Thermal scanning probe lithography is a powerful nanofabrication method with 10 nm lateral resolution and 1 nm depth resolution, applicable in biomedicine, nanomagnetism, and nanoelectronics.
Categories:
Scientific Paper
Connect
Follow us on social media to benefit
from a range of useful resources.
Disclaimer: Translations were created with the help of AI. Heidelberg Instruments does not guarantee the correctness of the translations.