About Heidelberg Instruments
Heidelberg Instruments designs, develops, and manufactures maskless laser lithography systems for the fabrication of micro-structures, serving the global photolithography community in both the direct writing field and in photomask production. Application areas include MEMS, micro-optics, advanced packaging (3DIC), IC, flat panel displays (FPD), micro-fluidics, sensors, and other analog and digital electronic components. Our systems are used in more than 50 countries in Research and Development, rapid prototyping, and industrial production.
In 2018, Heidelberg Instruments was joined by SwissLitho, a young and innovative high-tech company with an expertise in Scanning Thermal Probe Lithography (STPL), a technology realized with their NanoFrazor systems. Together, Heidelberg Instruments and SwissLitho are now able to provide customers with an additional choice of tools and options in the Nano- and Microlithography field. In the NanoFrazor, heatable silicon tips are used for direct patterning of arbitrary 2D and 3D nanostructures and for simultaneous imaging of the tiny resulting nanostructures.