Monolayer MoS2 Nanoribbon Transistors Fabricated by Scanning Probe Lithography

This work demonstrates the fabrication of 30 nm monolayer MoS2 nanoribbon field-effect transistors using scanning probe lithography, achieving high performance with channel widths below 100 nm.

File Type: 9b00271
Categories: Scientific Paper
Tags: NanoFrazor, Thermal Scanning Probe (t-SPL)
Author: Nano Letters
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