ラスタースキャンとベクトル露光モジュールを備えた、設定可能でコンパクトな卓上型マスクレスアライナー
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技術データ
| 書き込みモード I | ライト・モードII | 書き込みモードIII | |
|---|---|---|---|
| 書き込み性能（ラスタースキャン露光モジュール） | |||
| 最小構造サイズ [μm］ | 0.6 | 1 | 3 |
| 最小ラインとスペース [μm］ | 0.8 | 1.5 | 3 |
| アドレス・グリッド [nm］ | 20 | 50 | 100 |
| CD均一性［3σ、nm］ | 200 | 300 | 400 |
| 5 x 5 mm²以上の2層目のアライメント [nm］ | 500 | 500 | 1000 |
| 50×50mm²以上の2層目のアライメント [nm］ | 1000 | 1000 | 2000 |
| 書き込み速度 | 390 nm LED / 365 nm LED付き | 390 nm LED / 365 nm LED付き | 390nmのLEDを使用 |
| 書き込み速度 | 10 mm²/min at 0.6 µm | 40 mm²/min at 1 µm | 100 mm²/min at 3 µm |
| ラスター・スキャン露光モジュール用可変解像度" による、異なる最小構造サイズでのオプションの書き込み速度 | 18 mm²/min at 1 µm | 60 mm²/min at 2 µm | 160 mm²/min at 4 µm |
| 25 mm²/min at 2 µm | 90 mm²/min at 4 µm | 240 mm²/min at 6 µm | |
| 書き込み性能（ベクトルモード露光モジュール） | |||
| 最小フィーチャーサイズ[µm］ | 0.6 | 1 | 3 |
| アドレス・グリッド [nm］ | 20 | 20 | 20 |
| 5 x 5 mm²以上の2層目のアライメント [nm］ | 500 | 500 | 1000 |
| 50×50mm²以上の2層目のアライメント [nm］ | 1000 | 1000 | 2000 |
| ベクトルモードでの最大リニア書き込み速度 | 200 mm/s | 200 mm/s | 200 mm/s |
| ベクトルモードで使用可能なスポットサイズ[µm］ | 0.6 / 1 / 2 / 5 / 10 | 1 / 2 / 5 / 10 / 25 | 3 / 5 / 10 / 25 /50 |
| システム仕様 | |||
| 最大基板サイズ | 6″ x 6″ | ||
| 最小基板サイズ | 5 x 5mm2 | ||
| 基板の厚さ | 0.1～12 mm | ||
| 最大書き込み領域 | 150 x 150mm2 |
| ラスタースキャン露光モジュール | ベクトル露光モジュール | |
|---|---|---|
| 光源 | LED; 390 nm または 365 nm | レーザー；405 nmおよび/または375 nm |
| システム寸法（リソグラフィユニット） | ||
| µMLA | 幅×奥行き | 身長×体重 |
| メインシステムハウジング | 640mm（25インチ）×840mm（33インチ） | 530mm（21インチ）×130kg（285ポンド） |
| 設置条件 | ||
| 電気 | 230 VAC / 6A または 110 VAC / 12A (±5%、50/60 Hz) | |
| 圧縮空気 | 6～10バール | |
| クリーンルーム | ISO 6推奨 | |
| 温度安定性 | ±1 °C | |
| * システムにインストールできる書き込みモードは1つだけです。 |
関連出版物
| Title | Date | Publisher | Summary | Link |
|---|---|---|---|---|
| Brittle Materials-Based Fully Stretchable Organic Light-Emitting Diodes | August 27, 2026 | nature communications | This study introduces active crack engineering to create fully stretchable OLEDs from brittle semiconductors, achieving high efficiency, brightness, multicolor compatibility, and 250% strain tolerance. | |
| Quantifying Phage-Host Dynamics Using Droplet Microfluidics | April 28, 2026 | nature communications | Droplet microfluidics quantifies individual phage-host infection events, measuring lysis dynamics with precise experimental control, enabling accurate phage biology studies and advancing development of phage-based antimicrobial therapies. | |
| A Microfluidic Gradient Generator Post-Modified by Two-Photon Direct Laser Writing for Dynamic Particle Functionalization | March 25, 2026 | Journal of Applied Polymer Science | Reconfigurable microfluidic platform uses DLW-added pNIPAM actuators to trap, label, and release beads on-chip, enabling dynamic functionalization, high flexibility, and real-time control without changing flow conditions. | |
| Semiconductor Review – A Decade of Driving Microfabrication Forward | March 13, 2026 | Semiconductor Review | Over the past decade, maskless aligners have transformed lithography by eliminating photomasks, enabling rapid design iteration, high-precision patterning, and faster microfabrication workflows in research and production. | |
| Transfer, Integration, and Inverse Design of Metasurfaces in Suspended Membranes | February 16, 2026 | Moore More | This work introduces OPTIMISM, enabling universal transfer and integration of metasurfaces in suspended membranes, highlighting inverse-designed ultrathin meta-optics and refractive-index effects for scalable fiber-tip and biomedical applications. | |
| Microfluidic-Driven Lipid Nanoparticles for Improved miRNA Delivery via Endo-Lysosomal Trafficking Optimization | February 6, 2026 | Advanced Science | This study shows post-processing significantly shapes miRNA-loaded lipid nanoparticles’ size, charge, stability, and intracellular trafficking, establishing strategies to optimize non-viral gene delivery performance. | |
| Variability characteristics of non-stoichiometric, low-cost silicon oxide resistive memory | December 1, 2025 | AIP Advances | Eco-friendly silicon-oxide RRAM using biocompatible, low-cost materials shows state-of-the-art variability, supports intermediate resistance states, and suits memory-centric, non-von-Neumann computing architectures via simple microfabrication techniques methods. | |
| Direct Laser Writing of Au Top Contacts on WSe2 for High-Speed Photodetection | November 24, 2025 | ACS Applied Nano Materials | Laser-written gold contacts enable WSe2 photodetectors with nanosecond response, 250 MHz bandwidth, and strong responsivity, highlighting scalable high-speed optoelectronics using 2D materials for future applications. | |
| Deformability determines confined cancer cell migration efficiency with limited effect on directionality | November 18, 2025 | AIP Advances | Microfluidic studies link cancer cell deformability to improved squeezing through confinements, comparing HT1080 and MV3 cells, while showing minimal influence on migration path selection decisions. | |
| Inkjet-Printed 3D Sensor Arrays with FIB-Induced Electrode Refinement for Low-Noise Amperometric Recordings in hiPSC-Derived Brain Organoids | August 21, 2025 | ACS Sensors | Customizable 3D microelectrode arrays enable selective, low-noise recordings across organoid depths, overcoming planar MEA limits via inkjet printing, FIB milling, and electrodeposition for activity studies. | |
| Leaftronics: Natural Lignocellulose Scaffolds for Sustainable Electronics | November 8, 2024 | Science Advances | Leaf-derived lignocellulose scaffolds enable biodegradable, transparent, heat-stable electronic substrates supporting high-performance devices, offering sustainable alternatives to conventional plastics with low cost and minimal carbon footprint. | |
| Superconducting nonlinear transport in optically driven high-temperature K3C60 | September 23, 2023 | nature communications | This study investigates the electrical responses of optically driven quantum material, revealing nonlinear current-voltage characteristics indicative of photo-induced superconductivity, with potential applications in high-speed devices. | |
| Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release | July 27, 2023 | Heidelberg Instruments, IDUN DTU | This application note discusses microdevice-based drug delivery, focusing on dual compartment microcontainers (DCMCs) produced via maskless UV lithography. Potential for combination therapy is highlighted. | |
| Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetals | January 1, 2023 | nature physics | Optoelectronic materials converting light to bulk current. Unveiling anisotropic photothermoelectric effect driving complex photocurrent circulations via unequal crystal-axis thermopowers, visualized using microscopy and magnetic imaging. | |
| Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater | February 1, 2022 | ACS Nano | Aptamer-based graphene field effect transistor (AptG-FET) platform detects three opioid metabolites in wastewater rapidly and inexpensively, providing a reliable alternative to costly laboratory-based techniques. | |
| Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2 | December 14, 2021 | Chemistry of Materials | Novel atomic substitution method creates highly conductive nonlayered molybdenum nitrides from MoS2, enabling potential nanoelectronics’ applications with maintained conductivity and stable contacts over weeks. | |
| Evidence for metastable photo-induced superconductivity in K3C60 | February 1, 2021 | nature physics | Intense optical pulses induce transient superconductivity, evolving into stable states in K3C60 under sustained mid-infrared excitation, characterized by low resistance and extended lifetimes. | |
| Light-induced anomalous Hall effect in graphene | November 21, 2019 | nature physics | Optical driving in quantum solids uncovers phenomena like light-induced superconductivity and anomalous Hall effect in graphene, revealing Floquet-engineered topological band structures. |
