Manufacturing devices with nanofeatures in small areas
Numerous devices like biosensors, NEMS, quantum circuits or DFB lasers require precise nanostructures only in small areas of each device. It can be very cost effective to use direct write nanolithography instead of EUV or DUV to manufacture such parts of the nanodevices. The NanoFrazor Professional is a good candidate here, in particular if the unique NanoFrazor capabilities are advantageous for the device performance or if costs of ownership of electron beam lithography are discouraging.
(image: room temperature single electron transistors made with mix & match with stepper & NanoFrazor + Laser, courtesy of IBM Research)