Over the past decade, maskless aligners have transformed lithography by eliminating photomasks, enabling rapid design iteration, high-precision patterning, and faster microfabrication workflows in research and production.
Inverse-designed nanophotonic neural network accelerators achieve ultra-compact, energy-efficient optical computing, enabling high-density parallel processing and accurate image classification within micron-scale device footprints.
Heidelberg Instruments parent company LAB14 joins MIT.nano Consortium, contributing advanced lithography and XPS tools while strengthening academia-industry collaboration to accelerate innovation in micro- and nanofabrication
Single-lens telecentric four-camera array using planar mirrors enables high-precision, non-contact strain measurement, reducing parallax errors and matching strain gauge accuracy in pipeline monitoring applications.
A self-assembling, shape-matched 3D soft interface enables high-density electrophysiology, stimulation, imaging, and neuromodulation in human neural organoids, enabling high-resolution, network-level activity mapping and disease modeling.
This work introduces OPTIMISM, enabling universal transfer and integration of metasurfaces in suspended membranes, highlighting inverse-designed ultrathin meta-optics and refractive-index effects for scalable fiber-tip and
This study presents the first island-like 3C-SiC/Si heterojunction self-powered photodetector, achieving high responsivity, detectivity, 65% EQE, and fast response at 637 nm without external bias.
Soft 3D bioelectronic interfaces were fabricated by blending PEDOT:PSS with methacrylated gelatin via two-photon polymerization, yielding conductive, low-impedance, mechanically compliant hydrogels for improved neuronal interfacing.
A comprehensive framework for fabricating, harvesting, and characterizing freestanding micro-nanodevices, enabling minimally invasive, wireless neural interfaces with subcellular resolution and scalable neuromodulation potential.
Polypropylene carbonate enables high-resolution t-SPL nanopatterning via controlled thermal decomposition, achieving 50 nm lateral, sub-nanometer vertical resolution and grayscale pattern transfer for photonic and nanoelectronic
Organic substrates are hitting a wall. Discover how Heidelberg Instruments’ maskless lithography enables the glass revolution to break the sub-2 µm barrier for AI.
Heidelberg Instruments is excited to announce a follow-up order from a leading Asian manufacturer of display photomasks for its flagship VPG⁺ 1400 FPD Volume Pattern Generator.
Following the successful introduction of the modular NanoFrazor nanolithography system in 2024, Heidelberg Instruments is proud to announce the installation of the newest NanoFrazor at EPFL.
Heidelberg Instruments has received a substantial order from a top-tier photomask manufacturer in Asia for a VPG+ 1850 FPD system, developed on the established platform of its flagship VPG+ 1400 FPD Volume Pattern Generator.
As AI and HPC push monolithic circuits to obsolescence, the industry turns to Advanced Packaging. Yet, challenges like die shift and substrate warpage threaten to kill yield before the package leaves the fab. Enter the new hero of microelectronics: Maskless Lithography. Learn how adaptive alignment ensures your chiplets live to compute another day.
The quantum revolution is shifting from theory to reality, as breakthroughs like Google’s “Quantum Echoes” show. Scaling from small demos to systems with thousands of qubits demands ultra-precise, uniform nanofabrication. This post examines the fabrication challenges and lithographic solutions enabling the leap from lab to large-scale production.
What a week! From September 15–18, we had the pleasure of joining the micro- and nanofabrication community at the 51st International Micro and Nano Engineering Conference (MNE 2025) in Southampton, UK.
Heidelberg Instruments proudly celebrates the 10th anniversary of the MLA 150 Maskless Aligner—a breakthrough that has redefined high-resolution lithography in cleanrooms around the world.
Heidelberg Instruments Korea celebrates 20 years of customer commitment and partnership! Built on trust, loyalty, and long-term relationships, Heidelberg Instruments Korea continues to play a vital role in bringing innovation to local customers.
Join Heidelberg Instruments in Southampton for MNE 2025! We are proud to be sponsor of the prestigious Fellow Award and are looking forward to celebrate the 10th anniversary of our MLA 150 with you.
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Disclaimer: Translations were created with the help of AI. Heidelberg Instruments does not guarantee the correctness of the translations.
