Revolutionizing nanofabrication — the first hybrid mix&match nanolithography tool
Fast and precise control of a heated nanoscale tip offers many unique possibilities for nanofabrication and enables innovations not feasible otherwise.
The NanoFrazor Explore performs with maximum speed, precision and reliability. The technology behind the system is the result of more than 20 years of intensive research and development that started at IBM Research in Zurich and has been extended at SwissLitho and Heidelberg Instruments.
The NanoFrazor Explore is equipped with the most advanced hard- and software to control the heatable NanoFrazor cantilevers in the best possible manner for writing and imaging. Recently, the Explore has received an integrated laser writer extension to speed up patterning of coarse features. Nano- and microfeatures can now be seamlessly and quickly written into the same resist layer using the same software platform in a single fabrication step.
Key technical specifications.
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