Grayscale with GenISys 3D-PEC

We present the powerful software solution 3D-PEC of GenISys BEAMER for rapid and easy optimization of complex 3D microstructures fabricated with Grayscale laser lithography.

File Type: pdf
Categories: Application Note
Tags: Direct-writing, DWL 66, Grayscale
Author: GenISys GmbH, Heidelberg Instruments
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