Selective Direct Laser Writing of Pyrolytic Carbon Microelectrodes in Absorber-Modified SU-8

Low-power laser irradiation of SU-8 photoresist with an added absorber enables selective pyrolysis for simple and inexpensive patterning of pyrolytic carbon microelectrodes.

File Type: www
Categories: Scientific Paper
Tags: Direct Writing, µPG
Author: Micromachines
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