Bibliothèque
Découvrez notre bibliothèque de ressources
Nous sommes ravis de vous fournir une collection complète de fiches d’information, de documents de recherche, de livres blancs et d’autres documents relatifs à Heidelberg Instruments. Notre bibliothèque est conçue pour servir de ressource précieuse à tous ceux qui recherchent des informations sur nos produits, nos applications, nos technologies de base et nos caractéristiques principales. Non seulement nous y publions nos propres informations, mais nous y présentons également des documents produits en collaboration avec des partenaires et des documents rédigés par d’autres auteurs utilisant nos systèmes. Certains liens peuvent mener à des sources externes.
Comment utiliser notre bibliothèque
- Utilisez la barre de recherche pour trouver du contenu lié aux applications, avec des termes tels que “Advanced Packaging”, “Quantum Devices”, “Micro-optics” et bien d’autres encore.
- Trouvez des documents liés aux produits et à nos technologies grâce au filtre “tags”.
- Les catégories indiquent le type de publication, par exemple les fiches d’information.
| Title | Description | Category | Tags | Publisher | Published | Link | hf:doc_categories | hf:doc_tags | hf:doc_author | |
|---|---|---|---|---|---|---|---|---|---|---|
| “Sauber und laufruhig im Reinraum” – ReinRaumTechnik 3/2023 | Energieführungssystem für die partikelfreie Halbleiterfertigung in den Anlagen von Heidelberg Instruments. Only available in German at this point. | Press | VPG | WILEY Verlag | mai, 2023 | press | vpg | wiley-verlag | ||
| 3D-printed Optics: Focused femtosecond pulses print optical components with subdiffraction-limited resolution | High-precision 3D printing provides a wide range of freedom in design for industrial fabrication of advanced optical components and products. LFW December Issue/2019 | Scientific Paper | Two-Photon Polymerization (TPP) | Laser Focus World | décembre, 2019 | scientific-paper | two-photon-polymerization | laser-focus-world | ||
| A cleanroom in a glovebox | Our glovebox-integrated cleanroom achieves fabrication, characterization, and reduced facility costs in an oxygen-free and clean environment, enabling exploration of new materials, quantum phases and devices. | Scientific Paper | μPG 101 | Review of Scientific Instruments | juillet, 2020 | scientific-paper | %ce%bcpg-101 | review-of-scientific-instruments | ||
| A New Method of AFM‐Based Nanolithography Using Frequency Enhanced Electrochemical Pressure Solution Etching | This paper investigates Frequency Enhanced Electrochemical Pressure Solution (FEEPS) as a novel nanolithography method for etching silica surfaces with an AFM tip. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | mars, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-technologies | ||
| Achieving Reliable and Ultrafast Memristors via Artificial Filaments in Silk Fibroin | This paper investigates using biocompatible silk fibroin (SF) as a switching medium in silver/SF/gold (Ag/SF/Au) memristors. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | novembre, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Advanced MEMS/NEMS Fabrication and Sensors | This book introduces new and unique fabrication, micromachining, and integration manufacturing methods for MEMS and NEMS devices, as well as novel nanomaterials for sensor fabrications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature | octobre, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | nature | ||
| Anisotropic Particle Fabrication Using Thermal Scanning Probe Lithography | Nanoparticles’ optical and physicochemical properties are modulated via a novel, efficient nanolithographic method producing diverse monodispersed shapes, ensuring precise size, shape, and material control. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | avril, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Bilayer Lift-Off for NanoFrazor Lithography | Explore bilayer lift-off with NanoFrazor lithography, addressing advantages, process details, and examples, including high-quality contacts and structures as small as 7 nm. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | juillet, 2023 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Biosynthesis enhancement of tropodithietic acid (TDA) antibacterial compound through biofilm formation by marine bacteria Phaeobacter inhibens on micro-structured polymer surfaces | Microfluidic channels cultivate Phaeobacter inhibens biofilms on diverse polymer surfaces, offering biocontrol potential in aquaculture by mitigating antibiotic risks. Creating diverse surfaces to promote biosynthesis. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, Technical University of Denmark (DTU) | février, 2024 | application-note | direct-writing mla-150 | heidelberg-instruments technical-university-of-denmark-dtu | ||
| Broadband imaging with one planar diffractive lens | Achromatic diffractive lenses (ADLs) enable imaging across the visible spectrum, achieving diffraction-limited focusing and high numerical aperture. Cost-effective and scalable for widespread use. | Scientific Paper | Grayscale, μPG 101 | scientific reports (nature) | février, 2018 | scientific-paper | grayscale %ce%bcpg-101 | scientific-reports-nature | ||
| Challenges of photomask-based greyscale lithography with a highly-sensitive positive photoresist designed for >100µm deep greyscale patterns | Greyscale lithography enables 2.5D microstructures for micro-optics. The authors examine deep patterning in mr-P 22G_XP resist using mask aligners, resist aging effects, and suitable photomask … | Scientific Paper | DWL 66+, Grayscale | SPIE. Digital Library | mars, 2025 | scientific-paper | dwl-66 grayscale | spie-digital-library | ||
| Chemically Amplified, Dry-Develop Poly(aldehyde) Photoresist | The effects of incorporating a base quencher into a poly(phthalaldehyde-co-propanal) photoresist to enhance the performance of dry-develop resist in a direct-write UV lithography tool. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ECS Journal of Solid State Science and Technology | mai, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | ecs-journal-of-solid-state-science-and-technology | ||
| Color astrophotography with a 100 mm-diameter f/2 polymer flat lens | A 100 mm achromatic diffractive lens for 400-800 nm, created with the DWL 66+, achieves high-resolution full-color imaging and reduced telescope weight. | Scientific Paper | DWL 66+ | Applied Physics Letters | mars, 2025 | scientific-paper | dwl-66 | applied-physics-letters | ||
| Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification | A novel method for amplifying the depth of grayscale nanopatterns in dielectric materials like SiO2 using a combination of t-SPL and optimized dry etching techniques. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Microsystems & Nanoengineering | février, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | microsystems-nanoengineering | ||
| Complete logic operations in an ambipolar tellurium homojunction via non-invasive scanning probe lithography | Low-dimensional semiconductors, like tellurium nanoribbons, enable miniaturized logic devices via ambipolar conduction. Non-invasive lithography creates transistors performing all seven basic logic operations. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Device | septembre, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | device | ||
| Cost and Time Effective Lithography of Reusable Millimeter Size Bone Tissue Replicas With Sub-15 nm Feature Size on A Biocompatible Polymer | Bio-tSPL enables cost-effective, high-precision fabrication of reusable, biocompatible 3D bone tissue replicas for stem cell culture, tissue-mimetic biofunctionalization, drug testing, and regenerative medicine. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | février, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| Cubic Microcontainers Improve In Situ Colonic Mucoadhesion and Absorption of Amoxicillin in Rats | Microcontainers enhance colonic drug delivery by influencing mucoadhesion and absorption. Cubic microcontainers show better adherence and absorption of amoxicillin compared to cylindrical and triangular ones. | Scientific Paper | Direct Writing, MLA 100 | Pharmaceutics (MDPI) | avril, 2020 | scientific-paper | direct-writing mla-100 | pharmaceutics-mdpi | ||
| Damage-free nanolithography enabling superior device performance | Thermal scanning probe lithography enabled by NanoFrazor helps to fabricate devices with superior performance due to its damage-free patterning principle. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | septembre, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Deterministic Assembly of Single Sub-20 nm Functional Nanoparticles Using a Thermally Modified Template with a Scanning Nanoprobe | A deterministic technique uses hot scanning nanoprobes to assemble sub-20 nm nanoparticles, including quantum dots, into 2D arrays and complex nanostructures for various applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | novembre, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution | A nanofluidic slit method enables precise nanoparticle placement using geometry-induced energy landscapes, achieving 8 nm accuracy with electrostatic trapping, focusing, and adhesive contact. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | novembre, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs | Engineered nanotopography induces tensile strain in MoS2 FETs, significantly enhancing carrier mobility and on-state current, promising advancements for 2D material-based electronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | août, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nature-communications | ||
| Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor Nanocircuits | A scalable nanolithography method enables precise engineering of 2D TMD nanocircuits, like MoS2, for ultra-compact electronic and photonic devices with controlled thickness and excellent conductivity. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | novembre, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-interfaces | ||
| Diffractive flat lens enables extreme depth-of-focus imaging | Multi-level diffractive lens (MDL) designs drastically enhance depth of focus by over 4 orders of magnitude, enabling focus maintenance for objects separated by large distances. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | octobre, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Direct Heat-Induced Patterning of Inorganic Nanomaterials | The HIPIN method uses heat-induced ligand transformation to pattern nanomaterials, enabling direct, wavelength-diverse lithography for advanced manufacturing of quantum dot electronic and optoelectronic devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of the American Chemical Society | juin, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-the-american-chemical-society | ||
| Direct Patterning of Metal Chalcogenide Semiconductor Materials | A low-cost, high-resolution direct patterning method using metal-organic precursors enables fabrication of 2D/3D semiconductor structures with sub-50 nm resolution for various nanodevices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | mai, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| Direct Write Optical Waveguide Fabrication in organic films using a Heidelberg Laser Writer | Cheap and quick fabrication of mr-DWL waveguides channels on glass buried in optical polymer cladding with 350 µm radius ring resonators and 0.9 µm spacing. | Scientific Paper | Direct Writing, DWL 66+ | Rochester Institute of Technology | mai, 2016 | scientific-paper | direct-writing dwl-66 | rochester-institute-of-technology | ||
| DWL 2000 GS / DWL 4000 GS Industrial Grayscale Lithography | The most advanced industrial grayscale lithography tool on the market. | Fact Sheet | DWL | Heidelberg Instruments | novembre, 2021 | fact-sheet | dwl | heidelberg-instruments | ||
| DWL 66+ Ultimate Lithography System | Versatile system for research and prototyping with variable resolution and wide selection of options. | Fact Sheet | DWL 66+ | Heidelberg Instruments | avril, 2022 | fact-sheet | dwl-66 | heidelberg-instruments | ||
| Edge-Contact MoS2 Transistors Fabricated Using Thermal Scanning Probe Lithography | Thermal scanning probe lithography (t-SPL) fabricates MoS2-based field-effect transistors, achieving high on/off ratios without damaging materials, offering a gentle alternative to electron beam lithography. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | septembre, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Evidence for metastable photo-induced superconductivity in K3C60 | Intense optical pulses induce transient superconductivity, evolving into stable states in K3C60 under sustained mid-infrared excitation, characterized by low resistance and extended lifetimes. | Scientific Paper | Direct Writing, µMLA | nature physics | février, 2021 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Exploiting Thermal Scanning Probe Lithography for the Fabrication of Micro and Nano Electronic Devices | Thermal scanning probe lithography enables fast fabrication of micro/nano structures with 100nm resolution, enhancing electronic performance through gold coating and resistivity characterization. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | 2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC) | septembre, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | 2023-international-conference-on-optical-mems-and-nanophotonics-omn-and-sbfoton-international-optics-and-photonics-conference-sbfoton-iopc | ||
| Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography | This paper reports on the fabrication and optical characterisation of large aperture diffractive lenses using greyscale lithography for use in a tunable zoom lens system. | Scientific Paper | DWL, Grayscale | International Iberian Nanotechnology Laboratory (INL) | février, 2022 | scientific-paper | dwl grayscale | international-iberian-nanotechnology-laboratory-inl | ||
| Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating | Si-based device using a fractal pattern for automatic focusing in high-resolution X-ray tomography. Achieves globally homogeneous visibility and local contrast with versatile X-ray energy applicability. | Scientific Paper | Direct Writing, DWL 66+ | Applied Optics | mai, 2022 | scientific-paper | direct-writing dwl-66 | applied-optics | ||
| Fabrication of a hybrid device for the integration of light-triggered proton pumps | A novel method for fabricating a hybrid device that integrates light-triggered proton pumps into a network of nanochannels for applications in directed ion transport. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | juin, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | micro-and-nano-engineering-science-direct | ||
| Fabrication of a Silicon Electron Multiplier sensor using metal assisted chemical etching and its characterisation | SiEM sensor utilizing metal-assisted chemical etching to create high aspect ratio silicon pillars with charge multiplication capabilities. Electrical tests confirm compatibility with p–n junctions. | Scientific Paper | Direct Writing, DWL 66+ | ScienceDirect | mars, 2024 | scientific-paper | direct-writing dwl-66 | sciencedirect | ||
| Fabrication of refractive micro-lenses for orbital angular momentum generation by direct laser writing and nanoimprint lithography | This application note describes the fabrication of refractive micro-lenses using Direct Laser Writing and Nanoimprint Lithography for generating orbital angular momentum in light waves. | Application Note | Direct Writing, DWL 66+, Nanoimprint Lithography | GermanLitho, Heidelberg Instruments | octobre, 2024 | application-note | direct-writing dwl-66 nanoimprint-lithography | germanlitho heidelberg-instruments | ||
| Fabrication of spin-orbit logic devices by thermal nanolithography | This work explores thermal scanning probe lithography (t-SPL) to fabricate devices with sub-50 nm features, enabling energy-efficient non-volatile computing and memory devices using 2D materials. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | avril, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | ||||
| Fabrication Processes of Dual Compartment Microcontainers for Sequential Drug Release | This application note discusses microdevice-based drug delivery, focusing on dual compartment microcontainers (DCMCs) produced via maskless UV lithography. Potential for combination therapy is highlighted. | Application Note | Direct Writing, µMLA | Heidelberg Instruments, IDUN DTU | juillet, 2023 | application-note | direct-writing %c2%b5mla | heidelberg-instruments idun-dtu | ||
| Far-Field and Non-Intrusive Optical Mapping of Nanoscale Structures | This study analyzes far-field optical mapping of nanostructures using CLSM and radially polarized light, achieving 74 nm resolution for LDOS, crucial for high-density optical storage. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | juillet, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Fraxicon for Optical Applications with Aperture ∼1 mm: Characterisation Study | This paper describes the fabrication and characterisation of a flat conical lens (fraxicon) with a diameter of 0.2 mm for use in miniaturised optical applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | janvier, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Freeform nanostructuring of hexagonal boron nitride | Hexagonal boron nitride (hBN), now available as atomically smooth flakes, offers unique properties in optoelectronics and nanoelectronics. Researchers demonstrate freeform nanostructuring for advanced device architectures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | arXiv Physics/Optics | mai, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | arxiv-physics-optics | ||
| From regular periodic micro-lens arrays to randomized continuous phase profiles | For industrial illumination systems, micro-optical structures made via direct grayscale lithography achieve precise multi-wavelength intensity control, efficiency, and flexibility at a cost-effective production scale. | Scientific Paper | Direct Writing, DWL 66+ | Advanced Optical Technologies | février, 2015 | scientific-paper | direct-writing dwl-66 | advanced-optical-technologies | ||
| Generating smooth potential landscapes with thermal scanning-probe lithography | Scanning probe microscopy with a NanoFrazor achieves atomic precision, enabling controlled material manipulation and high-resolution lithography, with broad applications in photonics, electronics, and nanomaterials science. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Physics: Materials | novembre, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-physics-materials | ||
| Grayscale with GenISys 3D-PEC | We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser lithography. | Application Note | Direct Writing, DWL 66+, Grayscale | GenISys GmbH, Heidelberg Instruments | mars, 2023 | application-note | direct-writing dwl-66 grayscale | genisys-gmbh heidelberg-instruments | ||
| Heidelberg Instruments Reports Major Orders for the VPG+ 1400 FPD Volume Pattern Generator from Leading Asian Photomask Manufacturers | Heidelberg Instruments has secured two major orders for its VPG+ 1400 FPD Volume Pattern Generator from leading photomask manufacturers in Asia. | Press | VPG | Heidelberg Instruments | novembre, 2024 | press | vpg | heidelberg-instruments | ||
| High-resolution patterning of nanowire-based quantum devices with the NanoFrazor | The NanoFrazor offers a unique patterning solution, combining t-SPL and laser mix and match lithography. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | septembre, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| High-sensitive two-dimensional PbI2 photodetector with ultrashort channel | This study reports a PbI2-based photodetector with the highest responsivity (172 A/W) achieved, using thermal scanning probe lithography for ultrashort channel fabrication to enhance performance. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Frontiers of Physics | juillet, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | frontiers-of-physics | ||
| High-throughput protein nanopatterning | This work demonstrates high-throughput, sub-10 nm enzyme nanopatterning using thermochemical scanning probe lithography (tc-SPL), advancing bio-nanotechnology and molecular-level biological studies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Faraday Discussions | mars, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | faraday-discussions | ||
| Hollow silicon-based microneedle array for dermal interstitial fluid extraction fabricated by only dry etching on wafer scale | Silicon-based microneedles enable interstitial fluid biomarker extraction. Proposed dry etching technique achieves mass production compatibility, enhancing biomedical applications for minimally invasive diagnostics and monitoring. | Application Note | Direct Writing, MLA 150 | EPFL, Heidelberg Instruments, Xsensio | mai, 2024 | application-note | direct-writing mla-150 | epfl heidelberg-instruments xsensio | ||
| Hybrid structures by direct write lithography—Tuning the contrast and surface topography of grayscale photoresist with nanoimprint | This paper investigates hybrid processes for patterning mixed structures using thermal nanoimprint lithography (T-NIL) and direct write lithography (DWL) on ma-P1275G positive grayscale resist. | Scientific Paper | DWL, DWL 66+ | Paul Scherrer Institute | septembre, 2021 | scientific-paper | dwl dwl-66 | paul-scherrer-institute | ||
| Imaging over an unlimited bandwidth with a single diffractive surface | With the control of the phase in the image plane, a single diffractive surface can correct chromatic aberrations over a wide bandwidth, simplifying imaging systems. | Scientific Paper | Grayscale, μPG 101 | arXiv Physics/Optics | juillet, 2019 | scientific-paper | grayscale %ce%bcpg-101 | arxiv-physics-optics | ||
| Impact of massive parallelization on two-photon absorption micro- and nanofabrication | In this paper, massive parallelization is demonstrated which was realized by using a beam splitting diffractive optical element (DOE). | Scientific Paper | Two-Photon Polymerization (TPP) | SPIE. Digital Library | mars, 2020 | scientific-paper | two-photon-polymerization | spie-digital-library | ||
| Increasing the density of passive photonic integrated circuits via nanophotonic cloaking | We utilize nanophotonic cloaking to enable closer spacing of photonic-integrated devices, overcoming signal cross-talk limitations. Experimental results demonstrate efficient transmission and compact designs. | Scientific Paper | Grayscale, μPG 101 | nature communications | novembre, 2016 | scientific-paper | grayscale %ce%bcpg-101 | nature-communications | ||
| Interferometric scattering of a single plasmonic nanoparticle cluster assembled in a nanostructured template | Examining single Au nanoparticle cluster light scattering on nanostructured substrates, revealing two substrate effects via Green’s tensor theory for plasmonic nanostructure spectral interpretation. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Optics Express | avril, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | optics-express | ||
| Inverse-designed achromatic flat lens enabling imaging across the visible & near-infrared with diameter > 3mm | A flat lens, designed through inverse design with a phase-only pupil function, achieves achromatic focusing over a broad spectrum in a single diffractive surface. | Scientific Paper | DWL 66+, Grayscale | Applied Physics Letters | juillet, 2020 | scientific-paper | dwl-66 grayscale | applied-physics-letters | ||
| Large Scale Fresnel Zone Plates On SiN-Membranes | This application note describes the fabrication process of Fresnel Zone Plates on a thin silicon nitride membrane substrate for X-ray optics using a DWL 66+. | Application Note | DWL 66+ | Heidelberg Instruments, XRnanotech | septembre, 2023 | application-note | dwl-66 | heidelberg-instruments xrnanotech | ||
| Large-area, high-numerical-aperture multi-level diffractive lens via inverse design | Inverse design enables the creation of thin, high-NA flat lenses. Multi-level diffractive lens (MDL) with a NA=0.9 at 850 nm wavelength, replicable via imprint lithography. | Scientific Paper | DWL 66+, Grayscale | Heidelberg Instruments, Optica | mars, 2020 | scientific-paper | dwl-66 grayscale | heidelberg-instruments optica | ||
| Laser Heat-Mode Lithography: Principle and Methods | This book explains laser heat-mode lithography, covering principles, system design, feature size manipulation, and applications, offering a versatile, simple, and tunable approach for nanofabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | novembre, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | ||||
| Light-induced anomalous Hall effect in graphene | Optical driving in quantum solids uncovers phenomena like light-induced superconductivity and anomalous Hall effect in graphene, revealing Floquet-engineered topological band structures. | Scientific Paper | Direct Writing, µMLA | nature physics | novembre, 2019 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| Low-loss buried AlGaAs/AlOx waveguides using a quasi-planar process | Via-hole oxidation process for forming buried oxide-confined waveguides, resulting in straight, low-loss waveguides with smooth interfaces, simplifying III-V-semiconductor-oxide photonic device fabrication. | Scientific Paper | DWL | HAL open science | octobre, 2017 | scientific-paper | dwl | hal-open-science | ||
| LUMINEQ Boosts Transparent Display Innovation with Cutting-Edge MLA 300 Laser Exposure Tool from Heidelberg Instruments | Lumineq Oy, a global leader in transparent display technology, has announced a strategic investment in state-of-the-art machinery. Press Release, Lumineq Oy, Sept. 11, 2023. | Press | Direct Writing, MLA 300 | Lumineq | septembre, 2023 | press | direct-writing mla-300 | lumineq | ||
| Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range | Two-photon absorption (TPA) provides freedom in design for the fabrication of novel products that are not feasible with conventional techniques. | Scientific Paper | Two-Photon Polymerization (TPP) | Advanced Optical Technologies | mai, 2019 | scientific-paper | two-photon-polymerization | advanced-optical-technologies | ||
| Maskless Aligner Technology and the MLA 300 Drive Efficient Development and Production in Microstructures | This overview covers a paradigm shift in micro fabrication with the benefits of maskless aligners from Heidelberg Instruments and introduces the MLA 300. | Whitepaper | Direct Writing, MLA 300 | Heidelberg Instruments | août, 2021 | whitepaper | direct-writing mla-300 | heidelberg-instruments | ||
| MEMS micro-coils for magnetic neurostimulation | Innovative MEMS micro-coil probe fabrication overcame brain stimulation challenges, validated in vivo. International collaboration advances micro-magnetic stimulation for applications like artificial vision and hearing. | Scientific Paper | MLA 150 | Biosensors and Bioelectronics (ScienceDirect) | mai, 2023 | scientific-paper | mla-150 | biosensors-and-bioelectronics-sciencedirect | ||
| MLA 150 Advanced Maskless Aligner | The fastest maskless tool for rapid prototyping, the alternative to the mask aligners. | Fact Sheet | MLA 150 | Heidelberg Instruments | février, 2025 | fact-sheet | mla-150 | heidelberg-instruments | ||
| MLA 300 Industrial Maskless Aligner | Optimised for industrial production with highest throughput and seamless integration into industrial production lines. | Fact Sheet | MLA 300 | Heidelberg Instruments | mars, 2024 | fact-sheet | mla-300 | heidelberg-instruments | ||
| Monolayer MoS2 Nanoribbon Transistors Fabricated by Scanning Probe Lithography | This work demonstrates the fabrication of 30 nm monolayer MoS2 nanoribbon field-effect transistors using scanning probe lithography, achieving high performance with channel widths below 100 … | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | février, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication | This paper describes a hybrid thermal lithography method that uses silk fibroin as a water-developable resist for the fabrication of micro and nanoscale structures. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Science | janvier, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-science | ||
| Multilevel diffractive lens in the MWIR with extended depth-of-focus and wide field-of-view | Compare inverse-designed and conventional lenses in MWIR optics. The inverse-designed lens offers better depth-of-focus and off-axis performance but with larger spot size and reduced efficiency. | Scientific Paper | Direct Writing, DWL 66+ | Optics Express | mai, 2023 | scientific-paper | direct-writing dwl-66 | optics-express | ||
| Nano-Ironing van der Waals Heterostructures toward Electrically Controlled Quantum Dots | Nanoironing van der Waals heterostructures enhances interface quality, significantly improving electrical performance and enabling controlled quantum dot formation for advanced quantum technologies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | juin, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Nano/Microscale Thermal Field Distribution: Conducting Thermal Decomposition of Pyrolytic-Type Polymer by Heated AFM Probes | This study investigates temperature distribution between heated AFM tips and materials, using PPA film to create programmable nano/microscale pyramid structures for scanning thermal microscopy applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomaterials | mars, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nanomaterials | ||
| Nanofabrication of graphene field-effect transistors by thermal scanning probe lithography | Thermal scanning probe lithography (t-SPL) shows promise for scalable nanofabrication in nanoelectronics. It produces high-performance graphene-based transistors with simplified processing, reducing time and cost. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | APL Materials | janvier, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | apl-materials | ||
| Nanofluidic rocking Brownian motors | Creating precise nanofluidic slits, utilizing electrostatic forces and oscillating fields, enables controlled transport of nanoparticles, demonstrated with 60nm gold spheres and efficient sorting of particles. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Science | mars, 2018 | scientific-paper | nanofrazor thermal-scanning-probe | science | ||
| NanoFrazor | The NanoFrazor takes nanofabrication to the next level. Building on decades of research and development, the NanoFrazor brings thermal scanning probe lithography (t-SPL) into your … | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Heidelberg Instruments Nano | juillet, 2024 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments heidelberg-instruments-nano | ||
| NanoFrazor Explore Nanofabrication Tool | Thermal scanning probe lithography tool with a direct laser sublimation and grayscale modules. | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | mars, 2022 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| NanoFrazor for Direct Nanoscale Chemical Conversion of Materials | Chemical conversion using a thermal scanning probe can be used to make biosensors with advanced architecture and tailor surface chemistry to create nanostructures. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | août, 2024 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| NanoFrazor Scholar Nanofabrication Tool | Table-top thermal scanning probe lithography system with in-situ AFM imaging, compact and compatible with glovebox. | Fact Sheet | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | mars, 2022 | fact-sheet | nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| Nanometer scale resolution, multi-channel separation of spherical particles in a rocking ratchet with increasing barrier heights | This nanoparticle size-separation device uses a nanofluidic Brownian motor with electrostatic barriers, achieving a separation resolution of approximately 2 nm for gold particles. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Physical Review Applied | juillet, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | physical-review-applied | ||
| Nanopatterning of 2D materials by block copolymer self-assembly | Nanopatterning using block copolymer (BCP) self-assembly is a promising way to advancements in applications ranging from water treatment technologies to energy-efficient devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Technical University of Denmark (DTU) | août, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | technical-university-of-denmark-dtu | ||
| Neurite guidance and neuro-caging on steps and grooves in 2.5 dimensions | We investigate neurite guidance using semiconductor industry-compatible techniques for fabricating modulated surfaces, enabling the cultivation and study of ordered neuronal networks in a 2.5D configuration. | Scientific Paper | DWL 66+, Grayscale | Nanoscale Advances | juillet, 2020 | scientific-paper | dwl-66 grayscale | nanoscale-advances | ||
| Normally-Off p-GaN Gate High-Electron-Mobility Transistors with the Air-Bridge Source-Connection Fabricated Using the Direct Laser Writing Grayscale Photolithography Technology | Fabrication of a p-GaN gate HEMT with an air-bridge source connection using direct grayscale lithography, achieving good performance with high breakdown voltage and low on-resistance. | Scientific Paper | Direct Writing, DWL 66+ | Crystals | avril, 2023 | scientific-paper | direct-writing dwl-66 | crystals | ||
| Novel Mixed-Dimensional hBN-Passivated Silicon Nanowire Reconfigurable Field Effect Transistors: Fabrication and Characterization | This work demonstrates a reconfigurable field-effect transistor (RFET) combining a Si nanowire with a 2D hBN dielectric, improving electrical characteristics and enabling dynamic polarity control. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | août, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Novel Tunnel Magnetoresistive Sensor Functionalities via Oblique-Incidence Deposition | We improve tunnel magnetoresistive (TMR) devices by precisely shaping magnetic layers with oblique-incidence deposition, enhancing TMR design and functionality without additional magnetic materials. | Scientific Paper | μPG 101 | ACS Applied Materials & Interfaces | juillet, 2021 | scientific-paper | %ce%bcpg-101 | acs-applied-materials-interfaces | ||
| Optical Fourier surfaces | Thermal Scanning Probe Lithography and templating creating optical surfaces containing multiple specified sinusoids, enabling advanced diffractive optics, photonics, and applications in emerging photonics fields. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, nature | juin, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | heidelberg-instruments nature | ||
| Optically Inspired Nanomagnonics with Nonreciprocal Spin Waves in Synthetic Antiferromagnets | A versatile platform utilizes spin waves for optically inspired wave-based processing, advancing nanoscale devices with wavefront engineering, focusing, interference, and unique properties. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | janvier, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Optimization of Laser Written Photomasks for Photonic Device Manufacturing | Successful performance improvement of an ULTRA i-line laser writer for photonic device mask fabrication, reducing manufacturing costs. Thorough investigation and analysis identify optimal exposure strategies. | Scientific Paper | Mask-making, ULTRA | Heidelberg Instruments, SPIE. Digital Library | septembre, 2022 | scientific-paper | mask-making ultra | heidelberg-instruments spie-digital-library | ||
| Outdoor measurements of a photovoltaic system using diffractive spectrum-splitting and concentration | Photovoltaic system combining spectrum splitting and concentration using a planar diffractive optic, overcoming losses in single-bandgap absorbers & achieving a 25% increase in output power. | Scientific Paper | Direct Writing, μPG 101 | AIP Advances | septembre, 2016 | scientific-paper | direct-writing %ce%bcpg-101 | aip-advances | ||
| Overview on Maskless Grayscale Lithography | From design to micro structured topography: Grayscale lithography can be used to quickly fabricate various 2.5D and 3D structures at the micro scale. | Video | Grayscale | Heidelberg Instruments | mai, 2023 | video | grayscale | heidelberg-instruments | ||
| Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices | Scanning probe lithography (SPL) offers high resolution, precise positioning, and material versatility, but its throughput limitations can be addressed through mix-and-match lithography strategies. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Electrical Atomic Force Microscopy for Nanoelectronics | août, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | electrical-atomic-force-microscopy-for-nanoelectronics | ||
| Patterning metal contacts on monolayer MoS2 with vanishing Schottky barriers using thermal nanolithography | Thermal Scanning Probe Lithography enables precise metal electrode patterning on 2D semiconductors like MoS2, improving device performance with vanishing Schottky barriers and exceptional properties. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature electronics | janvier, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | nature-electronics | ||
| Phase masks for electron microscopy fabricated by thermal scanning probe lithography | Silicon-nitride phase masks are fabricated using thermal scanning probe lithography, avoiding ion implantation, offering high accuracy, and generating electron vortex and Bessel beams. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micron | octobre, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | micron | ||
| Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing | Nanomaterials derive unique properties from their nanostructure. A perspective explores advanced nanofabrication techniques to modify properties in condensed matter systems, discussing applications and future prospects. | Scientific Paper | Direct Writing, DWL 66+, NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Technologies | août, 2023 | scientific-paper | direct-writing dwl-66 nanofrazor thermal-scanning-probe | advanced-materials-technologies | ||
| Phase-Controllable Synthesis of Ultrathin Molybdenum Nitride Crystals Via Atomic Substitution of MoS2 | Novel atomic substitution method creates highly conductive nonlayered molybdenum nitrides from MoS2, enabling potential nanoelectronics’ applications with maintained conductivity and stable contacts over weeks. | Scientific Paper | µMLA | Chemistry of Materials | décembre, 2021 | scientific-paper | %c2%b5mla | chemistry-of-materials | ||
| Placement of Biological Membrane Patches in a Nanofluidic Gap With Control Over Position and Orientation | Purple membranes from Halobacterium salinarum are precisely positioned and oriented in nanofluidic confinement for integration into light-driven nanoscale hybrid devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials Interfaces | juillet, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials-interfaces | ||
| Poly-Alanine-ε-Caprolacton-Methacrylate as Scaffold Material with Tuneable Biomechanical Properties for Osteochondral Implants | Study of fabrication of artificial structures for musculo-skeletal tissue engineering, which was done by Two-Photon-Polymerization (TPP). | Scientific Paper | Two-Photon Polymerization (TPP) | International Journal of Molecular Sciences | mars, 2022 | scientific-paper | two-photon-polymerization | international-journal-of-molecular-sciences | ||
| Prospects of nano-lithographic tools for the fabrication of surface-enhanced Raman spectroscopy (SERS) substrates | This review discusses and compares different lithographic techniques for fabricating SERS substrates, highlighting their strengths and limitations, and explores their potential for commercial applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro and Nano Engineering (ScienceDirect) | juin, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | micro-and-nano-engineering-science-direct | ||
| Rapid, Multianalyte Detection of Opioid Metabolites in Wastewater | Aptamer-based graphene field effect transistor (AptG-FET) platform detects three opioid metabolites in wastewater rapidly and inexpensively, providing a reliable alternative to costly laboratory-based techniques. | Scientific Paper | Direct Writing, µMLA | ACS Nano | février, 2022 | scientific-paper | direct-writing %c2%b5mla | acs-nano | ||
| Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices | Direct patterning technology enables cost-effective design and production of devices, enhancing the fabrication of inorganic materials for optoelectronic, electronic, and energy applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Physics Research | août, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-physics-research | ||
| Replication of a Tissue Microenvironment by Thermal Scanning Probe Lithography | Thermal scanning probe lithography (t-SPL) efficiently creates biocompatible nanoscale topographies for cell culture, enabling rapid prototyping of substrates for studying cell-matrix interactions. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | mai, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography | Utilizing grayscale lithography and hard-mask methods, silicon carbide hosts micrometer-scale features and hemispherical solid immersion lenses, boosting optical collection for quantum emitters. Scalable, reproducible, CMOS-compatible. | Scientific Paper | Direct Writing, DWL 66+, Grayscale | Applied Physics Letters | avril, 2023 | scientific-paper | direct-writing dwl-66 grayscale | applied-physics-letters | ||
| Scanning Probe Lithography: State-of-the-Art and Future Perspectives | Scanning probe lithography (SPL) is a promising nanofabrication technique for nanoelectronics, data storage, and bioengineering, though it is still mainly used for prototyping. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micromachines | janvier, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | micromachines | ||
| Scanning Probe Thermometry to study Thermoelectricity and Dissipation at Nanoscale Junctions | This thesis explores heat transport and dissipation in nanoelectronics using high-resolution scanning probe thermometry, revealing nanoscale thermal phenomena, defects, and thermoelectric effects. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ETH Zürich | août, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | eth-zurich | ||
| Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8 | Low-power laser irradiation of SU-8 photoresist with an added absorber enables selective pyrolysis for simple and inexpensive patterning of pyrolytic carbon microelectrodes. | Scientific Paper | Direct Writing, µPG | Micromachines | avril, 2021 | scientific-paper | direct-writing %c2%b5pg | micromachines | ||
| Self-aligned single-electrode actuation of tangential and wineglass modes using PMN-PT | PMN–PT thin film disks, with single-electrode actuation, showcase self-aligned tangential and wineglass modes for high-frequency bulk acoustic wave (BAW) MEMS gyroscopes. | Scientific Paper | Direct Writing, MLA 150 | Microsystems & Nanoengineering (nature) | mai, 2023 | scientific-paper | direct-writing mla-150 | microsystems-nanoengineering-nature | ||
| Sequential Drug Release Achieved with Dual-Compartment Microcontainers: Toward Combination Therapy | Monodisperse dual-compartment microdevices with pH-sensitive polymer coatings enable tunable, sequential drug release in the gastrointestinal tract, providing a promising strategy for combination therapy. | Scientific Paper | Direct Writing, MLA 100 | Advanced Therapeutics | août, 2022 | scientific-paper | direct-writing mla-100 | advanced-therapeutics | ||
| Shaping Interfaces for Manipulation and Imaging of Nano-Objects in Nanofluidic Confinement | This study demonstrates nanoscale particle manipulation using nanofluidic slits, thermal scanning probe lithography, and electrostatic interactions for sorting, trapping, and surface charge modulation applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ETH Zürich | janvier, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | eth-zurich | ||
| Single CdSe Quantum Dots Positioned in Nanostructured Heterogeneous Templates: Implications for High-Precision Nanoassembly | This work develops a multiphysical strategy for precise assembly of colloidal quantum dots using nanostructured templates, controlling electric fields, surface energy, and topography. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | avril, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-nano-materials | ||
| Small Projectiles Featuring Triple-Layer Metal Cladding with Potential Applications in the field of Cell Transfection | Micro-projectiles were created through maskless UV lithography, O2 plasma treatment, silicon etching, and metal cladding. These conical micro-projectiles have applications in magnetically guided cell transfection. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, IDUN DTU | septembre, 2023 | application-note | direct-writing mla-150 | heidelberg-instruments idun-dtu | ||
| Spatial defects nanoengineering for bipolar conductivity in MoS2 | Controlling defects in monolayer MoS2 using thermochemical scanning probe lithography enables precise p- and n-type doping, vital for nanoelectronics, p-n junctions, and high rectification ratios. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature communications | juillet, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nature-communications | ||
| Spectral tuning of Bloch Surface Wave resonances by light-controlled optical anisotropy | This work demonstrates dynamic control of resonant modes in a 2D bull’s eye cavity using optically-induced anisotropy, enabling precise tuning in metasurface-based optics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanophotonics | février, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | nanophotonics | ||
| Spin-acoustic control of silicon vacancies in 4H silicon carbide | Spin-acoustic control demonstrated on a 4H silicon carbide-based bulk acoustic resonator allows frequency-tunable probing of resonances, aiding in dynamic strain distribution analysis for microelectromechanical systems. | Scientific Paper | Direct Writing, MLA 150 | nature electronics | septembre, 2023 | scientific-paper | direct-writing mla-150 | nature-electronics | ||
| Structurally and morphologically engineered chalcogenide materials for optical and photonic devices | This paper explores advanced techniques like multiphoton lithography and thermal scanning probe lithography for patterning chalcogenide materials, enabling nanoscale features and functional photonic devices. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Journal of Optical Microsystems | janvier, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | journal-of-optical-microsystems | ||
| Sub-10 nm Resolution Patterning of Pockets for Enzyme Immobilization with Independent Density and Quasi-3D Topography Control | The study demonstrates thermochemical scanning probe lithography (tc-SPL) for precise enzyme nanopatterning on polymer surfaces, achieving single-enzyme resolution, high throughput, and controlled enzyme density. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Materials & Interfaces | octobre, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-materials-interfaces | ||
| Superconducting nonlinear transport in optically driven high-temperature K3C60 | This study investigates the electrical responses of optically driven quantum material, revealing nonlinear current-voltage characteristics indicative of photo-induced superconductivity, with potential applications in high-speed devices. | Scientific Paper | Direct Writing, µMLA | nature communications | septembre, 2023 | scientific-paper | direct-writing %c2%b5mla | nature-communications | ||
| Symmetry breaking of the surface mediated quantum Hall Effect in Bi2Se3 nanoplates using Fe3O4 substrates | Bottom surface-induced ferromagnetism in Bi2Se3 nanoplate devices on SiO2 and ferromagnetic insulator substrates decouples quantum Hall effects, revealing shifted half-integer QHEs in a three-channel model. | Scientific Paper | Direct Writing, μPG 101 | IOP Science | janvier, 2017 | scientific-paper | direct-writing %ce%bcpg-101 | iop-science | ||
| Tailored Micromagnet Sorting Gate for Simultaneous Multiple Cell Screening in Portable Magnetophoretic Cell‐On‐Chip Platforms | Novel technique for selectively sorting magnetic carriers and cells using a multi-notched disk micromagnet, enabling precise manipulation even in low magnetic fields. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Functional Materials | mars, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-functional-materials | ||
| The choice of an autocorrelation length in dark‑field lung imaging | X-ray dark-field radiography (XDFR) explores lung microstructures. Porcine lungs exhibit similar extinction coefficients to PMMA spheres, emphasizing the critical autocorrelation length for effective clinical imaging. | Scientific Paper | Direct Writing, DWL 66+ | scientific reports (nature) | février, 2023 | scientific-paper | direct-writing dwl-66 | scientific-reports-nature | ||
| The Lithographer – Grayscale Lithography Issue | The Rise of Grayscale Lithography: Direct-write 3D patterning scaled from µm to nm. Grayscale Lithography Issue of The Lithographer, issued January 2020. | The Lithographer | Grayscale | Heidelberg Instruments | janvier, 2020 | the-lithographer | grayscale | heidelberg-instruments | ||
| The Lithographer – Interview with Dr. Nolan Lassaline | From classical optics to quantum electronics: A researcher’s journey inspired by thermal scanning probe lithography. Interview with Dr. Nolan Lassaline from TU Denmark. | The Lithographer | Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | octobre, 2024 | the-lithographer | thermal-scanning-probe | heidelberg-instruments | ||
| The Lithographer – Quantum Issue | The Quantum Issue of The Lithographer, issued Fall 2020 Topics include: Maskless Aligners, Grayscale, 2D Materials, Quantum Technology | The Lithographer | Direct Writing, Grayscale, NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments | octobre, 2020 | the-lithographer | direct-writing grayscale nanofrazor thermal-scanning-probe | heidelberg-instruments | ||
| The Potential of Combining Thermal Scanning Probes and Phase-Change Materials for Tunable Metasurfaces | Metasurfaces enable versatile optical wavefront control; active phase-change materials like germanium telluride offer compact, reconfigurable near-infrared metasurfaces, avoiding typical limitations. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Optical Materials | octobre, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-optical-materials | ||
| Thermal nanoconversion of ferromagnetic nanoislands | This paper examines the use of thermal nanoconversion (TNC) to modify the magnetic properties of nickel-iron (Ni80Fe20) nanoislands. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Applied Physics Letters | mars, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | applied-physics-letters | ||
| Thermal scanning probe and laser lithography for patterning nanowire based quantum devices | The NanoFrazor combines thermal scanning probe and laser writing lithography to fabricate InSb nanowire quantum devices, achieving quasi-ballistic transport with reduced fabrication-induced disorder. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanotechnology | avril, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nanotechnology | ||
| Thermal scanning probe lithography | Thermal scanning probe lithography is a powerful nanofabrication method with 10 nm lateral resolution and 1 nm depth resolution, applicable in biomedicine, nanomagnetism, and nanoelectronics. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature reviews methods primer | mai, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | nature-reviews-methods-primer | ||
| Thermal scanning probe lithography – a review | Review of Thermal Scanning Probe Lithography (t-SPL) covering its capabilities for high-resolution nanolithography and material interactions, providing insights for nanofabrication and material science challenges. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments, Microsystems & Nanoengineering (nature) | avril, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | heidelberg-instruments microsystems-nanoengineering-nature | ||
| Thermal scanning probe lithography using Parylene C as thermal resist | Thermal scanning probe lithography with Parylene C as a thermal resist enables high-resolution (∼40 nm) patterning and direct pattern transfer using deep reactive ion etching. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Micro & Nano Letters | février, 2022 | scientific-paper | nanofrazor thermal-scanning-probe | micro-nano-letters | ||
| Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates | Thermal scanning-probe lithography (t-SPL) enables high-resolution nanolithography on transparent substrates with conductive oxide films, creating tunable plasmonic nanostructures for nanophotonics and sensing applications. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | ACS Applied Nano Materials | octobre, 2023 | scientific-paper | nanofrazor thermal-scanning-probe | acs-applied-nano-materials | ||
| Thermoelectric Properties of Band Structure Engineered Topological Insulator (Bi1− xSbx)2Te3 Nanowires | Nanowires are promising for thermoelectric applications, but the predicted performance enhancement has not been observed yet. Surface states play a crucial role in transport characteristics. | Scientific Paper | Direct Writing, μPG 101 | Advanced Energy Materials | mai, 2015 | scientific-paper | direct-writing %ce%bcpg-101 | advanced-energy-materials | ||
| Thermomechanical Nanocutting of 2D Materials | A thermomechanical indentation technique enables precise cutting of monolayer 2D with 20 nm resolution, offering potential for electronic and photonic nanodevice fabrication. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Advanced Materials | juin, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | advanced-materials | ||
| Thermomechanical Nanostraining of Two-Dimensional Materials | Nanoindentation via thermomechanical scanning probe allows precise, nanoscale strain engineering in 2D materials like MoS2 and graphene, achieving modulated bandgaps and investigating localized strain effects. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nano Letters | octobre, 2020 | scientific-paper | nanofrazor thermal-scanning-probe | nano-letters | ||
| Threshold voltage reliability in flexible amorphous In–Ga–ZnO TFTs under simultaneous electrical and mechanical stress | Flexible thin film transistors on 50 µm thick polyimide demonstrated stable behavior under simultaneous mechanical and electrical stress up to a 4 mm bending radius. | Scientific Paper | Direct Writing, DWL 66+ | Flexible and Printed Electronics | juin, 2022 | scientific-paper | direct-writing dwl-66 | flexible-and-printed-electronics | ||
| Tip-Based Nanomachining on Thin Films: A Mini Review | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Nanomanufacturing and Metrology | septembre, 2021 | scientific-paper | nanofrazor thermal-scanning-probe | nanomanufacturing-and-metrology | ||
| Transistors platform for rapid and parallel detection of multiple pathogens by nanoscale-localized multiplexed biological activation | This paper describes a scalable and CMOS-compatible fabrication strategy for modifying individual field-effect transistors (FETs) with distinct bioreceptors. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | nature | janvier, 2024 | scientific-paper | nanofrazor thermal-scanning-probe | nature | ||
| Ultra compact electrochemical metallization cells offering reproducible atomic scale memristive switching | Coming soon. | Scientific Paper | NanoFrazor, Thermal Scanning Probe (t-SPL) | Communications Physics | mars, 2019 | scientific-paper | nanofrazor thermal-scanning-probe | communications-physics | ||
| ULTRA Semiconductor Mask Writer | A tool specifically designed to produce mature semiconductor photomasks. | Fact Sheet | ULTRA | Heidelberg Instruments | novembre, 2024 | fact-sheet | ultra | heidelberg-instruments | ||
| Ultra-High Resolution Pattern Transfer on NanoFrazor Lithography | High-resolution lithography is crucial for current and future technologies, requiring dimension reduction. NanoFrazor lithography, multi-layer stacks, and alternative strategies for superior patterns are discussed. | Application Note | NanoFrazor, Thermal Scanning Probe (t-SPL) | Heidelberg Instruments Nano | juillet, 2023 | application-note | nanofrazor thermal-scanning-probe | heidelberg-instruments-nano | ||
| Ultra-thick positive photoresist layers for maskless grayscale lithography | Grayscale lithography can create structured surfaces in photoresist for micro-optics applications. Experiments show promise in fabricating structures over 100 μm using a new experimental resist. | Scientific Paper | Direct Writing, DWL 66+, Grayscale | Heidelberg Instruments, SPIE. Digital Library | avril, 2023 | scientific-paper | direct-writing dwl-66 grayscale | heidelberg-instruments spie-digital-library | ||
| Ultrasensitive UV-C detection based on MOCVD-grown highly crystalline ultrawide bandgap orthorhombic κ-Ga2O3 | Orthorhombic κ-Ga2O3 is a superior ultrawide bandgap material for extreme environments. We demonstrate ultrasensitive UV-C detection using Si-doped κ-Ga2O3 photodetectors. | Scientific Paper | µPG | Applied Surface Science (ScienceDirect) | janvier, 2023 | scientific-paper | %c2%b5pg | applied-surface-science-science-direct | ||
| Vertical micropillars arrays with high aspect ratio submicron gap by metal assisted chemical etching as active components in new sensor devices | MacEtch, a plasma-free anisotropic etching method, produces sharp vertical silicon structures without ion damage, beneficial for sensors, X-ray optics, photovoltaics, vias, and bio-interfaces. | Application Note | Direct Writing, DWL 66+ | ETH Zürich, Heidelberg Instruments, Paul Scherrer Institute | juillet, 2024 | application-note | direct-writing dwl-66 | eth-zurich heidelberg-instruments paul-scherrer-institute | ||
| Vertical sidewalls in thick epoxy resist – a challenge for laser-based direct write lithography | Achieve straight, vertical sidewalls in thick negative-tone resist using focused laser beam-based direct write lithography, overcoming non-homogeneous illumination and non-sharp edges. (Possible application: MEMS) | Scientific Paper | Direct Writing, DWL 66+ | Micro and Nano Engineering (ScienceDirect) | juin, 2023 | scientific-paper | direct-writing dwl-66 | micro-and-nano-engineering-science-direct | ||
| Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology | First experimental demonstration of vertically-coupled micro-disk resonators to buried access waveguides on III-V semiconductor using simplified three-dimensional integration scheme, achieving high-quality devices. | Scientific Paper | Direct Writing, DWL | HAL open science | octobre, 2017 | scientific-paper | direct-writing dwl | hal-open-science | ||
| Visualizing bulk and edge photocurrent flow in anisotropic Weyl semimetals | Optoelectronic materials converting light to bulk current. Unveiling anisotropic photothermoelectric effect driving complex photocurrent circulations via unequal crystal-axis thermopowers, visualized using microscopy and magnetic imaging. | Scientific Paper | Direct Writing, µMLA | nature physics | janvier, 2023 | scientific-paper | direct-writing %c2%b5mla | nature-physics | ||
| VPG 300 DI Maskless Stepper | Maskless direct imager for high-accuracy and high-resolution microstructures. | Fact Sheet | VPG | Heidelberg Instruments | septembre, 2023 | fact-sheet | vpg | heidelberg-instruments | ||
| VPG+ 200 / VPG+ 400 Volume Pattern Generator | A production tool for standard photomasks and microstructures in i-line resists. | Fact Sheet | VPG | Heidelberg Instruments | juin, 2023 | fact-sheet | vpg | heidelberg-instruments | ||
| VPG+ 800 / VPG+ 1400 Volume Pattern Generator | Photomask production on large substrates, perfect for display applications. | Fact Sheet | VPG | Heidelberg Instruments | juin, 2022 | fact-sheet | vpg | heidelberg-instruments | ||
| Wire suspended on a v-groove cavity to measure gas physical properties | Thermal flow sensors measure fluid flow by detecting heat dissipation from a heated wire. A novel silicon-based design compensates for fluctuations ensuring accuracy. | Application Note | Direct Writing, MLA 150 | Heidelberg Instruments, University of Twente | mai, 2024 | application-note | direct-writing mla-150 | heidelberg-instruments university-of-twente | ||
| µMLA Tabletop Maskless Aligner | Configurable and compact tabletop maskless aligner with raster scan and vector exposure modules. | Fact Sheet | µMLA | Heidelberg Instruments | avril, 2024 | fact-sheet | %c2%b5mla | heidelberg-instruments |
