Heidelberg Instruments receives order for two semiconductor laser mask writers

June 18, 2020

Heidelberg Instruments, leading supplier of laser and maskless lithography systems, announces orders for two more ULTRA Semiconductor Laser Mask Writers from large photomask production groups in Asia.

Mature photomasks continue to be a vital component in semiconductor device production, being used in power management, microcontrollers, LED lighting, the IOT, MEMS, the automotive industry, and others. The ULTRA, as an economical mask writer solution, specifically addresses the manufacturing of mature semiconductor photomasks in these markets. It provides high throughput, high precision and structure uniformity, as well as extremely accurate alignment. The ULTRA can write structure sizes down to 500 nm and achieves write speeds up to 580 mm2 per minute, while featuring excellent values for CD, image quality, overlay, and registration. With its modern, compact build, the ULTRA can easily be incorporated into an existing mask shop cleanroom.

“With these recent projects, four leading photomask supplier groups have chosen the ULTRA system for production of semiconductor photomasks. We believe that the trend for a cost-effective solution to meet the mature semiconductor photomask market will continue to solidify the demand for the ULTRA Semiconductor Laser Mask Writer”, says Alexander Forozan, Head of Global Sales and Business Development at Heidelberg Instruments GmbH.

See ULTRA Semicoductor Laser Mask Writer product page


About Heidelberg Instruments: With an installation base of well over 900 systems in more than 50 countries, Heidelberg Instruments is a world leader in production of high-precision maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, nanotechnology, ASICS, TFT, plasma displays, micro optics, and many other related applications.

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