Thermal scanning probe and laser lithography for patterning nanowire based quantum devices

The NanoFrazor combines thermal scanning probe and laser writing lithography to fabricate InSb nanowire quantum devices, achieving quasi-ballistic transport with reduced fabrication-induced disorder.

File Type: 1088/1361-6528/ad3257
Categories: Scientific Paper
Tags: NanoFrazor, Thermal Scanning Probe (t-SPL)
Author: Nanotechnology
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