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| Title | Description | Category | Tags | Publisher | Published | Link | hf:doc_categories | hf:doc_tags | hf:doc_author | |
|---|---|---|---|---|---|---|---|---|---|---|
| “Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023 | Energieführungssystem für … | Press | VPG | WILEY Verlag | 5月, 2023 | press | vpg | wiley-verlag | ||
| 3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolution | High-precision 3D printin … | Scientific Paper | Two-Photon Polymerization (TPP) | Laser Focus World | 12月, 2019 | scientific-paper | two-photon-polymerization | laser-focus-world | ||
| A cleanroom in a glovebox | Our glovebox-integrated c … | Scientific Paper | μPG 101 | Review of Scientific Instruments | 7月, 2020 | scientific-paper | %ce%bcpg-101 | review-of-scientific-instruments | ||
| A New Method of AFM‐Based Nanolithography Using Frequency Enhanced Electrochemical Pressure Solution Etching | This paper investigates F … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | 3月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-technologies | ||
| Achieving Reliable and Ultrafast Memristors via Artificial Filaments in Silk Fibroin | This paper investigates u … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 11月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Advanced MEMS/NEMS Fabrication and Sensors | This book introduces new … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature | 10月, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | nature | ||
| Anisotropic Particle Fabrication Using Thermal Scanning Probe Lithography | Nanoparticles’ optical an … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 4月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Bilayer Lift-Off for NanoFrazor Lithography | Explore bilayer lift-off … | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 7月, 2023 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Biosynthesis enhancement of tropodithietic acid (TDA) antibacterial compound through biofilm formation by marine bacteria Phaeobacter inhibens on micro-structured polymer surfaces | Microfluidic channels cul … | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, Technical University of Denmark (DTU) | 2月, 2024 | application-note | direct-writing mla-150 | heidelberg-instruments technical-university-of-denmark-dtu | ||
| Broadband imaging with one planar diffractive lens | Achromatic diffractive le … | Scientific Paper | Grayscale, μPG 101 | scientific reports (nature) | 2月, 2018 | scientific-paper | grayscale %ce%bcpg-101 | scientific-reports-nature | ||
| Challenges of photomask-based greyscale lithography with a highly-sensitive positive photoresist designed for >100µm deep greyscale patterns | Greyscale lithography ena … | Scientific Paper | DWL 66+, Grayscale | SPIE. Digital Library | 3月, 2025 | scientific-paper | dwl-66 grayscale | spie-digital-library | ||
| Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist | The effects of incorporat … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ECS Journal of Solid State Science and Technology | 5月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | ecs-journal-of-solid-state-science-and-technology | ||
| Color astrophotography with a 100 mm-diameter f/2 polymer flat lens | A 100 mm achromatic diffr … | Scientific Paper | DWL 66+ | Applied Physics Letters | 3月, 2025 | scientific-paper | dwl-66 | applied-physics-letters | ||
| Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification | A novel method for amplif … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Microsystems & Nanoengineering | 2月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | microsystems-nanoengineering | ||
| Complete logic operations in an ambipolar tellurium homojunction via non-invasive scanning probe lithography | Low-dimensional semicondu … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Device | 9月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | device | ||
| Cost and Time Effective Lithography of Reusable Millimeter Size Bone Tissue Replicas With Sub-15 nm Feature Size on A Biocompatible Polymer | Bio-tSPL enables cost-eff … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | 2月, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| Cubic Microcontainers Improve In Situ Colonic Mucoadhesion and Absorption of Amoxicillin in Rats | Microcontainers enhance c … | Scientific Paper | Direct Writing, MLA 100 | Pharmaceutics (MDPI) | 4月, 2020 | scientific-paper | direct-writing mla-100 | pharmaceutics-mdpi | ||
| Damage-free nanolithography enabling superior device performance | Thermal scanning probe li … | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 9月, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe | A deterministic technique … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 11月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution | A nanofluidic slit method … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | 11月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs | Engineered nanotopography … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | 8月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nature-communications | ||
| Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor Nanocircuits | A scalable nanolithograph … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | 11月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-interfaces | ||
| Diffractive flat lens enables extreme depth-of-focus imaging | Multi-level diffractive l … | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | 10月, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Direct Heat-Induced Patterning of Inorganic Nanomaterials | The HIPIN method uses hea … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of the American Chemical Society | 6月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-the-american-chemical-society | ||
| Direct Patterning of Metal Chalcogenide Semiconductor Materials | A low-cost, high-resoluti … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | 5月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer | Cheap and quick fabricati … | Scientific Paper | Direct Writing, DWL 66+ | Rochester Institute of Technology | 5月, 2016 | scientific-paper | direct-writing dwl-66 | rochester-institute-of-technology | ||
| DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography | The most advanced industr … | Fact Sheet | DWL | Heidelberg Instruments | 11月, 2021 | fact-sheet | dwl | heidelberg-instruments | ||
| DWL 66+ Ultimate Lithography System | Versatile system for rese … | Fact Sheet | DWL 66+ | Heidelberg Instruments | 4月, 2022 | fact-sheet | dwl-66 | heidelberg-instruments | ||
| Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography | Thermal scanning probe li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 9月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Evidence for metastable photo-induced superconductivity in K3C60 | Intense optical pulses in … | Scientific Paper | Direct Writing, µMLA | nature physics | 2月, 2021 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Exploiting Thermal Scanning Probe Lithography for the Fabrication of Micro and Nano Electronic Devices | Thermal scanning probe li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC) | 9月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | 2023-international-conference-on-optical-mems-and-nanophotonics-omn-and-sbfoton-international-optics-and-photonics-conference-sbfoton-iopc | ||
| Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography | This paper reports on the … | Scientific Paper | DWL, Grayscale | International Iberian Nanotechnology Laboratory (INL) | 2月, 2022 | scientific-paper | dwl grayscale | international-iberian-nanotechnology-laboratory-inl | ||
| Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating | Si-based device using a f … | Scientific Paper | Direct Writing, DWL 66+ | Applied Optics | 5月, 2022 | scientific-paper | direct-writing dwl-66 | applied-optics | ||
| Fabrication of a hybrid device for the integration of light-triggered proton pumps | A novel method for fabric … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | 6月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | micro-and-nano-engineering-science-direct | ||
| Fabrication of a Silicon Electron Multiplier sensor using metal assisted chemical etching and its characterisation | SiEM sensor utilizing met … | Scientific Paper | Direct Writing, DWL 66+ | ScienceDirect | 3月, 2024 | scientific-paper | direct-writing dwl-66 | sciencedirect | ||
| Fabrication of refractive micro-lenses for orbital angular momentum generation by direct laser writing and nanoimprint lithography | This application note des … | Application Note | Direct Writing, DWL 66+, Nanoimprint Lithography | GermanLitho, Heidelberg Instruments | 10月, 2024 | application-note | direct-writing dwl-66 nanoimprint-lithography | germanlitho heidelberg-instruments | ||
| Fabrication of spin-orbit logic devices by thermal nanolithography | This work explores therma … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | 4月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | ||||
| Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release | This application note dis … | Application Note | Direct Writing, µMLA | Heidelberg Instruments, IDUN DTU | 7月, 2023 | application-note | direct-writing %c2%b5mla | heidelberg-instruments idun-dtu | ||
| Far-Field and Non-Intrusive Optical Mapping of Nanoscale Structures | This study analyzes far-f … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | 7月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study | This paper describes the … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | 1月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Freeform nanostructuring of hexagonal boron nitride | Hexagonal boron nitride ( … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | arXiv Physics/Optics | 5月, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | arxiv-physics-optics | ||
| From regular periodic micro-lens arrays to randomized continuous phase profiles | For industrial illuminati … | Scientific Paper | Direct Writing, DWL 66+ | Advanced Optical Technologies | 2月, 2015 | scientific-paper | direct-writing dwl-66 | advanced-optical-technologies | ||
| Generating smooth potential landscapes with thermal scanning-probe lithography | Scanning probe microscopy … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Physics: Materials | 11月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-physics-materials | ||
| Grayscale with GenISys 3D-PEC | We present the powerful s … | Application Note | Direct Writing, DWL 66+, Grayscale | GenISys GmbH, Heidelberg Instruments | 3月, 2023 | application-note | direct-writing dwl-66 grayscale | genisys-gmbh heidelberg-instruments | ||
| Heidelberg Instruments Reports Major Orders for the VPG+ 1400 FPD Volume Pattern Generator from Leading Asian Photomask Manufacturers | Heidelberg Instruments ha … | Press | VPG | Heidelberg Instruments | 11月, 2024 | press | vpg | heidelberg-instruments | ||
| High-resolution patterning of nanowire-based quantum devices with the NanoFrazor | The NanoFrazor offers a u … | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 9月, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| High-sensitive two-dimensional PbI2 photodetector with ultrashort channel | This study reports a PbI2 … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Frontiers of Physics | 7月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | frontiers-of-physics | ||
| High-throughput protein nanopatterning | This work demonstrates hi … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Faraday Discussions | 3月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | faraday-discussions | ||
| Hollow silicon-based microneedle array for dermal interstitial fluid extraction fabricated by only dry etching on wafer scale | Silicon-based microneedle … | Application Note | Direct Writing, MLA 150 | EPFL, Heidelberg Instruments, Xsensio | 5月, 2024 | application-note | direct-writing mla-150 | epfl heidelberg-instruments xsensio | ||
| Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint | This paper investigates h … | Scientific Paper | DWL, DWL 66+ | Paul Scherrer Institute | 9月, 2021 | scientific-paper | dwl dwl-66 | paul-scherrer-institute | ||
| Imaging over an unlimited bandwidth with a single diffractive surface | With the control of the p … | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | 7月, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Impact of massive parallelization on two-photon absorption micro- and nanofabrication | In this paper, massive pa … | Scientific Paper | Two-Photon Polymerization (TPP) | SPIE. Digital Library | 3月, 2020 | scientific-paper | two-photon-polymerization | spie-digital-library | ||
| Increasing the density of passive photonic integrated circuits via nanophotonic cloaking | We utilize nanophotonic c … | Scientific Paper | Grayscale, μPG 101 | nature communications | 11月, 2016 | scientific-paper | grayscale %ce%bcpg-101 | nature-communications | ||
| Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured template | Examining single Au nanop … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Optics Express | 4月, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | optics-express | ||
| Inverse-designed achromatic flat lens enabling imaging across the visible & near-infrared with diameter > 3mm | A flat lens, designed thr … | Scientific Paper | DWL 66+, Grayscale | Applied Physics Letters | 7月, 2020 | scientific-paper | dwl-66 grayscale | applied-physics-letters | ||
| Large Scale Fresnel Zone Plates On SiN-Membranes | This application note des … | Application Note | DWL 66+ | Heidelberg Instruments, XRnanotech | 9月, 2023 | application-note | dwl-66 | heidelberg-instruments xrnanotech | ||
| Large-area, high-numerical-aperture multi-level diffractive lens via inverse design | Inverse design enables th … | Scientific Paper | DWL 66+, Grayscale | Heidelberg Instruments, Optica | 3月, 2020 | scientific-paper | dwl-66 grayscale | heidelberg-instruments optica | ||
| Laser Heat-Mode Lithography: Principle and Methods | This book explains laser … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | 11月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | ||||
| Light-induced anomalous Hall effect in graphene | Optical driving in quantu … | Scientific Paper | Direct Writing, µMLA | nature physics | 11月, 2019 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process | Via-hole oxidation proces … | Scientific Paper | DWL | HAL open science | 10月, 2017 | scientific-paper | dwl | hal-open-science | ||
| LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments | Lumineq Oy, a global lead … | Press | Direct Writing, MLA 300 | Lumineq | 9月, 2023 | press | direct-writing mla-300 | lumineq | ||
| Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range | Two-photon absorption (TP … | Scientific Paper | Two-Photon Polymerization (TPP) | Advanced Optical Technologies | 5月, 2019 | scientific-paper | two-photon-polymerization | advanced-optical-technologies | ||
| Maskless Aligner Technology and the MLA 300 Drive Efficient Development and Production in Microstructures | This overview covers a pa … | Whitepaper | Direct Writing, MLA 300 | Heidelberg Instruments | 8月, 2021 | whitepaper | direct-writing mla-300 | heidelberg-instruments | ||
| MEMS micro-coils for magnetic neurostimulation | Innovative MEMS micro-coi … | Scientific Paper | MLA 150 | Biosensors and Bioelectronics (ScienceDirect) | 5月, 2023 | scientific-paper | mla-150 | biosensors-and-bioelectronics-sciencedirect | ||
| MLA 150 Advanced Maskless Aligner | The fastest maskless tool … | Fact Sheet | MLA 150 | Heidelberg Instruments | 2月, 2025 | fact-sheet | mla-150 | heidelberg-instruments | ||
| MLA 300 Industrial Maskless Aligner | Optimised for industrial … | Fact Sheet | MLA 300 | Heidelberg Instruments | 3月, 2024 | fact-sheet | mla-300 | heidelberg-instruments | ||
| Monolayer MoS2 Nanoribbon Transistors Fabricated by Scanning Probe Lithography | This work demonstrates th … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | 2月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication | This paper describes a hy … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Science | 1月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-science | ||
| Multilevel diffractive lens in the MWIR with extended depth-of-focus and wide field-of-view | Compare inverse-designed … | Scientific Paper | Direct Writing, DWL 66+ | Optics Express | 5月, 2023 | scientific-paper | direct-writing dwl-66 | optics-express | ||
| Nano-Ironing van der Waals Heterostructures toward Electrically Controlled Quantum Dots | Nanoironing van der Waals … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 6月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Nano/Microscale Thermal Field Distribution: Conducting Thermal Decomposition of Pyrolytic-Type Polymer by Heated AFM Probes | This study investigates t … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | 3月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography | Thermal scanning probe li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | APL Materials | 1月, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | apl-materials | ||
| Nanofluidic rocking Brownian motors | Creating precise nanoflui … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Science | 3月, 2018 | scientific-paper | nanofrazor thermal-scanning-probe | science | ||
| NanoFrazor | The NanoFrazor takes nano … | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Heidelberg Instruments Nano | 7月, 2024 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments heidelberg-instruments-nano | ||
| NanoFrazor Explore Nanofabrication Tool | Thermal scanning probe li … | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 3月, 2022 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| NanoFrazor for Direct Nanoscale Chemical Conversion of Materials | Chemical conversion using … | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 8月, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| NanoFrazor Scholar Nanofabrication Tool | Table-top thermal scannin … | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 3月, 2022 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| Nanometer scale resolution, multi-channel separation of spherical particles in a rocking ratchet with increasing barrier heights | This nanoparticle size-se … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Physical Review Applied | 7月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | physical-review-applied | ||
| Nanopatterning of 2D materials by block copolymer self-assembly | Nanopatterning using bloc … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Technical University of Denmark (DTU) | 8月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | technical-university-of-denmark-dtu | ||
| Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensions | We investigate neurite gu … | Scientific Paper | DWL 66+, Grayscale | Nanoscale Advances | 7月, 2020 | scientific-paper | dwl-66 grayscale | nanoscale-advances | ||
| Normally-Off p-GaN Gate High-Electron-Mobility Transistors with the Air-Bridge Source-Connection Fabricated Using the Direct Laser Writing Grayscale Photolithography Technology | Fabrication of a p-GaN ga … | Scientific Paper | Direct Writing, DWL 66+ | Crystals | 4月, 2023 | scientific-paper | direct-writing dwl-66 | crystals | ||
| Novel Mixed-Dimensional hBN-Passivated Silicon Nanowire Reconfigurable Field Effect Transistors: Fabrication and Characterization | This work demonstrates a … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 8月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Novel Tunnel Magnetoresistive Sensor Functionalities via Oblique-Incidence Deposition | We improve tunnel magneto … | Scientific Paper | μPG 101 | ACS Applied Materials & Interfaces | 7月, 2021 | scientific-paper | %ce%bcpg-101 | acs-applied-materials-interfaces | ||
| Optical Fourier surfaces | Thermal Scanning Probe Li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, nature | 6月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | heidelberg-instruments nature | ||
| Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic Antiferromagnets | A versatile platform util … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 1月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Optimization of Laser Written Photomasks for Photonic Device Manufacturing | Successful performance im … | Scientific Paper | Mask-making, ULTRA | Heidelberg Instruments, SPIE. Digital Library | 9月, 2022 | scientific-paper | mask-making ultra | heidelberg-instruments spie-digital-library | ||
| Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentration | Photovoltaic system combi … | Scientific Paper | Direct Writing, μPG 101 | AIP Advances | 9月, 2016 | scientific-paper | direct-writing %ce%bcpg-101 | aip-advances | ||
| Overview on Maskless Grayscale Lithography | From design to micro stru … | Video | Grayscale | Heidelberg Instruments | 5月, 2023 | video | grayscale | heidelberg-instruments | ||
| Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices | Scanning probe lithograph … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Electrical Atomic Force Microscopy for Nanoelectronics | 8月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | electrical-atomic-force-microscopy-for-nanoelectronics | ||
| Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography | Thermal Scanning Probe Li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature electronics | 1月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nature-electronics | ||
| Phase masks for electron microscopy fabricated by thermal scanning probe lithography | Silicon-nitride phase mas … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micron | 10月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | micron | ||
| Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing | Nanomaterials derive uniq … | Scientific Paper | Direct Writing, DWL 66+, NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | 8月, 2023 | scientific-paper | direct-writing dwl-66 nanofrazor thermal-scanning-probe | advanced-materials-technologies | ||
| Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2 | Novel atomic substitution … | Scientific Paper | µMLA | Chemistry of Materials | 12月, 2021 | scientific-paper | %c2%b5mla | chemistry-of-materials | ||
| Placement of Biological Membrane Patches in a Nanofluidic Gap With Control Over Position and Orientation | Purple membranes from Hal … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | 7月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-interfaces | ||
| Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants | Study of fabrication of a … | Scientific Paper | Two-Photon Polymerization (TPP) | International Journal of Molecular Sciences | 3月, 2022 | scientific-paper | two-photon-polymerization | international-journal-of-molecular-sciences | ||
| Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates | This review discusses and … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | 6月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | micro-and-nano-engineering-science-direct | ||
| Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater | Aptamer-based graphene fi … | Scientific Paper | Direct Writing, µMLA | ACS Nano | 2月, 2022 | scientific-paper | direct-writing %c2%b5mla | acs-nano | ||
| Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices | Direct patterning technol … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Physics Research | 8月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-physics-research | ||
| Replication of a Tissue Microenvironment by Thermal Scanning Probe Lithography | Thermal scanning probe li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 5月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography | Utilizing grayscale litho … | Scientific Paper | Direct Writing, DWL 66+, Grayscale | Applied Physics Letters | 4月, 2023 | scientific-paper | direct-writing dwl-66 grayscale | applied-physics-letters | ||
| Scanning Probe Lithography: State-of-the-Art and Future Perspectives | Scanning probe lithograph … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micromachines | 1月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | micromachines | ||
| Scanning Probe Thermometry to study Thermoelectricity and Dissipation at Nanoscale Junctions | This thesis explores heat … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ETH Zürich | 8月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | eth-zurich | ||
| Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8 | Low-power laser irradiati … | Scientific Paper | Direct Writing, µPG | Micromachines | 4月, 2021 | scientific-paper | direct-writing %c2%b5pg | micromachines | ||
| Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT | PMN–PT thin film disks, w … | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | 5月, 2023 | scientific-paper | direct-writing mla-150 | microsystems-nanoengineering-nature | ||
| Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination Therapy | Monodisperse dual-compart … | Scientific Paper | Direct Writing, MLA 100 | Advanced Therapeutics | 8月, 2022 | scientific-paper | direct-writing mla-100 | advanced-therapeutics | ||
| Shaping Interfaces for Manipulation and Imaging of Nano-Objects in Nanofluidic Confinement | This study demonstrates n … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ETH Zürich | 1月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | eth-zurich | ||
| Single CdSe Quantum Dots Positioned in Nanostructured Heterogeneous Templates: Implications for High-Precision Nanoassembly | This work develops a mult … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | 4月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-nano-materials | ||
| Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell Transfection | Micro-projectiles were cr … | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, IDUN DTU | 9月, 2023 | application-note | direct-writing mla-150 | heidelberg-instruments idun-dtu | ||
| Spatial defects nanoengineering for bipolar conductivity in MoS2 | Controlling defects in mo … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | 7月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nature-communications | ||
| Spectral tuning of Bloch Surface Wave resonances by light-controlled optical anisotropy | This work demonstrates dy … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanophotonics | 2月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | nanophotonics | ||
| Spin-acoustic control of silicon vacancies in 4H silicon carbide | Spin-acoustic control dem … | Scientific Paper | Direct Writing, MLA 150 | nature electronics | 9月, 2023 | scientific-paper | direct-writing mla-150 | nature-electronics | ||
| Structurally and morphologically engineered chalcogenide materials for optical and photonic devices | This paper explores advan … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Optical Microsystems | 1月, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-optical-microsystems | ||
| Sub-10 nm Resolution Patterning of Pockets for Enzyme Immobilization with Independent Density and Quasi-3D Topography Control | The study demonstrates th … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | 10月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Superconducting nonlinear transport in optically driven high-temperature K3C60 | This study investigates t … | Scientific Paper | Direct Writing, µMLA | nature communications | 9月, 2023 | scientific-paper | direct-writing %c2%b5mla | nature-communications | ||
| Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substrates | Bottom surface-induced fe … | Scientific Paper | Direct Writing, μPG 101 | IOP Science | 1月, 2017 | scientific-paper | direct-writing %ce%bcpg-101 | iop-science | ||
| Tailored Micromagnet Sorting Gate for Simultaneous Multiple Cell Screening in Portable Magnetophoretic Cell‐On‐Chip Platforms | Novel technique for selec … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | 3月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| The choice of an autocorrelation length in dark‑field lung imaging | X-ray dark-field radiogra … | Scientific Paper | Direct Writing, DWL 66+ | scientific reports (nature) | 2月, 2023 | scientific-paper | direct-writing dwl-66 | scientific-reports-nature | ||
| The Lithographer – Grayscale Lithography Issue | The Rise of Grayscale Lit … | The Lithographer | Grayscale | Heidelberg Instruments | 1月, 2020 | the-lithographer | grayscale | heidelberg-instruments | ||
| The Lithographer – Interview with Dr. Nolan Lassaline | From classical optics to … | The Lithographer | Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 10月, 2024 | the-lithographer | thermal-scanning-probe | heidelberg-instruments | ||
| The Lithographer – Quantum Issue | The Quantum Issue of The … | The Lithographer | Direct Writing, Grayscale, NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | 10月, 2020 | the-lithographer | direct-writing grayscale nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable Metasurfaces | Metasurfaces enable versa … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Optical Materials | 10月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-optical-materials | ||
| Thermal nanoconversion of ferromagnetic nanoislands | This paper examines the u … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Applied Physics Letters | 3月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | applied-physics-letters | ||
| Thermal scanning probe and laser lithography for patterning nanowire based quantum devices | The NanoFrazor combines t … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanotechnology | 4月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanotechnology | ||
| Thermal scanning probe lithography | Thermal scanning probe li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature reviews methods primer | 5月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | nature-reviews-methods-primer | ||
| Thermal scanning probe lithography – a review | Review of Thermal Scannin … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Microsystems & Nanoengineering (nature) | 4月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | heidelberg-instruments microsystems-nanoengineering-nature | ||
| Thermal scanning probe lithography using Parylene C as thermal resist | Thermal scanning probe li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro & Nano Letters | 2月, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | micro-nano-letters | ||
| Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates | Thermal scanning-probe li … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | 10月, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-nano-materials | ||
| Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 Nanowires | Nanowires are promising f … | Scientific Paper | Direct Writing, μPG 101 | Advanced Energy Materials | 5月, 2015 | scientific-paper | direct-writing %ce%bcpg-101 | advanced-energy-materials | ||
| Thermomechanical Nanocutting of 2D Materials | A thermomechanical indent … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | 6月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Thermomechanical Nanostraining of Two-Dimensional Materials | Nanoindentation via therm … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | 10月, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stress | Flexible thin film transi … | Scientific Paper | Direct Writing, DWL 66+ | Flexible and Printed Electronics | 6月, 2022 | scientific-paper | direct-writing dwl-66 | flexible-and-printed-electronics | ||
| Tip-Based Nanomachining on Thin Films: A Mini Review | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomanufacturing and Metrology | 9月, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | nanomanufacturing-and-metrology | ||
| Transistors platform for rapid and parallel detection of multiple pathogens by nanoscale-localized multiplexed biological activation | This paper describes a sc … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature | 1月, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nature | ||
| Ultra compact electrochemical metallization cells offering reproducible atomic scale memristive switching | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Communications Physics | 3月, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | communications-physics | ||
| ULTRA Semiconductor Mask Writer | A tool specifically desig … | Fact Sheet | ULTRA | Heidelberg Instruments | 11月, 2024 | fact-sheet | ultra | heidelberg-instruments | ||
| Ultra-High Resolution Pattern Transfer on NanoFrazor Lithography | High-resolution lithograp … | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | 7月, 2023 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Ultra-thick positive photoresist layers for maskless grayscale lithography | Grayscale lithography can … | Scientific Paper | Direct Writing, DWL 66+, Grayscale | Heidelberg Instruments, SPIE. Digital Library | 4月, 2023 | scientific-paper | direct-writing dwl-66 grayscale | heidelberg-instruments spie-digital-library | ||
| Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3 | Orthorhombic κ-Ga2O3 is a … | Scientific Paper | µPG | Applied Surface Science (ScienceDirect) | 1月, 2023 | scientific-paper | %c2%b5pg | applied-surface-science-science-direct | ||
| Vertical micropillars arrays with high aspect ratio submicron gap by metal assisted chemical etching as active components in new sensor devices | MacEtch, a plasma-free an … | Application Note | Direct Writing, DWL 66+ | ETH Zürich, Heidelberg Instruments, Paul Scherrer Institute | 7月, 2024 | application-note | direct-writing dwl-66 | eth-zurich heidelberg-instruments paul-scherrer-institute | ||
| Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithography | Achieve straight, vertica … | Scientific Paper | Direct Writing, DWL 66+ | Micro and Nano Engineering (ScienceDirect) | 6月, 2023 | scientific-paper | direct-writing dwl-66 | micro-and-nano-engineering-science-direct | ||
| Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology | First experimental demons … | Scientific Paper | Direct Writing, DWL | HAL open science | 10月, 2017 | scientific-paper | direct-writing dwl | hal-open-science | ||
| Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetals | Optoelectronic materials … | Scientific Paper | Direct Writing, µMLA | nature physics | 1月, 2023 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| VPG 300 DI Maskless Stepper | Maskless direct imager fo … | Fact Sheet | VPG | Heidelberg Instruments | 9月, 2023 | fact-sheet | vpg | heidelberg-instruments | ||
| VPG+ 200 / VPG+ 400 Volume Pattern Generator | A production tool for sta … | Fact Sheet | VPG | Heidelberg Instruments | 6月, 2023 | fact-sheet | vpg | heidelberg-instruments | ||
| VPG+ 800 / VPG+ 1400 Volume Pattern Generator | Photomask production on l … | Fact Sheet | VPG | Heidelberg Instruments | 6月, 2022 | fact-sheet | vpg | heidelberg-instruments | ||
| Wire suspended on a v-groove cavity to measure gas physical properties | Thermal flow sensors meas … | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, University of Twente | 5月, 2024 | application-note | direct-writing mla-150 | heidelberg-instruments university-of-twente | ||
| µMLA Tabletop Maskless Aligner | Configurable and compact … | Fact Sheet | µMLA | Heidelberg Instruments | 4月, 2024 | fact-sheet | %c2%b5mla | heidelberg-instruments |
