Webinars: NanoFrazor

Resist Materials & Tip Lifetime

Speaker: Jonas Vergés, Heidelberg Instruments Nano

 

Takeaways:

  • Learn about the main requirements for a resist material for standard NanoFrazor lithography and find out why PPA is the most widely used resist
  • Discover opportunities for a range of PPA derivatives and other alternative resists
  • Get insight in current understandings and theories of possible tip degradation mechanisms
  • Learn how the tip quality can be measured and tip degradation can be monitored inside the NanoFrazor
  • See the progress of tip endurance achieved over the last years that currently enables several days of continuous patterning with a single tip
  • Discover how fast and simple it is to exchange a cantilever
  • Get a glimpse into ongoing research and possible future improvements

 

Presentation: 15 min

Q&A: 15 min

Webinar recording

Abstract

“How long can you write with one of these tips?” is one of the most common questions about the NanoFrazor technology. The answer to these questions is not as straightforward as one would think it is. In this webinar, I will provide an overview of the current tip endurance results and test methodology. Furthermore, I will give a brief overview of different resist systems and their applications, properties and limitations.

Speaker's Bio:

Jonas Verges holds a B.Sc. in Material and Process Engineering from ZHAW Winterthur (Switzerland). From 2008 to 2013 he was working at Empa Dübendorf as a Physics Laboratory Assistant. In 2013, he moved to the University of Zurich, where he worked as a technician in the group of Physics at the Nanometer Scale. In 2019, Jonas joined the core technology team of Heidelberg Instruments Nano.

At Heidelberg Instruments Nano, Jonas is responsible for optimizations of the NanoFrazor patterning process and studying of the performance of new cantilever designs and resist materials.

 

Webinar Series description

The “NanoFrazor Technology” webinars will explain the main features and limitations of NanoFrazor lithography. They will be hosted by the key experts of our R&D teams. You will learn how our technology works, and where and why it is superior or inferior to conventional nanolithography techniques. We will also share the results and insights of our ongoing development projects.

The “NanoFrazor Applications” series will show examples from different application fields, where the NanoFrazor was used to fabricate unique nanopatterns and devices. The guest speakers - scientists who actively use NanoFrazor - will talk about their work and recent results.

The “NanoFrazor Sales” webinars will focus on NanoFrazor products. We will talk about hardware components and software features of the NanoFrazor systems. We will also cover the cost-of-ownership and how to receive a quick return on investment. Finally, we will also offer a dedicated webinar where you will learn about the various funding options for NanoFrazor systems and how to maximize your chances to get your funding proposal accepted.

 

Test yourself and win! After each webinar, you can test what you have learned in a short multiple-choice questions challenge. With 10 or more successful tests, you will receive a small prize and a unique Nanofabrication Guru certificate.