7월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nature-communications-ko | ||
| Thermomechanical Nanocutting of 2D Materials | A thermomechanical indentation technique enables precise cutting of monolayer 2D with 20 nm resolution, offering potential for electronic and photonic nanodevice fabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 6월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-ko | ||
| Optical Fourier surfaces | Thermal Scanning Probe Lithography and templating creating optical surfaces containing multiple specified sinusoids, enabling advanced diffractive optics, photonics, and applications in emerging photonics fields. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, nature | 6월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-ko nature-ko | ||
| Direct Patterning of Metal Chalcogenide Semiconductor Materials | A low-cost, high-resolution direct patterning method using metal-organic precursors enables fabrication of 2D/3D semiconductor structures with sub-50 nm resolution for various nanodevices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | 5월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-functional-materials-ko | ||
| Cubic Microcontainers Improve In Situ Colonic Mucoadhesion and Absorption of Amoxicillin in Rats | Microcontainers enhance colonic drug delivery by influencing mucoadhesion and absorption. Cubic microcontainers show better adherence and absorption of amoxicillin compared to cylindrical and triangular ones. | Scientific Paper | Direct Writing, MLA 100 | Pharmaceutics (MDPI) | 4월, 2020 | scientific-paper | direct-writing-ko mla-100-ko | pharmaceutics-mdpi-ko | ||
| Thermal scanning probe lithography – a review | Review of Thermal Scanning Probe Lithography (t-SPL) covering its capabilities for high-resolution nanolithography and material interactions, providing insights for nanofabrication and material science challenges. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Microsystems & Nanoengineering (nature) | 4월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | heidelberg-instruments-ko microsystems-nanoengineering-nature-ko | ||
| Nano/Microscale Thermal Field Distribution: Conducting Thermal Decomposition of Pyrolytic-Type Polymer by Heated AFM Probes | This study investigates temperature distribution between heated AFM tips and materials, using PPA film to create programmable nano/microscale pyramid structures for scanning thermal microscopy applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | 3월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nanomaterials-ko | ||
| Impact of massive parallelization on two-photon absorption micro- and nanofabrication | In this paper, massive parallelization is demonstrated which was realized by using a beam splitting diffractive optical element (DOE). | Scientific Paper | Two-Photon Polymerization (TPP) | SPIE. Digital Library | 3월, 2020 | scientific-paper | two-photon-polymerization-ko | spie-digital-library-ko | ||
| Large-area, high-numerical-aperture multi-level diffractive lens via inverse design | Inverse design enables the creation of thin, high-NA flat lenses. Multi-level diffractive lens (MDL) with a NA=0.9 at 850 nm wavelength, replicable via imprint lithography. | Scientific Paper | DWL 66+, Grayscale | Heidelberg Instruments, Optica | 3월, 2020 | scientific-paper | dwl-66-ko grayscale-ko | heidelberg-instruments-ko optica-ko | ||
| The Lithographer – Grayscale Issue | Grayscale Lithography Issue of The Lithographer, published in January 2020. The Rise of Grayscale Lithography: Direct-write 3D patterning scaled from µm to nm. | The Lithographer | Grayscale | Heidelberg Instruments | 1월, 2020 | the-lithographer | grayscale-ko | heidelberg-instruments-ko | ||
| Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic Antiferromagnets | A versatile platform utilizes spin waves for optically inspired wave-based processing, advancing nanoscale devices with wavefront engineering, focusing, interference, and unique properties. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 1월, 2020 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | advanced-materials-ko | ||
| 3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolution | High-precision 3D printing provides a wide range of freedom in design for industrial fabrication of advanced optical components and products. LFW December Issue/2019 | Scientific Paper | Two-Photon Polymerization (TPP) | Laser Focus World | 12월, 2019 | scientific-paper | two-photon-polymerization-ko | laser-focus-world-ko | ||
| Laser Heat-Mode Lithography: Principle and Methods | This book explains laser heat-mode lithography, covering principles, system design, feature size manipulation, and applications, offering a versatile, simple, and tunable approach for nanofabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | 11월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | ||||
| Light-induced anomalous Hall effect in graphene | Optical driving in quantum solids uncovers phenomena like light-induced superconductivity and anomalous Hall effect in graphene, revealing Floquet-engineered topological band structures. | Scientific Paper | Direct Writing, µMLA | nature physics | 11월, 2019 | scientific-paper | direct-writing-ko %c2%b5mla-ko | nature-physics-ko | ||
| Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution | A nanofluidic slit method enables precise nanoparticle placement using geometry-induced energy landscapes, achieving 8 nm accuracy with electrostatic trapping, focusing, and adhesive contact. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | 11월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nano-letters-ko | ||
| Sub-10 nm Resolution Patterning of Pockets for Enzyme Immobilization with Independent Density and Quasi-3D Topography Control | The study demonstrates thermochemical scanning probe lithography (tc-SPL) for precise enzyme nanopatterning on polymer surfaces, achieving single-enzyme resolution, high throughput, and controlled enzyme density. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 10월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-materials-interfaces-ko | ||
| Diffractive flat lens enables extreme depth-of-focus imaging | Multi-level diffractive lens (MDL) designs drastically enhance depth of focus by over 4 orders of magnitude, enabling focus maintenance for objects separated by large distances. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | 10월, 2019 | scientific-paper | grayscale-ko %ce%bcpg-101-ko | arxiv-physics-optics-ko | ||
| Phase masks for electron microscopy fabricated by thermal scanning probe lithography | Silicon-nitride phase masks are fabricated using thermal scanning probe lithography, avoiding ion implantation, offering high accuracy, and generating electron vortex and Bessel beams. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micron | 10월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | micron-ko | ||
| Scanning Probe Thermometry to study Thermoelectricity and Dissipation at Nanoscale Junctions | This thesis explores heat transport and dissipation in nanoelectronics using high-resolution scanning probe thermometry, revealing nanoscale thermal phenomena, defects, and thermoelectric effects. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ETH Zürich | 8월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | eth-zurich-ko | ||
| Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices | Scanning probe lithography (SPL) offers high resolution, precise positioning, and material versatility, but its throughput limitations can be addressed through mix-and-match lithography strategies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Electrical Atomic Force Microscopy for Nanoelectronics | 8월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | electrical-atomic-force-microscopy-for-nanoelectronics-ko | ||
| Imaging over an unlimited bandwidth with a single diffractive surface | With the control of the phase in the image plane, a single diffractive surface can correct chromatic aberrations over a wide bandwidth, simplifying imaging systems. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | 7월, 2019 | scientific-paper | grayscale-ko %ce%bcpg-101-ko | arxiv-physics-optics-ko | ||
| Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range | Two-photon absorption (TPA) provides freedom in design for the fabrication of novel products that are not feasible with conventional techniques. | Scientific Paper | Two-Photon Polymerization (TPP) | Advanced Optical Technologies | 5월, 2019 | scientific-paper | two-photon-polymerization-ko | advanced-optical-technologies-ko | ||
| Replication of a Tissue Microenvironment by Thermal Scanning Probe Lithography | Thermal scanning probe lithography (t-SPL) efficiently creates biocompatible nanoscale topographies for cell culture, enabling rapid prototyping of substrates for studying cell-matrix interactions. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 5월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | acs-applied-materials-interfaces-ko | ||
| High-throughput protein nanopatterning | This work demonstrates high-throughput, sub-10 nm enzyme nanopatterning using thermochemical scanning probe lithography (tc-SPL), advancing bio-nanotechnology and molecular-level biological studies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Faraday Discussions | 3월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | faraday-discussions-ko | ||
| Ultra compact electrochemical metallization cells offering reproducible atomic scale memristive switching | Miniaturized Ag/SiO₂/Pt memristors enabling fast, low-energy, and highly reproducible atomic-scale switching for next-generation non-volatile memory applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Communications Physics | 3월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | communications-physics-ko | ||
| Monolayer MoS2 Nanoribbon Transistors Fabricated by Scanning Probe Lithography | This work demonstrates the fabrication of 30 nm monolayer MoS2 nanoribbon field-effect transistors using scanning probe lithography, achieving high performance with channel widths below 100 nm. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | 2월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nano-letters-ko | ||
| Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography | Thermal Scanning Probe Lithography enables precise metal electrode patterning on 2D semiconductors like MoS2, improving device performance with vanishing Schottky barriers and exceptional properties. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature electronics | 1월, 2019 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | nature-electronics-ko | ||
| Combination of Thermal Scanning Probe Lithography and Ion Etching to Fabricate 3D Silicon Nanopatterns with Extremely Smooth Surface | Thermal scanning probe lithography enables nanoscale prototyping, but dry etching increases roughness. Optimized ion-beam polishing using a polymer mask achieved sub-nanometer smooth silicon surfaces. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ScienceDirect | 6월, 2018 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | sciencedirect-ko | ||
| Nanofluidic rocking Brownian motors | Creating precise nanofluidic slits, utilizing electrostatic forces and oscillating fields, enables controlled transport of nanoparticles, demonstrated with 60nm gold spheres and efficient sorting of particles. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Science | 3월, 2018 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | science-ko | ||
| Broadband imaging with one planar diffractive lens | Achromatic diffractive lenses (ADLs) enable imaging across the visible spectrum, achieving diffraction-limited focusing and high numerical aperture. Cost-effective and scalable for widespread use. | Scientific Paper | Grayscale, μPG 101 | scientific reports (nature) | 2월, 2018 | scientific-paper | grayscale-ko %ce%bcpg-101-ko | scientific-reports-nature-ko | ||
| Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process | Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device fabrication. | Scientific Paper | DWL | HAL open science | 10월, 2017 | scientific-paper | dwl-ko | hal-open-science-ko | ||
| Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology | First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality devices. | Scientific Paper | Direct Writing, DWL | HAL open science | 10월, 2017 | scientific-paper | direct-writing-ko dwl-ko | hal-open-science-ko | ||
| High-Aspect Ratio Nanopatterning via Combined Thermal Scanning Probe Lithography and Dry Etching | Thermal scanning probe lithography enables rapid nanofabrication in resist. Combined with optimized plasma etching, hard masks and heat treatment, shallow patterns were amplified 100× into silicon, achieving … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ScienceDirect | 8월, 2017 | scientific-paper | nanofrazor-ko thermal-scanning-probe-ko | sciencedirect-ko | ||
| Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substrates | Bottom surface-induced ferromagnetism in Bi2Se3 nanoplate devices on SiO2 and ferromagnetic insulator substrates decouples quantum Hall effects, revealing shifted half-integer QHEs in a three-channel model. | Scientific Paper | Direct Writing, μPG 101 | IOP Science | 1월, 2017 | scientific-paper | direct-writing-ko %ce%bcpg-101-ko | iop-science-ko | ||
| Increasing the density of passive photonic integrated circuits via nanophotonic cloaking | We utilize nanophotonic cloaking to enable closer spacing of photonic-integrated devices, overcoming signal cross-talk limitations. Experimental results demonstrate efficient transmission and compact designs. | Scientific Paper | Grayscale, μPG 101 | nature communications | 11월, 2016 | scientific-paper | grayscale-ko %ce%bcpg-101-ko | nature-communications-ko | ||
| Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentration | Photovoltaic system combining spectrum splitting and concentration using a planar diffractive optic, overcoming losses in single-bandgap absorbers & achieving a 25% increase in output power. | Scientific Paper | Direct Writing, μPG 101 | AIP Advances | 9월, 2016 | scientific-paper | direct-writing-ko %ce%bcpg-101-ko | aip-advances-ko | ||
| Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer | Cheap and quick fabrication of mr-DWL waveguides channels on glass buried in optical polymer cladding with 350 µm radius ring resonators and 0.9 µm spacing. | Scientific Paper | Direct Writing, DWL 66+ | Rochester Institute of Technology | 5월, 2016 | scientific-paper | direct-writing-ko dwl-66-ko | rochester-institute-of-technology-ko | ||
| Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 Nanowires | Nanowires are promising for thermoelectric applications, but the predicted performance enhancement has not been observed yet. Surface states play a crucial role in transport characteristics. | Scientific Paper | Direct Writing, μPG 101 | Advanced Energy Materials | 5월, 2015 | scientific-paper | direct-writing-ko %ce%bcpg-101-ko | advanced-energy-materials-ko | ||
| From regular periodic micro-lens arrays to randomized continuous phase profiles | For industrial illumination systems, micro-optical structures made via direct grayscale lithography achieve precise multi-wavelength intensity control, efficiency, and flexibility at a cost-effective production scale. | Scientific Paper | Direct Writing, DWL 66+ | Advanced Optical Technologies | 2월, 2015 | scientific-paper | direct-writing-ko dwl-66-ko | advanced-optical-technologies-ko |
