Ambipolar tellurium floating-gate devices enable nonvolatile memory with high retention, endurance, large on/off ratios, and reconfigurable excitatory–inhibitory synapses, achieving >90% accurate neuromorphic image recognition.
汎用性の高いモジュール式ナノリソグラフィツール
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(L. Shani*, J. Chaaban* et al 2024 Nanotechnology 35 255302)
(提供：Yannik Glauser, ETH Zürich)
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技術データ
| サーマル・プローブ ライティング | ダイレクトレーザー 昇華 | ||
|---|---|---|---|
| シングルチップ | デカペード | ||
| パターニング性能 | |||
| 最小構造サイズ [nm] | 15 | 15 | 600 |
| 最小ラインとスペース［ハーフピッチ、nm］ | 25 | 25 | 1000 |
| グレースケール／3D解像度（PPAのステップサイズ）［nm］ | 2 | 2 | - |
| 最大書き込みフィールドサイズ［X μm x Y μm］ | 60 x 60 | 60 x 60 | 60 x 60 |
| フィールドステッチ精度（マーカーレス、その場撮像を使用）[nm］ | 25 | 25 | 600 |
| オーバーレイ精度（マーカーレス、その場イメージングを使用） [nm］ | 25 | 25 | 600 |
| 書き込み速度（標準スキャン速度）[mm/s] | 1 | 1 | 5 |
| 書き込み速度（50nmピクセル）[μm²/min］ | 1000 | 10 000 | 100 000 |
| トポグラフィー画像性能 | |||
| 横方向の画像分解能（フィーチャーサイズ） [nm］ | 10 | ||
| 垂直分解能（トポグラフィ感度） [nm］ | <0.5 | ||
| イメージング速度（＠50nm分解能）[μm²/分］ | 1000 | 10 000 | - |
| 基本システムの特徴 | |
|---|---|
| 基板サイズ | 1 x 1 mm² ～ 100 x 100 mm² （制限付きで 150 x 150 mm² も可能）
厚さ：最大 10 mm |
| 光学顕微鏡 | デジタル分解能0.6μm、回折限界2μm、視野1.0mm×1.0mm、オートフォーカス |
| 磁気カンチレバーホルダー | 高速（<1分）で正確なチップ交換 |
| 防振 | アクティブ防振ステージ |
| オプションのシステム機能／モジュール性 | |
| ダイレクトレーザー昇華 | レーザー光源と光学系波長405nm CWファイバーレーザー、300mW、最小焦点サイズ1.2μm レーザーオートフォーカス：NanoFrazorカンチレバーの距離センサーを使用。 |
| デカペード | パラレル・ライティング10のヒント |
| 独立型ハウジング | 3層防音構造、優れた防振性（> 98% @ 10 Hz）｜PC制御による温度・湿度モニタリングおよびガス流量調整｜（寸法185 cm × 78 cm × 128 cm／重量650 kg） |
| グローブボックスとの完全統合 | 制御された環境でナノリソグラフィが可能なグローブボックスへの統合 |
| NanoFrazor カンチレバーの特徴（シングルチップとデカペデの両方） | |
| 統合コンポーネント | チップヒーター、トポグラフィーセンサー、静電アクチュエーター |
| 先端形状 | <半径10nm、長さ750nmの円錐形チップ |
| チップヒーター温度範囲 | 25 °C – 1400 °C (<1 K の設定点分解能) |
| ベースシステムの寸法と設置条件 | |
| 高さ×幅×奥行き | テーブルトップユニット：44 cm x 40 cm x 45 cm コントローラー: 84 cm x 60 cm x 56 cm |
| 重量 | テーブルトップユニット50 kg コントローラー：80 kg |
| 電源入力 | 1 x 110または220 V AC、10 A |
| ソフトウェアの特徴 | |
| GDSおよびビットマップのインポート、256階調のグレースケール、トポグラフィー画像解析およびオーバーレイ描画、チップ描画とレーザー描画のミックス＆マッチ、完全自動キャリブレーションルーチン、Pythonスクリプト対応 |
関連出版物
| Title | Date | Publisher | Summary | Link |
|---|---|---|---|---|
| Nanoscale Spatial Tuning of Superconductivity in Cuprate Thin Films via Direct Laser Writing | July 23, 2026 | Advanced Functional Materials | Direct laser writing with the Heidelberg Instruments DWL 66⁺ and NanoFrazor enables nanoscale oxygen-stoichiometry tuning in YBCO, precisely controlling superconducting properties and enabling scalable functional nanostructures. | |
| Fourier Pixels for Bidirectional Light Control | June 24, 2026 | nature | Fourier pixels use miniaturized diffractive structures and plasmonic waves to both generate and fully characterize optical wavefronts (amplitude, phase, polarization), enabling compact bidirectional light control. | |
| Broadband, compact, and training-free optical processors for parallel image classification | February 21, 2026 | arXiv Physics/Optics | Compact, training-free optical processor using Fourier surfaces enables broadband, parallel image classification with up to 20 simultaneous computations, achieving high accuracy and scalable, low-power performance. | |
| Engineered Strain in 2D Materials by Direct Growth on Deterministically Patterned Grayscale Topographies | February 10, 2026 | Advanced Science | Strain is engineered during 2D growth on grayscale topographies, achieving controlled 0–0.5% uni- and multiaxial tensile strain in MoS2 without transfer, enabling direct integration into nanoelectronics. | |
| Beta Site Installation of NanoFrazor with Parallelization Capabilities at EPFL | January 20, 2026 | Heidelberg Instruments | Following the successful introduction of the modular NanoFrazor nanolithography system in 2024, Heidelberg Instruments is proud to announce the installation of the newest NanoFrazor at EPFL. | |
| Strained 2D Semiconductor Lateral Heterojunctions via Grayscale Thermal-Scanning Probe Lithography | January 12, 2026 | Small | Locally strained 2D semiconductor lateral heterojunctions are created by maskless grayscale thermal-Scanning Probe Lithography, enabling tunable asymmetric electrical behavior in MoS₂–Au nanoarrays for nanoelectronic and sensing applications. | |
| Beyond Binary Patterning: Polypropylene Carbonate as a Versatile Thermal Resist for High-Fidelity Grayscale Nanofabrication | January 8, 2026 | Microsystems & Nanoengineering (nature) | Polypropylene carbonate enables high-resolution t-SPL nanopatterning via controlled thermal decomposition, achieving 50 nm lateral, sub-nanometer vertical resolution and grayscale pattern transfer for photonic and nanoelectronic fabrication. | |
| Top-Down Fabrication of Silicon Nanowire Field-Effect Transistors Using Thermal Scanning Probe Lithography | December 16, 2025 | ACS Applied Nano Materials | Hybrid t-SPL and photolithography fabricate Si nanowire FETs with precise dimensional control, reproducible liquid-gate characteristics, and low-cost processing for biosensing applications. | |
| Gradient Electronic Landscapes in van der Waals Heterostructures | December 3, 2025 | Nano Letters | Thermal scanning probe lithography patterns nanometer-precise topographies in hBN-encapsulated graphene, enabling periodic electric-field modulation and tailored quantum transport potentials beyond planar device geometries. | |
| Defect Engineering in β‐Bi2 SeO5 /Bi2 O2 Se Heterostructures for High‐Resolution Phototransistor Arrays | November 24, 2025 | Advanced Materials | Defect-engineered β-Bi2SeO5/Bi2O2Se heterojunctions suppress vacancies, enable type-II charge separation, and achieve high-responsivity phototransistors and high-resolution arrays for advanced optoelectronics. | |
| Three-dimensional nanoscale control of magnetism in crystalline Yttrium Iron Garnet | October 30, 2025 | nature communications | Focused UV laser writing enables three-dimensional, non-destructive anisotropy engineering in crystalline YIG, tuning spin-wave band structures, localization, and non-reciprocity for advanced magnonic and magneto-optic devices. | |
| Independent Control of Quality Factor and Circular Dichroism via Intrinsic Chiral Plasmonic Bound States in the Continuum | September 27, 2025 | Laser & Photonics Reviews | 3D symmetry-broken plasmonic metasurfaces enable visible quasi-BIC resonances with independently tunable circular dichroism and Q-factors, achieving high chiroptical performance via nanoscale height-controlled architectures. | |
| Manipulating Anisotropy of Second Harmonic Generation in NbOI2 via Precise Strain Engineering | September 10, 2025 | Advanced Functional Materials | Precisely oriented strain engineering in NbOI2 enhances second harmonic generation up to 19-fold, quantitatively linking strain direction with nonlinear susceptibility and enabling tunable 2D ferroelectric optoelectronics. | |
| Josephson Junction Device Fabrication with the NanoFrazor | August 18, 2025 | Heidelberg Instruments Nano | High-resolution, damage-free NanoFrazor lithography enables fast and reliable fabrication of Josephson junctions for quantum and nanoelectronics applications. | |
| High-Resolution Lift-Off Process with the NanoFrazor | August 18, 2025 | Heidelberg Instruments Nano | This application note describes the NanoFrazor’s high-resolution lift-off process for creating sub-100 nm metal features with low line edge roughness using thermal lithography. | |
| Confinement-Enhanced Core–Shell Avalanche Photodetectors | July 8, 2025 | ACS Nano | A SiO2-passivated Si nanowire/graphene nanoresonator enhances 1550 nm absorption and confined avalanche multiplication, achieving 56.6 A/W responsivity and 2.6×10⁴ gain for CMOS-compatible NIR photodetection. | |
| Nanofabrication of All-Dielectric Metasurfaces through Pulsed Thermal Scanning Probe Lithography | July 2, 2025 | Scientific Reports | Pulsed thermal scanning probe lithography enables sub-10 nm patterning on insulating silica without conductive layers, advancing all-dielectric metasurface fabrication and material compatibility in nanofabrication. | |
| Noninvasive Deterministic Nanostructures Lithography on 2D Transition Metal Dichalcogenides | June 23, 2025 | Advanced Engineering Materials | Noninvasive t-SPL enables high-resolution nanolithography on transparent substrates, enabling tunable plasmonic nanostructures for applications in nanophotonics, sensing, and thermoplasmonics. | |
| Hybrid-Contact Engineering for Enhanced P-Type Performance in WSe2 Field-Effect Transistors | June 17, 2025 | Nanotechnology | Hybrid edge-top contacts in WSe2 FETs mitigate Fermi-level pinning, boosting p-type conduction, lowering contact resistance and Schottky barriers, enabling efficient complementary post-silicon electronics. | |
| Fourier-Tailored Light–Matter Coupling in van der Waals Heterostructures | May 27, 2025 | ACS Nano | Fourier-patterned hBN/WS2 van der Waals heterostructures enhance exciton–waveguide coupling, enabling exciton-polariton formation near strong coupling for advanced optoelectronic and quantum devices. | |
| Reconfigurable Artificial Synapses Based on Ambipolar Environmentally Stable Tellurium for Neuromorphic Computing | May 24, 2025 | ACS Applied Materials & Interfaces | ||
| Multifunctional Logic-in-Memory Circuits Based on Reconfigurable WSe2 Transistors via Enhanced Ambipolarity | May 15, 2025 | ACS Nano | Scanning probe lithography enhances ambipolar WSe2 transport, enabling nonvolatile reconfigurable memory, transistor, and diode modes with ~10¹⁰ on/off ratios, realizing ambient logic-in-memory circuits. | |
| Diffraction of Light from Optical Fourier Surfaces | April 28, 2025 | ACS Photonics | Precisely fabricated optical Fourier surfaces show measured diffraction matching electrodynamic simulations, outperforming binary profiles and scalar models, enabling accurate Fourier-spectrum engineering for advanced holography and optical computing. | |
| Combination of Thermal Scanning Probe Lithography and Directed Self-Assembly of Block Copolymers | April 24, 2025 | SPIE. Digital Library | Combining thermal scanning probe lithography with block copolymer self-assembly enables sub-20 nm, high-density quantum device patterning, achieving depth-amplified nanoholes and sub-10 nm placement accuracy. | |
| Strategies to Extend Resolution Limits for Direct Write Lithography | April 23, 2025 | SPIE. Digital Library | This presentation introduces methods for optimizing various direct-writing lithography systems from Heidelberg Instruments to push the resolution limit for smaller structures in collaboration with IMS Chips Germany. | |
| Detection of Dynamic Temperature Modulation using a Thermal Scanning Probe Lithography (t-SPL) System | April 8, 2025 | AIP Publishing | Thermal scanning probe lithography enables nanoscale thermal diffusivity measurement via localized periodic heating and temperature-wave phase analysis, achieving 10–100 nm resolution without miniaturized sensing. | |
| Dynamic BIC in Customizable Hydrogel Metagratings for Advanced Information Security | March 27, 2025 | Advanced Functional Materials | Water-responsive hydrogel metagratings with grayscale thermal patterning enable humidity-tunable q-BIC resonances for multistage visible optical encryption and concealed Morse-code decryption. | |
| Toward Phonon-Limited Transport in Two-Dimensional Transition Metal Dichalcogenides by Oxygen-Free Fabrication | February 24, 2025 | ACS Nano | An oxygen-free fabrication approach boosts MoS2 and WS2 FET mobility toward phonon limits, achieving record values and showing oxygen chemisorption critically degrades 2D transistor performance. | |
| Hybrid Contact for High‐Performance MoS2 Transistors via Hard‐Mask Scanning Probe Lithography | January 20, 2025 | Advanced Materials | Hard-mask scanning probe lithography enables hybrid contacts for MoS2 FETs, improving carrier injection, reducing contact resistance and Schottky barriers, achieving high on-current, large on/off ratios, and ~18 nm patterning. | |
| Selective Placement of Functionalised DNA Origami via Thermal Scanning Probe Lithography Patterning | November 4, 2024 | Materials Advances | Thermal scanning probe lithography organized functionalized DNA origami into predefined nanoarrays with single-molecule precision, positioning gold nanoparticles and quantum dots for heterofunctional bionanotechnology applications. | |
| Quantitative Mapping of Smooth Topographic Landscapes Produced by Thermal Scanning-Probe Lithography | October 28, 2024 | Nature Protocols | This work introduces FunFit, open-source software fitting analytical functions to SPM data, enabling precise fabrication, transfer, and feedback analysis of tSPL-patterned polymer and hBN nanoscale landscapes. | |
| Nanoscale-Localized Multiplexed Biological Activation of Field Effect Transistors for Biosensing Applications | September 24, 2024 | Nanoscale | Thermal scanning probe lithography enables nanoscale, multiplexed biofunctionalization of FET biosensors, achieving sub-20 nm precision and ultrasensitive SARS-CoV-2 detection with graphene FETs. | |
| High-resolution patterning of nanowire-based quantum devices with the NanoFrazor | September 18, 2024 | Heidelberg Instruments Nano | The NanoFrazor offers a unique patterning solution, combining t-SPL and laser mix and match lithography. | |
| Liquid Metal Oxide-Assisted Integration of High-k Dielectrics and Metal Contacts for Two-Dimensional Electronics | September 18, 2024 | ACS Nano | Liquid metal oxide enables ultrathin high-k HfO2 integration on 2D semiconductors, achieving smooth interfaces, low-leakage WS2 transistors, minimal hysteresis, and scalable dielectric-contact stacking for nanoelectronics. | |
| Damage-free nanolithography enabling superior device performance | September 16, 2024 | Heidelberg Instruments Nano | Thermal scanning probe lithography enabled by NanoFrazor helps to fabricate devices with superior performance due to its damage-free patterning principle. | |
| Assembly and Bilayer Liftoff of Periodic Nanostructures with Sub-20 nm Resolution Using Thermal Scanning Probe Lithography | September 11, 2024 | MDPI | Optimized thermal scanning probe lithography achieved 10 nm resolution. Combined with bilayer liftoff, sub-20 nm metal structures were fabricated and validated for photonic dipole devices. | |
| Scalable Layer‐Controlled Oxidation of Bi2 O2 Se for Self‐Rectifying Memristor Arrays With sub‐pA Sneak Currents | September 9, 2024 | Advanced Materials | UV-assisted oxidation created β-Bi2SeO5/Bi2O2Se heterostructure memristors with self-rectifying switching, high ON/OFF ratios, sub-pA sneak currents, sub-100 ns speed, low power, enabling scalable neuromorphic arrays. | |
| Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs | August 16, 2024 | nature communications | Engineered nanotopography induces tensile strain in MoS2 FETs, significantly enhancing carrier mobility and on-state current, promising advancements for 2D material-based electronics. | |
| NanoFrazor for Direct Nanoscale Chemical Conversion of Materials | August 16, 2024 | Heidelberg Instruments Nano | Chemical conversion using a thermal scanning probe can be used to make biosensors with advanced architecture and tailor surface chemistry to create nanostructures. | |
| Fabrication of a hybrid device for the integration of light-triggered proton pumps | June 23, 2024 | Micro and Nano Engineering (ScienceDirect) | A novel method for fabricating a hybrid device that integrates light-triggered proton pumps into a network of nanochannels for applications in directed ion transport. | |
| Nano-Ironing van der Waals Heterostructures toward Electrically Controlled Quantum Dots | June 6, 2024 | ACS Applied Materials & Interfaces | Nanoironing van der Waals heterostructures enhances interface quality, significantly improving electrical performance and enabling controlled quantum dot formation for advanced quantum technologies. | |
| Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates | June 4, 2024 | Micro and Nano Engineering (ScienceDirect) | This review discusses and compares different lithographic techniques for fabricating SERS substrates, highlighting their strengths and limitations, and explores their potential for commercial applications. | |
| Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist | May 15, 2024 | ECS Journal of Solid State Science and Technology | The effects of incorporating a base quencher into a poly(phthalaldehyde-co-propanal) photoresist to enhance the performance of dry-develop resist in a direct-write UV lithography tool. | |
| Thermal scanning probe and laser lithography for patterning nanowire based quantum devices | April 4, 2024 | Nanotechnology | The NanoFrazor combines thermal scanning probe and laser writing lithography to fabricate InSb nanowire quantum devices, achieving quasi-ballistic transport with reduced fabrication-induced disorder. | |
| Thermal nanoconversion of ferromagnetic nanoislands | March 14, 2024 | Applied Physics Letters | This paper examines the use of thermal nanoconversion (TNC) to modify the magnetic properties of nickel-iron (Ni80Fe20) nanoislands. | |
| Tailored Micromagnet Sorting Gate for Simultaneous Multiple Cell Screening in Portable Magnetophoretic Cell‐On‐Chip Platforms | March 5, 2024 | Advanced Functional Materials | Novel technique for selectively sorting magnetic carriers and cells using a multi-notched disk micromagnet, enabling precise manipulation even in low magnetic fields. | |
| Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification | February 23, 2024 | Microsystems & Nanoengineering | A novel method for amplifying the depth of grayscale nanopatterns in dielectric materials like SiO2 using a combination of t-SPL and optimized dry etching techniques. | |
| Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study | January 30, 2024 | Nanomaterials | This paper describes the fabrication and characterisation of a flat conical lens (fraxicon) with a diameter of 0.2 mm for use in miniaturised optical applications. | |
| Transistors platform for rapid and parallel detection of multiple pathogens by nanoscale-localized multiplexed biological activation | January 26, 2024 | nature | This paper describes a scalable and CMOS-compatible fabrication strategy for modifying individual field-effect transistors (FETs) with distinct bioreceptors. | |
| Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication | January 17, 2024 | Advanced Science | This paper describes a hybrid thermal lithography method that uses silk fibroin as a water-developable resist for the fabrication of micro and nanoscale structures. | |
| Achieving Reliable and Ultrafast Memristors via Artificial Filaments in Silk Fibroin | November 7, 2023 | Advanced Materials | This paper investigates using biocompatible silk fibroin (SF) as a switching medium in silver/SF/gold (Ag/SF/Au) memristors. | |
| Generating smooth potential landscapes with thermal scanning-probe lithography | November 1, 2023 | Journal of Physics: Materials | Scanning probe microscopy with a NanoFrazor achieves atomic precision, enabling controlled material manipulation and high-resolution lithography, with broad applications in photonics, electronics, and nanomaterials science. | |
| Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates | October 3, 2023 | ACS Applied Nano Materials | Thermal scanning-probe lithography (t-SPL) enables high-resolution nanolithography on transparent substrates with conductive oxide films, creating tunable plasmonic nanostructures for nanophotonics and sensing applications. | |
| Complete logic operations in an ambipolar tellurium homojunction via non-invasive scanning probe lithography | September 22, 2023 | Device | Low-dimensional semiconductors, like tellurium nanoribbons, enable miniaturized logic devices via ambipolar conduction. Non-invasive lithography creates transistors performing all seven basic logic operations. | |
| Exploiting Thermal Scanning Probe Lithography for the Fabrication of Micro and Nano Electronic Devices | September 1, 2023 | IEEE | Thermal scanning probe lithography enables fast fabrication of micro/nano structures with 100 nm resolution, enhancing electronic performance through gold coating and resistivity characterization. | |
| Nanopatterning of 2D materials by block copolymer self-assembly | August 31, 2023 | Technical University of Denmark (DTU) | Nanopatterning using block copolymer (BCP) self-assembly is a promising way to advancements in applications ranging from water treatment technologies to energy-efficient devices. | |
| Nano-Rectennas for Harnessing Infrared Energy | August 30, 2023 | Serdar B. Tekin | This thesis optimizes MIM rectenna diodes via barrier engineering and scaling, improving responsivity, asymmetry and coupling efficiency, demonstrating enhanced THz rectification and proposing nanoscale rectenna fabrication. | |
| Novel Mixed-Dimensional hBN-Passivated Silicon Nanowire Reconfigurable Field Effect Transistors: Fabrication and Characterization | August 22, 2023 | ACS Applied Materials & Interfaces | This work demonstrates a reconfigurable field-effect transistor (RFET) combining a Si nanowire with a 2D hBN dielectric, improving electrical characteristics and enabling dynamic polarity control. | |
| Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices | August 15, 2023 | Advanced Physics Research | Direct patterning technology enables cost-effective design and production of devices, enhancing the fabrication of inorganic materials for optoelectronic, electronic, and energy applications. | |
| Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing | August 1, 2023 | Advanced Materials Technologies | Nanomaterials derive unique properties from their nanostructure. A perspective explores advanced nanofabrication techniques to modify properties in condensed matter systems, discussing applications and future prospects. | |
| Bilayer Lift-Off for NanoFrazor Lithography | July 27, 2023 | Heidelberg Instruments Nano | Explore bilayer lift-off with NanoFrazor lithography, addressing advantages, process details, and examples, including high-quality contacts and structures as small as 7 nm. | |
| Ultra-High Resolution Pattern Transfer on NanoFrazor Lithography | July 27, 2023 | Heidelberg Instruments Nano | High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor lithography, multi-layer stacks, and alternative strategies for superior patterns are discussed. | |
| High-sensitive two-dimensional PbI2 photodetector with ultrashort channel | July 26, 2023 | Frontiers of Physics | This study reports a PbI2-based photodetector with the highest responsivity (172 A/W) achieved, using thermal scanning probe lithography for ultrashort channel fabrication to enhance performance. | |
| Spin Transport in Superconducting and Ferromagnetic Heterostructures | June 30, 2023 | Liam O'Brien | This thesis engineers S/F and F/HM heterostructures, demonstrating high-quality Nb films, tunable spin transport, perpendicular anisotropy, and superconducting spin valves probing super spin currents via neutron reflectivity and tr-MOKE. | |
| A New Method of AFM‐Based Nanolithography Using Frequency Enhanced Electrochemical Pressure Solution Etching | March 1, 2023 | Advanced Materials Technologies | This paper investigates Frequency Enhanced Electrochemical Pressure Solution (FEEPS) as a novel nanolithography method for etching silica surfaces with an AFM tip. | |
| Spectral tuning of Bloch Surface Wave resonances by light-controlled optical anisotropy | February 20, 2023 | Nanophotonics | This work demonstrates dynamic control of resonant modes in a 2D bull’s eye cavity using optically-induced anisotropy, enabling precise tuning in metasurface-based optics. | |
| Spin Transport and Associated Background Effects in All-Metallic Non-Local Spin Valves | February 16, 2023 | Alexander James Wright | This thesis investigates spin transport and relaxation mechanisms in all-metallic non-local spin valves across varied materials, temperatures and magnetic fields, clarifying spurious effects for low-power spintronic applications. | |
| Shaping Interfaces for Manipulation and Imaging of Nano-Objects in Nanofluidic Confinement | January 22, 2023 | ETH Zürich | This study demonstrates nanoscale particle manipulation using nanofluidic slits, thermal scanning probe lithography, and electrostatic interactions for sorting, trapping, and surface charge modulation applications. | |
| Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor Nanocircuits | November 27, 2022 | Advanced Materials Interfaces | A scalable nanolithography method enables precise engineering of 2D TMD nanocircuits, like MoS2, for ultra-compact electronic and photonic devices with controlled thickness and excellent conductivity. | |
| Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography | September 7, 2022 | ACS Applied Materials & Interfaces | Thermal scanning probe lithography (t-SPL) fabricates MoS2-based field-effect transistors, achieving high on/off ratios without damaging materials, offering a gentle alternative to electron beam lithography. | |
| Placement of Biological Membrane Patches in a Nanofluidic Gap With Control Over Position and Orientation | July 19, 2022 | Advanced Materials Interfaces | Purple membranes from Halobacterium salinarum are precisely positioned and oriented in nanofluidic confinement for integration into light-driven nanoscale hybrid devices. | |
| Far-Field and Non-Intrusive Optical Mapping of Nanoscale Structures | July 1, 2022 | Nanomaterials | This study analyzes far-field optical mapping of nanostructures using CLSM and radially polarized light, achieving 74 nm resolution for LDOS, crucial for high-density optical storage. | |
| Direct Heat-Induced Patterning of Inorganic Nanomaterials | June 9, 2022 | Journal of the American Chemical Society | The HIPIN method uses heat-induced ligand transformation to pattern nanomaterials, enabling direct, wavelength-diverse lithography for advanced manufacturing of quantum dot electronic and optoelectronic devices. | |
| Thermal scanning probe lithography | May 1, 2022 | nature reviews methods primer | Thermal scanning probe lithography is a powerful nanofabrication method with 10 nm lateral resolution and 1 nm depth resolution, applicable in biomedicine, nanomagnetism, and nanoelectronics. | |
| Nanofabrication and Characterization of Spin-Orbit Logic Devices | April 28, 2022 | This work explores thermal scanning probe lithography (t-SPL) to fabricate devices with sub-50 nm features, enabling energy-efficient non-volatile computing and memory devices using 2D materials. | ||
| Anisotropic Particle Fabrication Using Thermal Scanning Probe Lithography | April 22, 2022 | ACS Applied Materials & Interfaces | Nanoparticles’ optical and physicochemical properties are modulated via a novel, efficient nanolithographic method producing diverse monodispersed shapes, ensuring precise size, shape, and material control. | |
| Single CdSe Quantum Dots Positioned in Nanostructured Heterogeneous Templates: Implications for High-Precision Nanoassembly | April 6, 2022 | ACS Applied Nano Materials | This work develops a multiphysical strategy for precise assembly of colloidal quantum dots using nanostructured templates, controlling electric fields, surface energy, and topography. | |
| Thermal scanning probe lithography using Parylene C as thermal resist | February 22, 2022 | Micro & Nano Letters | Thermal scanning probe lithography with Parylene C as a thermal resist enables high-resolution (∼40 nm) patterning and direct pattern transfer using deep reactive ion etching. | |
| Scanning Probe Lithography: State-of-the-Art and Future Perspectives | January 29, 2022 | Micromachines | Scanning probe lithography (SPL) is a promising nanofabrication technique for nanoelectronics, data storage, and bioengineering, though it is still mainly used for prototyping. | |
| Advanced MEMS/NEMS Fabrication and Sensors | October 12, 2021 | nature | This book introduces new and unique fabrication, micromachining, and integration manufacturing methods for MEMS and NEMS devices, as well as novel nanomaterials for sensor fabrications. | |
| Tip-Based Nanomachining on Thin Films: A Mini Review | September 21, 2021 | Nanomanufacturing and Metrology | Mini review of AFM tip-based nanomachining on thin films, covering materials, applications, and future prospects in nanooptics, electronics, and data storage. | |
| Freeform nanostructuring of hexagonal boron nitride | May 1, 2021 | arXiv Physics/Optics | Hexagonal boron nitride (hBN), now available as atomically smooth flakes, offers unique properties in optoelectronics and nanoelectronics. Researchers demonstrate freeform nanostructuring for advanced device architectures. | |
| Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured template | April 1, 2021 | Optics Express | Examining single Au nanoparticle cluster light scattering on nanostructured substrates, revealing two substrate effects via Green’s tensor theory for plasmonic nanostructure spectral interpretation. | |
| Cost and Time Effective Lithography of Reusable Millimeter Size Bone Tissue Replicas With Sub-15 nm Feature Size on A Biocompatible Polymer | February 5, 2021 | Advanced Functional Materials | Bio-tSPL enables cost-effective, high-precision fabrication of reusable, biocompatible 3D bone tissue replicas for stem cell culture, tissue-mimetic biofunctionalization, drug testing, and regenerative medicine. | |
| Structurally and morphologically engineered chalcogenide materials for optical and photonic devices | January 26, 2021 | Journal of Optical Microsystems | This paper explores advanced techniques like multiphoton lithography and thermal scanning probe lithography for patterning chalcogenide materials, enabling nanoscale features and functional photonic devices. | |
| Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography | January 1, 2021 | APL Materials | Thermal scanning probe lithography (t-SPL) shows promise for scalable nanofabrication in nanoelectronics. It produces high-performance graphene-based transistors with simplified processing, reducing time and cost. | |
| Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe | November 1, 2020 | Advanced Materials | A deterministic technique uses hot scanning nanoprobes to assemble sub-20 nm nanoparticles, including quantum dots, into 2D arrays and complex nanostructures for various applications. | |
| The Lithographer – Quantum Issue | October 26, 2020 | Heidelberg Instruments | Quantum Issue of The Lithographer, published in October 2020. Topics include: Quantum Technology, Maskless Aligners, Grayscale Lithography, 2D Materials. | |
| Thermomechanical Nanostraining of Two-Dimensional Materials | October 1, 2020 | Nano Letters | Nanoindentation via thermomechanical scanning probe allows precise, nanoscale strain engineering in 2D materials like MoS2 and graphene, achieving modulated bandgaps and investigating localized strain effects. | |
| The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable Metasurfaces | October 1, 2020 | Advanced Optical Materials | Metasurfaces enable versatile optical wavefront control; active phase-change materials like germanium telluride offer compact, reconfigurable near-infrared metasurfaces, avoiding typical limitations. | |
| Nanometer scale resolution, multi-channel separation of spherical particles in a rocking ratchet with increasing barrier heights | July 8, 2020 | Physical Review Applied | This nanoparticle size-separation device uses a nanofluidic Brownian motor with electrostatic barriers, achieving a separation resolution of approximately 2 nm for gold particles. | |
| Spatial defects nanoengineering for bipolar conductivity in MoS2 | July 1, 2020 | nature communications | Controlling defects in monolayer MoS2 using thermochemical scanning probe lithography enables precise p- and n-type doping, vital for nanoelectronics, p-n junctions, and high rectification ratios. | |
| Thermomechanical Nanocutting of 2D Materials | June 1, 2020 | Advanced Materials | A thermomechanical indentation technique enables precise cutting of monolayer 2D with 20 nm resolution, offering potential for electronic and photonic nanodevice fabrication. | |
| Optical Fourier surfaces | June 1, 2020 | Heidelberg Instruments, nature | Thermal Scanning Probe Lithography and templating creating optical surfaces containing multiple specified sinusoids, enabling advanced diffractive optics, photonics, and applications in emerging photonics fields. | |
| Direct Patterning of Metal Chalcogenide Semiconductor Materials | May 14, 2020 | Advanced Functional Materials | A low-cost, high-resolution direct patterning method using metal-organic precursors enables fabrication of 2D/3D semiconductor structures with sub-50 nm resolution for various nanodevices. | |
| Thermal scanning probe lithography – a review | April 1, 2020 | Heidelberg Instruments, Microsystems & Nanoengineering (nature) | Review of Thermal Scanning Probe Lithography (t-SPL) covering its capabilities for high-resolution nanolithography and material interactions, providing insights for nanofabrication and material science challenges. | |
| Nano/Microscale Thermal Field Distribution: Conducting Thermal Decomposition of Pyrolytic-Type Polymer by Heated AFM Probes | March 7, 2020 | Nanomaterials | This study investigates temperature distribution between heated AFM tips and materials, using PPA film to create programmable nano/microscale pyramid structures for scanning thermal microscopy applications. | |
| Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic Antiferromagnets | January 21, 2020 | Advanced Materials | A versatile platform utilizes spin waves for optically inspired wave-based processing, advancing nanoscale devices with wavefront engineering, focusing, interference, and unique properties. | |
| Laser Heat-Mode Lithography: Principle and Methods | November 29, 2019 | This book explains laser heat-mode lithography, covering principles, system design, feature size manipulation, and applications, offering a versatile, simple, and tunable approach for nanofabrication. | ||
| Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution | November 6, 2019 | Nano Letters | A nanofluidic slit method enables precise nanoparticle placement using geometry-induced energy landscapes, achieving 8 nm accuracy with electrostatic trapping, focusing, and adhesive contact. | |
| Sub-10 nm Resolution Patterning of Pockets for Enzyme Immobilization with Independent Density and Quasi-3D Topography Control | October 14, 2019 | ACS Applied Materials & Interfaces | The study demonstrates thermochemical scanning probe lithography (tc-SPL) for precise enzyme nanopatterning on polymer surfaces, achieving single-enzyme resolution, high throughput, and controlled enzyme density. | |
| Phase masks for electron microscopy fabricated by thermal scanning probe lithography | October 3, 2019 | Micron | Silicon-nitride phase masks are fabricated using thermal scanning probe lithography, avoiding ion implantation, offering high accuracy, and generating electron vortex and Bessel beams. | |
| Scanning Probe Thermometry to study Thermoelectricity and Dissipation at Nanoscale Junctions | August 21, 2019 | ETH Zürich | This thesis explores heat transport and dissipation in nanoelectronics using high-resolution scanning probe thermometry, revealing nanoscale thermal phenomena, defects, and thermoelectric effects. | |
| Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices | August 1, 2019 | Electrical Atomic Force Microscopy for Nanoelectronics | Scanning probe lithography (SPL) offers high resolution, precise positioning, and material versatility, but its throughput limitations can be addressed through mix-and-match lithography strategies. | |
| Replication of a Tissue Microenvironment by Thermal Scanning Probe Lithography | May 3, 2019 | ACS Applied Materials & Interfaces | Thermal scanning probe lithography (t-SPL) efficiently creates biocompatible nanoscale topographies for cell culture, enabling rapid prototyping of substrates for studying cell-matrix interactions. | |
| High-throughput protein nanopatterning | March 14, 2019 | Faraday Discussions | This work demonstrates high-throughput, sub-10 nm enzyme nanopatterning using thermochemical scanning probe lithography (tc-SPL), advancing bio-nanotechnology and molecular-level biological studies. | |
| Ultra compact electrochemical metallization cells offering reproducible atomic scale memristive switching | March 7, 2019 | Communications Physics | Miniaturized Ag/SiO₂/Pt memristors enabling fast, low-energy, and highly reproducible atomic-scale switching for next-generation non-volatile memory applications. | |
| Monolayer MoS2 Nanoribbon Transistors Fabricated by Scanning Probe Lithography | February 27, 2019 | Nano Letters | This work demonstrates the fabrication of 30 nm monolayer MoS2 nanoribbon field-effect transistors using scanning probe lithography, achieving high performance with channel widths below 100 nm. | |
| Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography | January 1, 2019 | nature electronics | Thermal Scanning Probe Lithography enables precise metal electrode patterning on 2D semiconductors like MoS2, improving device performance with vanishing Schottky barriers and exceptional properties. | |
| Combination of Thermal Scanning Probe Lithography and Ion Etching to Fabricate 3D Silicon Nanopatterns with Extremely Smooth Surface | June 5, 2018 | ScienceDirect | Thermal scanning probe lithography enables nanoscale prototyping, but dry etching increases roughness. Optimized ion-beam polishing using a polymer mask achieved sub-nanometer smooth silicon surfaces. | |
| Nanofluidic rocking Brownian motors | March 1, 2018 | Science | Creating precise nanofluidic slits, utilizing electrostatic forces and oscillating fields, enables controlled transport of nanoparticles, demonstrated with 60nm gold spheres and efficient sorting of particles. | |
| High-Aspect Ratio Nanopatterning via Combined Thermal Scanning Probe Lithography and Dry Etching | August 5, 2017 | ScienceDirect | Thermal scanning probe lithography enables rapid nanofabrication in resist. Combined with optimized plasma etching, hard masks and heat treatment, shallow patterns were amplified 100× into silicon, achieving 240 nm lines, 4 µm depth, smooth surfaces and vertical sidewalls. |
