Markerless Overlay & Stitching
Speaker: Dr Urs Dürig, Heidelberg Instruments Nano
- Find out why the precise position of nanostructures buried under spin-coated resist can be detected by in-situ AFM imaging
- Learn how positioning errors can be determined with nm accuracy using image correlation techniques
- Discover the advantages of adaptive overlay design
- Recognize the limitations of the practical stitching and overlay accuracy of this markerless approach
- Get a practical understanding of large stitched patterns and accurately aligned contacts through examples
May 28, 2020, 08:45 CEST
Urs Duerig received his PhD in Physics from ETH Zurich in 1984. Afterwards, he joined IBM Research Zurich as Post-Doctoral Research Fellow developing the first working optical near-field microscope in Dieter Pohl's group. In 1997, he joined the Probe Storage Group at IBM, leading the polymer storage media development. In 2008, he started the thermal probe lithography project which formed the basis for the NanoFrazor technology. Urs was a member of the various research commissions, review panels and advisory committees. He holds more than 60 patents and he has (co-) authored more than 140 high impact scientific and technical papers.
After his retirement at IBM, Urs joined Heidelberg Instruments Nano in 2017. He brings in his broad experimental experience as well as his strong analytical skills to push the development of various aspects of the NanoFrazor technology.
Webinar Series description
The “NanoFrazor Technology” webinars will explain the main features and limitations of NanoFrazor lithography. They will be hosted by the key experts of our R&D teams. You will learn how our technology works, and where and why it is superior or inferior to conventional nanolithography techniques. We will also share the results and insights of our ongoing development projects.
The “NanoFrazor Applications” series will show examples from different application fields, where the NanoFrazor was used to fabricate unique nanopatterns and devices. The guest speakers - scientists who actively use NanoFrazor - will talk about their work and recent results.
The “NanoFrazor Sales” webinars will focus on NanoFrazor products. We will talk about hardware components and software features of the NanoFrazor systems. We will also cover the cost-of-ownership and how to receive a quick return on investment. Finally, we will also offer a dedicated webinar where you will learn about the various funding options for NanoFrazor systems and how to maximize your chances to get your funding proposal accepted.
Test yourself and win! After each webinar, you can test what you have learned in a short multiple-choice questions challenge. With 10 or more successful tests, you will receive a small prize and a unique Nanofabrication Guru certificate.