Hollow silicon-based microneedle array for dermal interstitial fluid extraction fabricated by only dry etching on wafer scale

Silicon-based microneedles enable interstitial fluid biomarker extraction. Proposed dry etching technique achieves mass production compatibility, enhancing biomedical applications for minimally invasive diagnostics and monitoring.

File Type: pdf
Categories: Application Note
Tags: Direct-writing, MLA 150
Author: EPFL
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