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Chinese Photomask Group orders semiconductor laser mask writer

Heidelberg Instruments receives order for a semiconductor laser mask writer

November 21, 2019

Heidelberg Instruments – a leading supplier of laser and maskless lithography systems, announced order for an ULTRA Semiconductor Laser Mask Writer from a large photomask production group in China.

Mature photomasks continue to be a vital component in semiconductor device fabrication; they are used in power management, microcontrollers, LED lighting, the IOT, MEMS, the automotive industry, to name a few. The ULTRA Semiconductor Laser Mask Writer serves this market with structure sizes down to 500 nm and write speeds up to 325 mm2 or 580 mm2 per minute depending on write mode, while featuring excellent values for CD, image quality, overlay, and registration.

“There has been a fantastic reception from the market since the introduction and qualification of the ULTRA technology. With its competitive pricing and low cost of ownership, excellent reliability and pattern performance, the ULTRA Semiconductor Laser Mask Writer will enable our existing and future customers to significantly boost their core photomask production business.” States Alexander Forozan, Head of Global Sales, Business Development and Marketing at Heidelberg Instruments.

See ULTRA product page

About Heidelberg Instruments:  With an installation base of well over 900 systems in more than 50 countries, Heidelberg Instruments is a world leader in production of high-precision maskless lithography systems. Due to their flexibility, these systems are used in research, development and industrial applications for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, nanotechnology, ASICS, TFT, plasma displays, micro optics, and many other related applications.

 

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