PMN–PT thin film disks, with single-electrode actuation, showcase self-aligned tangential and wineglass modes for high-frequency bulk acoustic wave (BAW) MEMS gyroscopes.
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Scientific Paper
PMN–PT thin film disks, with single-electrode actuation, showcase self-aligned tangential and wineglass modes for high-frequency bulk acoustic wave (BAW) MEMS gyroscopes.
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Disclaimer: Translations were created with the help of AI. Heidelberg Instruments does not guarantee the correctness of the translations.