NanoFrazor Scholar

Advanced nanofabrication for everyone

NanoFrazor lithography – based on thermal Scanning Probe Lithography developed at IBM Research – is the fastest and most versatile of all Scanning Probe Lithography techniques.

The NanoFrazor Scholar is the entry level NanoFrazor system and is particularly suited for academic research groups looking for an easy way to create high-resolution nanopatterns or devices. The NanoFrazor Scholar is a compact system designed to fit in the smallest lab spaces. It can also be installed in a dedicated glovebox to enable nanolithography of sensitive materials in inert conditions.

Like all NanoFrazor tools, the Scholar can pattern features with ultra-high resolution with no need for proximity effect corrections. All the unique NanoFrazor capabilities like in-situ AFM imaging, accurate 3D grayscale lithography, markerless overlay or thermal material conversion are available with the Scholar.

Key Features

  • Resolution below 20 nm
  • In-situ high-speed AFM topography imaging
  • Samples size up to 50 x 50 mm2
  • Closed-Loop Lithography
  • Precise markerless overlay and stitching using in-situ AFM
  • No damage of sensitive materials (no electron or ion beams)
  • Alternative patterning mode: direct nanoscale thermal conversion
  • Small footprint
  • Easy to use (no wet development, no vacuum, etc.)
  • Unique capabilities help publish in high-impact journals
  • and receive funding for new projects

Application images

  

Reflective computer-generated hologram

The whole area patterned autonomously: the tool can pattern without user interaction for hours.

6-fold bow tie antenna

Easy patterning of complex designs: The software supports the import of various graphic file formats. Single copies or arrays of the same design can be patterned.

High-resolution gold trimer

No proximity effect and no substrate charging allow for generating dense structures. The shown structures were written by The NanoFrazor and transferred into the substrate using ion milling.

Downloads

Key technical specifications.

Fact sheet

Contact

We look forward to discuss our products and services with you. Write us an email to sales-nano@himt.ch or support-nano@himt.ch, depending on the type of your inquiry, or use the form below.

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