Global Support

Worldwide service and spare parts

Heidelberg Instruments supports more than 1,000 systems installed worldwide. We are experts in advanced direct-write lithography systems with the experience gained in over three decades. We use our knowledge to support customers to maximize uptime and minimize cost-of-ownership of our products. We provide extensive services both to our state-of-the-art technology systems and throughout the entire life cycle of our older systems.

Technical Support

Do you need advice regarding the use of our systems or set-up for specific applications? Our Technical Support Engineers are there to share their experience and knowledge.

Service Packages

We offer service contracts for customers who need fast and efficient online and on-site support, even after the end of the warranty period. Contracts range from support-only to full coverage including all parts, and can be adjusted to match the customer's needs exactly.

Spare Parts & Repair

Our experienced engineers quickly respond to and take care of your service requests. Specific spare parts are available for all lithography systems.

Process and Application Labs (PAL)

Our Process and Application Labs are state-of-the-art facilities conveniently located in Germany, Switzerland and China. There, our engineers train and collaborate with our customers. Typical tasks include standardized test exposures, benchmarking, and process development upon request. All of this helps our customers to make the most of their Heidelberg Instruments equipment.

Customer Training Workshops

We offer specialized workshops ranging from basic training topics to advanced courses with in-depth expert knowledge and practical orientation.

Please contact us

At Heidelberg Instruments, we strive to use our expertise and local presence around the world to support our customers.
The contact information for our global offices is listed below. Please use the contact form to directly reach the responsible person.

  • Pal
  • Service

PAL Center Germany

Heidelberg Instruments Mikrotechnik GmbH
Tullastrasse 2
69126 Heidelberg

PAL Center China

Stella Technology Co. Ltd
A-3, 1F, HengRun Business Building
No.8 Bei BaiYan Street
Suzhou Industrial Park

PAL Center Switzerland

Heidelberg Instruments Nano
SwissLitho AG
Technoparkstrasse 1
8005 Zurich

Service Europe

Heidelberg Instruments Mikrotechnik GmbH
Tullastr. 2
69126 Heidelberg
+49 6221 3430 0

Service Americas

Heidelberg Instruments, Inc.
2539 W 237th St Suite A
Torrance, CA 90505
+1 (310) 212 5071

Service China

Heidelberg Instruments Co., Ltd.
Rm 202, Bldg 1, No. 5 Yuehai Road,
Dengliang Community
Nanshan District, 518054 Shenzhen
+86 755 8301 5991

Service Japan

Heidelberg Instruments, KK
German Industry Park, 1-18-2, Hakusan, Midori
Yokohama 226-0006
+81 45 938 5250

Service South Korea

Heidelberg Instruments Korea Ltd.
9F, 131 Expo-ro
Yuseong-gu, Daejeon
34125 Republic of Korea
+82 42 482 1668

Service Switzerland

Heidelberg Instruments Nano
SwissLitho AG
Technoparkstrasse 1
8005 Zurich
+41 44 500 38 00

Service Taiwan

Heidelberg Instruments Service Taiwan Corp.
6F-5,No.192 DongGuang Rd.
30069 Hsinchu
+886 3 5715 188