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Heidelberg Instruments

Grayscale lithography is increasingly important for optoelectronics, medical devices, engineered surfaces, ...

NanoFrazor Explore is now a hybrid system for mix & match lithography. Our thermal probe nanolithography tool has been upgraded with a laser module for ...

The success story continues. Following its entry into the market in 2015, the MLA150 Maskless Aligner from Heidelberg Instruments has evolved ...