EIPBN 2023
Visit us at booth 130!
The 66th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication.
Talks:
June 1st
8:20 am – 3C3
Patterning with the fourth beam: Advances in thermal lithography with the NanoFrazor
Emine Cagin, CTO Heidelberg Instruments Nano AG
9:10 am – 3C8
News from the Lab14 Group
Niels Wijnaendts van Resandt, Lab14 – parent company of Heidelberg Instruments
9:20 am – 3C9
The Maskless Aligner – A Success Story
Steffen Diez, COO Heidelberg Instruments
June 2nd
2:20 pm – 8B3
Image reversal through NanoFrazor patterning and pattern transfer processes: from nanoholes to nanopillars
Jana Chaaban, Senior Applications Engineer Heidelberg Instruments Nano