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May 30 2023 - Jun 02 2023


all day

EIPBN 2023

Visit us at booth 130!

The 66th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication.

June 1st
8:20 am – 3C3
Patterning with the fourth beam: Advances in thermal lithography with the NanoFrazor
Emine Cagin, CTO Heidelberg Instruments Nano AG

9:10 am – 3C8
News from the Lab14 Group
Niels Wijnaendts van Resandt, Lab14 – parent company of Heidelberg Instruments

9:20 am – 3C9
The Maskless Aligner – A Success Story
 Steffen Diez, COO Heidelberg Instruments

June 2nd
2:20 pm – 8B3

Image reversal through NanoFrazor patterning and pattern transfer processes: from nanoholes to nanopillars
Jana Chaaban, Senior Applications Engineer Heidelberg Instruments Nano

The event is finished.

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