3D Pattern Transfer
Speaker: Dr Tero Kulmala, Heidelberg Instruments Nano
- Review 3D (grayscale) capabilities of the NanoFrazor technology
- Get an overview of different approaches to transfer 3D patterns from an organic resist
- Understand the possibilities and challenges of 3D etching with respect to amplification and roughness
- Learn from examples, how roughness can be minimized (<1 nm rms) and how a maximum amplification can be reached (>100x in Si shown)
- Discover that template stripping and electroplating of metals can be done directly from 3D structured PPA resist
Presentation: 15 min
Q&A: 15 min
June 11, 2020, 16:45 CEST
July 9, 2020, 08:45 CEST
The sub-nm accurate 3D patterning is one of the most impressive unique capabilities of NanoFrazor lithography. Here, we present how such patterns can be transferred to various substrate materials by etching or replicated in copious amounts via e.g. template stripping or electroplating. The possibilities and challenges of 3D pattern transfer will also be addressed.
Tero Kulmala has more than 15 years of experience in the most advanced micro and nanofabrication processes. He holds an M.Sc. degree in materials science from Helsinki University of Technology (Finland) and a PhD in electrical engineering from the University of Cambridge (UK), where he was working on nanowires and graphene nanoelectronics in the group of Prof. Ferrari. Prior to joining Heidelberg Instruments Nano in 2016, he was a postdoctoral fellow at Paul Scherrer Institute (CH), where he worked on EUV lithography for sub-10 nm semiconductor technology nodes.
At Heidelberg Instruments Nano, Tero develops new applications and processes for the NanoFrazor technology. He works closely with existing and prospective customers in these areas.
Webinar Series description
The “NanoFrazor Technology” webinars will explain the main features and limitations of NanoFrazor lithography. They will be hosted by the key experts of our R&D teams. You will learn how our technology works, and where and why it is superior or inferior to conventional nanolithography techniques. We will also share the results and insights of our ongoing development projects.
The “NanoFrazor Applications” series will show examples from different application fields, where the NanoFrazor was used to fabricate unique nanopatterns and devices. The guest speakers - scientists who actively use NanoFrazor - will talk about their work and recent results.
The “NanoFrazor Sales” webinars will focus on NanoFrazor products. We will talk about hardware components and software features of the NanoFrazor systems. We will also cover the cost-of-ownership and how to receive a quick return on investment. Finally, we will also offer a dedicated webinar where you will learn about the various funding options for NanoFrazor systems and how to maximize your chances to get your funding proposal accepted.
Test yourself and win! After each webinar, you can test what you have learned in a short multiple-choice questions challenge. With 10 or more successful tests, you will receive a small prize and a unique Nanofabrication Guru certificate.